Aluminum nitride sintering cooling cycle device
Patent Information
- Application Number
- CN202522379769.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-10
- Publication Date
- 2026-10-27
- Estimated Expiration
- 2035-11-10
AI Technical Summary
[0005]针对现有技术的不足，本实用新型提供了氮化铝烧结降温循环装置，解决了在实际工作过程中，由于氮化铝烧结时所需工作温度较高，并且烧结炉和冷却管道的热膨胀系数差异较大，因此烧结炉和冷却管道均会出现热胀冷缩现象，这种现象可能会导致烧结炉与冷却管道出现细微的缝隙，这种缝隙会严重破坏热量传递路径，导致冷却液无法高效吸收炉体热量，从而无法对烧结完毕氮化铝进行快速降温的问题
[0012]本实用新型提供了氮化铝烧结降温循环装置。具备以下有益效果：该氮化铝烧结降温循环装置，通过连接槽、连接柱、限位杆、弹簧和抵紧座的配合，实现了冷却管道动态适配炉体形变，即使烧结炉由于热胀冷缩出现形变，冷却管道也能够保证降温效果，保证热量的传递路径，确保冷却液能够高效吸收烧结炉的热量，进而提高烧结炉内部氮化铝的冷却速度。
Smart Images
Figure CN224905705U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of aluminum nitride sintering technology, specifically to an aluminum nitride sintering cooling circulation device. Background Technology
[0002] The aluminum nitride sintering cooling circulation device is a key piece of equipment in the aluminum nitride sintering production process. It is mainly used for rapid and uniform cooling of the sintered aluminum nitride material and to realize the recycling of the cooling medium, which has the characteristics of energy saving and high efficiency.
[0003] In traditional aluminum nitride sintering cooling circulation devices, workers place the aluminum nitride raw material to be processed into the sintering furnace for processing, and cool the sintered aluminum nitride material inside the sintering furnace by circulating coolant in the cooling pipes.
[0004] However, in actual operation, due to the high operating temperature required for aluminum nitride sintering and the significant difference in the thermal expansion coefficients between the sintering furnace and the cooling pipes, both the sintering furnace and the cooling pipes will experience thermal expansion and contraction. This phenomenon may cause tiny gaps to appear between the sintering furnace and the cooling pipes. These gaps will severely disrupt the heat transfer path, preventing the coolant from efficiently absorbing the heat from the furnace body, thus making it impossible to quickly cool down the sintered aluminum nitride. Utility Model Content
[0005] To address the shortcomings of existing technologies, this invention provides a cooling circulation device for aluminum nitride sintering. This device solves the problem that, in actual operation, the high operating temperature required for aluminum nitride sintering and the significant difference in thermal expansion coefficients between the sintering furnace and cooling pipes cause thermal expansion and contraction in both. This expansion and contraction can lead to minute gaps between the sintering furnace and cooling pipes, severely disrupting the heat transfer path and preventing the coolant from efficiently absorbing heat from the furnace, thus hindering rapid cooling of the sintered aluminum nitride.
[0006] To achieve the above objectives, this utility model provides the following technical solution: an aluminum nitride sintering cooling circulation device, comprising a base plate, a sintering furnace body mounted above the base plate, a cooling pipe fitted onto the outer wall of the sintering furnace body, an outer cover fitted onto the outer layer of the cooling pipe, both ends of the cooling pipe penetrating the inner walls of the outer cover respectively, and both ends of the cooling pipe being connected to flow valves. The aluminum nitride sintering cooling circulation device further includes a clamping mechanism disposed between the cooling pipe and the outer cover; a fixing mechanism disposed on the side of the outer cover; and a buffer mechanism disposed between the sintering furnace body and the cooling pipe. The clamping mechanism brings the outer wall of the cooling pipe closer to the outer wall of the sintering furnace body, the fixing mechanism adjusts the depth of the outer cover, and the buffer mechanism protects the inner layer of the cooling pipe and the outer layer of the sintering furnace body.
[0007] Preferably, the clamping mechanism includes a connecting groove formed on the inner wall of the outer cover; a connecting column inserted into the inner wall of the connecting groove; a limiting rod fixedly connected to the inner wall of the connecting groove and inserted into the inner wall of the connecting column; a spring sleeved on the outer wall of the connecting column, with the outer wall fitting against the inner wall of the connecting groove; and a clamping seat fixedly connected to the end of the connecting column, with the side of the outer wall near the connecting groove fitting against the end of the spring. Through the cooperation between the connecting groove, connecting column, limiting rod, spring, and clamping seat, the outer wall of the cooling pipe is brought close to the outer wall of the sintering furnace body.
[0008] Preferably, the fixing mechanism includes two positioning rings, which are respectively attached to both ends of the outer cover; two fixing rings, which are respectively attached to the outer wall of the two positioning rings away from the outer cover; four connecting rods, which sequentially pass through the fixing rings, positioning rings and the inner wall of the outer cover; and four locking nuts, which are respectively threaded to the outer wall of the four connecting rods and abut against one side of the outer cover of the outer wall of one fixing ring; wherein, the depth of the outer cover is appropriately adjusted by the cooperation of the positioning rings, fixing rings, connecting rods and locking nuts.
[0009] Preferably, the buffer mechanism includes a damping pad, which is fixedly connected to the outer wall of the abutment on the side away from the connecting column, and the side of the outer wall away from the abutment is attached to the outer wall of the cooling pipe; a filling layer is sleeved on the outer wall of the sintering furnace body and attached to the side of the outer wall of the cooling pipe away from the damping pad; a heat-conducting layer is fixedly connected to the inner wall of the filling layer and sleeved on the outer wall of the sintering furnace body; wherein, through the cooperation of the damping pad, the filling layer and the heat-conducting layer, the inner layer of the cooling pipe and the outer layer of the sintering furnace body are protected.
[0010] Preferably, a connecting pipe is connected to the back of the sintering furnace body, and a heating component is connected to the end of the connecting pipe. The bottom of the heating component is fixedly connected to the top of the base plate, and a controller is provided on the front of the heating component. The bottom of the controller is fixedly connected to the top of the base plate.
[0011] Preferably, the inner wall of the heat-conducting layer is fixedly connected to a support layer, the inner wall of the support layer is fixedly connected to the outer wall of the sintering furnace body, and both ends of the support layer are fixedly connected to support seats, the bottom of the support seats is fixedly connected to the top of the base plate. Beneficial effects
[0012] This invention provides a cooling circulation device for aluminum nitride sintering. It offers the following advantages: This aluminum nitride sintering cooling circulation device, through the cooperation of a connecting groove, connecting column, limiting rod, spring, and clamping seat, achieves dynamic adaptation of the cooling pipes to furnace deformation. Even if the sintering furnace deforms due to thermal expansion and contraction, the cooling pipes can still maintain the cooling effect, ensuring the heat transfer path and guaranteeing that the coolant can efficiently absorb the heat from the sintering furnace, thereby increasing the cooling rate of the aluminum nitride inside the sintering furnace.
[0013] By using a combination of positioning rings, fixing rings, connecting rods, and locking nuts, the depth of the outer cover can be adjusted according to the depth of the sintering furnace, thus adapting to more models of sintering furnaces. This not only significantly reduces procurement costs but also improves the convenience of subsequent equipment maintenance. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the appearance of the present utility model; Figure 3 for Figure 2 Exploded view of the fixed mechanism; Figure 4 for Figure 1 A schematic diagram of the connecting groove, connecting column, and spring. Figure 5 for Figure 3 A schematic diagram of the structure of the outer and middle layers of the cover, the positioning ring, and the fixing ring.
[0015] In the diagram: 1. Base plate; 11. Sintering furnace body; 12. Connecting pipe; 13. Heating assembly; 14. Controller; 2. Cooling pipe; 21. Flow valve; 3. Outer cover; 4. Clamping mechanism; 41. Connecting groove; 42. Connecting column; 43. Limiting rod; 44. Spring; 45. Clamping seat; 5. Fixing mechanism; 51. Positioning ring; 52. Fixing ring; 53. Connecting rod; 54. Locking nut; 6. Buffering mechanism; 61. Damping pad; 62. Filling layer; 63. Heat-conducting layer; 7. Support layer; 71. Support base. Detailed Implementation
[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0017] In actual operation, due to the high operating temperature required for aluminum nitride sintering and the significant difference in the coefficients of thermal expansion between the sintering furnace and the cooling pipes, both the sintering furnace and the cooling pipes will experience thermal expansion and contraction. This phenomenon may cause tiny gaps to appear between the sintering furnace and the cooling pipes. These gaps will severely disrupt the heat transfer path, preventing the coolant from efficiently absorbing the heat from the furnace body, thus making it impossible to quickly cool down the sintered aluminum nitride.
[0018] In view of this, the present invention provides an aluminum nitride sintering cooling circulation device. This aluminum nitride sintering cooling circulation device, through the cooperation of connecting groove, connecting column, limiting rod, spring and clamping seat, realizes the dynamic adaptation of cooling pipe to furnace body deformation. Even if the sintering furnace deforms due to thermal expansion and contraction, the cooling pipe can still ensure the cooling effect, ensure the heat transfer path, and ensure that the coolant can efficiently absorb the heat of the sintering furnace, thereby improving the cooling rate of aluminum nitride inside the sintering furnace.
[0019] Those skilled in the art can connect the components in this case sequentially. The specific connection and operation sequence should refer to the working principle described below. The detailed connection methods are well-known technologies in the field. The working principle and process are mainly described below.
[0020] Example 1: By Figure 1-5 It is known that the aluminum nitride sintering cooling circulation device includes a base plate 1, a sintering furnace body 11 is arranged above the base plate 1, a cooling pipe 2 is sleeved on the outer wall of the sintering furnace body 11, an outer cover 3 is sleeved on the outer layer of the cooling pipe 2, the two ends of the cooling pipe 2 respectively penetrate the inner wall of the outer cover 3, and both ends of the cooling pipe 2 are connected to flow valves 21. The aluminum nitride sintering cooling circulation device also includes a pressing mechanism 4, a fixing mechanism 5 and a buffering mechanism 6. The pressing mechanism 4 is arranged between the cooling pipe 2 and the outer cover 3; the fixing mechanism 5 is arranged on the side of the outer cover 3; the buffering mechanism 6 is arranged between the sintering furnace body 11 and the cooling pipe 2. The pressing mechanism 4 brings the outer wall of the cooling pipe 2 close to the outer wall of the sintering furnace body 11, the fixing mechanism 5 adjusts the depth of the outer cover 3, and the buffering mechanism 6 protects the inner layer of the cooling pipe 2 and the outer layer of the sintering furnace body 11. In the specific implementation process, it is worth noting that the base plate 1 is a rectangular plate with support feet fixedly connected to its four corners. The base plate 1 can be made of alloy steel. The sintering furnace body 11 is cylindrical in shape and hollow inside. It has an openable, sealed door on the front. The material of the sintering furnace body 11 can be silicon carbide composite material. The internal details of the sintering furnace body 11 are not described in detail, as long as it meets the operational requirements. The cooling pipe 2 is wrapped around the outside of the sintering furnace body 11. The material of the cooling pipe 2 can be 316L stainless steel pipe. Multiple sets of cooling pipe 2 can be set according to actual conditions to reduce cooling dead zones. The coolant inside the cooling pipe 2 can be selected according to actual conditions, such as deionized water. The flow valve 21 is a solenoid valve. The model can be selected according to actual needs, as long as it meets the working requirements. For example, it can be a ZCGL-16P-DN25 stainless steel solenoid valve. The ends of the two flow valves 21 are connected to the external circulation structure to realize the recycling of heat. The outer cover 3 is generally similar to a circular tube. Its material can be stainless steel. A support block is fixedly connected to its bottom. The bottom of the support block is attached to the top of the base plate 1. Four circular through holes are processed on its side wall and a groove with a cross section similar to a square is connected to the four circular through holes. A sealing strip is set inside the groove. The sealing strip is four segments. When the two outer covers 3 or the outer cover 3 is connected to the fixing mechanism 5, the sealing strip can be set. The above structure can ensure that the aluminum nitride sintering cooling circulation device can operate stably. Furthermore, the clamping mechanism 4 includes a connecting groove 41, a connecting column 42, a limiting rod 43, a spring 44, and a clamping seat 45. The connecting groove 41 is formed on the inner wall of the outer cover 3; the connecting column 42 is inserted into the inner wall of the connecting groove 41; the limiting rod 43 is fixedly connected to the inner wall of the connecting groove 41 and inserted into the inner wall of the connecting column 42; the spring 44 is sleeved on the outer wall of the connecting column 42, and the outer wall is in contact with the inner wall of the connecting groove 41; the clamping seat 45 is fixedly connected to the end of the connecting column 42, and the side of the outer wall near the connecting groove 41 is in contact with the end of the spring 44; wherein, through the cooperation between the connecting groove 41, the connecting column 42, the limiting rod 43, the spring 44, and the clamping seat 45, the outer wall of the cooling pipe 2 is brought close to the outer wall of the sintering furnace body 11; In the specific implementation process, it is particularly worth noting that the connecting groove 41 has an approximately inverted T-shaped cross section, and there are a plurality of the connecting grooves, the number of which can be determined according to actual needs as long as the operation requirements are met. The connecting column 42 is a cylinder as a whole, a through hole is machined on its side wall, and it can be made of stainless steel. The number of the connecting columns 42 is the same as that of the connecting grooves 41. The limiting rod 43 is in the shape of a round rod as a whole, and the number and material of the limiting rods 43 are the same as those of the connecting columns 42. The spring 44 is made of high-temperature resistant alloy spring steel, and its elastic coefficient can be selected according to actual needs as long as the operation requirements are met. The pressing seat 45 has an approximately convex-shaped cross section, and the material and number of the pressing seats 45 are the same as those of the connecting columns 42. In actual operation, when the sintering furnace body 11 enters the high-temperature sintering stage, radial expansion of the sintering furnace body 11 occurs due to the characteristics of thermal expansion and cold contraction. At this time, the sintering furnace body 11 presses the cooling pipe 2 outwards through the buffer mechanism 6. After being pressed, the cooling pipe 2 transmits the acting force to the pressing seat 45, and the pressing seat 45 pushes the connecting column 42 to slide towards the inside of the connecting groove 41. The limiting rod 43 limits the movement of the connecting column 42, and the limiting rod 43 can prevent the cooling pipe 2 from deforming caused by excessive compression of the spring 44. The pressing seat 45 compresses the spring 44, and the reverse pressing force generated by the compression of the spring 44 counteracts the pressing force applied to the cooling pipe 2, ensuring that the cooling pipe 2 is always in close contact with the outer layer of the buffer mechanism 6. When the sintering is completed and the temperature reduction stage starts, the temperature of the sintering furnace body 11 gradually drops to room temperature, the radial dimension shrinks, and the pressing force on the cooling pipe 2 weakens. At this time, the spring 44 releases elastic potential energy to push the pressing seat 45 to move, the pressing seat 45 drives the connecting column 42 to move, and the pressing seat 45 presses against the outer wall of the cooling pipe 2, so that the cooling pipe 2 shrinks along with the sintering furnace body 11, ensuring that they are always kept in close contact, realizing dynamic adaptation to the deformation of the sintering furnace body 11, and further ensuring the cooling effect of the cooling liquid inside the cooling pipe 2; Further, the fixing mechanism 5 includes two positioning rings 51, two fixing rings 52, four connecting rods 53 and four locking nuts 54. The two positioning rings 51 are respectively attached to two ends of the outer cover 3; the two fixing rings 52 are respectively attached to the sides of the outer walls of the two positioning rings 51 away from the outer cover 3; the four connecting rods 53 all sequentially penetrate through the fixing rings 52, the positioning rings 51 and the inner wall of the outer cover 3; the four locking nuts 54 are respectively in threaded connection with the outer walls of the four connecting rods 53, and are all pressed against the side of the outer wall of one fixing ring 52 facing the outer cover 3; wherein, the depth of the outer cover 3 can be appropriately adjusted through the cooperation of the positioning rings 51, the fixing rings 52, the connecting rods 53 and the locking nuts 54; In the specific implementation process, it is worth noting that there are two positioning rings 51, each with four symmetrical circular through holes machined on its outer wall. The material of these rings can be stainless steel. There are also two fixing rings 52, made of the same material as the positioning rings 51, both with circular through holes machined on their outer walls. The fixing ring 52 located on the front of the sintering furnace body 11 has four through holes on its outer wall that are half circular and half hexagonal. These through holes on the fixing ring 52 can engage with the head end of the connecting rod 53, limiting the connection rod 53 and ensuring that its head end does not rotate within the through holes. There are four connecting rods 53, made of the same material as the positioning rings 51. One end of each rod is fixedly connected to a hexagonal prism, and the other end is machined with external threads. There are four locking nuts 54, made of the same material as the connecting rods 53, which engage with the connecting rods 53 to fix the positioning rings 51, fixing rings 52, and outer cover 3 together, creating a nearly enclosed environment to ensure heat transfer. In actual operation… When the outer cover 3 needs to be installed, the staff first takes out a sufficient length and number of outer cover 3s and fits the outer cover 3 onto the outer wall of the sintering furnace body 11. Then, the two positioning rings 51 and the two fixing rings 52 are attached to the two ends of the outer cover 3 in sequence. After that, four connecting rods 53 are taken out and corresponding to the four through holes on the outer wall of the fixing rings 52 respectively. The four connecting rods 53 are inserted into the four through holes respectively. The four connecting rods 53 pass through the fixing ring 52 at the front end of the sintering furnace body 11, the positioning ring 51 at the front end of the sintering furnace body 11, the multiple outer cover 3s and the positioning ring 51 at the end of the sintering furnace body 11 in sequence. Finally, they pass out from the fixing ring 52 at the end of the sintering furnace body 11. After that, the staff can fix the four connecting rods 53 with four locking nuts 54. This not only improves the installation speed and the convenience of installation, but also improves the adaptability of the outer cover 3, thereby providing a protective and heat-insulating barrier for the cooling pipe 2. Example 2: From Figure 1-5 It is understood that the buffer mechanism 6 includes the cooperation of a damping pad 61, a filling layer 62, and a heat-conducting layer 63. The damping pad 61 is fixedly connected to the outer wall of the abutment 45 on the side away from the connecting column 42, and the outer wall away from the abutment 45 is attached to the outer wall of the cooling pipe 2. The filling layer 62 is sleeved on the outer wall of the sintering furnace body 11 and is attached to the outer wall of the cooling pipe 2 on the side away from the damping pad 61. The heat-conducting layer 63 is fixedly connected to the inner wall of the filling layer 62 and sleeved on the outer wall of the sintering furnace body 11. The cooperation of the damping pad 61, the filling layer 62, and the heat-conducting layer 63 protects the inner layer of the cooling pipe 2 and the outer layer of the sintering furnace body 11. In the specific implementation process, it is worth noting that multiple damping pads 61 are provided, and their number can be determined according to the number of clamping seats 45. Their cross-section is similar to a 'C' shape and is snapped onto the outer wall of the cooling pipe 2. The material of the damping pad 61 can be high-temperature resistant silicone rubber. The material of the filling layer 62 can be aluminum nitride ceramic fiber cotton, and the material of the heat-conducting layer 63 can be aluminum nitride ceramic sheet. In actual operation, the damping pad 61 can absorb the impact stress between the cooling pipe 2 and the clamping seat 45, and at the same time avoid scratches on the cooling pipe 2 caused by direct friction between metals. The filling layer 62 can buffer the thermal expansion difference between the sintering furnace body 11 and the cooling pipe 2, and is of the same material as the workpiece, without impurities or contamination. The heat-conducting layer 63 is close to metal and has good insulation, which can quickly transfer the heat of the sintering furnace body 11 to the cooling pipe 2, while avoiding direct wear between the sintering furnace body 11 and the filling layer 62. This improves the service life of the cooling pipe 2 and the heat transfer effect, thereby accelerating the cooling speed. Furthermore, a connecting pipe 12 is connected to the back of the sintering furnace body 11, and a heating component 13 is connected to the end of the connecting pipe 12. The bottom of the heating component 13 is fixedly connected to the top of the base plate 1, and a controller 14 is provided on the front of the heating component 13. The bottom of the controller 14 is fixedly connected to the top of the base plate 1. In the specific implementation process, it is worth noting that the material of the connecting pipe 12 can be stainless steel. Its specific structure is set according to the actual working requirements, as long as it meets the requirements. The connecting pipe 12 is used to transfer the heat required for sintering. The heating component 13 consists of a heating element module, a temperature detection unit, a power adjustment unit, and a heat dissipation protection unit. The heating element module includes a silicon molybdenum rod and a heating tube support, which directly generates high-temperature heat, providing a core heat source of 1500-1800℃ for aluminum nitride sintering. The temperature detection unit includes an S-type thermocouple and a temperature transmitter, which monitors the sintering temperature in the furnace in real time and converts the temperature signal into an electrical signal to feed back to the controller 14. The power adjustment unit includes a thyristor power regulator, an air switch, and a contactor. According to the instructions of the controller 14, it adjusts the input power of the heating element to achieve precise temperature control and heat dissipation. The protection unit includes a cooling fan, cooling duct, and high-temperature insulated terminals to cool the power regulation unit, prevent it from burning out due to high temperature, and ensure the insulation safety of the wiring of the heating element. In actual operation, the composition of the heating component 13 includes, but is not limited to, the above structure, and can be adjusted according to the actual situation to meet the working requirements. The specific model of the controller 14 can be selected according to actual needs to meet the control requirements. For example, it can be S7-1200-CPU-1214C. In actual operation, when aluminum nitride raw materials need to be sintered, the operator connects the external power supply of the heating component 13 through the controller 14 to start and control the operation of the heating component 13, generating heat. The heat enters the interior of the sintering furnace body 11 through the connecting pipe 12 to realize the sintering operation, thus ensuring the working stability of the aluminum nitride sintering cooling circulation device. Furthermore, a support layer 7 is fixedly connected to the inner wall of the heat-conducting layer 63, and the inner wall of the support layer 7 is fixedly connected to the outer wall of the sintering furnace body 11. Support seats 71 are fixedly connected to both ends of the support layer 7, and the bottom of the support seat 71 is fixedly connected to the top of the bottom plate 1. In the specific implementation process, it is worth noting that the support layer 7 is generally similar to a circular tube, and its material can be stainless steel. It is directly fixed to the outer wall of the sintering furnace body 11. There are two support seats 71, which are made of the same material as the support layer 7. The support seats 71 are fixed to the outer wall of the support layer 7 by bolts, which plays a supporting role for the entire sintering furnace body 11 and improves the structural stability of the aluminum nitride sintering cooling circulation device. Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A cooling and circulating device for aluminum nitride sintering, comprising a base plate (1), characterized in that: A sintering furnace body (11) is provided above the base plate (1). A cooling pipe (2) is sleeved on the outer wall of the sintering furnace body (11). An outer cover (3) is sleeved on the outer layer of the cooling pipe (2). The two ends of the cooling pipe (2) pass through the inner walls of the outer cover (3) respectively. Both ends of the cooling pipe (2) are connected to flow valves (21). The aluminum nitride sintering cooling circulation device also includes: The clamping mechanism (4) is located between the cooling pipe (2) and the outer cover (3); The fixing mechanism (5) is located on the side of the outer cover (3); A buffer mechanism (6) is provided between the sintering furnace body (11) and the cooling pipe (2); The outer wall of the cooling pipe (2) is brought close to the outer wall of the sintering furnace body (11) by the clamping mechanism (4), the depth of the outer cover (3) is adjusted by the fixing mechanism (5), and the inner layer of the cooling pipe (2) and the outer layer of the sintering furnace body (11) are protected by the buffer mechanism (6).
2. The aluminum nitride sintering cooling circulation device according to claim 1, characterized in that: The clamping mechanism (4) includes: A connecting groove (41) is formed on the inner wall of the outer cover (3); The connecting post (42) is inserted into the inner wall of the connecting groove (41); The limiting rod (43) is fixedly connected to the inner wall of the connecting groove (41) and inserted into the inner wall of the connecting column (42); Spring (44) is sleeved on the outer wall of connecting post (42), and the outer wall is attached to the inner wall of connecting groove (41); The abutment (45) is fixedly connected to the end of the connecting column (42), and the side of the outer wall near the connecting groove (41) is attached to the end of the spring (44); The outer wall of the cooling pipe (2) is brought close to the outer wall of the sintering furnace body (11) through the cooperation between the connecting groove (41), connecting column (42), limiting rod (43), spring (44) and abutment seat (45).
3. The aluminum nitride sintering cooling circulation device according to claim 1, characterized in that: The fixing mechanism (5) includes: Positioning rings (51) are provided in two parts, which are respectively attached to both ends of the outer cover (3); Two fixing rings (52) are provided, which are respectively attached to the outer wall of the two positioning rings (51) on the side away from the outer cover (3); There are four connecting rods (53), which pass through the inner wall of the fixing ring (52), the positioning ring (51) and the outer cover (3) in sequence; Locking nuts (54) are provided in four types, which are threaded to the outer walls of the four connecting rods (53) respectively, and all abut against one side of the outer cover (3) of the outer wall of one of the fixing rings (52); The depth of the outer cover (3) is appropriately adjusted by the cooperation of the positioning ring (51), the fixing ring (52), the connecting rod (53) and the locking nut (54).
4. The aluminum nitride sintering cooling circulation device according to claim 2, characterized in that: The buffer mechanism (6) includes: The damping pad (61) is fixedly connected to the outer wall of the abutment (45) on the side away from the connecting column (42), and the outer wall of the pad away from the abutment (45) is attached to the outer wall of the cooling pipe (2). The filling layer (62) is fitted onto the outer wall of the sintering furnace body (11) and adheres to the side of the outer wall of the cooling pipe (2) away from the damping pad (61); The heat-conducting layer (63) is fixedly connected to the inner wall of the filling layer (62) and sleeved on the outer wall of the sintering furnace body (11); The inner layer of the cooling pipe (2) and the outer layer of the sintering furnace body (11) are protected by the cooperation of the damping pad (61), the filling layer (62) and the heat-conducting layer (63).
5. The aluminum nitride sintering cooling circulation device according to claim 1, characterized in that: The back of the sintering furnace body (11) is connected to a connecting pipe (12), and the end of the connecting pipe (12) is connected to a heating component (13). The bottom of the heating component (13) is fixedly connected to the top of the base plate (1). A controller (14) is provided on the front of the heating component (13), and the bottom of the controller (14) is fixedly connected to the top of the base plate (1).
6. The aluminum nitride sintering cooling circulation device according to claim 4, characterized in that: The inner wall of the heat-conducting layer (63) is fixedly connected to a support layer (7), the inner wall of the support layer (7) is fixedly connected to the outer wall of the sintering furnace body (11), and both ends of the support layer (7) are fixedly connected to support seats (71), the bottom of the support seats (71) is fixedly connected to the top of the base plate (1).