Infrared-based tube target straightness detector

Abstract

The utility model discloses a kind of tube target straightness detector based on infrared, including rack, mandrel and infrared probe, the mandrel is installed on the rack, the mandrel extends along the rack length direction, the infrared probe is installed on the mandrel, the rack is equipped with shaping assembly and the rotating wheel component for driving tube target to rotate around its own axis, the shaping assembly includes fixed frame, cylinder and shaping ram, the fixed frame is fixedly installed in the middle of the rack, the rotating wheel component includes fixed rotating wheel group and movable rotating wheel group, the beneficial effects of the utility model are as follows: with movable rotating wheel group and fixed rotating wheel group drive tube target to rotate around its own axis, at the same time, movable rotating wheel group is displaced along the rack length direction via transmission device. Movable rotating wheel group drives tube target to move synchronously in moving process, that is, tube target realizes self-rotation and moves along the rack length direction. In this way, infrared probe in tube target can detect larger range.

Description

Technical Field

[0001] This utility model relates to the field of testing equipment technology, and in particular to a tube target straightness tester based on infrared light. Background Technology

[0002] Coating targets are sputtering sources used to form various functional thin films on substrates through magnetron sputtering, multi-arc ion plating, or other types of coating systems under appropriate process conditions. Simply put, the target material is the material bombarded by high-speed charged particles. In high-energy laser weapons, different power densities, output waveforms, and wavelengths of laser light interact with different targets, producing different destructive effects. For example, evaporation magnetron sputtering coating involves heated evaporation to coat aluminum films. By changing different target materials (such as aluminum, copper, stainless steel, titanium, and nickel targets), different film systems (such as ultra-hard, wear-resistant, and corrosion-resistant alloy films) can be obtained.

[0003] A search revealed a Chinese utility model patent (authorization announcement number: CN204788279U0) that provides a device for detecting the straightness of a sputtering rotating target, including a mandrel, an infrared probe, Teflon support wheels, and a digital display. A digital display is installed at one end of the mandrel, and an infrared probe is installed in the middle of the mandrel. Teflon support wheels are respectively mounted on both sides of the infrared probe on the mandrel. The Teflon support wheels drive the target to rotate, and the infrared probe on the mandrel detects the inner diameter of the target's inner wall, thereby achieving the function of straightness detection.

[0004] However, existing technologies have the following drawbacks: they can only perform straightness testing on a single area of ​​the target, resulting in a relatively narrow measurement range. Furthermore, when the target's straightness is found to be non-compliant, it is difficult to quickly implement repairs, making it impossible to accurately locate the areas requiring repair during subsequent maintenance. Therefore, this deficiency urgently needs to be addressed. Utility Model Content

[0005] The purpose of this invention is to address the above-mentioned problems. This invention provides an infrared-based tube target straightness detector, which has the advantages of a large tube target detection range and timely maintenance.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an infrared-based tube target straightness detector, comprising a frame, a mandrel, and an infrared probe. The mandrel is mounted on the frame and extends along the length of the frame. The infrared probe is mounted on the mandrel. The frame is equipped with a shaping assembly and a rotating wheel assembly for driving the tube target to rotate around its own axis. The shaping assembly includes a fixed frame, a cylinder, and a shaping pressure head. The fixed frame is fixedly mounted in the middle of the frame. The cylinder is mounted on the fixed frame. The shaping pressure head is mounted on the output end of the cylinder, with the cylinder output end perpendicularly facing the frame. The infrared probe is located on the movement trajectory of the shaping pressure head. The rotary wheel assembly includes a fixed rotary wheel group and a movable rotary wheel group. The fixed rotary wheel group and the movable rotary wheel group are respectively arranged on both sides of the infrared probe along the length direction of the frame. A transmission device for driving the movable rotary wheel group is installed on the frame. The movable rotary wheel group moves along the length direction of the frame through the transmission device. The infrared probe is electrically connected to the transmission device and the cylinder.

[0007] Preferably, the movable wheel assembly includes a first connecting plate, two first wheel frames, and a first motor. The first motor is fixedly mounted on the first connecting plate, the first connecting plate is mounted on the transmission device, and both first wheel frames are fixedly mounted on the upper surface of the first connecting plate. Each first wheel frame has a first wheel rotatably mounted on it, and one of the first wheels is mounted on the output end of the first motor. The fixed wheel assembly includes a second connecting plate, two second wheel frames, and a second motor. The second motor is fixedly mounted on the second connecting plate, and the second connecting plate is fixedly mounted on the frame. Both second wheel frames are fixedly mounted on the upper surface of the second connecting plate, and a second wheel is rotatably mounted on each of the second wheel frames. One of the second wheel frames is mounted on the output end of the second motor. The axes of the first and second rotating wheels both extend along the length of the frame.

[0008] Preferably, the frame is provided with a slide rail extending along the length of the frame, the first connecting plate is provided with a slider corresponding to the slide rail, the transmission device includes a third motor and a lead screw fixedly installed on the frame, the lead screw is driven and installed at the output end of the third motor, the lead screw extends along the length of the frame, and the bottom of the first connecting plate is provided with a lead screw slider that cooperates with the lead screw.

[0009] Preferably, both the first connecting plate and the second connecting plate are provided with a lifting mechanism, each lifting mechanism is equipped with a fixed plate, each fixed plate has a third wheel frame installed on its lower surface, and each third wheel frame has a pressure wheel rotatably installed on it, with the pressure wheel located above the first rotating wheel and the second rotating wheel.

[0010] Preferably, the lifting mechanism includes a fixed cylinder and a sliding rod, wherein the fixed cylinder is provided with a groove extending along the height direction, and the sliding rod is slidably engaged in the groove.

[0011] Preferably, a spring is connected between the bottom of the groove of the fixed cylinder mounted on the first connecting plate and the bottom of the sliding rod, and the spring always has the tendency to pull the sliding rod downward.

[0012] Preferably, a bracket is mounted on the frame, and the mandrel is fixedly mounted on the bracket.

[0013] Preferably, a display screen is mounted on the bracket, and the display screen is electrically connected to the infrared probe.

[0014] Preferably, the bottom of the frame is provided with a plurality of support feet, each support foot including a support block and an adjusting rod, the adjusting rod being threaded into the support block.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: This invention provides an infrared-based tube target straightness detector. A movable and fixed rotating wheel assembly drives the tube target to rotate around its own axis. Simultaneously, the movable wheel assembly moves along the length of the frame via a transmission device. During this movement, the movable wheel assembly synchronously moves the tube target, allowing it to rotate and move along the frame's length. This allows the infrared probe inside the tube target to detect a wider area. When a location is detected where straightness does not meet requirements, a cylinder drives a shaping pressure head to reshape the corresponding position on the tube target, enabling timely reshaping of the target. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a top view of the structure of this utility model; Figure 3 This is a cross-sectional structural diagram of the present invention from a first-view perspective. Figure 4 This is a cross-sectional structural diagram of the present invention from a second perspective.

[0017] Figure Descriptions: 1. Frame; 2. Mandrel; 21. Infrared Probe; 22. Bracket; 23. Display Screen; 31. Fixing Frame; 32. Cylinder; 33. Shaping Press Head; 41. First Connecting Plate; 411. Lead Screw Slider; 412. Slider; 42. First Wheel Frame; 43. First Rotating Wheel; 44. First Motor; 45. Second Connecting Plate; 46. Second Wheel Frame; 47. Second Rotating Wheel; 48. Second Motor; 51. Fixing Cylinder; 52. Sliding Rod; 53. Fixing Plate; 54. Third Wheel Frame; 55. Pressure Roller; 56. Spring; 61. Third Motor; 62. Lead Screw; 63. Slide Rail; 7. Support Foot; 71. Adjusting Rod; 72. Support Block. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] like Figures 1-4 As shown, an infrared-based tube target straightness detector includes a frame 1, a spindle 2, and an infrared probe 21. The spindle 2 is mounted on the frame 1 and extends along the length of the frame 1. The infrared probe 21 is mounted at the end of the spindle 2 and is located above the middle of the frame 1. The frame 1 is equipped with a shaping assembly and a wheel assembly for driving the tube target to rotate around its own axis. The shaping assembly includes a fixed frame 31, a cylinder 32, and a shaping pressure head 33. The fixed frame 31 is fixedly mounted in the middle of the frame 1. The cylinder 32 is mounted on the upper end of the fixed frame 31. The shaping pressure head 33 is mounted on the output end of the cylinder 32. The output end of the cylinder 32 is perpendicular to the frame 1, and the infrared probe 21 is located on the movement trajectory of the shaping pressure head 33. The rotating wheel assembly includes a fixed rotating wheel group and a movable rotating wheel group. The fixed rotating wheel group and the movable rotating wheel group are respectively arranged on both sides of the infrared probe 21 along the length direction of the frame 1. A transmission device for driving the movable rotating wheel group to move is installed on the frame 1. The movable rotating wheel group moves along the length direction of the frame 1 through the transmission device.

[0020] It should be noted that the infrared probe 21 is electrically connected to the transmission device and the cylinder 32.

[0021] The movable wheel assembly includes a first connecting plate 41, two first wheel frames 42, and a first motor 44. The first motor 44 is fixedly mounted on the first connecting plate 41, and the first connecting plate 41 is mounted on the transmission device. Both first wheel frames 42 are fixedly mounted on the upper surface of the first connecting plate 41, and each first wheel frame 42 has a first wheel 43 rotatably mounted on it. One of the first wheels 43 is mounted on the output end of the first motor 44. The fixed wheel assembly includes a second connecting plate 45, two second wheel frames 46, and a second motor 48. The second motor 48 is fixedly mounted on the second connecting plate 45, and the second connecting plate 45 is fixedly mounted on the frame 1. Both second wheel frames 46 are fixedly mounted on the upper surface of the second connecting plate 45. A second wheel 47 is rotatably mounted on each of the second wheel frames 46, and one of the second wheel 47 is mounted on the output end of the second motor 48. The axes of the first rotating wheel 43 and the second rotating wheel 47 both extend along the length direction of the frame 1.

[0022] The infrared probe 21 is electrically connected to the first motor 44 and the second motor 48.

[0023] By placing the target tube on two first rotating wheels 43 and two second rotating wheels 47, the first motor 44 drives the first rotating wheel 43 to rotate and the second motor 48 drives the second rotating wheel 47 to rotate, thereby causing the target tube to rotate around its own axis.

[0024] The frame 1 is provided with a slide rail 63 extending along the length of the frame 1. The first connecting plate 41 is provided with a slider 412 corresponding to the slide rail 63. The slider 412 and the slide rail 63 cooperate to achieve the guiding function. The transmission device includes a third motor 61 and a lead screw 62 fixedly installed on the frame 1. The lead screw 62 is driven and installed at the output end of the third motor 61. The lead screw 62 extends along the length of the frame 1, and the bottom of the first connecting plate 41 is provided with a lead screw slider 411 that cooperates with the lead screw 62.

[0025] The first connecting plate 41 and the second connecting plate 45 are both provided with lifting mechanisms. Each lifting mechanism is equipped with a fixed plate 53. A third wheel frame 54 is installed on the lower surface of each fixed plate 53. A pressure wheel 55 is rotatably installed on each third wheel frame 54. The pressure wheel 55 is located above the first rotating wheel 43 and the second rotating wheel 47.

[0026] In this application, the first connecting plate 41 and the second connecting plate 45 are each provided with two sets of lifting mechanisms. The two pressure rollers 55 on the first connecting plate 41 are respectively located above the corresponding first rotating roller 43, and the two pressure rollers 55 on the second connecting plate 45 are respectively located above the corresponding second rotating roller 47. There is a gap between the two fixed plates 53 on the first connecting plate 41 and between the two fixed plates 53 on the second connecting plate 45 for the shaping pressure head 33 to pass through.

[0027] The lifting mechanism includes a fixed cylinder 51 and a sliding rod 52. The fixed cylinder 51 has a groove extending along the height direction. The sliding rod 52 is slidably engaged in the groove. A spring 56 is connected between the bottom of the groove of the fixed cylinder 51, which is mounted on the first connecting plate 41, and the bottom of the sliding rod 52. The spring 56 always has the tendency to pull the sliding rod 52 downward.

[0028] Since the fixed cylinder 51 on the first connecting plate 41 contains a spring 56, the pressure roller 55 on the first connecting plate 41 can press against the tube target, so that the tube target will not move axially when it is located above the first connecting plate 41.

[0029] Since there is no spring force between the fixed cylinder 51 and the sliding rod 52 on the second connecting plate 45, the tube target does not receive axial pressure at this point. Therefore, the tube target can move relative to itself along its own axis above the second rotating wheel 47. The pressure wheel 55 on the second connecting plate 45 is used to prevent the tube target from shifting its position during rotation.

[0030] A bracket 22 is mounted on the frame 1, and the spindle 2 is fixedly mounted on the bracket 22. A display screen 23 is mounted on the bracket 22. The display screen 23 is electrically connected to the infrared probe 21. The infrared probe 21 measures the distance, and the distance measurement signal is displayed digitally on the display screen 23.

[0031] The bottom of the frame 1 is provided with several support feet 7, each of which includes a support block 72 and an adjusting rod 71, and the adjusting rod 71 is threaded into the support block 72.

[0032] In this application, the first rotating wheel 43, the second rotating wheel 47, and the pressure wheel 55 are all filter elements with Teflon outer sleeves.

[0033] The specific operating process is as follows: The mandrel 2 is inserted into the target tube, and the target tube is placed on the first rotating wheel 43 and the second rotating wheel 47. The position of the target tube is restricted by the pressure roller 55. Then, the first motor 44 and the second motor 48 are started, causing the first rotating wheel 43 and the second rotating wheel 47 to rotate, driving the target tube to rotate around its own axis. An infrared probe 21 measures the distance to the inner wall of the target tube. The third motor 61 drives the lead screw slider 411 to move, thereby causing the first connecting plate 41, the first rotating wheel 43, and the pressure roller 55 on the first connecting plate 41 to move synchronously. The target tube... While rotating, the infrared probe moves along the length of the frame 1, thus enabling the infrared probe 21 to detect most of the inner wall area of ​​the tube target. When a position where the straightness does not meet the requirements is detected, the first motor 44, the second motor 48, and the third motor 61 all stop outputting. At this time, the cylinder 32 starts, thereby driving the shaping head 33 to move downward to press and shape the tube target, thereby achieving the function of shaping the tube target. After the shaping is completed, the cylinder 32 closes, the shaping head 33 rises and resets, and the first motor 44, the second motor 48, and the third motor 61 continue to start.

[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0035] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An infrared-based tube target straightness detector, comprising a frame (1), a spindle (2), and an infrared probe (21), wherein the spindle (2) is mounted on the frame (1) and extends along the length of the frame (1), and the infrared probe (21) is mounted on the spindle (2), characterized in that: The frame (1) is equipped with a shaping component and a rotating wheel assembly for driving the tube target to rotate around its own axis. The shaping component includes a fixed frame (31), a cylinder (32) and a shaping head (33). The fixed frame (31) is fixedly installed in the middle of the frame (1). The cylinder (32) is installed on the fixed frame (31). The shaping head (33) is installed at the output end of the cylinder (32). The output end of the cylinder (32) is perpendicular to the frame (1), and the infrared probe (21) is located on the movement trajectory of the shaping head (33). The rotating wheel assembly includes a fixed rotating wheel group and a movable rotating wheel group. The fixed rotating wheel group and the movable rotating wheel group are respectively arranged on both sides of the infrared probe (21) along the length direction of the frame (1). A transmission device for driving the movable rotating wheel group is installed on the frame (1). The movable rotating wheel group moves along the length direction of the frame (1) through the transmission device. The infrared probe (21) is electrically connected to the transmission device and the cylinder (32).

2. The infrared-based tube target straightness detector according to claim 1, characterized in that: The movable wheel assembly includes a first connecting plate (41), two first wheel frames (42) and a first motor (44). The first motor (44) is fixedly mounted on the first connecting plate (41), and the first connecting plate (41) is mounted on the transmission device. Both first wheel frames (42) are fixedly mounted on the upper surface of the first connecting plate (41). Each first wheel frame (42) has a first wheel (43) rotatably mounted on it, and one of the first wheels (43) is mounted on the output end of the first motor (44). The fixed wheel assembly includes a second connecting plate (45), two second wheel frames (46) and a second motor (48). The second motor (48) is fixedly installed on the second connecting plate (45), and the second connecting plate (45) is fixedly installed on the frame (1). The two second wheel frames (46) are both fixedly installed on the upper surface of the second connecting plate (45). A second wheel (47) is rotatably installed on each of the second wheel frames (46), and one of the second wheels (47) is installed at the output end of the second motor (48). The axes of the first rotating wheel (43) and the second rotating wheel (47) both extend along the length direction of the frame (1).

3. The infrared-based tube target straightness detector according to claim 2, characterized in that: The frame (1) is provided with a slide rail (63) extending along the length of the frame (1), and the first connecting plate (41) is provided with a slider (412) corresponding to the slide rail (63). The transmission device includes a third motor (61) and a lead screw (62) fixedly installed on the frame (1). The lead screw (62) is driven and installed at the output end of the third motor (61). The lead screw (62) extends along the length of the frame (1), and the bottom of the first connecting plate (41) is provided with a lead screw slider (411) cooperating with the lead screw (62).

4. A tube target straightness detector based on infrared light according to claim 2 or 3, characterized in that: The first connecting plate (41) and the second connecting plate (45) are both provided with lifting mechanisms. The lifting mechanisms are all equipped with fixed plates (53). The lower surface of the fixed plates (53) is equipped with third wheel frames (54). The third wheel frames (54) are all rotatably equipped with pressure wheels (55). The pressure wheels (55) are all located above the first rotating wheel (43) and the second rotating wheel (47).

5. The infrared-based tube target straightness detector according to claim 4, characterized in that: The lifting mechanism includes a fixed cylinder (51) and a sliding rod (52). The fixed cylinder (51) has a groove extending along the height direction, and the sliding rod (52) is slidably engaged in the groove.

6. The infrared-based tube target straightness detector according to claim 5, characterized in that: A spring (56) is connected between the bottom of the groove of the fixed cylinder (51) mounted on the first connecting plate (41) and the bottom of the sliding rod (52). The spring (56) always has the tendency to pull the sliding rod (52) downward.

7. The infrared-based tube target straightness detector according to claim 1, characterized in that: A bracket (22) is installed on the frame (1), and the spindle (2) is fixedly installed on the bracket (22).

8. The infrared-based tube target straightness detector according to claim 7, characterized in that: A display screen (23) is mounted on the bracket (22), and the display screen (23) is electrically connected to the infrared probe (21).

9. The infrared-based tube target straightness detector according to claim 1, characterized in that: The bottom of the frame (1) is provided with several support feet (7), each of the support feet (7) includes a support block (72) and an adjusting rod (71), and the adjusting rod (71) is threaded into the support block (72).

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