Multi-module frame docking surface flexible pressure maintaining sealing device

Abstract

The utility model discloses a kind of multi-module frame butt joint face flexible pressure-maintaining sealing devices, and the sealing device includes the sealing structure and the pipeline structure of the fan filtering unit of connecting the sealing structure and equipment, which are clamped on the section bar rod.The sealing device of the present application can achieve the sealing of the fixed gap of the pulling equipment.It not only ensures the sealing between the two butt joints, but also does not damage the sealing structure when the equipment is inspected or misaligned.When the sealing structure needs to be replaced, only the section material with the sealing structure at the frame handover area needs to be treated and replaced, without the need to disassemble the equipment body, which is more convenient and effectively reduces the damage caused by disassembly to the equipment, saving costs and reducing replacement time.

Description

Technical Field

[0001] This utility model relates to the field of sealing devices, and more specifically, to a flexible pressure-holding sealing device for a multi-module frame mating surface. Background Technology

[0002] The coating and developing machine is composed of multiple modular frames. Inside the machine, wafers are transferred to various process units for processing via a vacuum robotic arm. During wafer processing, it is crucial to maintain a positive pressure environment inside the equipment. This is a key measure to prevent external dust from entering and to ensure a clean process environment. To prevent the positive pressure from failing due to gap leakage, the connections between the modular frames must be effectively sealed to ensure stable and controllable positive pressure.

[0003] However, in actual construction, the following problem exists: In existing technologies, because the online coating and developing machine needs to interface with the lithography machine, and considering maintainability, the interface equipment needs to be installed using a pull-out method, resulting in a fixed gap between the two. Conventional static sealing uses pressure sealing with frontal clamping, which cannot eliminate the gap between the equipment, making sealing difficult. Existing technologies, such as the sealing device disclosed in patent number CN116994990A, have their sealing body fixed to a first panel, meaning the sealing structure is directly fixed to a set of modules. When the sealing structure ages and damages due to frequent use, the intended fixed module panel needs to be removed, making maintenance inconvenient. The gas supply pipeline design is also complex, hindering efficient space utilization. Utility Model Content

[0004] The purpose of this invention is to provide a flexible pressure-sealing device for the mating surface of a multi-module frame, in order to solve the technical problems existing in the background art.

[0005] This utility model provides a flexible pressure-holding and sealing device for a multi-module frame mating surface, including a sealing structure that can be detachably installed on a profile rod and a pipeline structure that connects the sealing structure to the fan filter unit of the equipment;

[0006] The sealing structure includes an installation part and a deformation part connected to the installation part. The shape of the installation part is adapted to the notch on the profile rod. The deformation part is provided with a cavity structure. The pipeline structure is connected to the cavity structure. The fan filter unit inflates or vents the cavity structure through the pipeline structure.

[0007] In a preferred embodiment, the mounting part is integrally disposed with the deformation part, and the mounting part is snapped into the notch of the profile rod.

[0008] The deformable part is located outside the profile rod and in the gap to be sealed.

[0009] In a preferred embodiment, the deformable part is provided with a docking joint, one end of the pipeline structure is inserted and fixed to the docking joint, and the other end is divided into two paths that are respectively connected to the air inlet and air outlet of the fan filter unit.

[0010] In a preferred embodiment, the pipeline structure is provided with a control module for monitoring and controlling the inflation and deflation processes.

[0011] In a preferred embodiment, the control module includes a pressure reducing valve, a pressure sensor, and a solenoid valve.

[0012] In a preferred embodiment, the deformable part is made of rubber.

[0013] A sealing method for a flexible pressure-holding sealing device for a multi-module frame mating surface includes the following steps:

[0014] S1, Sealing structure installation: Insert the mounting part of the sealing structure into the notch of the profile rod, and connect it to the fan filter unit through the pipeline structure;

[0015] S2, Inflatable Sealing: Air is inflated into the cavity structure through the fan filter unit, causing the deformable part to expand and tightly fit the mating surfaces of the two side modules. The control module monitors the pressure in real time, and stops inflating when the pressure inside the cavity structure reaches the preset value.

[0016] S3, Gas Extraction and Separation: The gas inside the cavity structure is released through the fan filter unit. The deformable part retracts from the docking surface through its own elasticity. The control module monitors this in real time. When the gas pressure in the cavity structure drops to the preset safe separation threshold, the gas extraction stops.

[0017] In a preferred embodiment, the inflation monitoring process in step S2 is as follows: the pressure sensor monitors the air pressure value in the pipeline structure, and when the air pressure value reaches the preset value, the solenoid valve closes and the fan filter unit stops inflation.

[0018] In a preferred embodiment, the air extraction monitoring process in step S3 is as follows: the pressure sensor monitors the air pressure value in the pipeline structure, and when the air pressure value reaches the preset safe departure threshold, the solenoid valve closes and the fan filter unit stops extracting air.

[0019] The beneficial effects of this utility model's technical solution are:

[0020] The sealing device in this solution can achieve a seal between the fixed gaps of the pull-out equipment. It not only ensures a tight seal between the two interfaces, but also prevents damage to the sealing structure during equipment inspection or misalignment. Furthermore, when the sealing structure needs replacement, only the profile with the sealing structure at the frame junction area needs to be replaced; there is no need to disassemble the equipment itself. This is more convenient and effectively reduces potential damage from disassembly, achieving cost savings and reduced replacement time. Attached Figure Description

[0021] Figure 1 This is a diagram showing the modular components of a coating and developing machine system.

[0022] Figure 2 This is a structural diagram of the interface module of this utility model.

[0023] Figure 3 This is a schematic diagram of the overall state of the sealing structure of this utility model in its inflated state.

[0024] Figure 4 This is a schematic diagram of the overall state of the sealing structure of this utility model in the air extraction and contraction state.

[0025] Figure 5 This is a diagram showing the sealing state of the sealing structure of this utility model on the sealing surface.

[0026] Figure 6 This is a diagram showing the separation of the sealing structure and the sealing surface of this utility model.

[0027] Figure 7 This is a schematic diagram of the control module of this utility model.

[0028] Explanation of reference numerals in the attached drawings: 1. Front-end module of composite equipment; 2. Processing module; 3. Interface module; 4. Equipment interface frame; 5. Fixed gap; 6. Sealing position; 7. Robotic arm; 8. Profile rod; 9. Fan filter unit; 10. Process unit; 11. Sealing structure; 12. Mounting part; 13. Deformation part; 14. Cavity structure; 15. Slot notch; 16. Butt joint; 17. Inflation interface; 18. Exhaust interface; 19. Pressure reducing valve; 20. Pressure sensor; 21. Solenoid valve; 22. Butt joint surface. Detailed Implementation

[0029] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical applications of the present invention, and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for a particular purpose.

[0030] like Figure 1 As shown, the entire coating and developing machine system consists of multiple functional modules, such as the front-end module (HCSB) 1, the process module (PRB) 2, the interface module (IFB) 3, and the photolithography interface module 4. During equipment maintenance, the interface module 3 needs to be pulled out for easy access and operation. The bottom of the interface module (IFB) 3 adopts a track-type design, with a 15mm gap (fixed gap 5) reserved between it and the equipment on both sides, facilitating installation. However, the entire wafer transport channel requires maintaining microenvironment cleanliness and anode pressure stability; therefore, an adjustable air pressure sealing method is needed to seal the fixed gap 5.

[0031] like Figure 2 As shown, the interface module 3 consists of a frame, a fan filter unit 9, and a process unit 10. The frame is assembled from custom-designed profile rods 8. The fan filter unit 9, mounted on top, has two interfaces: an extraction interface 18 and an inflation interface 17. The central tower of the interface module 3 is the wafer transfer point, enclosed by the profile rods 8 to form a rectangular area. The robotic arm 7 inside the process module 2 completes the entire process flow by handling wafers at the interface.

[0032] Based on this, the present invention provides a flexible pressure-holding sealing device for the mating surface of a multi-module frame, used to achieve sealing of the fixed gap 5, such as... Figure 3 As shown, the sealing device includes a sealing structure 11 that is clamped onto the profile rod 8 and a pipeline structure connecting the sealing structure 11 to the fan filter unit 9 of the equipment (the pipeline structure is not shown in the diagram, but can be made of PU pipe, etc.).

[0033] In the above scheme, the sealing structure 11 is fixed to the profile rod 8 by a snap-fit ​​method. The pipeline structure establishes a gas pressure transmission channel between the sealing structure 11 and the fan filter unit 9. The gas output from the fan filter unit 9 is accurately delivered to the sealing structure 11 through the pipeline structure, providing power for the inflation and deflation of the sealing structure 11, thereby realizing the sealing and desealing of the fixed gap 5. The desealing state is as follows: Figure 4 As stated above.

[0034] like Figures 5-6 As shown, the sealing structure 11 includes a mounting part 12 and a deformation part 13 integrally formed with the mounting part 12. The shape of the mounting part 12 is adapted to the notch 15 on the profile rod 8. The deformation part 13 is provided with a cavity structure 14. The pipeline structure is connected to the cavity structure 14. The fan filter unit 9 inflates or deflates the cavity structure 14 through the pipeline structure.

[0035] In the above scheme, the mounting part 12 of the sealing structure 11 precisely engages with the notch 15 of the profile rod 8, achieving glue-free fixation. When the fan filter unit 9 is inflated into the cavity structure 14 of the deformation part 13 through the pipeline structure, the cavity structure 14 expands, causing the deformation part 13 to expand outward, tightly fitting the mating surfaces 22 of the two side modules, see... Figure 5 Fill the fixed gap 5. When it is necessary to release the seal, the fan filter unit 9 draws air through the pipeline structure, the cavity contracts and the deformable part 13 elastically retracts, separating from the mating surface 22, thus achieving module separation. See Figure 6 .

[0036] The deformable part 13 is located outside the profile rod 8 and at the gap to be sealed, i.e., at the fixed gap 5. The length of the deformable part 13 is adapted to the length of the gap to be sealed. The deformable part 13 is made of rubber. The deformable part 13 precisely corresponds to the position and length of the gap to be sealed, ensuring a seamless seal. The rubber material has excellent elasticity and deformation capacity. When inflated, it can completely fill the gap and fit tightly against the mating surface 22 to form an effective seal. Materials such as silicone rubber and EPDM rubber can be used. After deflating, it can quickly and elastically retract to its initial state without affecting the module's pull-out and separation action.

[0037] The deformable part 13 is provided with a connecting joint 16. One end of the pipeline structure is inserted and fixed to the connecting joint 16, and the other end is divided into two paths, which are respectively connected to the inflation port 17 and the exhaust port 18 of the fan filter unit 9. The pipeline structure is quickly connected and fixed to the deformable part 13 through the connecting joint 16, without the need for complicated connection procedures. The two pipelines are independently connected to the inflation port 17 and the exhaust port 18 of the fan filter unit 9, respectively. When inflating, gas enters the cavity structure 14 through the inflation branch, and when evacuating, gas is discharged through the exhaust branch. The smooth switching between the two states is achieved by controlling the fan filter unit 9.

[0038] like Figure 7 As shown, the pipeline structure is equipped with a control module for monitoring and controlling the inflation and deflation processes. The control module includes a pressure reducing valve 19, a pressure sensor 20, and a solenoid valve 21.

[0039] In the above scheme, the control module works in conjunction with the fan filter unit 9. Before inflation, the pressure of the gas output from the fan filter unit 9 is adjusted to a preset value that matches the gap size (e.g., the pressure value corresponding to a gap of 5mm). During inflation and deflation, the pressure sensor 20 monitors the changes in air pressure in the pipeline in real time and feeds the data back to the control system. When the air pressure reaches the preset value (the preset sealing value or the safety release threshold), the control system triggers the solenoid valve 21 to close the corresponding air path, thereby achieving precise stopping of inflation or deflation.

[0040] The sealing method of this sealing device includes the following steps:

[0041] Sealing structure installation: The operator aligns the mounting part 12 of the sealing structure 11 with the notch 15 on the profile rod 8 and directly engages and fixes it, completing the mechanical assembly of the sealing structure 11; then, one end of the pipeline structure is inserted into the mating joint 16 of the deformable part 13, and the other end is connected to the air charging and decharging interface of the fan filter unit 9, while ensuring the correct assembly of the control module and the pipeline structure, thus completing the construction of the entire sealing system.

[0042] Inflation and Sealing: After the equipment is installed in place, the system completes self-test and sends an inflation signal. The blower filter unit 9 starts the inflation function. After the gas is adjusted to the preset pressure by the pressure reducing valve 19, it enters the cavity structure 14 of the deformation part 13 through the pipeline structure. The deformation part 13 expands under the action of air pressure, gradually fitting the mating surface 22 of the two side modules and filling the fixed gap 5. The pressure sensor 20 monitors the air pressure in the pipeline in real time. When the air pressure reaches the preset sealing value, it feeds back a signal to the control system. The solenoid valve 21 closes the inflation air path, the blower filter unit 9 stops inflation, and the sealing structure 11 maintains the pressure holding state.

[0043] Air extraction separation: When the equipment needs maintenance, the maintenance personnel issue an air extraction signal, the fan filter unit 9 starts the air extraction function, the solenoid valve 21 opens the air extraction path, and the gas in the cavity structure 14 is discharged through the pipeline structure; the deformable part 13 gradually retracts under its own elasticity and separates from the module docking surface 22; the pressure sensor 20 monitors the air pressure drop in real time, and when the air pressure drops to the preset safe separation threshold, it sends a feedback signal to the control system, the solenoid valve 21 closes the air extraction path, the fan filter unit 9 stops air extraction, and at this time the interface module 3 can be pulled out along the track for maintenance operations.

[0044] The sealing device in this solution can seal the fixed gap 5 of the pull-out device. It not only ensures the seal between the two interfaces, but also prevents damage to the sealing structure during equipment inspection or misalignment. Furthermore, when the sealing structure needs replacement, only the profile rod with the sealing structure in the frame junction area needs to be replaced; there is no need to disassemble the entire device. This is more convenient and effectively reduces potential damage from disassembly, achieving cost savings and reduced replacement time.

[0045] Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of this utility model without creative effort should fall within the protection scope of this utility model. Structures, devices, and operating methods not specifically described and explained in this utility model, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A flexible pressure-holding and sealing device for a multi-module frame mating surface, characterized in that, It includes a sealing structure that can be detachably installed on the profile rod and a piping structure that connects the sealing structure to the fan filter unit of the equipment; The sealing structure includes an installation part and a deformation part connected to the installation part. The shape of the installation part is adapted to the notch on the profile rod. The deformation part is provided with a cavity structure. The pipeline structure is connected to the cavity structure. The fan filter unit inflates or vents the cavity structure through the pipeline structure.

2. The flexible pressure-holding and sealing device for the mating surface of a multi-module frame according to claim 1, characterized in that, The mounting part is integrally formed with the deformation part, and the mounting part is snapped into the notch of the profile rod.

3. The flexible pressure-holding and sealing device for the mating surface of a multi-module frame according to claim 1, characterized in that, The deformable part is located outside the profile rod and in the gap to be sealed.

4. The flexible pressure-holding and sealing device for the mating surface of a multi-module frame according to claim 1, characterized in that, The deformable part is provided with a docking joint. One end of the pipeline structure is inserted and fixed to the docking joint, and the other end is divided into two paths that are respectively connected to the air inlet and air outlet of the fan filter unit.

5. The flexible pressure-holding and sealing device for the mating surface of a multi-module frame according to claim 1, characterized in that, The pipeline structure is equipped with a control module for monitoring and controlling the inflation and deflation processes.

6. The flexible pressure-holding and sealing device for the mating surface of a multi-module frame according to claim 5, characterized in that, The control module includes a pressure reducing valve, a pressure sensor, and a solenoid valve.

7. The flexible pressure-holding and sealing device for the mating surface of a multi-module frame according to claim 1, characterized in that, The deformable part is made of rubber.

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