Dynamic flow distribution device for multi-port exhaust gas treatment apparatus

Abstract

The utility model discloses a dynamic flow distribution device of multi -port waste gas treatment equipment concretely relates to waste gas treatment equipment technical field, including the air intake manifold, the surface of air intake manifold is provided with a plurality of branch pipes, and the one side of air intake manifold is provided with flow regulating mechanism, and flow regulating mechanism includes the small -size stepper motor fixed mounting on the surface of air intake manifold, and the output of small -size stepper motor is fixedly provided with the pivot, and the one end of pivot penetrates air intake manifold and extends to the outside of air intake manifold, and the surface of air intake manifold is fixedly provided with the support frame, and pivot is rotatably connected with support frame. The utility model realizes macroscopic dynamic distribution and flow direction adjustment to waste gas flow, and the setting of flow guide hole optimizes waste gas flow path, improves distribution efficiency, makes it have accurate flow control, strong environmental adaptability and high stability, satisfies the severe demand of semiconductor, chemical industry and so on many fields waste gas treatment.

Description

Technical Field

[0001] This utility model relates to the technical field of waste gas treatment equipment, and more specifically, to a dynamic flow distribution device for multi-port waste gas treatment equipment. Background Technology

[0002] In the semiconductor industry, gases such as silane and phosphine are highly toxic and flammable. If the flow distribution is uneven during the treatment process, it may lead to excessively high local concentrations and cause safety accidents. Moreover, the waste gas composition in the chemical industry is complex, so the flow distribution device needs to be precisely adjusted according to the real-time changes of the waste gas. At the same time, in the scenario of heat energy recovery and resource utilization, the flow requirements of different waste gases vary greatly. Existing waste gas treatment equipment relies heavily on fixed structures or simple valve control for flow distribution. This makes it difficult to adapt the flow distribution devices efficiently to the complex composition and high treatment requirements of waste gases from the semiconductor and chemical industries, resulting in low heat recovery efficiency and serious resource waste. Utility Model Content

[0003] In order to overcome the above-mentioned defects of the prior art, the present invention provides a dynamic flow distribution device for multi-port exhaust gas treatment equipment to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: A dynamic flow distribution device for a multi-port exhaust gas treatment equipment includes an intake manifold, on the surface of which multiple branch pipes are provided, and on one side of the intake manifold, a flow regulating mechanism is provided. The flow regulation mechanism includes a small stepper motor fixedly installed on the surface of the intake manifold. The output end of the small stepper motor is fixedly provided with a rotating shaft. One end of the rotating shaft passes through the intake manifold and extends to the outside of the intake manifold. A support frame is fixedly provided on the surface of the intake manifold. The rotating shaft is rotatably connected to the support frame. An adjustment blade is fixedly provided on the surface of the rotating shaft. The regulating blade is made of corrosion-resistant polytetrafluoroethylene material, and the surface of the regulating blade is provided with a wear-resistant layer and multiple flow guide holes are opened on the surface of the regulating blade.

[0005] By adopting the above technical solution: a small stepper motor drives the rotating shaft and adjusting blades, and with the guide hole, the macroscopic dynamic distribution and flow direction adjustment of the waste gas flow rate are realized. The adjusting blades are made of corrosion-resistant polytetrafluoroethylene material and are equipped with a wear-resistant layer to ensure long-term stable operation in highly toxic and corrosive waste gas environments and extend service life.

[0006] As a further description of the above technical solution: a flow sensor is embedded in the surface of the branch pipe, and an electric regulating valve is fixedly installed on one side of the flow sensor; a temperature sensor is fixedly installed on one side of the electric regulating valve, and a pressure sensor is fixedly installed on one side of the temperature sensor. A controller is fixedly installed on one side of the main intake pipe, and both the main intake pipe and the branch pipe are made of Hastelloy.

[0007] By adopting the above technical solution, flow, temperature and pressure sensors are integrated on the branch pipe, and an electric regulating valve is used to build a real-time monitoring and dynamic adjustment system. This system can quickly capture changes in exhaust gas flow, temperature and pressure, providing multi-dimensional data support for precise flow control and ensuring stable exhaust gas treatment conditions.

[0008] As a further description of the above technical solution: the surfaces of the main intake pipe and the branch pipe are both provided with a ceramic coating, the ceramic coating is made of zirconium oxide coating, the wear-resistant layer is made of tungsten carbide coating, the guide hole is conical, and the diameter of the guide hole at the end near the main intake pipe is larger than the diameter of the outlet end.

[0009] By adopting the above technical solutions, it is possible to effectively resist the erosion of corrosive substances in semiconductor and chemical waste gases, further enhance the pipeline protection capability, reduce the loss of media to the pipeline, extend the overall service life of the equipment, and the guide hole adopts a conical design with the inlet diameter being larger than the outlet diameter. This structure can generate a dual effect of throttling and guiding the waste gas, optimize the flow state of the gas in the pipeline, reduce eddies and resistance, improve the uniformity and accuracy of waste gas flow distribution, and enable the device to operate efficiently under complex working conditions.

[0010] The technical effects and advantages of this utility model are as follows: 1. By setting up a flow regulation mechanism, precise flow control is achieved compared with existing technologies. A small stepper motor drives the regulating blades to change the angle, which is combined with the electric regulating valve to adjust the opening. The two work together to macroscopically distribute and precisely fine-tune the exhaust gas flow, meeting the stringent requirements of industries such as semiconductors and chemicals for exhaust gas treatment flow, ensuring treatment effect, and improving operational stability. The guide holes on the surface of the regulating blades are designed with a conical shape, which can initially throttle and guide the flow, reducing exhaust gas impact. Combined with wear-resistant and corrosion-resistant materials, it reduces component wear and enhances adaptability. The flow distribution ratio can be flexibly adjusted according to the needs of different treatment units, making it widely applicable to various scenarios such as semiconductor high-toxicity flammable gas treatment, chemical exhaust gas treatment, and heat recovery, improving the equipment's versatility and application value. 2. By incorporating flow sensors, temperature sensors, pressure sensors, and a controller, compared to existing technologies, high-precision sensors collect multi-dimensional data in real time. Flow sensors quickly capture subtle changes in flow, while temperature and pressure sensors synchronously acquire parameters, ensuring timely and accurate data and providing a reliable basis for flow regulation. Secondly, the controller has a built-in intelligent algorithm module to achieve dynamic adaptive adjustment. Finally, the cooperation between multiple sensors and the intelligent controller enhances the device's ability to cope with different scenarios such as highly toxic and flammable semiconductor gases and complex chemical waste gases, ensuring that flow distribution always matches processing needs, enhancing equipment operational stability and processing efficiency, and reducing energy consumption and safety risks. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0012] Figure 2 This is a schematic diagram of the overall rear view structure of this utility model.

[0013] Figure 3 This is a cross-sectional structural diagram of the flow regulating mechanism of this utility model.

[0014] Figure 4 This is a schematic diagram showing the detailed structure of the flow regulation mechanism of this utility model.

[0015] Figure 5 This is a schematic diagram of the overall top sectional structure of this utility model.

[0016] Figure 6 This is a schematic diagram of the overall system of this utility model.

[0017] The attached diagram is labeled as follows: 1. Main intake pipe; 2. Branch pipe; 3. Small stepper motor; 4. Shaft; 5. Support frame; 6. Adjusting blade; 7. Wear-resistant layer; 8. Guide hole; 9. Flow sensor; 10. Electric regulating valve; 11. Temperature sensor; 12. Pressure sensor; 13. Controller; 14. Ceramic coating. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] The embodiments disclosed in this application are as follows: Figure 1-6The dynamic flow distribution device of the multi-port exhaust gas treatment equipment includes an intake manifold 1, a plurality of branch pipes 2 are provided through the surface of the intake manifold 1, and a flow regulating mechanism is provided on one side of the intake manifold 1. The flow regulation mechanism includes a small stepper motor 3 fixedly installed on the surface of the intake manifold 1. A rotating shaft 4 is fixedly installed at the output end of the small stepper motor 3. One end of the rotating shaft 4 passes through the intake manifold 1 and extends to the outside of the intake manifold 1. A support frame 5 is fixedly installed on the surface of the intake manifold 1. The rotating shaft 4 is rotatably connected to the support frame 5. An adjustment blade 6 is fixedly installed on the surface of the rotating shaft 4. The regulating blade 6 is made of corrosion-resistant polytetrafluoroethylene material, and the surface of the regulating blade 6 is provided with a wear-resistant layer 7. Multiple flow guide holes 8 are opened on the surface of the regulating blade 6. Driven by the small stepper motor 3, the adjusting blade 6 adjusts the flow direction and flow distribution of the exhaust gas in the main intake pipe 1 according to the initial set angle using the surface guide hole 8. Since the guide hole 8 is conical and the diameter of the hole near the main intake pipe 1 is larger than the diameter of the outlet end, it can play a preliminary throttling and guiding role on the exhaust gas, so that the exhaust gas is initially distributed to each branch pipe 2 in the main intake pipe 1. According to the calculation results, the controller 13 sends adjustment commands to the small stepper motor 3 and the electric regulating valve 10 respectively. For the small stepper motor 3, the command controls its rotation angle, which in turn drives the rotating shaft 4 and the regulating blade 6 to rotate. By changing the angle of the regulating blade 6, the flow distribution ratio of the exhaust gas in the intake manifold 1 is adjusted. For the electric regulating valve 10, the command controls its opening size, which directly adjusts the exhaust gas flow in the branch pipe 2. After receiving the instruction, the small stepper motor 3 drives the rotating shaft 4 to rotate, causing the adjusting blade 6 to change its angle. The guide holes 8 on the surface of the adjusting blade 6 change their guiding and throttling effects on the exhaust gas, realizing the macroscopic distribution and adjustment of the exhaust gas flow rate in the main intake pipe 1 among the branch pipes 2. At the same time, the electric regulating valve 10 adjusts its opening according to the instruction to precisely fine-tune the exhaust gas flow rate in the branch pipes 2, ensuring that the flow rate in each branch pipe 2 reaches the preset value. The flow regulation mechanism is dynamically adjusted in real time to achieve continuous and accurate distribution of exhaust gas flow rate, ensuring the efficient and stable operation of the entire exhaust gas treatment process.

[0020] Reference Figure 2-3 As shown, a flow sensor 9 is embedded in the surface of the branch pipe 2, and an electric regulating valve 10 is fixedly installed on one side of the flow sensor 9; a temperature sensor 11 is fixedly installed on one side of the electric regulating valve 10, and a pressure sensor 12 is fixedly installed on one side of the temperature sensor 11. A controller 13 is fixedly installed on one side of the intake manifold 1. Both the intake manifold 1 and the branch pipe 2 are made of Hastelloy. The flow sensors 9 embedded in the surface of each branch pipe 2 begin to monitor the flow rate of the exhaust gas flowing through the branch pipe 2 in real time and transmit the flow data in the form of electrical signals. The flow sensors 9 have high-precision sensing capabilities and can quickly capture minute changes in flow rate to ensure the timeliness and accuracy of the data. Moreover, the temperature sensor 11 and pressure sensor 12 on one side of the electric regulating valve 10 work synchronously to collect the temperature and pressure parameters of the exhaust gas in real time. The temperature sensor 11 and pressure sensor 12 convert the collected temperature and pressure data into electrical signals, providing multi-dimensional data support for subsequent precise flow regulation. Meanwhile, the data collected by the flow sensor 9, temperature sensor 11 and pressure sensor 12 are transmitted through the line to the controller 13, which is fixedly installed on one side of the intake manifold 1. After receiving the data, the controller 13 uses a built-in intelligent algorithm module based on fuzzy control algorithm or neural network algorithm to comprehensively analyze and process the flow, temperature and pressure data. The algorithm will calculate the precise flow adjustment amount required by each branch pipe 2 under the current operating conditions according to the preset flow distribution scheme and the needs of each processing unit.

[0021] Reference Figure 4-5 As shown, the surfaces of the intake manifold 1 and the branch pipe 2 are both provided with a ceramic coating 14, which is made of zirconium oxide coating. The wear-resistant layer 7 is made of tungsten carbide coating. The guide hole 8 is conical, and the diameter of the guide hole 8 near the intake manifold 1 is larger than the diameter of the outlet end. Since both the main intake pipe 1 and the branch pipe 2 are made of Hastelloy and have a zirconia ceramic coating 14 on their surface, they are designed to ensure stable operation in harsh gas environments. The guide hole adopts a conical design and the diameter of the intake end is larger than that of the outlet end. This structure can have a dual effect of throttling and guiding the exhaust gas, optimizing the flow state of the gas in the pipe, reducing eddies and resistance, and improving the uniformity and accuracy of exhaust gas flow distribution, so that the device can operate efficiently under complex working conditions.

[0022] Working principle of this utility model: This utility model is a dynamic flow distribution device for a multi-port exhaust gas treatment equipment. When the device is in use, the exhaust gas to be treated enters the device from the main inlet pipe 1. Multiple branch pipes 2, which are arranged through the surface of the main inlet pipe 1, initially guide the exhaust gas to flow to different treatment units. Since the main inlet pipe 1 and the branch pipes 2 are both made of Hastelloy and have a zirconia ceramic coating 14 on their surface, they can be made to ensure stable operation in harsh gas environments. The small stepper motor 3 is connected to an external power supply. At this time, the adjusting blade 6, driven by the small stepper motor 3, adjusts the flow direction and flow distribution of the exhaust gas in the main intake pipe 1 according to the initial set angle using the surface guide hole 8. Since the guide hole 8 is conical and the diameter of the hole near the main intake pipe 1 is larger than the diameter of the outlet end, it can play a preliminary throttling and guiding role on the exhaust gas, so that the exhaust gas is initially distributed to each branch pipe 2 in the main intake pipe 1. The flow sensors 9 embedded in the surface of each branch pipe 2 begin to monitor the flow rate of the exhaust gas flowing through the branch pipe 2 in real time and transmit the flow data in the form of electrical signals. The flow sensors 9 have high-precision sensing capabilities and can quickly capture minute changes in flow rate to ensure the timeliness and accuracy of the data. Moreover, the temperature sensor 11 and pressure sensor 12 on one side of the electric regulating valve 10 work synchronously to collect the temperature and pressure parameters of the exhaust gas in real time. The temperature sensor 11 and pressure sensor 12 convert the collected temperature and pressure data into electrical signals, providing multi-dimensional data support for subsequent precise flow regulation. Meanwhile, the data collected by the flow sensor 9, temperature sensor 11 and pressure sensor 12 are transmitted through the line to the controller 13 which is fixedly installed on one side of the intake manifold 1. After receiving the data, the built-in intelligent algorithm module performs comprehensive analysis and processing of the flow, temperature and pressure data based on fuzzy control algorithm or neural network algorithm. The algorithm will calculate the precise flow adjustment amount required by each branch pipe 2 under the current operating conditions according to the preset flow distribution scheme and the needs of each processing unit. The flow sensor 9 is a Siemens SITRANS electromagnetic flow meter, the electric regulating valve 10 is a Siemens SIPART positioner matching regulating valve, the temperature sensor 11 is a Honeywell XCD temperature sensor, the pressure sensor 12 is a Siemens SITRANSP320 pressure transmitter, and the controller 13 is a Siemens S7-1200CPU. These are existing technologies and will not be described in detail in this technical solution.

[0023] According to the calculation results, the controller 13 sends adjustment commands to the small stepper motor 3 and the electric regulating valve 10 respectively. For the small stepper motor 3, the command controls its rotation angle, which in turn drives the rotating shaft 4 and the regulating blade 6 to rotate. By changing the angle of the regulating blade 6, the flow distribution ratio of the exhaust gas in the intake manifold 1 is adjusted. For the electric regulating valve 10, the command controls its opening size, which directly adjusts the exhaust gas flow in the branch pipe 2. After receiving the instruction, the small stepper motor 3 drives the rotating shaft 4 to rotate, causing the adjusting blade 6 to change its angle. The guide holes 8 on the surface of the adjusting blade 6 change their guiding and throttling effects on the exhaust gas, realizing the macroscopic distribution and adjustment of the exhaust gas flow rate in the main intake pipe 1 among the branch pipes 2. At the same time, the electric regulating valve 10 adjusts its opening according to the instruction to precisely fine-tune the exhaust gas flow rate in the branch pipes 2, ensuring that the flow rate in each branch pipe 2 reaches the preset value. The flow regulation mechanism is dynamically adjusted in real time to achieve continuous and accurate distribution of exhaust gas flow rate, ensuring the efficient and stable operation of the entire exhaust gas treatment process.

[0024] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A dynamic flow distribution device for a multi-port exhaust gas treatment equipment, comprising an intake manifold (1), characterized in that: Multiple branch pipes (2) are provided through the surface of the main intake pipe (1), and a flow regulating mechanism is provided on one side of the main intake pipe (1). The flow regulation mechanism includes a small stepper motor (3) fixedly installed on the surface of the intake manifold (1). The output end of the small stepper motor (3) is fixedly provided with a rotating shaft (4). One end of the rotating shaft (4) passes through the intake manifold (1) and extends to the outside of the intake manifold (1). A support frame (5) is fixedly provided on the surface of the intake manifold (1). The rotating shaft (4) is rotatably connected to the support frame (5). An adjustment blade (6) is fixedly provided on the surface of the rotating shaft (4). The regulating blade (6) is made of corrosion-resistant polytetrafluoroethylene material, and the surface of the regulating blade (6) is provided with a wear-resistant layer (7). Multiple flow guide holes (8) are opened on the surface of the regulating blade (6).

2. The dynamic flow distribution device for the multi-port exhaust gas treatment equipment according to claim 1, characterized in that: A flow sensor (9) is embedded in the surface of the branch pipe (2), and an electric regulating valve (10) is fixedly installed on one side of the flow sensor (9).

3. The dynamic flow distribution device for the multi-port exhaust gas treatment equipment according to claim 2, characterized in that: A temperature sensor (11) is fixedly installed on one side of the electric regulating valve (10), and a pressure sensor (12) is fixedly installed on one side of the temperature sensor (11).

4. The dynamic flow distribution device for the multi-port exhaust gas treatment equipment according to claim 1, characterized in that: A controller (13) is fixedly installed on one side of the main intake pipe (1), and both the main intake pipe (1) and the branch pipe (2) are made of Hastelloy.

5. The dynamic flow distribution device for the multi-port exhaust gas treatment equipment according to claim 1, characterized in that: The surfaces of the main intake pipe (1) and the branch pipe (2) are provided with ceramic coatings (14), which are made of zirconium oxide coatings and the wear-resistant layer (7) is made of tungsten carbide coatings.

6. The dynamic flow distribution device for the multi-port exhaust gas treatment equipment according to claim 1, characterized in that: The guide hole (8) is conical, and the diameter of the guide hole (8) at the end near the intake manifold (1) is larger than the diameter of the outlet end.

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