valve

Abstract

The application provides a valve, and relates to the technical field of valve assemblies. The valve comprises a valve body, a driving member, a driving auxiliary member, a first contact plate and a second contact plate. The first contact plate and the second contact plate are symmetrically arranged along an axis of the driving member. A first groove is arranged on an end face of the first contact plate close to the driving member. The driving auxiliary member is arranged between the driving member and the first contact plate and is partially accommodated in the first groove. A groove bottom profile of the first groove comprises at least a first section and a second section. The depth of the first section is greater than the depth of the second section. The depth extension direction of the first section to the second section is consistent with the direction of the driving member close to the valve body. The first contact plate and the second contact plate are configured to be close to a sealing surface of the valve when the driving auxiliary member moves to the second section. The driving member lifts the groove bottom, lifts the first contact plate and drives the second contact plate to press the sealing surface synchronously, so that the valve is sealed.

Description

Technical Field

[0001] This application relates to the field of valve assembly technology, and more specifically, to a valve. Background Technology

[0002] In semiconductor equipment, gate valves, commonly used to isolate cavities or areas with different vacuum levels, suffer from significant particulate contamination due to their inherent structural limitations. During operation, a traditional gate valve uses a cylinder to propel a valve core in a linear motion within the valve body. Upon reaching its destination, the valve core directly impacts the valve body, inevitably generating metallic or non-metallic particles. Furthermore, to ensure the linearity and stability of the valve core's movement, guide wheels are typically installed around it. As these guide wheels roll or slide along the valve body's track, contact friction continuously generates fine particles. These particles easily suspend and migrate to the process area in a vacuum environment, potentially adhering to the wafer surface or entering sensitive structures. This can cause pattern defects, thin-film contamination, or structural damage, leading to fatal malfunctions such as open circuits and short circuits, severely hindering semiconductor process yield improvements and long-term product reliability. Utility Model Content

[0003] In view of this, the purpose of this application is to provide a valve to improve the above-mentioned problems existing in the prior art.

[0004] The valve includes: a valve body, a drive member, a drive auxiliary member, a first contact plate, and a second contact plate; the first contact plate and the second contact plate are symmetrically arranged along the axis of the drive member; a first groove is provided on the end face of the first contact plate near the drive member; the drive auxiliary member is disposed between the drive member and the first contact plate and is partially accommodated in the first groove; the bottom profile of the first groove includes at least a first segment and a second segment; the depth of the first segment is greater than the depth of the second segment; wherein the depth extension direction from the first segment to the second segment is consistent with the direction of the drive member near the valve body; wherein the first contact plate and the second contact plate are configured such that when the drive auxiliary member moves to the second segment, the first contact plate and the second contact plate are close to the valve sealing surface.

[0005] In the above process, the driving component moves along the axis toward the valve body, causing the driving auxiliary component to slide from the deeper first section to the shallower second section in the first groove; as the bottom of the groove rises, the first contact plate is lifted up and simultaneously drives the second contact plate to move toward the sealing surface, until the two contact plates press against the sealing surface at the same time, thereby achieving valve closure and sealing.

[0006] Optionally, the valve further includes: a third contact plate; the third contact plate includes: a clearance portion; the clearance portion extends through the thickness direction of the third contact plate and is disposed corresponding to the position of the first groove; wherein, the clearance portion is configured to accommodate the drive auxiliary component.

[0007] In the above implementation process, when the drive auxiliary component moves with the drive component, its top always passes through the avoidance part of the third contact plate and extends into the first groove; the avoidance part provides the drive auxiliary component with a guide space along the axial direction to prevent the third contact plate from interfering with the drive auxiliary component, while ensuring that the first contact plate can be raised and lowered independently, so that the first contact plate and the second contact plate can still synchronously and tightly adhere to the cover to complete the sealing.

[0008] Optionally, the third contact plate is attached to the first contact plate; the end of the third contact plate near the second section is longer than the first contact plate.

[0009] In the above implementation process, the third contact plate remains in contact with the first contact plate and its end near the second section extends beyond the first contact plate; when the drive auxiliary component slides into the second section and the first contact plate is lifted, the overhanging section of the third contact plate continues to cover and press the area above the second section, so that the sealing surface is pressed more evenly, while preventing the edge of the first contact plate from warping, thereby improving the reliability of valve closure and sealing life.

[0010] Optionally, the third contact plate further includes: a first connecting portion and a second connecting portion; wherein, the first contact plate includes a first connecting protrusion; the second contact plate includes a second connecting protrusion; the first connecting portion is configured to connect with the first connecting protrusion, and the second connecting portion is configured to connect with the second connecting protrusion; the first connecting portion is symmetrically arranged along the line where the avoidance portion is located; the second connecting portion is symmetrically arranged along the line where the avoidance portion is located.

[0011] In the above implementation process, the third contact plate is engaged with the first connecting protrusion of the first contact plate through the first connecting part and with the second connecting protrusion of the second contact plate through the second connecting part. Both sets of connecting parts are arranged in pairs with the center line of the avoidance part as the axis of symmetry. When the driving auxiliary component slides into the second section and the first contact plate is lifted, the symmetrical connecting pair synchronously transmits the lifting force to the second contact plate, so that the first contact plate and the second contact plate maintain mirror motion, the sealing surface is subjected to uniform force, avoids skew and jamming, and enhances the overall rigidity with the bridging effect of the third contact plate, thereby improving the synchronicity of valve closing and sealing reliability.

[0012] Optionally, the second contact plate includes a sealing groove; the sealing groove is disposed along the edge of the second contact plate near the valve sealing surface; the sealing groove is configured to accommodate a sealing ring.

[0013] In the above implementation process, when the drive auxiliary component slides into the second section, the first contact plate is lifted and drives the second contact plate to approach the sealing surface, the pre-placed sealing ring in the sealing groove at the edge of the second contact plate first contacts the valve sealing surface; as the clamping force continues to increase, the sealing ring is compressed and fills the micro-unevenness, forming a line-surface double sealing barrier, blocking the medium leakage path, thereby significantly improving the sealing level and long-term reliability of the valve after it is closed without increasing the overall structural thickness.

[0014] Optionally, the second contact plate includes: a second groove; the second groove is disposed on the end face of the second contact plate near the drive member; the second groove is configured to accommodate the drive auxiliary member; the groove bottom profile of the second groove includes at least a third segment and a fourth segment; the depth of the third segment is greater than the depth of the fourth segment; wherein the depth extension direction of the third segment to the fourth segment is consistent with the direction of the drive member near the valve body.

[0015] During the above process, the driving component continues to advance towards the valve body, and the driving auxiliary component simultaneously falls into the second groove of the second contact plate, and is initially located in the third section with a greater depth. As the driving component moves forward, the driving auxiliary component climbs along the bottom of the groove to the fourth section with a smaller depth, synchronously lifting the second contact plate, so that the second contact plate and the first contact plate are pressed together against the valve sealing surface, realizing synchronous wedging on both sides, further improving the uniformity of the sealing pressure and the overall sealing reliability of the valve.

[0016] Optionally, the first contact plate further includes: an isolator; the isolator is disposed on the side of the first contact plate away from the drive member; the isolator is configured to isolate the first contact plate and the valve body.

[0017] In the above process, when the first contact plate is lifted by the driving auxiliary component and pressed against the sealing surface, the isolating component contacts the corresponding surface of the valve body before the first contact plate, forming a small heat-insulating or material-insulating gap between the first contact plate and the metal wall of the valve body. This gap can block the direct contact between the high-temperature medium or corrosive fluid and the back of the first contact plate, reduce heat conduction and chemical corrosion, and prevent jamming caused by thermal expansion differences or adhesion, thereby extending the valve's opening and closing life and sealing stability under high temperature and strong corrosion conditions.

[0018] Optionally, the driving component includes a cylinder and a piston rod; one end of the piston rod is connected to the cylinder, and the other end is in contact with the driving auxiliary component; the cylinder is configured to drive the piston rod to move the driving auxiliary component, and the driving auxiliary component transmits the driving force to the first contact plate.

[0019] In the above process, after the cylinder receives air, it pushes the piston rod to extend along the axis towards the valve body. The end of the piston rod directly pushes the drive auxiliary component, causing it to slide from the first section to the second section within the first groove. The drive auxiliary component converts the axial thrust into a lifting force on the first contact plate, which in turn drives the second contact plate to press synchronously against the sealing surface, completing the valve closure. During exhaust, the piston rod retracts, and the drive auxiliary component retracts to the first section under the action of the spring or the medium's reaction force. The first and second contact plates then disengage from the sealing surface, realizing the valve opening.

[0020] Optionally, the piston rod includes at least a first segment and a second segment; the first segment has a first diameter, and the second segment has a second diameter; wherein the first diameter is larger than the second diameter; the cylinder includes a mounting portion; the mounting portion is configured to receive the piston rod; the mounting portion includes a defining region and a receiving region; the receiving region shares a geometric center with the defining region; the receiving region has at least one tangent point with the first segment; the receiving region is configured to restrict the movement space of the first segment; the diameter of the receiving region is between the first diameter and the second diameter; the receiving region is configured to accommodate the second segment passing through the mounting portion.

[0021] In the above implementation process, when the piston rod of the cylinder extends outward, the first section is blocked by the limiting area because its first diameter is larger than the diameter of the receiving area, and cannot pass through the mounting part; the second section can pass through freely because its second diameter is smaller than the diameter of the receiving area. This structure mechanically limits the maximum extension stroke of the piston rod to the position where the end face of the first section contacts the end face of the limiting area, thereby precisely controlling the end position of the drive auxiliary component in the first groove, preventing it from crossing the second section and causing the first contact plate and the second contact plate to over-press the sealing surface, avoiding overload damage to the sealing ring or valve jamming, and improving the safety and repeatability of the pneumatic drive.

[0022] Optionally, the drive auxiliary component includes a ball bearing.

[0023] In the above implementation process, the drive auxiliary component adopts a ball bearing; when the piston rod pushes the ball bearing from the first section to the second section in the first groove, the ball bearing and the bottom of the groove have rolling friction, which has a low coefficient of friction and little wear. Moreover, the ball bearing can automatically center itself, so that the lifting force is evenly transmitted to the first contact plate along the axis, reducing the opening and closing resistance and the risk of jamming, and improving the sensitivity and service life of the valve action. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a first schematic diagram of a valve provided in an embodiment of this application; Figure 2 This is a schematic diagram of the third contact plate of the valve provided in an embodiment of this application; Figure 3 This is a diagram showing the installation relationship between the three contact plates of the valve provided in an embodiment of this application. Figure 4 This is a second schematic diagram of a valve provided in an embodiment of this application; Figure 5 This is a first schematic diagram of the piston rod connection provided in an embodiment of this application; Figure 6 This is a second schematic diagram of the piston rod connection provided in an embodiment of this application.

[0026] Icons: Valve body-100, Limiting area-2001, Receiving area-2002, Drive component-210, Cylinder-211, Piston rod-212, First section-2121, Second section-2122, Drive auxiliary component-220, Ball bearing-221, First contact plate-310, Isolator-311, Second contact plate-320, Sealing ring-321, Third contact plate-330, Clearance part-331, First connecting part-332, Second connecting part-333, Connector-334. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of the embodiments of this application.

[0028] In view of this, the purpose of this application is to provide a valve to improve the above-mentioned problems existing in the prior art.

[0029] Please see Figure 1 , Figure 1 This is a first schematic diagram of a valve provided in an embodiment of this application.

[0030] The valve includes: a valve body 100, a drive member 210, a drive auxiliary member 220, a first contact plate 310, and a second contact plate 320; the first contact plate 310 and the second contact plate 320 are symmetrically arranged along the axis of the drive member 210; a first groove is provided on the end face of the first contact plate 310 near the drive member 210; the drive auxiliary member 220 is disposed between the drive member 210 and the first contact plate 310 and is partially accommodated in the first groove; the bottom profile of the first groove includes at least a first section and a second section; the depth of the first section is greater than the depth of the second section; wherein the depth extension direction from the first section to the second section is consistent with the direction of the drive member 210 near the valve body 100; wherein the first contact plate 310 and the second contact plate 320 are configured such that when the drive auxiliary member 220 moves to the second section, the first contact plate 310 and the second contact plate 320 are close to the valve sealing surface.

[0031] In the above implementation process, by partially accommodating the drive auxiliary component 220 within a first groove of a specific contour of the first contact plate 310, and utilizing the change in groove bottom depth from the first section to the second section, when the drive auxiliary component 220 moves to the shallower second section under the axial drive of the drive component 210, it can push the first contact plate 310 and its symmetrically arranged second contact plate 320 to synchronously approach the sealing surface of the valve body 100, thereby achieving tight closure or sealing of the valve. The efficient transmission and precise positioning of the mechanical structure ensure the synchronicity and consistency of the actions of the two contact plates, improving the sealing reliability and response accuracy of the valve.

[0032] Please see Figure 2 , Figure 2 This is a schematic diagram of the third contact plate of the valve provided in an embodiment of this application.

[0033] Optionally, the valve further includes: a third contact plate 330; the third contact plate 330 includes: a clearance portion 331; the clearance portion 331 extends through the thickness direction of the third contact plate 330 and is disposed corresponding to the position of the first groove; wherein, the clearance portion 331 is configured to accommodate the drive auxiliary component 220.

[0034] In the above implementation process, by adding a third contact plate 330 with a clearance portion 331, and aligning the clearance portion 331 with the position of the first groove, a dedicated through-channel is provided for the axial movement of the drive auxiliary component 220. This allows the drive auxiliary component 220 to extend directly and engage with the first groove of the first contact plate 310 without interfering with the structure of the third contact plate 330. This not only optimizes the transmission path of the driving force and reduces energy consumption and potential interference in intermediate links, but also makes the internal structure layout of the valve more compact and reasonable, providing the possibility for multi-contact plate collaborative work or the implementation of more complex valve control logic.

[0035] Please combine Figure 1 and Figure 2 See Figure 3 , Figure 3 This is a diagram showing the installation relationship between the three contact plates of the valve provided in an embodiment of this application.

[0036] Optionally, the third contact plate 330 is attached to the first contact plate 310; the end of the third contact plate 330 near the second section is longer than the first contact plate 310.

[0037] In the above implementation process, by making the third contact plate 330 fit against the first contact plate 310 and having one end (near the second section side) longer than the first contact plate 310, a stepped or cantilevered structural layout is formed. On the one hand, by utilizing the extended portion of the third contact plate 330, it can contact or interact with the valve body 100 or related sealing surface components earlier or more directly, playing a role in pilot positioning, auxiliary support, or sharing the sealing pressure; on the other hand, it optimizes the force sequence and distribution of each contact plate during the valve's opening or closing process, improving the smoothness of the operation and the overall structural strength, while reserving more space for the arrangement of fluid channels or other functional components.

[0038] Optionally, by Figure 2 and Figure 3 It is known that the third contact plate 330 further includes: a first connecting portion 332 and a second connecting portion 333; wherein, the first contact plate 310 includes a first connecting protrusion (not shown); the second contact plate 320 includes a second connecting protrusion (not shown); the first connecting portion 332 is configured to connect with the first connecting protrusion, and the second connecting portion 333 is configured to connect with the second connecting protrusion; the first connecting portion 332 is symmetrically arranged along the line where the avoidance portion 331 is located; the second connecting portion 333 is symmetrically arranged along the line where the avoidance portion 331 is located.

[0039] In the above implementation process, by symmetrically arranging the first connecting part 332 and the second connecting part 333 on the third contact plate 330, and cooperating with the corresponding connecting protrusions on the first contact plate 310 and the second contact plate 320, a stable and symmetrical mechanical connection is established between the three contact plates. This connection method not only ensures the linkage and integrity of the third contact plate 330 with the first contact plate 310 and the second contact plate 320 during movement, preventing misalignment or separation of the plates under force; at the same time, since the connecting parts are symmetrically arranged along the line of the avoidance part 331, the driving force transmitted by the drive auxiliary component 220 can be evenly and balancedly distributed to the first contact plate 310 and the second contact plate 320 on both sides through the third contact plate 330, thereby greatly improving the synchronization accuracy of valve action, structural rigidity and operational reliability, and effectively avoiding problems such as uneven wear or sealing failure caused by uneven force.

[0040] In one embodiment of this application, such as Figure 3 As shown, the first connecting portion 332 and the second connecting portion 333 are mounting holes, and the corresponding first contact plate 310 includes a first connecting protrusion; the second contact plate 320 includes a second connecting protrusion. The first connecting portion 332 is sleeved with the first connecting protrusion, and the second connecting portion 333 is configured to sleeve with the second connecting protrusion. They are then fixed by a connector 334, which can be a bolt or a screw. The bolt passes sequentially through the mounting hole of the first connecting portion 332, the hole on the first connecting protrusion, and another pair of bolts / screws that are adapted to the holes on the second connecting protrusion and the mounting hole of the second connecting portion 333. Finally, a nut is tightened. If any component has internal threads, it can be screwed in directly without a nut. The connector 334 can also be a pin, which passes directly through all the aligned holes. Sometimes, a cotter pin, a retaining ring (elastic retaining ring), or a nut is used at the end to prevent the pin from falling out. In cases requiring permanent fixation, the connector 334 can be a rivet.

[0041] In one embodiment of this application, besides directly fitting the connecting part onto the corresponding connecting protrusion, various alternative connection methods can be used between the first connecting part 332 and the first connecting protrusion, and between the second connecting part 333 and the second connecting protrusion. These methods include, but are not limited to: using welding or brazing to achieve a high-strength permanent connection; using screws for fastening to facilitate disassembly and maintenance; designing a flexible snap-fit ​​or clamping structure for quick assembly; using riveting to reliably fix dissimilar materials; using conductive or structural adhesive for bonding to adapt to precision vibration environments or special electrical requirements; using plug-in and slotted connections for precise guidance and positioning; or embedding magnets to form a magnetic connection for convenient frequent disassembly and automatic alignment. The specific solution needs to be selected based on comprehensive factors such as product reliability requirements, maintainability requirements, process costs, and electrical performance.

[0042] Optionally, the second contact plate 320 includes a sealing groove; the sealing groove is disposed along the edge of the second contact plate 320 near the valve sealing surface; the sealing groove is configured to accommodate a sealing ring 321.

[0043] In the above implementation process, by setting a sealing groove on the edge of the second contact plate 320 near the valve sealing surface to accommodate the sealing ring 321, when the second contact plate 320 is driven to approach the valve sealing surface, the sealing ring 321 can be compressed between the sealing groove and the sealing surface, forming a uniform and tight elastic sealing interface. This not only effectively blocks media leakage, but also compensates for processing errors or minor wear through the flexible deformation of the sealing ring 321, improving the adaptability and durability of the seal.

[0044] Optionally, the second contact plate 320 includes: a second groove; the second groove is disposed on the end face of the second contact plate 320 near the drive member 210; the second groove is configured to accommodate the drive auxiliary member 220; the groove bottom profile of the second groove includes at least a third section and a fourth section; the depth of the third section is greater than the depth of the fourth section; wherein the depth extension direction of the third section to the fourth section is consistent with the direction of the drive member 210 near the valve body 100.

[0045] In the above implementation process, a second groove similar to that of the first contact plate 310 is mirrored on the second contact plate 320, containing a third and fourth section with decreasing depths, and the other end of the drive auxiliary component 220 is accommodated therein, thus constructing a completely symmetrical double-groove drive accommodating structure. This allows the drive auxiliary component 220 to simultaneously form a variable-depth engagement relationship with both the first contact plate 310 and the second contact plate 320 in the axial direction. When the drive component 210 pushes the drive auxiliary component 220 toward the valve body 100, the drive auxiliary component 220 simultaneously slides from the deeper section to the shallower section in the grooves on both sides, thereby efficiently and synchronously converting the axial driving force into the approaching movement of the two contact plates. This ensures the synchronicity and uniformity of the contact between the double contact plates and the sealing surface when the valve is closed, greatly optimizing the balance of the drive and the reliability of the seal.

[0046] Optionally, the first contact plate 310 further includes: an isolator 311; the isolator 311 is disposed on the side of the first contact plate 310 away from the drive member 210; the isolator 311 is configured to isolate the first contact plate 310 and the valve body 100.

[0047] In the above implementation process, by providing an isolator 311 on the side of the first contact plate 310 facing the valve body 100, a physical separation layer is established between the first contact plate 310 and the valve body 100. This effectively prevents the first contact plate 310 from directly contacting the metal surface of the valve body 100 during movement or under pressure, avoiding potential wear, scratches, or metal adhesion. The isolator 311 also serves to buffer, dampen, and compensate for dimensional tolerances, making the valve operation smoother and more stable.

[0048] In one embodiment of this application, wear-resistant engineering plastics can be used under normal operating conditions; filled polytetrafluoroethylene (PTFE) can be used in applications requiring lower friction or chemical resistance; and metal-based self-lubricating materials or surface treatment layers (such as plating or nitriding layers) can be selected for applications requiring high temperatures or higher strength. The isolation element 311 fundamentally avoids direct contact and wear between the first contact plate 310 and the metal substrate of the valve body 100.

[0049] Optionally, the drive component 210 includes a cylinder 211 and a piston rod 212; one end of the piston rod 212 is connected to the cylinder 211, and the other end is in contact with the drive auxiliary component 220; the cylinder 211 is configured to drive the piston rod 212 to drive the drive auxiliary component 220 to move, and the drive auxiliary component 220 transmits the driving force to the first contact plate 310.

[0050] In the above implementation process, a drive component 210 consisting of a cylinder 211 and a piston rod 212 is used, and the piston rod 212 is in direct contact with the drive auxiliary component 220. The cylinder 211 serves as a power source, driving the piston rod 212 to move linearly through compressed air. The piston rod 212 then directly transmits the linear thrust output by the cylinder 211 to the drive auxiliary component 220, realizing the efficient and direct transmission of driving force from the pneumatic actuator to the valve contact plate. This has the advantages of simple structure, rapid response, easy control, and convenient maintenance.

[0051] Optionally, please refer to Figure 5 and Figure 6 , Figure 5 This is a first schematic diagram of the piston rod connection provided in an embodiment of this application. Figure 6 This is a second schematic diagram of a piston rod connection provided in an embodiment of this application. The piston rod 212 includes at least a first segment 2121 and a second segment 2122; the first segment 2121 has a first diameter, and the second segment 2122 has a second diameter; wherein the first diameter is larger than the second diameter; the cylinder 211 includes a mounting portion; the mounting portion is configured to accommodate the piston rod 212; the mounting portion includes a defining region 2001 and a receiving region 2002; the receiving region 2002 shares a geometric center with the defining region 2001; the receiving region 2002 and the first segment 2121 have at least one tangent point; the receiving region 2002 is configured to restrict the movement space of the first segment 2121; the diameter of the receiving region 2002 is between the first diameter and the second diameter; the receiving region 2002 is configured to accommodate the second segment 2122 passing through the mounting portion.

[0052] In the above implementation process, the piston rod 212 is a stepped shaft structure with different diameters, the first segment 2121 having a larger diameter than the second segment 2122. A mounting portion consisting of a limiting area 2001 and a receiving area 2002 is correspondingly provided on the cylinder 211, realizing a guiding and limiting mechanism. The diameter of the receiving area 2002 is between the diameters of the first segment 2121 and the second segment 2122, restricting the first segment 2121 to move within the limiting area 2001, while the second segment 2122 can freely pass through the receiving area 2002. This firstly ensures the alignment and stable guidance between the piston rod 212 and the cylinder 211, reducing wobble and friction during movement. More importantly, by mechanically limiting the axial travel of the larger diameter portion of the first segment 2121, the ultimate extension position of the piston rod 212 is defined and constrained, thereby providing a reliable and repeatable mechanical limit for the final position of the drive auxiliary component 220 and even the entire valve actuator.

[0053] Optionally, the drive auxiliary component 220 includes a ball bearing 221.

[0054] In the above implementation, by designing the drive auxiliary component 220 to include a structure containing ball bearings 221, a rolling friction mechanism is introduced between the drive component 210, such as the piston rod 212, and the grooves of the first contact plate 310 and the optionally symmetrical second contact plate 320. The ball bearings 221 can roll along a specific contour within their receiving grooves, such as the first groove or the second groove, such as from a deep first or third segment to a shallow second or fourth segment.

[0055] In one embodiment of this application, the ball bearing 221 can be made of high-carbon chromium bearing steel, stainless steel, or engineering ceramics. These materials have good wear resistance, fatigue strength, and dimensional stability, making them suitable for high-frequency rolling contact conditions, effectively reducing the coefficient of friction and extending service life.

[0056] In summary, the valve includes: a valve body 100, a drive member 210, a drive auxiliary member 220, a first contact plate 310, and a second contact plate 320; the first contact plate 310 and the second contact plate 320 are symmetrically arranged along the axis of the drive member 210; a first groove is provided on the end face of the first contact plate 310 near the drive member 210; the drive auxiliary member 220 is disposed between the drive member 210 and the first contact plate 310 and is partially accommodated in the first groove; the bottom profile of the first groove includes at least a first section and a second section; the depth of the first section is greater than the depth of the second section; wherein the depth extension direction from the first section to the second section is consistent with the direction of the drive member 210 near the valve body 100; wherein the first contact plate 310 and the second contact plate 320 are configured such that when the drive auxiliary member 220 moves to the second section, the first contact plate 310 and the second contact plate 320 are close to the valve sealing surface. By partially accommodating the drive auxiliary component 220 within a first groove of a specific contour on the first contact plate 310, and utilizing the variation in groove depth from the first section to the second section, when the drive auxiliary component 220 moves to the shallower second section under the axial drive of the drive component 210, it can push the first contact plate 310 and its symmetrically arranged second contact plate 320 synchronously towards the sealing surface of the valve body 100, thereby achieving tight closure or sealing of the valve. The efficient transmission and precise positioning of the mechanical structure ensure the synchronicity and consistency of the actions of the two contact plates, improving the valve's sealing reliability and response accuracy.

[0057] In the several embodiments provided in this application, it should be understood that the disclosed device can also be implemented in other ways. The device embodiments described above are merely illustrative. For example, the block diagrams in the accompanying drawings show the possible architecture, functions, and operations of the device according to various embodiments of this application. Furthermore, the functional modules in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0058] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application. It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0059] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

[0060] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A valve, characterized in that, The valve includes: a valve body, a drive component, a drive auxiliary component, a first contact plate, and a second contact plate; The first contact plate and the second contact plate are symmetrically arranged along the axis of the driving member; A first groove is provided on the end face of the first contact plate near the driving member; the driving auxiliary member is disposed between the driving member and the first contact plate, and is partially accommodated in the first groove; The bottom profile of the first groove includes at least a first section and a second section; the depth of the first section is greater than the depth of the second section; wherein the depth extension direction from the first section to the second section is consistent with the direction of the drive member approaching the valve body; The first contact plate and the second contact plate are configured such that when the drive auxiliary component moves to the second section, the first contact plate and the second contact plate are close to the valve sealing surface.

2. The valve according to claim 1, characterized in that, The valve also includes: a third contact plate; The third contact plate includes: a clearance portion; the clearance portion extends through the thickness direction of the third contact plate and is disposed corresponding to the position of the first groove; The avoidance part is configured to accommodate the drive auxiliary component.

3. The valve according to claim 2, characterized in that, in, The third contact plate is attached to the first contact plate; the end of the third contact plate near the second section is longer than the first contact plate.

4. The valve according to claim 2, characterized in that, The third contact plate further includes: a first connecting portion and a second connecting portion; The first contact plate includes a first connecting protrusion; the second contact plate includes a second connecting protrusion. The first connecting portion is configured to connect with the first connecting protrusion, and the second connecting portion is configured to connect with the second connecting protrusion; The first connecting portion is symmetrically arranged along the line where the avoidance portion is located; the second connecting portion is symmetrically arranged along the line where the avoidance portion is located.

5. The valve according to claim 1, characterized in that, The second contact plate includes: a sealing groove; The sealing groove is provided along the edge of the second contact plate near the valve sealing surface; the sealing groove is configured to accommodate a sealing ring.

6. The valve according to claim 1, characterized in that, The second contact plate includes: a second groove; The second groove is disposed on the end face of the second contact plate near the driving member; the second groove is configured to accommodate the driving auxiliary member; The bottom profile of the second groove includes at least a third section and a fourth section; the depth of the third section is greater than the depth of the fourth section; wherein the depth extension direction of the third section to the fourth section is consistent with the direction of the drive member approaching the valve body.

7. The valve according to claim 1, characterized in that, The first contact plate further includes: an isolation element; The isolator is disposed on the side of the first contact plate away from the drive member; the isolator is configured to isolate the first contact plate and the valve body.

8. The valve according to claim 1, characterized in that, The driving component includes: a cylinder and a piston rod; One end of the piston rod is connected to the cylinder, and the other end is in contact with the drive auxiliary component; The cylinder is configured to drive the piston rod to move the drive auxiliary component, and the drive auxiliary component transmits the driving force to the first contact plate.

9. The valve according to claim 8, characterized in that, in, The piston rod includes at least a first section and a second section; the first section has a first diameter, and the second section has a second diameter; wherein the first diameter is larger than the second diameter; The cylinder includes a mounting portion; the mounting portion is configured to accommodate the piston rod; The mounting section includes a defined area and a receiving area; the receiving area and the defined area share a geometric center. The accommodating area has at least one tangent point with the first segment; the accommodating area is configured to restrict the activity space of the first segment. The diameter of the receiving area is between the first diameter and the second diameter; the receiving area is configured to accommodate the second segment passing through the mounting portion.

10. The valve according to claim 1, characterized in that, in, The drive auxiliary component includes ball bearings.

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