measuring device

Abstract

The application relates to the field of precision measurement technology and provides a measuring device, which comprises a base, a moving device, a stand and a detection device. The moving device is arranged on the base. The moving device comprises a first moving assembly and a second moving assembly. The first moving assembly is used for driving the second moving assembly to move. The second moving assembly is used for moving relative to the first moving assembly. The stand is arranged on the base. The detection device comprises a third moving assembly, a support, a lens assembly, an illumination assembly and a fourth moving assembly. The support comprises a first mounting portion, a second mounting portion and a third mounting portion. The third moving assembly is arranged between the first mounting portion and the stand. The second mounting portion is connected with the lens assembly. The third moving assembly is used for driving the lens assembly to move. The illumination assembly is arranged on one side of the lens assembly. The fourth moving assembly is connected with the illumination assembly through the third mounting portion. The fourth moving assembly is used for driving the illumination assembly to move. The measuring device improves the test efficiency.

Description

Technical Field

[0001] This application relates to the field of precision measurement technology, and more particularly to a measuring device. Background Technology

[0002] In existing measurement technologies, high-precision lenses are typically used to perform full-field imaging measurements of the workpiece. However, when the workpiece is large, achieving full-field imaging covering the entire workpiece surface in a single operation often requires manufacturing high-precision lenses with extremely large fields of view. The design and manufacturing processes of such lenses are complex, resulting in high manufacturing costs. Furthermore, the file size of a single high-resolution image of a large workpiece is enormous, placing a heavy burden on data processing and leading to low measurement efficiency. Utility Model Content

[0003] In view of this, this application provides a measurement device with high testing efficiency.

[0004] One embodiment of this application provides a measuring device. The measuring device includes: a base, a moving device, a column, and a detection device. The moving device is mounted on the base. The moving device includes a first moving component and a second moving component. The first moving component is located on the second moving component. The first moving component is used to drive the second moving component to move along a first direction. The second moving component is used to move relative to the first moving component along a second direction. The second moving component includes a support plate. The support plate is used to support the workpiece to be measured. The first direction and the second direction are perpendicular to each other. The column is mounted on the base and is located on one side of the moving device. The detection device includes a third moving component, a bracket, a lens assembly, a light illumination assembly, and a fourth moving component. The bracket includes a first mounting portion, a second mounting portion, and a third mounting portion. The third moving component is mounted between the first mounting portion and the column. The second mounting portion is connected to the lens assembly. The light illumination assembly is mounted on one side of the lens assembly. The third moving component is used to drive the lens assembly and the light illumination assembly to move along a third direction. The fourth moving component is connected to the light illumination assembly through the third mounting portion. The fourth moving component is used to move the illumination component along the third direction. Both the first and second directions are perpendicular to the third direction.

[0005] In some embodiments of this application, a moving device is provided on the base. A first moving component in the moving device drives a second moving component to move along a first direction, and the second moving component moves relative to the first moving component along a second direction. The second moving component includes a support plate. During the movement of the moving device carrying the workpiece to be tested along the support plate in the first and second directions, the lens assembly in the detection device can acquire images of the workpiece in sections, and then stitch the acquired images into a large image, which improves image processing efficiency and thus measurement efficiency. Simultaneously, a third moving component in the detection device can drive the lens assembly to move along a third direction, which facilitates better image acquisition, improves the accuracy of the acquired images, and thus improves measurement accuracy. Furthermore, during image acquisition by the lens assembly, a fourth moving component can drive the illumination assembly to move, which helps determine the uniformity of illumination on the surface of the workpiece, ensures the consistency of image grayscale, and thus improves measurement accuracy.

[0006] In some embodiments of this application, the fourth moving component includes: a first driving member, a conveyor belt assembly, and a lead screw and nut assembly, wherein one end of the conveyor belt assembly is connected to the output end of the first driving member, and the other end is connected to the lead screw drive of the lead screw and nut assembly.

[0007] In some embodiments of this application, the measuring device further includes: a first position sensor mounted on a first moving component for detecting the distance moved by the first moving component; and / or a second position sensor mounted on a second moving component for detecting the distance moved by the second moving component.

[0008] In some embodiments of this application, the first moving component includes: a fixed plate, a plurality of sliders, a first main guide rail and a first secondary guide rail. Along a first direction, the first main guide rail and the first secondary guide rail are spaced apart on the base. The first main guide rail and the first secondary guide rail are both connected to the fixed plate through the plurality of sliders. The sliders are used to drive the fixed plate to move.

[0009] In some embodiments of this application, the first moving component further includes a second driving member, which is mounted on the side of the base near the first main guide rail. The second driving member includes a first driver, a first stator, and a first mover. The first stator is mounted on the base, and the first mover is mounted on the fixed plate. The first driver is used to drive the first mover to carry the fixed plate and move it along the first direction.

[0010] In some embodiments of this application, the second moving component further includes: a second main guide rail, a second secondary guide rail, a first track adapted to the first main guide rail, and a second track adapted to the second secondary guide rail. Along a second direction, the first track and the second track are spaced apart on the fixed plate, the second main guide rail is mounted on the support plate and slidably connected to the first track, and the second secondary guide rail is mounted on the support plate and slidably connected to the second track.

[0011] In some embodiments of this application, the second moving component further includes a third driving member, which includes a second driver, a second stator, and a second mover. The second stator is mounted on the support plate, and the second mover is mounted on the fixed plate. The second driver is used to drive the second stator to carry the fixed plate and move it along the second direction.

[0012] In some embodiments of this application, the second moving component further includes: a support platform and a plurality of leveling components. The support plate has a groove on the side opposite to the fixed plate. The groove is surrounded by recesses corresponding to the plurality of leveling components. The plurality of leveling components are respectively installed in the corresponding recesses. The support platform is installed in the groove and abuts against the plurality of leveling components. The leveling components are used to support the support platform.

[0013] In some embodiments of this application, the second moving component further includes a pre-tightening member, the support platform including a fastening part and a support part, the outer side of the fastening part having a through hole, the pre-tightening member passing through the through hole for pressing the support part.

[0014] In some embodiments of this application, the measuring device further includes a clamping device, which is installed on the side of the support plate away from the base, and is used to grip and fix the workpiece to be measured. Attached Figure Description

[0015] Figure 1 This is a perspective view of a measuring device in one embodiment of this application.

[0016] Figure 2 This is a partial exploded view of the measuring device in one embodiment of this application.

[0017] Figure 3 This is a partially exploded view of another location of the measuring device in one embodiment of this application.

[0018] Figure 4 This is a partial view of a measuring device in one embodiment of this application.

[0019] Explanation of main component symbols 100-Measuring device; 10-Base; 11-Mounting slot; 20-Moving device; 21-First moving component; 210-Fixing plate; 2100-Through slot; 211-Slider; 212-First main guide rail; 213-First secondary guide rail; 214-Second driving component; 2140-First driver; 2141-First stator; 2142-First mover; 22-Second moving component; 220-Bearing plate; 2200-Groove; 2201-Recess; 221-Second main guide rail; 222-Second secondary guide rail; 223-First track; 224-Second track; 225-Third driving component; 2250-Second driver; 2251-Second stator; 2252-Second mover; 226- Support platform; 2260-Fastening part; 22600-Through hole; 2261-Supporting part; 227-Leveling part; 228-Pre-tightening part; 30-Column; 40-Detection device; 41-Third moving assembly; 42-Bracket; 420-First mounting part; 421-Second mounting part; 422-Third mounting part; 43-Lens assembly; 44-Illumination assembly; 440-Ring light source; 441-Coaxial light source; 45-Fourth moving assembly; 450-First driving component; 451-Conveyor belt assembly; 4510-First pulley; 4511-Second pulley; 4512-Conveyor belt; 452-Screw and nut assembly; 4520-Screw; 50-First position sensor; 60-Second position sensor.

[0020] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation

[0021] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0023] In existing measurement technologies, high-precision lenses are typically used for full-field imaging measurement of the workpiece. However, when the workpiece is large, achieving full-field imaging covering the entire workpiece surface in a single operation often requires the manufacture of high-precision lenses with extremely large fields of view. On the one hand, the design and manufacturing process of such lenses are complex, and to match such high-resolution lenses with extremely large fields of view, it is necessary to use ultra-large target surface image sensors with extremely small pixel sizes, resulting in high overall manufacturing costs. On the other hand, the inherent optical distortions (such as barrel distortion or pincushion distortion) of large-field lenses, especially wide-angle lenses, are very obvious at the image edges, making image distortion difficult to calibrate. At the same time, it is very difficult to ensure that the illumination of the workpiece surface is absolutely uniform throughout the large field of view. The illumination in the edge areas is usually lower than that in the center areas, which leads to inconsistent image grayscale, seriously affecting the repeatability of edge extraction and measurement, and even causing misjudgment, severely impacting the test accuracy.

[0024] In addition, the file size of a single high-resolution image of a large workpiece is enormous, resulting in huge data processing pressure and low measurement efficiency.

[0025] Therefore, to solve the above-mentioned technical problems, embodiments of this application provide a measuring device 100. A moving device 20 is provided on the base 10. A first moving component 21 in the moving device 20 drives a second moving component 22 to move along a first direction. The second moving component 22 moves relative to the first moving component 21 along a second direction. The second moving component 22 includes a support plate 220. During the movement of the moving device 20 carrying the workpiece to be measured along the support plate 220 in the first and second directions, the lens assembly 43 in the detection device 40 can acquire images of the workpiece in sections, and then stitch the acquired images into a large image, which improves image processing efficiency and thus measurement efficiency. Simultaneously, a third moving component 41 in the detection device 40 can drive the lens assembly 43 to move along a third direction, which facilitates better image acquisition, improves the accuracy of the acquired images, and thus improves measurement accuracy. Furthermore, during image acquisition by the lens assembly 43, a fourth moving component 45 can drive the illumination component 44 to move, which helps determine the uniformity of illumination on the surface of the workpiece, ensures the consistency of image grayscale, and thus improves measurement accuracy.

[0026] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0027] Please also refer to Figures 1 to 4 One embodiment of this application provides a measuring device 100. For example... Figure 1As shown, X represents the first direction, and Y represents the second direction. The measuring device 100 includes: a base 10, a moving device 20, a column 30, and a detection device 40. The moving device 20 is mounted on the base 10. The moving device 20 includes a first moving component 21 and a second moving component 22. The first moving component 21 is located on the second moving component 22. The first moving component 21 drives the second moving component 22 to move along the first direction. The second moving component 22 is used to move relative to the first moving component 21 along the second direction. The second moving component 22 includes a support plate 220. The support plate 220 is used to support the workpiece to be measured. The first direction and the second direction are perpendicular to each other. The column 30 is mounted on the base 10 and located on one side of the moving device 20. The detection device 40 includes a third moving component 41, a bracket 42, a lens assembly 43, a light illumination assembly 44, and a fourth moving component 45. The bracket 42 includes a first mounting portion 420, a second mounting portion 421, and a third mounting portion 422. The third moving component 41 is installed between the first mounting part 420 and the column 30. The second mounting part 421 is connected to the lens assembly 43. The illumination component 44 is installed on one side of the lens assembly 43. The third moving component 41 is used to move the lens assembly 43 and the illumination component 44 along a third direction. The fourth moving component 45 is connected to the illumination component 44 through the third mounting part 422. The fourth moving component 45 is used to move the illumination component 44 along a third direction. The first direction and the second direction are both perpendicular to the third direction.

[0028] In some embodiments of this application, a moving device 20 is provided on the base 10. A first moving component 21 in the moving device 20 drives a second moving component 22 to move along a first direction. The second moving component 22 moves relative to the first moving component 21 along a second direction. The second moving component 22 includes a support plate 220. During the movement of the moving device 20 carrying the workpiece to be tested along the support plate 220 in the first and second directions, the lens assembly 43 in the detection device 40 can acquire images of the workpiece in sections, and then stitch the acquired images into a large image, which improves image processing efficiency and thus measurement efficiency. Simultaneously, a third moving component 41 in the detection device 40 can drive the lens assembly 43 to move along a third direction, which facilitates better image acquisition, improves the accuracy of the acquired images, and thus improves measurement accuracy. Furthermore, during image acquisition by the lens assembly 43, a fourth moving component 45 can drive the illumination component 44 to move, which helps determine the uniformity of illumination on the surface of the workpiece, ensures the consistency of image grayscale, and thus improves measurement accuracy.

[0029] Further integration Figure 2 and Figure 3The first moving component 21 includes a fixed plate 210, a plurality of sliders 211, a first main guide rail 212, and a first secondary guide rail 213. Along a first direction X, the first main guide rail 212 and the first secondary guide rail 213 are spaced apart and mounted on the base 10. Both the first main guide rail 212 and the first secondary guide rail 213 are connected to the fixed plate 210 via the plurality of sliders 211. The sliders 211 are used to drive the fixed plate 210 to move.

[0030] In some embodiments of this application, by setting a number of sliders 211 on the fixed plate 210, that is, by connecting the sliders 211 of the first main guide rail 212 and the first secondary guide rail 213 through the fixed plate 210, linear guidance can be better achieved, the anti-overturning torque of the fixed plate 210 is increased, and the stability and smoothness of the movement of the fixed plate 210 are ensured.

[0031] Understandably, the preload of the first main guide rail 212 and the first auxiliary guide rail 213 are different. By setting different preloads for the first main guide rail 212 and the first auxiliary guide rail 213, the problem of deflection during the movement of the fixed plate 210 is avoided due to the same preload, which helps to improve the stability of the movement of the fixed plate 210.

[0032] For example, the guide rail and slider 211 are of the same model. By setting the width of the first main guide rail 212 to be greater than the width of the first secondary guide rail 213, the first main guide rail 212 can apply a greater preload force than the first secondary guide rail 213. In some other embodiments, if the width of the first main guide rail 212 is the same as the width of the first secondary guide rail 213, the gap between the first main guide rail 212 and the slider 211 is set to be smaller than the gap between the first secondary guide rail 213 and the slider 211, so that the first main guide rail 212 can apply a greater preload force than the first secondary guide rail 213.

[0033] In some embodiments of this application, the first moving component 21 further includes a second driving member 214. The second driving member 214 is mounted on the side of the base 10 near the first main guide rail 212. The second driving member 214 includes a first driver 2140, a first stator 2141, and a first mover 2142. The first stator 2141 is mounted on the base 10. The first mover 2142 is mounted on the fixed plate 210. The first driver 2140 is used to drive the first mover 2142 to carry the fixed plate 210 and move it along a first direction.

[0034] In some embodiments of this application, by mounting the second drive member 214 on the side of the base 10 close to the first main guide rail 212, the deflection torque can be reduced, ensuring the stability of the fixed plate 210 during movement.

[0035] In some embodiments of this application, the first driver 2140 can be a U-shaped coreless linear direct drive motor, the first mover 2142 can be a U-shaped linear motor mover, and the first stator 2141 can be a U-shaped linear motor stator. By mounting the U-shaped linear motor mover on the fixed plate 210 and mounting the U-shaped linear motor stator on the base 10, the U-shaped linear motor mover and the U-shaped linear motor stator maintain a gap during relative movement, eliminating contact friction. This improves the service life of the second drive component 214, and the absence of friction greatly reduces mechanical vibration caused by contact friction, making it more suitable for high-speed and high-precision drive requirements. This ensures the smoothness of the movement of the fixed plate 210, thereby improving the accuracy of the acquired images and the measurement efficiency.

[0036] In some embodiments of this application, the second moving component 22 further includes: a second main guide rail 221, a second secondary guide rail 222, a first track 223 adapted to the first main guide rail 212, and a second track 224 adapted to the second secondary guide rail 222. Along a second direction, the first track 223 and the second track 224 are spaced apart and mounted on the fixed plate 210. The second main guide rail 221 is mounted on the support plate 220 and slidably connected to the first track 223. The second secondary guide rail 222 is mounted on the support plate 220 and slidably connected to the second track 224.

[0037] In some embodiments of this application, the first track 223 and the second track 224 are mounted on the fixed plate 210. The second main guide rail 221 is mounted on the support plate 220 and slidably connected to the first track 223, and the second auxiliary guide rail 222 is mounted on the support plate 220 and slidably connected to the second track 224. That is to say, a moving mechanism is installed upside down below the support plate 220. The fixed plate 210 connects the second main guide rail 221 and the second auxiliary guide rail 222 to the first track 223 and the second track 224 respectively, which is beneficial for better linear guidance, increases the anti-overturning torque of the support plate 220, and ensures the stability and smoothness of the movement of the support plate 220.

[0038] In some embodiments of this application, the second moving component 22 further includes a third driving member 225. The third driving member 225 includes a second driver 2250, a second stator 2251, and a second mover 2252. The second stator 2251 is mounted on the support plate 220. The second mover 2252 is mounted on the fixed plate 210. The second driver 2250 is used to drive the second stator 2251 to carry the fixed plate 210 and move it along a second direction.

[0039] In some embodiments of this application, by mounting the third drive member 225 on the side of the base 10 close to the second main guide rail 221, the deflection torque can be reduced, ensuring the stability of the carrier plate 220 during movement.

[0040] In some embodiments of this application, the second driver 2250 can be a U-shaped coreless linear direct drive motor, the second mover 2252 can be a U-shaped linear motor mover, and the second stator 2251 can be a U-shaped linear motor stator. By mounting the U-shaped linear motor mover on the fixed plate 210 and mounting the U-shaped linear motor stator on the support plate 220, the U-shaped linear motor mover and the U-shaped linear motor stator maintain a gap during relative movement, eliminating contact friction. This improves the service life of the third drive component 225, and the absence of friction greatly reduces mechanical vibration caused by contact friction, making it more suitable for high-speed and high-precision drive requirements. This ensures the smooth movement of the support plate 220, thereby improving the accuracy of the acquired images and measurement efficiency.

[0041] In some embodiments of this application, the second moving assembly 22 further includes a support platform 226 and a plurality of leveling members 227. The support plate 220 has a groove 2200 on the side opposite to the fixed plate 210. The groove 2200 has recesses 2201 around its perimeter corresponding to the plurality of leveling members 227. The plurality of leveling members 227 are respectively installed in their corresponding recesses 2201. The support platform 226 is installed in the groove 2200 and abuts against the plurality of leveling members 227. The leveling members 227 support the support platform 226.

[0042] In some embodiments of this application, the leveling component 227 supports the support platform 226. If the support platform 226 is not parallel to the support plate 220, adjusting the leveling component 227 can ensure that the bearing surface of the support platform 226 is parallel to the motion plane. This helps to ensure the stability of the position of the workpiece under test, thereby improving the accuracy of the acquired image and the measurement efficiency. The motion plane refers to a surface parallel to both the first and second directions.

[0043] In some embodiments of this application, the support stage 226 can be a glass support stage 226. By using a glass support stage 226, backlighting can be achieved, which can produce a clear outline image with high contrast, ensuring imaging quality and thus improving measurement accuracy.

[0044] In some embodiments of this application, the second moving assembly 22 further includes a pre-tightening member 228. The support platform 226 includes a fastening portion 2260 and a support portion 2261. The outer surface of the fastening portion 2260 is provided with a through hole 22600. The pre-tightening member 228 passes through the through hole 22600 and is used to press against the support portion 2261.

[0045] In some embodiments of this application, when the support platform 226 is mounted on the support plate 220, there may be a gap between the support platform 226 and the fastening part 2260, which may cause the support platform 226 to be unstable. In this embodiment, by setting the pre-tightening member 228 to squeeze the support platform 226, the stability of the position of the support platform 226 is ensured.

[0046] In some embodiments of this application, the pre-tightening member 228 is made of a plastic part with moderate hardness and is embedded in the fastening part 2260. By adjusting the set screw behind the pre-tightening member 228, the pre-tightening member 228 is squeezed against the support platform 226, thereby achieving the function of pre-tightening the support platform 226.

[0047] In some embodiments of this application, both the fixing plate 210 and the supporting plate 220 are made of aluminum material that has undergone cold / heat treatment and whose surface has been finely ground. In some embodiments of this application, the materials used for the fixing plate 210 and the supporting plate 220 are not limited.

[0048] In some embodiments of this application, the measuring device 100 further includes a first position sensor 50. The first position sensor 50 is mounted on the first moving component 21. The first position sensor 50 is used to detect the distance moved by the first moving component 21.

[0049] In some embodiments of this application, by installing a first position sensor 50 on one side of the first moving component 21, the distance moved by the first moving component 21 can be monitored, thereby enabling better partitioning and image acquisition of the workpiece under test, and improving the accuracy of the acquired images.

[0050] In some embodiments of this application, the first position sensing element 50 may include a first grating ruler and / or a first position sensor. The first grating ruler includes a first ruler strip and a first reading head. The first ruler strip is mounted on the side of the fixing plate 210 near the first main guide rail 212. The first reading head is mounted on the side of the base 10 near the first main guide rail 212. Since both the first ruler strip and the first reading head are close to the side of the first main guide rail 212, the difference between the drive, guide, and feedback (obtaining position values ​​from the measuring mechanism) is greatly reduced, improving the positioning accuracy of the measured motion. The first position sensor is mounted on the side of the base 10 near the first main guide rail 212, greatly reducing the difference between the drive, guide, and feedback (obtaining position values ​​from the measuring mechanism), and improving the positioning accuracy of the measured motion.

[0051] In some embodiments of this application, the measuring device 100 further includes a second position sensor 60. The second position sensor 60 is mounted on the second moving component 22. The second position sensor 60 is used to detect the distance moved by the second moving component 22.

[0052] In some embodiments of this application, the second position sensing element 60 may include a second grating ruler and / or a second position sensor. The second grating ruler includes a second ruler strip and a second reading head. The second ruler strip is mounted on the side of the support plate 220 near the second main guide rail 221. The second reading head is mounted on the side of the fixing plate 210 near the second main guide rail 221. Since both the second ruler strip and the second reading head are close to the side of the second main guide rail 221, the difference between the drive, guide, and feedback (obtaining position values ​​from the measuring mechanism) is greatly reduced, improving the positioning accuracy of the measured motion. The second position sensor is mounted on the side of the fixing plate 210 near the second main guide rail 221, greatly reducing the difference between the drive, guide, and feedback (obtaining position values ​​from the measuring mechanism), and improving the positioning accuracy of the measured motion.

[0053] In some embodiments of this application, the measuring device 100 further includes a clamping device 70. The clamping device 70 is mounted on the side of the support plate 220 away from the base 10. The clamping device 70 is used to grip and fix the workpiece to be measured.

[0054] In some embodiments of this application, there are many types of workpieces to be measured, and some workpieces need to be fixed before measurement can be performed. In this embodiment, the clamping device 70 can hold the workpiece to be measured to ensure the stability of the position of the workpiece.

[0055] Further integration Figure 4 As shown, the fourth moving assembly 45 includes: a first drive member 450, a conveyor belt assembly 451, and a lead screw and nut assembly 452. One end of the conveyor belt assembly 451 is connected to the output end of the first drive member 450. The other end of the conveyor belt assembly 451 is drively connected to the lead screw 4520 of the lead screw and nut assembly 452.

[0056] In some embodiments of this application, the conveyor belt assembly 451 includes a first pulley 4510 connected to the output end of the first drive member 450. A second pulley 4511 is spaced apart from the first pulley 4510. The second pulley 4511 is connected to a lead screw 4520. The conveyor belt 4512 covers the outer periphery of the first pulley 4510 and the second pulley 4511 and is tensioned by both the first pulley 4510 and the second pulley 4511.

[0057] In some embodiments of this application, the illumination component 44 is driven by the combination of the first driving component 450, the conveyor belt assembly 451 and the lead screw and nut assembly 452. The first driving component 450 does not need to be directly connected to the illumination component 44 that needs to move, so that the placement of the first driving component 450 is not affected by the illumination component 44. In this embodiment, by placing the first driving component 450 on the bracket 42, the overall space utilization of the measuring device 100 is greatly optimized.

[0058] In some embodiments of this application, the illumination component 44 includes a ring light source 440 and / or a coaxial light source 441. The ring light source 440 and / or the coaxial light source 441 work together to illuminate the workpiece under test, ensuring the uniformity of illumination on the workpiece under test and thus improving the accuracy of detection.

[0059] In some embodiments of this application, since the support platform 226 is a glass support platform 226, the coaxial light source 441 can be used to eliminate its own reflection on the glass surface, thus preventing the lens assembly 43 from capturing the reflected image of the light source itself.

[0060] In some embodiments of this application, the measuring device 100 further includes a backlight source 80. A mounting groove 11 is provided on the side of the base 10 near the moving device 20. The backlight source 80 is installed in the mounting groove 11. A through groove 2100 is provided on the fixing plate 210, and the first through groove 2100, the mounting groove 11, and the recess 2200 are connected. The backlight source 80 can be a parallel profile light source, which can emit light through the glass support stage 226 onto the workpiece to be measured. This is beneficial for providing the highest accuracy, unambiguous, and stable profile information of the workpiece to be measured, while being insensitive to defects in the support stage 226 itself, thereby improving the accuracy of the measurement.

[0061] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described with reference to the embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and substance of the technical solutions of this application.

Claims

1. A measuring device, characterized in that, The measuring device includes: Base; A moving device is mounted on the base. The moving device includes a first moving component and a second moving component. The first moving component is located on the second moving component. The first moving component is used to drive the second moving component to move along a first direction. The second moving component is used to move relative to the first moving component along a second direction. The second moving component includes a support plate for supporting the workpiece to be measured. The first direction and the second direction are perpendicular to each other. A column is mounted on the base and located on one side of the mobile device; The detection device includes a third moving component, a support, a lens assembly, a lighting assembly, and a fourth moving component. The support includes a first mounting portion, a second mounting portion, and a third mounting portion. The third moving component is installed between the first mounting portion and the column. The second mounting portion is connected to the lens assembly. The lighting assembly is installed on one side of the lens assembly. The third moving component is used to drive the lens assembly and the lighting assembly to move along a third direction. The fourth moving component is connected to the lighting assembly through the third mounting portion. The fourth moving component is used to drive the lighting assembly to move along the third direction. The first direction and the second direction are both perpendicular to the third direction.

2. The measuring device according to claim 1, characterized in that, The fourth moving component includes: a first driving member, a conveyor belt assembly, and a lead screw and nut assembly. One end of the conveyor belt assembly is connected to the output end of the first driving member, and the other end is connected to the lead screw drive of the lead screw and nut assembly.

3. The measuring device according to claim 1, characterized in that, The measuring device also includes: A first position sensor is mounted on a first moving component for detecting the distance the first moving component moves; and / or a second position sensor is mounted on a second moving component for detecting the distance the second moving component moves.

4. The measuring device according to claim 1, characterized in that, The first moving component includes: a fixed plate, a plurality of sliders, a first main guide rail and a first secondary guide rail. Along a first direction, the first main guide rail and the first secondary guide rail are spaced apart on the base. The first main guide rail and the first secondary guide rail are both connected to the fixed plate through the plurality of sliders. The sliders are used to drive the fixed plate to move.

5. The measuring device according to claim 4, characterized in that, The first moving component further includes a second driving member, which is mounted on the side of the base near the first main guide rail. The second driving member includes a first driver, a first stator, and a first mover. The first stator is mounted on the base, and the first mover is mounted on the fixed plate. The first driver is used to drive the first mover to carry the fixed plate and move it along the first direction.

6. The measuring device according to claim 4, characterized in that, The second moving component further includes: a second main guide rail, a second secondary guide rail, a first track adapted to the first main guide rail, and a second track adapted to the second secondary guide rail. Along the second direction, the first track and the second track are spaced apart on the fixed plate, the second main guide rail is mounted on the support plate and slidably connected to the first track, and the second secondary guide rail is mounted on the support plate and slidably connected to the second track.

7. The measuring device according to claim 6, characterized in that, The second moving component further includes a third driving member, which includes a second driver, a second stator, and a second mover. The second stator is mounted on the support plate, and the second mover is mounted on the fixed plate. The second driver is used to drive the second stator to carry the fixed plate and move it along the second direction.

8. The measuring device according to claim 4, characterized in that, The second moving component further includes: a support platform and a plurality of leveling components. The support platform has a groove on the side opposite to the fixed plate. The groove is surrounded by recesses corresponding to the plurality of leveling components. The plurality of leveling components are respectively installed in the corresponding recesses. The support platform is installed in the groove and abuts against the plurality of leveling components. The leveling components are used to support the support platform.

9. The measuring device according to claim 8, characterized in that, The second moving component also includes: The pre-tightening component, the bearing platform includes a fastening part and a bearing part, the outer side of the fastening part is provided with a through hole, the pre-tightening component passes through the through hole and is used to compress the bearing part.

10. The measuring device according to any one of claims 1 to 9, characterized in that, The measuring device also includes: A clamping device is installed on the side of the bearing plate away from the base, and the clamping device is used to grip and fix the workpiece to be tested.

Images