Exhaust device for boron expansion

Abstract

The utility model relates to exhaust device field especially, is used for boron extension's exhaust device. Including boron extension stove, spacing structure and dismantling structure, one side of boron extension stove is installed with tail exhaust pipe, the side that tail exhaust pipe is away from boron extension stove is installed with the connecting pipe with the help of dismantling structure, the side that the connecting pipe is away from tail exhaust pipe is installed with oval flat pipe, the side that oval flat pipe is away from the connecting pipe is installed with cyclone device, the surface fixed connection of oval flat pipe has the fixed frame, the inner wall of fixed frame is installed with three fixed pegs. The utility model provides a kind of exhaust device for boron extension to solve the process in need to the inside wall coating of oval flat pipe is checked, will appear connection component dismantling step tedious, time-consuming and laborious, and when reinstalling, it is difficult to guarantee original sealing and centring degree condition, further lead to equipment maintenance cycle long, production efficiency reduces, and easily because of improper installation causes waste gas leakage or unstable process shortcomings.

Description

Technical Field

[0001] This utility model relates to the field of exhaust devices, and more particularly to an exhaust device for boron diffusion. Background Technology

[0002] Exhaust systems used in boron diffusion are typically equipment used in semiconductor manufacturing processes. They are used to control and remove harmful or chemical gases generated during the boron diffusion process, which involves introducing boron atoms into silicon materials to form PN junctions and adjust the conductivity of the materials. In this process, some toxic or harmful gases may be generated, which need to be treated by exhaust systems.

[0003] Existing technologies, such as the utility model patent with publication number CN213150732U, disclose a boron diffusion device. This patent employs a diffusion furnace, a quartz boat, an inlet mechanism, and an exhaust mechanism. The diffusion furnace has a furnace door at its first end and an inlet and an exhaust port at its second end. A first inlet pipe is installed at the inlet, and a first exhaust pipe is installed at the exhaust port. The inlet mechanism includes a boron source storage tank, a first confluence element, a second inlet pipe, a third inlet pipe, and a first connecting pipe. The exhaust mechanism includes a pressure-resistant water tank, a second confluence element, a second exhaust pipe, a fourth inlet pipe, and a second connecting pipe. This utility model's boron diffusion device features an exhaust mechanism with a water-washing function for the exhaust pipe, effectively solving the problem of boron diffusion reaction products clogging the exhaust pipe. A heat-insulating baffle plate is installed inside the furnace door to alleviate the problem of reaction products sticking to the furnace door. The boron source storage tank is located within a source temperature control device, which can maintain a constant BBr3 liquid temperature.

[0004] In the existing technology, when it is necessary to inspect the coating on the inner wall of the elliptical flat tube, the disassembly of the connecting parts is cumbersome, time-consuming and labor-intensive, and it is difficult to guarantee the original sealing and alignment when reinstalling. This leads to long equipment maintenance cycles, reduced production efficiency, and problems such as exhaust gas leakage or process instability caused by improper installation. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies, such as the cumbersome and time-consuming disassembly of connecting parts during the inspection of the coating on the inner wall of elliptical flat tubes, the difficulty in ensuring the original sealing and alignment during reinstallation, the long maintenance cycle, reduced production efficiency, and the risk of exhaust gas leakage or process instability due to improper installation. Therefore, this invention proposes an exhaust device for boron expansion.

[0006] To solve the above-mentioned technical problems, this utility model provides an exhaust device for boron expansion, comprising: a boron expansion furnace, a limiting structure, and a disassembly structure. A tailpipe is installed on one side of the boron expansion furnace. A connecting pipe is installed on the side of the tailpipe away from the boron expansion furnace via the disassembly structure. An elliptical flat tube is installed on the side of the connecting pipe away from the tailpipe. A swirl device is installed on the side of the elliptical flat tube away from the connecting pipe. A fixing frame is fixedly connected to the surface of the elliptical flat tube. Three fixing bolts are installed on the inner wall of the fixing frame. A connecting ring is installed on the arc surface of the three fixing bolts. An ultrasonic vibrator is installed on the inner wall of the connecting ring. The arc surface of the tailpipe is provided with a disassembly structure, which includes a fixing ring and a positioning ring. The fixing ring is fixedly connected to the tailpipe, and the positioning ring is connected to the connecting ring. The connecting pipe is fixedly connected, and four positioning rods are fixedly connected to the side of the fixed ring near the positioning ring. The positioning rods are slidably connected to the positioning ring. Two rotating rods are rotatably connected to the inner wall of the fixed ring. A rotating plate is fixedly connected to the arc surface of the rotating rod. Two coil springs are sleeved on the arc surface of the rotating rod. The two ends of the coil springs are fixedly connected to the rotating plate and the fixed ring, respectively. A connecting plate is fixedly connected to the side of the rotating plate away from the positioning ring. A lead screw is threaded to the inner wall of the connecting plate. Two connecting rods are slidably connected to the inner wall of the connecting plate. A pressing plate is fixedly connected to the end of the two connecting rods near the positioning ring. The pressing plate is rotatably connected to the lead screw. There are two auxiliary grooves at the beginning of the inner wall of the positioning ring. The bottom wall of the auxiliary grooves abuts against the pressing plate. The auxiliary grooves are slidably connected to the pressing plate.

[0007] The effect achieved by the above-mentioned components is as follows: when personnel need to inspect the peeling of the coating inside the elliptical flat tube, they can rotate the two lead screws to move the extrusion plate to a suitable distance. At this time, the coil spring rebounds, causing the two rotating plates to move away from each other. Then, the personnel can move the connecting tube until the positioning rod slides completely out of the inner wall of the positioning ring. This makes it convenient for personnel to inspect the peeling of the coating inside the elliptical flat tube, thereby improving the ease of operation for personnel.

[0008] Preferably, the coil spring has a bellows covering its arc surface, and the two ends of the bellows are rotatably connected to a fixed ring and a rotating plate, respectively.

[0009] The effect achieved by the above components is that the bellows can protect the coil spring, prevent other substances from coming into direct contact with the spring, and thus improve the service life of the coil spring.

[0010] Preferably, the end of the positioning rod away from the fixing ring is fixedly connected to the guide block.

[0011] The effect achieved by the above components is that the guide block can guide the positioning rod, making it easy for personnel to slide the positioning rod into the inner wall of the positioning ring.

[0012] Preferably, a sealing gasket is fixedly connected to the side of the connecting pipe near the tailpipe, and the sealing gasket abuts against the tailpipe.

[0013] The effect achieved by the above components is that the sealing gasket can increase the sealing between the connecting pipe and the tailpipe, and can prevent liquid from flowing out between the connecting pipe and the tailpipe.

[0014] Preferably, the inner wall of the lead screw has a plurality of anti-slip grooves, and the plurality of anti-slip grooves are evenly distributed on the arc surface of the lead screw.

[0015] The effect achieved by the above components is that the anti-slip groove can increase the friction between the operator's hand and the lead screw, and can prevent the operator from slipping during the rotation of the lead screw.

[0016] Preferably, the arc surface of the fixing bolt is provided with a limiting structure, the limiting structure including two limiting grooves and several positioning holes. The two limiting grooves are all opened on the fixing bolt, and the several positioning holes are all opened on the connecting ring. A connecting block is slidably connected to the inner wall of the limiting groove. A spring is provided between the side of the connecting block away from the connecting ring and the limiting groove. The two ends of the spring are fixedly connected to the limiting groove and the connecting block, respectively. A moving ring is fixedly connected to the side of the two connecting blocks away from each other. The moving ring is slidably connected to the fixing bolt. Several insertion rods are fixedly connected to the side of the moving ring near the connecting ring. The positioning holes are slidably connected to the insertion rods.

[0017] The effect achieved by the above components is that after the ultrasonic vibrator is fixed by the fixing bolt, the fixing bolt can be limited by several plug rods and moving rings, which can prevent the fixing bolt from loosening during short-term use, thereby improving the stability of the ultrasonic vibrator.

[0018] Preferably, a limiting rod is fixedly connected to the inner wall of the limiting groove, the limiting rod is slidably connected to the connecting block, and the spring is sleeved on the arc surface of the limiting rod.

[0019] The effect achieved by the above components is that the limiting rod can limit the connecting block and prevent the connecting block from becoming misaligned during the sliding process on the inner wall of the limiting groove.

[0020] Compared with related technologies, the exhaust device for boron diffuser provided by this utility model has the following advantages: This utility model provides an exhaust device for boron expansion. By setting a disassembly structure, when personnel need to inspect the peeling of the coating inside the elliptical flat tube, the disassembly structure can be used to facilitate the disassembly of the elliptical flat tube, thereby making it easier for personnel to inspect the peeling of the coating inside the elliptical flat tube, thus improving the ease of operation.

[0021] By setting a limiting structure, when personnel fix the ultrasonic vibrator with a fixing bolt, the limiting structure can limit the fixing bolt, which can prevent the fixing bolt from loosening during short-term use, thereby improving the stability of the ultrasonic vibrator. Attached Figure Description

[0022] Figure 1 A schematic diagram of the structure of an exhaust device for boron diffuser provided by this utility model; Figure 2 for Figure 1 The diagram shows a partial structural representation of the structure. Figure 3 for Figure 1 The diagram shows the structural schematic of the disassembly structure. Figure 4 for Figure 3 The diagram shows a partial structural representation of the structure. Figure 5 for Figure 1 The diagram shows the structure of the limiting structure.

[0023] The diagram is labeled as follows: 1. Boron expansion furnace; 2. Tail pipe; 3. Disassembly structure; 301. Fixing ring; 302. Positioning ring; 303. Positioning rod; 304. Guide block; 305. Rotating rod; 306. Coil spring; 307. Bellows; 308. Rotating plate; 309. Connecting plate; 310. Screw rod; 311. Anti-slip groove; 312. Connecting rod; 313. Extrusion plate; 314. Auxiliary groove; 315. Sealing gasket; 4. Limiting structure; 41. Moving ring; 42. Positioning hole; 43. Insert rod; 44. Limiting groove; 45. Limiting rod; 46. Spring; 47. Connecting block; 5. Connecting pipe; 6. Elliptical flat tube; 7. Fixing frame; 8. Ultrasonic vibrator; 9. Swirl device; 10. Fixing bolt; 11. Connecting ring. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0025] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0026] Please see Figure 1 and Figure 2This utility model provides an exhaust device for boron expansion, comprising: a boron expansion furnace 1, a limiting structure 4, and a disassembly structure 3. A tailpipe 2 is installed on one side of the boron expansion furnace 1. A connecting pipe 5 is installed on the side of the tailpipe 2 away from the boron expansion furnace 1 via the disassembly structure 3. An elliptical flat tube 6 is installed on the side of the connecting pipe 5 away from the tailpipe 2. A swirl device 9 is installed on the side of the elliptical flat tube 6 away from the connecting pipe 5. A fixing frame 7 is fixedly connected to the surface of the elliptical flat tube 6. Three fixing bolts 10 are installed on the inner wall of the fixing frame 7. A connecting ring 11 is installed on the arc surface of the three fixing bolts 10. An ultrasonic vibrator 8 is installed on the inner wall of the connecting ring 11. The disassembly structure 3 is provided on the arc surface of the tailpipe 2, and the limiting structure 4 is provided on the arc surface of the fixing bolts 10.

[0027] In the embodiments of this utility model, please refer to Figure 3 and Figure 4The disassembly structure 3 includes a fixing ring 301 and a positioning ring 302. The fixing ring 301 is fixedly connected to the tailpipe 2, and the positioning ring 302 is fixedly connected to the connecting pipe 5. Four positioning rods 303 are fixedly connected to the side of the fixing ring 301 near the positioning ring 302. The positioning rods 303 are slidably connected to the positioning ring 302. Two rotating rods 305 are rotatably connected to the inner wall of the fixing ring 301. A rotating plate 308 is fixedly connected to the arc surface of the rotating rod 305. Two coil springs 306 are sleeved on the arc surface of the rotating rod 305. The two ends of the coil springs 306 are respectively connected to the rotating plate 308 and the fixing ring 302. 01 Fixed connection: A connecting plate 309 is fixedly connected to the side of the rotating plate 308 away from the positioning ring 302. A lead screw 310 is threadedly connected to the inner wall of the connecting plate 309. Two connecting rods 312 are slidably connected to the inner wall of the connecting plate 309. A pressing plate 313 is fixedly connected to the end of the two connecting rods 312 near the positioning ring 302. The pressing plate 313 is rotatably connected to the lead screw 310. Two auxiliary grooves 314 start on the inner wall of the positioning ring 302. The bottom wall of the auxiliary groove 314 abuts against the pressing plate 313. The auxiliary groove 314 is slidably connected to the pressing plate 313. When personnel need to inspect the coating peeling inside the elliptical flat tube 6, they can rotate the two lead screws 310 to move the extrusion plate 313 to a suitable distance. At this time, the coil spring 306 rebounds, causing the two rotating plates 308 to move away from each other. Then, the personnel can move the connecting tube 5 until the positioning rod 303 completely slides out of the inner wall of the positioning ring 302. This facilitates the inspection of the coating peeling inside the elliptical flat tube 6, thus improving the ease of operation. The arc surface of the coil spring 306 is fitted with a bellows 307, and both ends of the bellows 307 are rotatably connected to the fixing ring 301 and the rotating plate 308, respectively. The bellows 307 protects the coil spring 306, preventing other substances from directly contacting the spring 46, thereby extending the service life of the coil spring 306. The end of the positioning rod 303 away from the fixing ring 301 is fixedly connected to the guide block 304. The guide block 304 guides the positioning rod 303, allowing personnel to easily slide the positioning rod 303 into the inner wall of the positioning ring 302. A sealing gasket 315 is fixedly connected to the side of the connecting pipe 5 near the tailpipe 2, and the sealing gasket 315 abuts against the tailpipe 2. The sealing gasket 315 increases the sealing between the connecting pipe 5 and the tailpipe 2, preventing liquid from flowing out between them. The inner wall of the lead screw 310 has several anti-slip grooves 311, evenly spaced on the arc surface of the lead screw 310. The anti-slip grooves 311 increase the friction between the personnel's hands and the lead screw 310, preventing slippage during rotation. In the embodiments of this utility model, please refer to Figure 5The limiting structure 4 includes two limiting grooves 44 and several positioning holes 42. The two limiting grooves 44 are both opened on the fixing bolt 10, and the several positioning holes 42 are both opened on the connecting ring 11. A connecting block 47 is slidably connected to the inner wall of the limiting groove 44. A spring 46 is provided between the side of the connecting block 47 away from the connecting ring 11 and the limiting groove 44. The two ends of the spring 46 are fixedly connected to the limiting groove 44 and the connecting block 47 respectively. A moving ring 41 is fixedly connected to the side of the two connecting blocks 47 away from each other. The moving ring 41 is slidably connected to the fixing bolt 10. Several insert rods 43 are fixedly connected to the side of the moving ring 41 close to the connecting ring 11. The positioning holes 42 are slidably connected to the insert rods 43. After the ultrasonic vibrator 8 is fixed by the fixing bolt 10, the fixing bolt 10 can be limited by several insert rods 43 and moving rings 41. This prevents the fixing bolt 10 from loosening during short-term use, thereby improving the stability of the ultrasonic vibrator 8. The inner wall of the limiting groove 44 is fixedly connected to the limiting rod 45, which is slidably connected to the connecting block 47. A spring 46 is sleeved on the arc surface of the limiting rod 45. The limiting rod 45 can limit the connecting block 47, preventing the connecting block 47 from misaligning during sliding on the inner wall of the limiting groove 44. The working principle of the exhaust device for boron expansion furnace 1 provided by this utility model is as follows: When purifying and filtering the gas discharged from the boron expansion furnace 1, the gas discharged from the boron expansion furnace 1 enters the elliptical flat tube 6 through the connecting pipe 5 and the tailpipe 2. At this time, the gas forms a special flow field distribution in the tube. The gas velocity near the tube wall increases, and the velocity difference between the center and the tube wall decreases, so that the airflow in the tube generates a specific flow state, such as spiral flow, which enhances the degree of turbulence and reduces the deposition of dirt. Then, the coating on the inner wall of the elliptical flat tube 6 has superhydrophobic and low surface energy characteristics, which can prevent dirt from adhering to the inner wall of the elliptical flat tube 6. Then, the gas passes through the swirling device 9, which throws solid particles and liquid droplets in the exhaust gas toward the swirling cavity wall. The gas flows down the wall to the bottom collection tank, and the purified gas is discharged from the central outlet at the top of the cyclone chamber, achieving efficient separation of gas and solid, and gas and liquid. When the elliptical flat tube 6 needs to be inspected for coating peeling after long-term use, the operator can first rotate the two lead screws 310, causing them to rotate away from the positioning ring 302. The anti-slip grooves 311 on the inner wall of the lead screws 310 increase the friction between the operator's hand and the lead screws 310, preventing slippage during rotation. Then, the lead screws 310 drive the extrusion plate 313 to move away from the positioning ring 302, extruding the gas. Plate 313 drives the two connecting rods 312 to move closer to the connecting plate 309. The pressing plate 313 drives the two connecting rods 312 to move away from the positioning ring 302 until the pressing plate 313 reaches the appropriate position. At this point, the coil springs 306 rebound, and the two coil springs 306 drive the rotating plate 308 to rotate. The rotating plate 308 drives the connecting plate 309 to rotate away from the positioning ring 302. The connecting plate 309 then drives the two connecting rods 312 and the lead screw 310 to rotate away from the positioning ring 302. The bellows 307 on the arc surface of the spring 46 protects the coil spring 306, preventing other substances from directly contacting the spring 46. This improves the service life of the coil spring 306 until the rotating plate 308 rotates to a suitable angle. Then, the operator moves the connecting pipe 5 away from the tailpipe 2. The connecting pipe 5 drives the positioning ring 302 and the sealing gasket 315 away from the fixing ring 301. The sealing gasket 315 can increase the sealing between the connecting pipe 5 and the tailpipe 2, preventing liquid from flowing out between the connecting pipe 5 and the tailpipe 2. This continues until the positioning rod 303 and the guide block 304 completely slide out of the inner wall of the positioning ring 302. The guide block 304 can guide the positioning rod 303, making it easy for the operator to slide the positioning rod 303 into the inner wall of the positioning ring 302.

[0028] In addition, when personnel fix the ultrasonic vibrator 8 using the fixing bolt 10, they can first move the moving ring 41 away from the connecting ring 11. Then, they can rotate the fixing bolt 10 until it rotates into the inner wall of the fixing frame 7 and abuts against the connecting ring 11. Then, they can release the moving ring 41. At this time, the two springs 46 rebound and drive the connecting block 47 to move closer to the connecting ring 11. The connecting block 47 slides on the arc surface of the limiting rod 45. The limiting rod 45 can limit the connecting block 47 and prevent it from being misaligned during the sliding process on the inner wall of the limiting groove 44. Then, the two connecting blocks 47 drive the moving ring 41 to move closer to the positioning hole 42. The moving ring 41 drives several insert rods 43 to move closer to the positioning hole 42 until the insert rods 43 slide into the inner wall of the positioning hole 42.

[0029] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0030] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. An exhaust device for boron diffuser, characterized in that, include: The boron expansion furnace (1), the limiting structure (4), and the disassembly structure (3) are provided. A tailpipe (2) is installed on one side of the boron expansion furnace (1). A connecting pipe (5) is installed on the side of the tailpipe (2) away from the boron expansion furnace (1) via the disassembly structure (3). An elliptical flat tube (6) is installed on the side of the connecting pipe (5) away from the tailpipe (2). A swirl device (9) is installed on the side of the elliptical flat tube (6) away from the connecting pipe (5). A fixing frame (7) is fixedly connected to the surface of the elliptical flat tube (6). Three fixing bolts are installed on the inner wall of the fixing frame (7). (10), connecting rings (11) are installed on the arc surfaces of the three fixing bolts (10), and ultrasonic vibrators (8) are installed on the inner walls of the connecting rings (11). The arc surface of the tailpipe (2) is provided with a disassembly structure (3). The disassembly structure (3) includes a fixing ring (301) and a positioning ring (302). The fixing ring (301) is fixedly connected to the tailpipe (2), and the positioning ring (302) is fixedly connected to the connecting pipe (5). Four positioning rods (3) are fixedly connected to the side of the fixing ring (301) near the positioning ring (302). 03), the positioning rod (303) is slidably connected to the positioning ring (302), and two rotating rods (305) are rotatably connected to the inner wall of the fixing ring (301). A rotating plate (308) is fixedly connected to the arc surface of the rotating rod (305). Two coil springs (306) are sleeved on the arc surface of the rotating rod (305). The two ends of the coil springs (306) are fixedly connected to the rotating plate (308) and the fixing ring (301) respectively. A connecting plate (309) is fixedly connected to the side of the rotating plate (308) away from the positioning ring (302). The inner wall of the connecting plate (309) is threaded with a lead screw (310). The inner wall of the connecting plate (309) is slidably connected with two connecting rods (312). The two connecting rods (312) are fixedly connected to an extrusion plate (313) at one end near the positioning ring (302). The extrusion plate (313) is rotatably connected to the lead screw (310). The inner wall of the positioning ring (302) has two auxiliary grooves (314). The bottom wall of the auxiliary groove (314) abuts against the extrusion plate (313). The auxiliary groove (314) is slidably connected to the extrusion plate (313).

2. The exhaust device for boron diffuser according to claim 1, characterized in that, The coil spring (306) has a bellows (307) fitted on its arc surface, and the two ends of the bellows (307) are rotatably connected to the fixed ring (301) and the rotating plate (308) respectively.

3. The exhaust device for boron diffuser according to claim 1, characterized in that, The end of the positioning rod (303) away from the fixing ring (301) is fixedly connected to the guide block (304).

4. The exhaust device for boron diffuser according to claim 1, characterized in that, A sealing gasket (315) is fixedly connected to the side of the connecting pipe (5) near the tailpipe (2), and the sealing gasket (315) abuts against the tailpipe (2).

5. The exhaust device for boron diffuser according to claim 1, characterized in that, The inner wall of the lead screw (310) has a number of anti-slip grooves (311), which are evenly distributed on the arc surface of the lead screw (310).

6. The exhaust device for boron diffuser according to claim 1, characterized in that, The arc surface of the fixing bolt (10) is provided with a limiting structure (4). The limiting structure (4) includes two limiting grooves (44) and several positioning holes (42). The two limiting grooves (44) are opened on the fixing bolt (10), and the several positioning holes (42) are opened on the connecting ring (11). The inner wall of the limiting groove (44) is slidably connected with a connecting block (47). A spring (46) is provided between the side of the connecting block (47) away from the connecting ring (11) and the limiting groove (44). The two ends of the spring (46) are fixedly connected to the limiting groove (44) and the connecting block (47) respectively. A moving ring (41) is fixedly connected to the side of the two connecting blocks (47) away from each other. The moving ring (41) is slidably connected to the fixing bolt (10). Several insert rods (43) are fixedly connected to the side of the moving ring (41) close to the connecting ring (11). The positioning holes (42) are slidably connected to the insert rods (43).

7. An exhaust device for boron diffuser according to claim 6, characterized in that, The inner wall of the limiting groove (44) is fixedly connected to a limiting rod (45), the limiting rod (45) is slidably connected to the connecting block (47), and the spring (46) is sleeved on the arc surface of the limiting rod (45).

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