Mass spectrometry test gas path integrated module

Abstract

The utility model discloses a mass spectrum test gas path integrated module, including the substrate, a side of the substrate is provided with a plurality of external gas pipe, a plurality of independent gas inlet gas paths are arranged in the substrate, and each gas inlet gas path is connected with an external gas pipe through a specific interface, and the gas inlet gas paths do not intersect with each other. The valve bodies with the same function on the three station function modules are connected to the same gas inlet gas path through the corresponding connecting interfaces. The substrate is provided with a gas outlet gas path corresponding to the one station function module, the two station function modules and the three station function modules. The gas outlet gas path of each station function module is connected with a connecting gas path group. The connecting gas path group is used for realizing the gas transmission with the valve body outlet on the corresponding station function module. By integrating the three station function modules together, unnecessary joint application is reduced, the gas path connection structure is simplified, the volume is reduced, and the convenience of use is improved.

Description

Technical Field

[0001] This utility model belongs to the field of mass spectrometry testing equipment and relates to a three-station mass spectrometry testing gas path integrated module. Background Technology

[0002] In existing mass spectrometry testing equipment, the detection process is crucial, involving the coordinated operation of three functional modules. Each functional module is equipped with the same valves, such as calibration valves, purge valves, venting valves, and test valves. These valves play a key role in controlling gas flow direction and flow rate during equipment operation, and are important components for ensuring the accuracy and stability of the test.

[0003] Currently, the valve bodies of the three functional modules are connected to the test chamber via air pipes, and the valve bodies are also connected to each other via air pipes, resulting in an extremely complex air pipe network. The numerous intertwined air pipes not only occupy a significant amount of space but also greatly increase the number of joints. This makes sealing and debugging during equipment assembly exceptionally difficult, requiring considerable time and effort to ensure a good seal at each joint. Furthermore, the complex connection structure also poses a significant challenge to maintenance personnel when equipment malfunctions and requires repair, making it difficult to quickly locate and repair the problem, severely impacting equipment maintenance efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a mass spectrometry testing gas path integrated module, which integrates three functional modules together to reduce unnecessary connectors, simplify the gas path connection structure, reduce size, and improve ease of use.

[0005] The objective of this utility model is achieved through the following technical solution: A mass spectrometry testing gas path integrated module includes a substrate. Several external gas pipes are disposed on one side of the substrate. Several independent inlet gas paths are disposed within the substrate. Each inlet gas path is individually connected to an external gas pipe via a specific interface, and the inlet gas paths do not intersect. Valve bodies with the same function on three workstation functional modules are respectively connected to the same inlet gas path via corresponding connection interfaces. The substrate is provided with outlet gas paths corresponding to the first, second, and third workstation functional modules, respectively. Each workstation functional module's outlet gas path is connected to a connecting gas path group, which is used to realize gas transmission with the valve outlet on the corresponding workstation functional module.

[0006] As a further improvement of one embodiment of the present invention, the substrate is formed by splicing at least two splicing plates together by butt joint, and the splicing plates are locked together by bolts. A sealing ring is provided at the connection between the two splicing plates with the same air intake path to prevent gas leakage at the connection between the two splicing plates.

[0007] As a further improvement of one embodiment of this utility model, each of the three workstation functional modules is equipped with a calibration valve, a purge valve, a venting valve, an exhaust valve, and a test valve. The connecting air circuit group consists of a first air pipe, a second air pipe, and a third air pipe. The first air pipe is connected to the outlet of the calibration valve, the second air pipe is connected to the outlets of the purge valve and the test valve, and the third air pipe is connected to the outlets of the venting valve and the exhaust valve.

[0008] As a further improvement of one embodiment of the present invention, a calibration function block is also integrated on the substrate.

[0009] As a further improvement of one embodiment of the present invention, the calibration function block includes a calibration leak hole, a leak hole purge valve, and a leak hole venting valve.

[0010] As a further improvement of one embodiment of this utility model, the same valve bodies are arranged side by side on the three functional modules, and the air intake path is arranged in a straight line.

[0011] The above technical solution offers the following advantages: By modularly connecting the three workstation functional modules, the complex connections of numerous air pipes present in traditional distributed setups are avoided, reducing unnecessary connectors. The air circuit connection structure is significantly simplified, the overall equipment size is reduced, and the space occupied is minimized. Simultaneously, operators no longer need to search and adjust through a multitude of air pipes, improving the ease of use of the equipment and reducing the risk of leaks and other malfunctions caused by excessive connectors. Attached Figure Description

[0012] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0013] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0014] Figure 1 A three-dimensional structural diagram of this utility model.

[0015] Figure 2 A top view of the structure provided for this utility model (hiding the calibration leak hole cover plate).

[0016] Figure 3 A schematic diagram of the left-side structure provided by this utility model.

[0017] Figure 4 for Figure 3 A schematic diagram of the cross-sectional structure along the AA direction.

[0018] Figure 5 for Figure 3 A schematic diagram of the cross-sectional structure along the BB direction.

[0019] In the picture: 1. Substrate; 11, 12, 13, splicing panels; 2. One-station functional module; 3. Two-station functional module; 4. Three-station functional module; 21, 31, 41, Calibration valves; 22, 32, 42, purge valve; 23, 33, 43, vent valve; 24, 34, 44, drain valve; 25, 35, 45, test valve; 51. Break the airway external air tube; 52. Calibrate the external air hose; 53. Test the external air tube; 54. Positive pressure external air hose; 55. Negative pressure external air tube; 56. Leakage hole air blowing pipe; 57. Vent pipe with leakage hole; 61. First trachea; 62. Second trachea; 63. The third trachea; 7. Calibration function block; 71. Calibrate the leak; 72. Leakage purge valve; 73. Drain valve with leakage hole; 81, 82, 83, 84, 85, Intake air passage. Detailed Implementation

[0020] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0021] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0022] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model. Example

[0023] See Figures 1-5 As shown, a mass spectrometry testing gas path integrated module includes a substrate 1. Several external gas pipes are provided on one side of the substrate 1, and several independent gas inlet paths are provided inside the substrate 1. Each gas inlet path is connected to an external gas pipe individually through a specific interface, and the gas inlet paths do not intersect with each other. Valve bodies with the same function on three workstation functional modules are respectively connected to the same gas inlet path through corresponding connection interfaces. Gas outlet paths are provided on the substrate 1 and are respectively connected to the first workstation functional module 2, the second workstation functional module 3, and the third workstation functional module 4. The gas outlet path of each workstation functional module is connected to a connecting gas path group. The connecting gas path group is used to realize gas transmission with the valve outlet on the corresponding workstation functional module.

[0024] Specifically, the first-station functional module 2 has a calibration valve 21, a purge valve 22, a venting valve 23, an exhaust valve 24, and a test valve 25; the second-station functional module 3 has a calibration valve 31, a purge valve 32, a venting valve 33, an exhaust valve 34, and a test valve 35; and the third-station functional module 4 has a calibration valve 41, a purge valve 42, a venting valve 43, an exhaust valve 44, and a test valve 45.

[0025] The external air tubes include a venting external air tube 51, a calibration external air tube 52, a testing external air tube 53, a positive pressure external air tube 54, and a negative pressure external air tube 55. The external air inlet pipe 51 is connected to the air inlet path 81, which is connected to the air breaker valves 23, 33, and 43, and supplies air to the three air breaker valves simultaneously. The external air inlet pipe 52 is connected to the air inlet path 82, which is connected to the calibration valves 21, 31, and 41, and supplies air to the three calibration valves simultaneously. The external air inlet pipe 53 is connected to the air inlet path 83, which is connected to the test valves 25, 35, and 45, and supplies air to the three test valves simultaneously. The external air inlet pipe 54 is connected to the air inlet path 84, which is connected to the purge valves 22, 32, and 42, and supplies air to the three purge valves simultaneously. The external air inlet pipe 55 is connected to the air inlet path 85, which is connected to the vent valves 24, 34, and 44, and evacuates air from the three vent valves simultaneously.

[0026] Meanwhile, each of the three functional modules (station 1, 2, 3, and 4) is connected to an independent connecting gas path group. Since the connections between the connecting gas path group and the three functional modules are essentially the same, for ease of description, station 1 functional module 2 will be used as an example.

[0027] The connecting air circuit group consists of a first air pipe 61, a second air pipe 62 and a third air pipe 63. The first air pipe 61 is connected to the outlet of the calibration valve 21, the second air pipe 62 is connected to the outlet of the purge valve 22 and the test valve 25, and the third air pipe 63 is connected to the outlet of the venting valve 23 and the venting valve 24.

[0028] In this embodiment, the same valve bodies on the first-station functional module 2, the second-station functional module 3, and the third-station functional module 4 are arranged side by side, so that the corresponding air intake passages 81~85 are arranged in a straight line, which facilitates the processing and layout of the air intake passages.

[0029] Furthermore, the substrate 1 also integrates a calibration function block 7, which includes a calibration leak hole 71, a leak hole purge valve 72, and a leak hole vent valve 73 (a cover plate is provided on the calibration leak hole 71). The corresponding external air pipe also includes a leak hole blowing pipe 56 connected to the leak hole purge valve 72 and a leak hole exhaust pipe 57 connected to the leak hole vent valve 73.

[0030] In this embodiment, the substrate 1 is formed by splicing three splicing plates 11, 12 and 13 by butt joint. The splicing plates 11 and 12 are fastened together by bolts, and the splicing plates 12 and 13 are fastened together by bolts. A sealing ring is provided at the connection between two splicing plates with the same air intake path to prevent gas leakage at the connection between the two splicing plates.

[0031] This invention integrates the first-station functional module 2, the second-station functional module 3, and the third-station functional module 4 onto the base plate 1 through the aforementioned structural design. This avoids the complex connections of numerous air pipes in traditional decentralized installations and reduces the use of unnecessary connectors. Simultaneously, the air path connection structure is significantly simplified, resulting in a smaller overall equipment size and reduced space occupation. Furthermore, operators no longer need to search and adjust through a complex network of air pipes, improving the ease of use of the equipment and reducing the risk of malfunctions such as air leaks caused by excessive connectors.

[0032] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0033] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0034] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0035] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A mass spectrometry testing gas path integrated module, characterized in that, The system includes a base plate; one side of the base plate is provided with several external air pipes, and the base plate is provided with several independent air intake paths. Each air intake path is connected to an external air pipe through a corresponding interface, and the air intake paths do not intersect each other; valve bodies with the same function on the three workstation functional modules are respectively connected to the same air intake path through corresponding connection interfaces; the base plate is provided with air outlet paths that are respectively connected to the first workstation functional module, the second workstation functional module, and the third workstation functional module, and the air outlet path of each workstation functional module is connected to a connecting air path group.

2. The integrated mass spectrometry testing gas path module according to claim 1, characterized in that, The substrate is formed by splicing at least two splicing plates together by butt joint. The splicing plates are locked together by bolts. A sealing ring is provided at the connection between two splicing plates with the same air intake path to prevent gas leakage at the connection between the two splicing plates.

3. The integrated mass spectrometry testing gas path module according to claim 1, characterized in that, Each of the three workstation functional modules has a calibration valve, a purge valve, a venting valve, an exhaust valve, and a test valve. The connecting air circuit group consists of a first air pipe, a second air pipe, and a third air pipe. The first air pipe is connected to the outlet of the calibration valve, the second air pipe is connected to the outlets of the purge valve and the test valve, and the third air pipe is connected to the outlets of the venting valve and the exhaust valve.

4. The mass spectrometry test gas path integrated module according to any one of claims 1 to 3, characterized in that, The substrate also integrates a calibration function block.

5. The integrated mass spectrometry testing gas path module according to claim 4, characterized in that, The calibration function block includes a calibration leak hole, a leak hole purge valve, and a leak hole drain valve.

6. The integrated mass spectrometry testing gas path module according to claim 1, characterized in that, Identical valve bodies are arranged side by side on the three functional modules, and the air intake path is arranged in a straight line.

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