A crystal pulling furnace

Abstract

The application provides a crystal pulling furnace. The crystal pulling furnace comprises a furnace body, a partition plate, a heat preservation cover, a crucible, an adjusting cylinder and an adjusting mechanism. The partition plate is connected to the furnace body and arranged in the furnace body. The partition plate divides the furnace body into a first cavity and a second cavity. The first cavity is adjacent to the second cavity. The heat preservation cover is arranged in the first cavity and covers at least part of the top surface of the partition plate. The heat preservation cover has a support wall opposite to the partition plate. The support wall is provided with a communication hole. The crucible is arranged in the first cavity and located in the heat preservation cover. The opening of the crucible faces the communication hole. The adjusting cylinder is movably arranged on the side of the support wall away from the partition plate through the adjusting mechanism. The adjusting cylinder can move towards the communication hole or away from the communication hole to adjust the air intake of the communication hole.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a crystal pulling furnace. Background Technology

[0002] A crystal pulling furnace is a device used to prepare silicon crystals using the Czochralski method (CZ method). When pulling single-crystal silicon rods, polycrystalline silicon blocks and other raw materials are placed in a crucible and heated in a protective gas atmosphere to melt the silicon. The molten silicon then crystallizes and solidifies into a single-crystal silicon rod according to the arrangement of silicon atoms in the seed crystal.

[0003] However, the crystal pulling furnaces in the relevant technologies do not have the function of adjusting the gas flow rate inside the furnace, which makes it impossible to control the crystal growth rate and results in poor performance of the semiconductor crystal pulling furnace. Utility Model Content

[0004] Based on the above-mentioned technical problems, this application provides a crystal pulling furnace that can adjust the gas flow rate inside the furnace, so as to control the crystal growth rate and improve the performance of the crystal pulling furnace.

[0005] This application is achieved through the following technical solution: A crystal pulling furnace includes: a furnace body; a partition plate connected to the furnace body and disposed within the furnace body, the partition plate dividing the interior of the furnace body into a first cavity and a second cavity, the first cavity and the second cavity being adjacent to each other; a heat insulation cover disposed within the first cavity and covering at least a portion of the top surface of the partition plate, the heat insulation cover having a support wall opposite to the partition plate, the support wall having a communicating hole; a crucible disposed within the first cavity and located within the heat insulation cover, the opening of the crucible facing the communicating hole; an adjusting cylinder and an adjusting mechanism, the adjusting cylinder being movably disposed on the side of the support wall facing away from the partition plate via the adjusting mechanism. At least a portion of the vertical projection of the adjusting cylinder is located within the communicating hole. The adjusting mechanism includes: a driving member having a rotatable output portion; a first support rod and a second support rod, the first support rod being rotatably connected to the side of the support wall facing away from the partition, the first support rod being connected to the output portion of the driving member, and the first support rod being threaded through the adjusting cylinder; the second support rod being connected to the side of the support wall facing away from the partition, and the second support rod being movably connected through the adjusting cylinder; wherein: under the drive of the driving member, the adjusting cylinder moves toward or away from the communicating hole to adjust the air intake of the communicating hole.

[0006] The crystal pulling furnace provided in this application, when it is necessary to adjust the gas flow rate inside the furnace body, controls the rotation of the drive component, and the output part of the drive component drives the first support rod to rotate synchronously. Since the first support rod is threaded through the adjusting cylinder and the second support rod is slidably passed through the adjusting cylinder, under the condition of the rotation of the first support rod, drives the adjusting cylinder to move along the extension direction of the first and second support rods, thereby causing the adjusting cylinder to move closer to or away from the connecting hole, so as to adjust the gas intake of the connecting hole, thereby adjusting the gas flow rate inside the furnace, controlling the crystal growth rate, improving the use effect of the crystal pulling furnace, and having good practicality.

[0007] In some embodiments, the adjustment mechanism further includes: a first support base connected to the side of the support wall facing away from the partition, one end of the first support rod being rotatably connected to the support wall, and the other end of the first support rod being rotatably connected to the first support base; the driving member being connected to the first support base and connected to the other end of the first support rod; and a second support base connected to the side of the support wall facing away from the partition, one end of the second support rod being connected to the support wall, and the other end of the second support rod being connected to the second support base.

[0008] In some embodiments, the adjusting cylinder includes: a cylinder body and the connecting hole arranged vertically in sequence, the cylinder body extending axially to form an air intake channel, the cylinder body being movable toward or away from the connecting hole to adjust the air intake volume of the connecting hole; a connecting ring connecting the top end of the cylinder body, the connecting ring being provided with a first slider and a second slider protruding from the circumferential sidewall of the cylinder body, the first slider being provided with a threaded hole for the first support rod to thread through, and the second slider being provided with a guide hole for the second support rod to slide through.

[0009] In some implementations, the connecting ring and the cylinder are detachably connected.

[0010] In some embodiments, the connecting ring is provided with a connecting hole, and the top surface of the cylinder is provided with an insertion hole, the insertion hole and the connecting hole being connected to each other; the crystal pulling furnace also includes a quick-release assembly, the quick-release assembly, the connecting hole and the insertion hole being provided in a one-to-one correspondence, the quick-release assembly including: a fixing sleeve, adaptedly disposed in the connecting hole; a pull rod, movably passing through the fixing sleeve along the axial direction of the fixing sleeve, the top end of the pull rod protruding from the top end of the fixing sleeve, the bottom end of the pull rod protruding from the bottom end of the fixing sleeve, the bottom end of the pull rod being inserted into the insertion hole; a driving ring, disposed in the fixing sleeve and slidably sleeved on the pull rod; a reset member, disposed in the fixing sleeve, one end of the reset member being connected to the driving ring, and the other end of the reset member being connected to the top end or the bottom end of the fixing sleeve.

[0011] In some implementations, the top surface of the cylinder is provided with two first positioning parts, which are disposed opposite to each other on both sides of the air intake channel. The first positioning parts extend from the side wall of the air intake channel to the outer side wall of the cylinder. The bottom surface of the connecting ring is provided with a second positioning part, which is disposed in a one-to-one correspondence with the first positioning parts. One of the first positioning parts and the second positioning part is a slot, and the other is a block. The block is slidably disposed in the corresponding slot.

[0012] In some implementations, the first positioning part is a locking block, the insertion hole is formed on the top surface of the first positioning part, the second positioning part is a locking groove, and the connecting hole extends to the bottom of the groove of the second positioning part; or, the first positioning part is a locking groove, the insertion hole is formed on the bottom of the groove of the first positioning part, the second positioning part is a locking block, and the connecting hole extends to the bottom surface of the second positioning part.

[0013] In some embodiments, along the sliding direction perpendicular to the card block, the top dimension of the cross-section of the first positioning part and the second positioning part is larger than the bottom dimension.

[0014] In some embodiments, the crystal pulling furnace further includes: a flow guide cylinder connected to the support wall and disposed within the communicating hole, the flow guide cylinder extending axially to form a flow guide channel, at least a portion of the adjusting cylinder being adapted to pass through the flow guide channel; the flow guide channel is frustum-shaped, the radius of the first end of the flow guide channel is greater than the radius of the second end of the flow guide channel, and the first end of the flow guide channel is located above the second end.

[0015] In some embodiments, the connecting hole is frustum-shaped, the radius of the first end of the connecting hole is greater than the radius of the second end of the connecting hole, the first end of the connecting hole is located above the second end, and at least a portion of the adjusting cylinder is adapted to pass through the connecting hole. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the structure of a crystal pulling furnace according to one or more embodiments of this application is shown; Figure 2 It shows Figure 1 A cross-sectional schematic diagram; Figure 3An exploded view of the assembly of the regulating cylinder, regulating mechanism, and heat insulation cover is shown. Figure 4 A schematic diagram of the regulating cylinder is shown; Figure 5 An explosion diagram of the regulating cylinder is shown; Figure 6 It shows Figure 5 Enlarged diagram of point A.

[0018] Explanation of reference numerals in the attached figures: 10. Crystal pulling furnace; 100. Furnace body; 110. First cavity; 120. Second cavity; 130. Interface; 140. First mounting hole; 150. Second mounting hole; 200. Partition; 210. Air vent; 300. Insulation cover; 310. Support wall; 320. Connecting hole; 400. Crucible; 500, Adjusting cylinder; 510, Cylinder body; 511, Air inlet channel; 512, Insertion hole; 513, First positioning part; 520, Connecting ring; 521, Connecting hole; 522, Second positioning part; 530, First slider; 531, Threaded hole; 540, Second slider; 541, Guide hole; 600. Adjustment mechanism; 610. Driving component; 620. First support rod; 630. Second support rod; 640. First support base; 650. Second support base; 700. Feed pipe; 800. Heating element; 900, support rod; 1000, Exhaust pipe; 1100, Flow guide tube; 1110, Flow guide channel; 1200, Quick-release assembly; 1210, Fixing sleeve; 1220, Pull rod; 1230, Drive ring; 1240, Reset component. Detailed Implementation

[0019] To enable those skilled in the art to more clearly understand this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0020] Figure 1 This application shows a schematic diagram of the structure of a crystal pulling furnace 10 according to one or more embodiments. Figure 2It shows Figure 1 A cross-sectional schematic diagram. Combined with... Figure 1 as well as Figure 2 The crystal pulling furnace 10 provided in this application includes a furnace body 100, a partition 200, a heat insulation cover 300, and a crucible 400. The partition 200 is connected to the furnace body 100 and disposed within the furnace body 100. The partition 200 divides the interior of the furnace body 100 into a first cavity 110 and a second cavity 120. The first cavity 110 is adjacent to the second cavity 120 and is located above the second cavity 120. The heat insulation cover 300 is disposed within the first cavity 110 and covers at least a portion of the top surface of the partition 200. The heat insulation cover 300 has a support wall 310 opposite to the partition 200, and the support wall 310 has a connecting hole 320. The crucible 400 is disposed in the first cavity 110 and located in the heat insulation cover 300. The opening of the crucible 400 faces the connecting hole 320. Raw materials such as crystals are placed in the crucible 400. Protective gas enters the crucible 400 through the connecting hole 320 on the support wall 310 to serve the melting and crystallization of the silicon block.

[0021] Combination Figure 2 The crystal pulling furnace 10 also includes an adjusting cylinder 500 and an adjusting mechanism 600. Driven by the adjusting mechanism 600, the adjusting cylinder 500 can move towards or away from the connecting hole 320 to adjust the gas intake of the connecting hole 320, thereby adjusting the gas flow rate inside the furnace and achieving the purpose of controlling the crystal growth rate.

[0022] Figure 3 An exploded view of the assembly of the adjusting cylinder 500, the adjusting mechanism 600, and the heat insulation cover 300 is shown. (Combined with...) Figure 3 The adjusting cylinder 500 is movably disposed on the side of the support wall 310 facing away from the partition plate 200 via the adjusting mechanism 600. At least a portion of the vertical projection of the adjusting cylinder 500 is located within the connecting hole 320. The adjusting mechanism 600 includes a driving member 610, a first support rod 620, and a second support rod 630. The driving member 610 has a rotatable output portion. The first support rod 620 is rotatably connected to the side of the support wall 310 facing away from the partition plate 200. The first support rod 620 and the output portion of the driving member 610 are connected, and the first support rod 620 is threaded through the adjusting cylinder 500. The second support rod 630 is connected to the side of the support wall 310 facing away from the partition plate 200, and the second support rod 630 is movably disposed through the adjusting cylinder 500.

[0023] When it is necessary to adjust the gas flow rate inside the furnace body 100, the drive component 610 is controlled to rotate. The output part of the drive component 610 drives the first support rod 620 to rotate synchronously. Since the first support rod 620 is threaded through the adjusting cylinder 500 and the second support rod 630 is slidably passed through the adjusting cylinder 500, under the condition that the first support rod 620 rotates, the adjusting cylinder 500 is driven to move along the extension direction of the first support rod 620 and the second support rod 630, thereby causing the adjusting cylinder 500 to move towards or away from the connecting hole 320, so as to adjust the air intake of the connecting hole 320.

[0024] For example, when the drive unit 610 rotates forward, the regulating cylinder 500 moves towards the connecting hole 320 until at least a portion of the regulating cylinder 500 is in complete contact with the inner wall of the connecting hole 320, thus minimizing the gas flow rate through the connecting hole 320. Conversely, when the drive unit 610 rotates in reverse, the regulating cylinder 500 moves away from the connecting hole 320, and as the regulating cylinder 500 moves further away from the connecting hole 320, the gas flow rate through the connecting hole 320 continuously increases. By adjusting the distance between at least a portion of the regulating cylinder 500 and the connecting hole 320, the interface 130 regulates the gas flow rate through the connecting hole 320, avoiding the problem that the semiconductor crystal pulling furnace 10 lacks the function of regulating the gas flow rate inside the furnace, which would prevent control over the crystal growth rate and thus improve the performance of the semiconductor crystal pulling furnace 10. The specific details of the crystal pulling furnace 10 will now be further described with reference to the accompanying drawings.

[0025] Combination Figure 1 as well as Figure 2 In some embodiments, the top of the furnace body 100 is provided with an interface 130 for connection to the upper furnace chamber, and the side of the furnace body 100 is provided with a first mounting hole 140. The crystal pulling furnace 10 also includes a feed pipe 700, the feed end of which is located outside the furnace body 100, and the discharge end of which passes through the first mounting hole 140 and the support wall 310 in sequence, and communicates with the inside of the crucible 400. Raw materials can be transported into the crucible 400 through the feed pipe 700. Exemplarily, the height of the first mounting hole 140 is higher than that of the support wall 310, so that the feed pipe 700 is arranged at an angle to facilitate the transport of raw materials.

[0026] Combination Figure 2 In some embodiments, the crystal pulling furnace 10 further includes a heating element 800 disposed within the first cavity 110 for heating the crucible 400. Exemplarily, the heating element 800 is an electric heater, connected to the top surface of the partition 200 and disposed within the insulation cover 300. The heating element 800 may be annularly arranged, surrounding the outer periphery of the crucible 400 to uniformly heat the crucible 400.

[0027] Combination Figure 2 In some embodiments, the partition 200 has a gas outlet 210, through which the gas participating in the crystal reaction is discharged from the heat insulation cover 300 into the second cavity 120. Exemplarily, two gas outlets 210 are provided, symmetrically arranged about the central axis of the crucible 400, and positioned between the heating element and the crucible 400. In other configurations, more gas outlets 210 may be provided, such as three or four, spaced circumferentially around the crucible 400.

[0028] Combination Figure 2 The crystal pulling furnace 10 also includes a support rod 900, which is coaxially arranged with the furnace body 100. The support rod 900 is located inside the second cavity 120. The bottom end of the support rod 900 is connected to the bottom surface of the furnace body 100, and the top end of the support rod 900 is connected to a partition 200 so that the partition 200 is fixed inside the furnace body 100.

[0029] Combination Figure 1 The furnace body 100 is also provided with a second mounting hole 150 on its side. The second mounting hole 150 is connected to the second cavity 120. The crystal pulling furnace 10 also includes an exhaust pipe 1000. The air inlet end of the exhaust pipe 1000 is installed in the second mounting hole 150 so that the exhaust pipe 1000 is connected to the second cavity 120. The air inlet end of the exhaust pipe 1000 is located outside the furnace body 100. The gas in the second cavity 120 can be discharged outside the furnace body 100 through the crystal exhaust pipe 1000.

[0030] Combination Figure 2 as well as Figure 3 In some embodiments, the top surface of the support wall 310 is a plane, and the aforementioned connecting hole 320 is provided at the center of the support wall 310. The first support rod 620 and the second support rod 630 are symmetrically arranged on the top surface of the support wall 310 about the central axis of the connecting hole 320, and both extend vertically.

[0031] Combination Figure 2 as well as Figure 3In some embodiments, the adjustment mechanism 600 further includes a first support base 640 and a second support base 650. Both the first support base 640 and the second support base 650 are connected to the side of the support wall 310 facing away from the partition plate 200. One end of the first support rod 620 is rotatably connected to the support wall 310, and the other end of the first support rod 620 is rotatably connected to the first support base 640. A drive member 610 is connected to the first support base 640 and to the other end of the first support rod 620, so that the first support rod 620 is rotatably erected on the top surface of the support wall 310. The drive member 610 can be a servo motor and can receive signals, thus allowing it to be remotely controlled by personnel. When the drive member 610 receives a start command, it can rotate forward or reverse, thereby driving the first support rod 620 to rotate synchronously. Additionally, one end of the second support rod 630 is connected to the support wall 310, and the other end of the second support rod 630 is connected to the second support base 650, so that the second support rod 630 can be erected on the top surface of the support wall 310.

[0032] Combination Figure 2 as well as Figure 3 In some embodiments, the first support 640 and the second support 650 are symmetrically arranged on the top surface of the support wall 310 about the central axis of the connecting hole 320. At least a portion of their opposite sides are open, thereby providing space for the adjusting cylinder 500 to move up and down between them. For example, the bottom of the open portion on the opposite side of the first support 640 and the second support 650 extends to the top surface of the support wall 310. That is, when the adjusting cylinder 500 can move to the top surface of the support wall 310, the gas flow rate through the connecting hole 320 is minimized. The top of the open portion on the opposite side of the first support 640 and the second support 650 is spaced from the top of the corresponding support, which can restrict the upward movement of the adjusting cylinder 500 through the top of the first support 640 and the second support 650.

[0033] In specific implementation, the first support base 640 and the second support base 650 can be integrally formed with the heat insulation cover 300, or they can be connected by screws or other components, or the two can be welded to the heat insulation cover 300. This application does not impose any restrictions on this.

[0034] Figure 4 A schematic diagram of the adjusting cylinder 500 is shown. (Combined with...) Figures 2 to 4In some embodiments, the adjusting cylinder 500 includes a cylinder body 510 and a connecting ring 520. The cylinder body 510 and the connecting hole 320 are arranged vertically in sequence. The cylinder body 510 can move towards or away from the connecting hole 320 to adjust the air intake of the connecting hole 320. The connecting ring 520 is connected to the top end of the cylinder body 510. The connecting ring 520 is provided with a first slider 530 and a second slider 540 protruding from the circumferential sidewall of the cylinder body 510. The first slider 530 is provided with a threaded hole 531. A first support rod 620 is threaded through the threaded hole 531. The second slider 540 is provided with a guide hole 541. The second support rod 630 slides through the guide hole 541. When the drive unit 610 is activated, the regulating cylinder 500, which has a first slider 530 and a second slider 540, can move towards or away from the connecting hole 320, thereby allowing the cylinder body 510 of the regulating cylinder 500 to move towards or away from the connecting hole 320, so as to adjust the air intake of the connecting hole 320.

[0035] Combination Figure 2 as well as Figure 3 In some embodiments, the cylinder 510 extends axially to form an air inlet channel 511. Even when the cylinder 510 is fully embedded in the connecting hole 320, gas can still flow into the heat insulation cover 300 through the air inlet channel 511. With this configuration, during the melting and crystallization process of the silicon ingot, gas can always flow into the crucible 400 inside the heat insulation cover 300 at a minimum flow rate to serve the melting and crystallization of the silicon ingot.

[0036] It should be noted that the cylinder body 510 and the connecting ring 520 constituting the regulating cylinder 500 can be integrally formed or detachably connected by bolts or other components. This application does not impose any restrictions on this.

[0037] Combination Figure 2 as well as Figure 3 In some embodiments, the crystal pulling furnace 10 further includes a flow guide cylinder 1100, which is connected to the support wall 310 and located within the connecting hole 320. The flow guide cylinder 1100 extends axially to form a flow guide channel 1110 to guide airflow into the crucible 400 within the heat insulation cover 300. The cylinder body 510 of the adjusting cylinder 500 can be adapted to pass through the flow guide channel 1110 to change the air intake of the flow guide channel 1110. In addition, at least one end of the flow guide channel 1110 protrudes from the support wall 310 in the axial direction. This configuration can reduce the thickness of the support wall 310 while ensuring the guiding direction of the airflow, thereby reducing the cost of the heat insulation cover 300.

[0038] Combination Figure 2 as well as Figure 3In some embodiments, the flow channel 1110 built into the flow guide cylinder 1100 is frustoconical. The end of the flow channel 1110 with a larger diameter is defined as the first end, and the end of the flow channel 1110 with a smaller diameter is defined as the second end. That is, the radius of the first end of the flow channel 1110 is larger than the radius of the second end of the flow channel 1110. The first end of the flow channel 1110 is located above the second end. The cylinder body 510 of the air inlet and the flow channel 1110 are adapted to each other. During the process of the cylinder body 510 of the air inlet moving towards the flow channel 1110, it can not only guide the movement of the air inlet, but also allow the gas to enter the heat insulation cover 300 through the gap between the cylinder body 510 of the air inlet and the side wall of the flow channel 1110, so as to adjust the air flow rate replenished to the heat insulation cover 300.

[0039] For example, when the drive unit 610 rotates forward, the regulating cylinder 500 moves toward the connecting hole 320. As the regulating cylinder 500 approaches the guide channel 1110, the gas flow rate through the guide channel 1110 decreases. When at least a portion of the regulating cylinder 500 is in complete contact with the inner wall of the guide channel 1110, the gas flow rate through the guide channel 1110 reaches its minimum. Conversely, when the drive unit 610 rotates in reverse, the regulating cylinder 500 moves away from the guide channel 1110. As the regulating cylinder 500 moves away from the guide channel 1110, gas can flow in through the gap between at least a portion of the regulating cylinder 500 and the side wall of the guide channel 1110, increasing the gas flow rate through the guide channel 1110. When the distance between at least a portion of the regulating cylinder 500 and the inner wall of the guide channel 1110 is maximized, the gas flow rate through the guide channel 1110 reaches its maximum.

[0040] In some other configurations, if the thickness of the support wall 310 is sufficient to guide the airflow, the guide tube 1100 may not be provided. That is, the connecting hole 320 may be frustum-shaped, meaning that the radius of the first end of the connecting hole 320 is greater than the radius of the second end of the connecting hole 320, and the first end of the connecting hole 320 is located above the second end. The cylinder body 510 of the air inlet and the connecting hole 320 are compatible, and the airflow rate to the insulation cover 300 can be adjusted and supplemented at the same time as the movement of the air inlet is guided through the connecting hole 320. This application does not impose any restrictions on this.

[0041] In the process of adjusting the air intake into the insulation cover 300 by moving the adjusting cylinder 500, the applicant found that because the cylinder body 510 of the adjusting cylinder 500 needs to contact and rub against the guide cylinder 1100, the cylinder body 510 of the adjusting cylinder 500 is prone to damage or wear after long-term use, affecting the normal operation of the airflow. Based on this, the cylinder body 510 and the connecting ring 520 of the adjusting cylinder 500 in this application adopt a split structure, and the two can be detachably connected. When the cylinder body 510 is damaged or severely worn, the cylinder body 510 can be quickly replaced to ensure that the furnace body 100 can be used normally.

[0042] Based on this, the crystal pulling furnace 10 provided in this application also includes a quick-release assembly 1200, which allows the cylinder 510 and the connecting ring 520 to be quickly disassembled and assembled. Figure 5 An explosion diagram of the regulating cylinder is shown. Figure 6 It shows Figure 5 A magnified diagram of point A. Combined with... Figure 5 as well as Figure 6 , specifically: The connecting ring 520 is provided with a connecting hole 521, and the top surface of the cylinder 510 is provided with an insertion hole 512. The insertion hole 512 and the connecting hole 521 are connected to each other. The quick-release assembly 1200, the connecting hole 521 and the insertion hole 512 are provided in a one-to-one correspondence. The quick-release assembly 1200 includes a fixing sleeve 1210, a pull rod 1220, a drive ring 1230 and a reset member 1240. The fixing sleeve 1210 is adapted to be disposed in the connecting hole 521. The pull rod 1220 moves through the fixing sleeve 1210 axially and is fixed. The top end of the fixed sleeve 1210 and the bottom end of the pull rod 1220 protrude from the top end of the fixed sleeve 1210 and the bottom end of the pull rod 1220 are inserted into the insertion hole 512. The drive ring 1230 is disposed inside the fixed sleeve 1210 and slides on the pull rod 1220. The reset member 1240 is disposed inside the fixed sleeve 1210. One end of the reset member 1240 is connected to the drive ring 1230 and the other end of the reset member 1240 is connected to the top end or the bottom end of the fixed sleeve 1210.

[0043] When the cylinder body 510 of the regulating cylinder 500 is damaged or severely worn, the pull rod 1220 can be moved upward. The pull rod 1220 moves upward synchronously with the drive ring 1230, and compresses or stretches the reset piece 1240 until the bottom end of the limit rod moves out of the corresponding insertion hole 512. This disconnects the cylinder body 510 and the connecting ring 520, allowing the cylinder body 510 to be disassembled. When replacing the cylinder body 510, the pull rod 1220 is released. Under the reset action of the reset piece 1240, the drive ring 1230 is pushed downward in the opposite direction. The drive ring 1230 drives the bottom end of the pull rod 1220 to insert into the insertion hole 512, thus realizing the assembly of the cylinder body 510 and the connecting ring 520. This facilitates the quick replacement of the cylinder body 510 of the regulating cylinder 500, reduces equipment downtime for maintenance, and improves production efficiency.

[0044] Combination Figure 5 as well as Figure 6 In some embodiments, two quick-release components 1200, two connecting holes 521, and two insert holes 512 are provided, and they are all arranged symmetrically about the central axis of the cylinder 510 to improve the reliability of the cylinder 510 and the connecting ring 520 after assembly. The drive ring 1230 is adaptedly disposed in the fixed sleeve 1210 and fixedly connected to the pull rod 1220. The reset member 1240 can be a spring, which is sleeved on the pull rod 1220. The top end of the reset member 1240 is supported on the inner side of the top of the fixed sleeve 1210, and the bottom end of the reset member 1240 is connected to the drive ring 1230.

[0045] Combination Figure 5 as well as Figure 6In some embodiments, the top surface of the cylinder 510 is provided with two first positioning parts 513, which are disposed opposite to each other on both sides of the air intake channel 511. The first positioning parts 513 extend from the side wall of the air intake channel 511 to the outer side wall of the cylinder 510. The bottom surface of the connecting ring 520 is provided with a second positioning part 522, which is disposed in a one-to-one correspondence with the first positioning parts 513. One of the first positioning parts 513 and the second positioning part 522 is a slot, and the other is a block. The block is slidably disposed in the corresponding slot. After operating the quick-release assembly 1200 to disconnect the connecting ring 520 and the cylinder 510, the cylinder 510 is then driven to move along the extension direction of the first positioning part 513. The cylinder 510, along with the first positioning part 513, moves out from the second positioning part 522, and the cylinder 510 is completely disassembled from the connecting ring 520. When replacing the cylinder 510, first align the first positioning part of the cylinder 510 with the second positioning part 522 of the connecting ring 520, and drive the cylinder 510 to move along the extension direction of the first positioning part 513. The cylinder 510, along with the first positioning part 513, moves to the second positioning part 522, and the cylinder 510 and the connecting ring 520 are initially positioned. Then, operating the quick-release assembly 1200 will lock the cylinder 510 and the connecting ring 520 together. This configuration, through the first positioning part 513 and the second positioning part 522, combined with the connection of the quick-release assembly 1200, improves the reliability of the assembly of the cylinder 510 and the connecting ring 520.

[0046] Combination Figure 5 as well as Figure 6 In some embodiments, along the sliding direction perpendicular to the locking block, the top dimension of the cross-section of the first positioning part 513 and the second positioning part 522 is larger than the bottom dimension. For example, the cross-sections of both the first positioning part 513 and the second positioning part 522 are trapezoidal as shown in the figure. In other embodiments, the cross-sections of the first positioning part 513 and the second positioning part 522 may also be triangular. This arrangement improves the locking effect between the cylinder 510 and the connecting ring 520, and enhances the reliability of their assembly.

[0047] Combination Figure 5 as well as Figure 6 In some embodiments, the first positioning part 513 is a locking block, with an insertion hole 512 formed on the top surface of the first positioning part 513, and the second positioning part 522 is a locking slot, with a connecting hole 521 extending to the bottom of the slot of the second positioning part 522. In other embodiments, the first positioning part 513 is a locking slot, with an insertion hole 512 formed on the bottom of the slot of the first positioning part 513, and the second positioning part 522 is a locking block, with a connecting hole 521 extending to the bottom surface of the second positioning part 522, that is, the locking block and the locking slot are reversed.

[0048] It should be noted that in other embodiments, the insertion hole 512 may also be opened at other positions on the top surface of the cylinder 510, and the connecting hole 521 may also be opened at other positions on the connecting ring 520. That is, the insertion hole 512 is offset from the first positioning part 513, and the connecting hole 521 is offset from the second positioning part 522. This application does not limit this.

[0049] In summary, the crystal pulling furnace 10 provided in this application can change the gas flow rate of the crucible 400 introduced into the heat insulation cover 300 by adjusting the movement of the cylinder 500, so as to control the crystal growth rate. Furthermore, the quick-release assembly 1200 can quickly replace the damaged or excessively worn cylinder 510, ensuring that the crystal pulling furnace 10 can be used normally, thus having great practical value.

[0050] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0051] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0052] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0053] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0054] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A crystal pulling furnace, characterized in that, The crystal pulling furnace includes: Furnace body; A partition is connected to the furnace body and disposed inside the furnace body. The partition divides the interior of the furnace body into a first cavity and a second cavity, wherein the first cavity and the second cavity are adjacent to each other. A heat insulation cover is disposed in the first cavity and covers at least a portion of the top surface of the partition. The heat insulation cover has a support wall opposite to the partition and the support wall has a communicating hole. A crucible is disposed in the first cavity and located inside the heat insulation cover, with the opening of the crucible facing the communicating hole; An adjusting cylinder and an adjusting mechanism are provided. The adjusting cylinder is movably disposed on the side of the support wall facing away from the partition plate via the adjusting mechanism. At least a portion of the vertical projection of the adjusting cylinder is located within the communicating hole. The adjusting mechanism includes: The drive unit has a rotatable output section; A first support rod and a second support rod are connected. The first support rod is rotatably connected to the side of the support wall facing away from the partition plate. The first support rod is connected to the output part of the drive component, and the first support rod is threaded through the adjusting cylinder. The second support rod is connected to the side of the support wall facing away from the partition plate, and the second support rod is movably connected through the adjusting cylinder. Wherein: Driven by the driving component, the adjusting cylinder moves toward or away from the connecting hole to adjust the air intake of the connecting hole.

2. The crystal pulling furnace according to claim 1, characterized in that, The adjustment mechanism further includes: A first support base is connected to the side of the support wall facing away from the partition plate. One end of the first support rod is rotatably connected to the support wall, and the other end of the first support rod is rotatably connected to the first support base. The driving component is connected to the first support base and to the other end of the first support rod. The second support base is connected to the side of the support wall facing away from the partition plate. One end of the second support rod is connected to the support wall, and the other end of the second support rod is connected to the second support base.

3. The crystal pulling furnace according to claim 1, characterized in that, The regulating cylinder includes: The cylinder and the connecting hole are arranged vertically in sequence. The cylinder is axially continuous to form an air intake channel. The cylinder can move towards or away from the connecting hole to adjust the air intake of the connecting hole. A connecting ring is connected to the top end of the cylinder. The connecting ring is provided with a first slider and a second slider that protrude from the circumferential sidewall of the cylinder. The first slider is provided with a threaded hole for the first support rod to thread through, and the second slider is provided with a guide hole for the second support rod to slide through.

4. The crystal pulling furnace according to claim 3, characterized in that, The connecting ring and the cylinder are detachably connected.

5. The crystal pulling furnace according to claim 4, characterized in that, The connecting ring is provided with a connecting hole, and the top surface of the cylinder is provided with an insertion hole, and the insertion hole and the connecting hole are connected to each other. The crystal pulling furnace also includes a quick-release assembly, wherein the quick-release assembly, the connecting hole, and the insertion hole are respectively provided. The quick-release assembly includes: A fixing sleeve is adapted to be disposed within the connecting hole; A pull rod is movably inserted through the fixed sleeve along the axial direction of the fixed sleeve. The top end of the pull rod protrudes from the top end of the fixed sleeve, the bottom end of the pull rod protrudes from the bottom end of the fixed sleeve, and the bottom end of the pull rod is inserted into the insertion hole. A drive ring is disposed within the fixed sleeve and slidably sleeves the pull rod; A reset component is disposed within the fixed sleeve, one end of which is connected to the drive ring, and the other end of which is connected to the top or bottom end of the fixed sleeve.

6. The crystal pulling furnace according to claim 5, characterized in that, The top surface of the cylinder is provided with two first positioning parts, which are arranged opposite to each other on both sides of the air intake channel. The first positioning parts extend from the side wall of the air intake channel to the outer side wall of the cylinder. The bottom surface of the connecting ring is provided with a second positioning part, which corresponds to the first positioning part. One of the first positioning part and the second positioning part is a slot, and the other is a block. The block is slidably disposed in the corresponding slot.

7. The crystal pulling furnace according to claim 6, characterized in that, The first positioning part is a locking block, and the insertion hole is formed on the top surface of the first positioning part; the second positioning part is a locking groove, and the connecting hole extends to the bottom of the groove of the second positioning part; or... The first positioning part is a slot, and the insertion hole is opened at the bottom of the slot of the first positioning part. The second positioning part is a block, and the connecting hole extends to the bottom surface of the second positioning part.

8. The crystal pulling furnace according to claim 6, characterized in that, Along the sliding direction perpendicular to the card block, the top dimension of the cross-section of the first positioning part and the second positioning part is larger than the bottom dimension.

9. The crystal pulling furnace according to any one of claims 1-8, characterized in that, The crystal pulling furnace also includes: A flow guide cylinder is connected to the support wall and disposed within the communicating hole. The flow guide cylinder extends axially to form a flow guide channel. At least a portion of the adjusting cylinder is adapted to pass through the flow guide channel. The flow guide channel is frustum-shaped, and the radius of the first end of the flow guide channel is greater than the radius of the second end of the flow guide channel. The first end of the flow guide channel is located above the second end.

10. The crystal pulling furnace according to any one of claims 1-8, characterized in that, The connecting hole is frustum-shaped, the radius of the first end of the connecting hole is greater than the radius of the second end of the connecting hole, the first end of the connecting hole is located above the second end, and at least a portion of the adjusting cylinder is adapted to pass through the connecting hole.

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