Energy measuring device and laser apparatus

Abstract

The application provides an energy measuring device and a laser device. The energy measuring device comprises an energy meter and a light adjusting assembly. The energy meter can receive and measure the light beam emitted after being adjusted by the light adjusting assembly. The light adjusting assembly comprises an attenuation sheet, a focusing mirror and a scattering sheet. The attenuation sheet and the scattering sheet are arranged along the transmission direction of the light beam, and the focusing mirror is arranged on the light path of the light beam. The energy measuring device adjusts the energy size by the attenuation sheet to avoid sensor overload or signal loss, compresses the dynamic divergent light spot by the focusing mirror to prevent energy leakage, and optimizes the energy distribution of the Gaussian light spot by the scattering sheet to reduce the measurement deviation. The three work together to realize stable and accurate measurement of the dynamic laser beam and break through the limitation of static measurement.

Description

Technical Field

[0001] This application belongs to the field of optical equipment technology, and in particular relates to an energy measurement device and a laser device. Background Technology

[0002] With the rapid iteration of laser technology and the deep expansion of its industrial applications, laser processing, with its core advantages of high precision, high efficiency, and low damage, has become a key process in the manufacturing of precision electronic components such as PCBs (printed circuit boards) and FPCs (flexible printed circuit boards). In the processing stages of PCB drilling, cutting, and etching, the energy stability of the laser beam directly determines the processing accuracy, circuit conductivity, and product yield.

[0003] The electronics manufacturing industry is constantly demanding miniaturization, high density, and flexibility in circuit boards, driving the development of laser processing equipment towards high dynamics and high speeds. During processing, the laser beam often operates through dynamic scanning and continuous movement. However, current laser energy measurement devices are only suitable for energy detection scenarios involving static laser beams, relying on fixed optical paths and static spot receiving structures, and cannot adapt to the propagation characteristics and spot variation patterns of dynamic laser beams. Utility Model Content

[0004] The purpose of this application is to provide an energy measurement device and a laser device, which aims to solve the technical problem that current energy measurement devices cannot adapt to dynamic laser beams.

[0005] The embodiments of this application are implemented as follows: Firstly, an energy measurement device is provided, including an energy meter and a dimming assembly. The energy meter is capable of receiving and measuring a light beam emitted after being adjusted by the dimming assembly. The dimming assembly includes an attenuator, a focusing lens, and a scattering sheet. The attenuator and the scattering sheet are arranged along the transmission direction of the light beam, and the focusing lens is disposed in the optical path of the light beam.

[0006] In one possible scenario of the first aspect, the attenuator, the focusing lens, and the diffuser are arranged sequentially at intervals along the transmission direction of the light beam.

[0007] In one possible scenario of the first aspect, the energy measuring device further includes a mirror mount mounted on the energy meter, and the dimming assembly mounted on the mirror mount.

[0008] In one possible scenario of the first aspect, the incident end of the energy meter is provided with a window, the mirror mount is arranged around the window, the mirror mount is provided with a through-hole, and the attenuator, the focusing lens and the scattering plate are all disposed within the through-hole.

[0009] In one possible aspect of the first aspect, the lens mount includes a first mount, a second mount, and a third mount that are detachably connected sequentially along the transmission direction of the light beam. The third mount is detachably connected to the energy meter. The first mount is disposed around the attenuator and forms a first aperture. The second mount is disposed around the focusing lens and forms a second aperture. The third mount is disposed around the diffuser and forms a third aperture. The first aperture, the second aperture, and the third aperture together form the light-transmitting aperture.

[0010] In one possible aspect of the first aspect, the energy measuring device further includes a mounting base on which the energy meter is mounted, the mounting base being used for mounting to an external structural component.

[0011] In one possible aspect of the first aspect, the fixing base includes a first fixing plate, a second fixing plate, and a connecting plate. The first fixing plate includes a first fixing part and a first bending part arranged at an angle. The second fixing plate includes a second fixing part and a second bending part arranged at an angle. The first bending part is connected to the second bending part, and a clearance space is formed between the first fixing part and the second fixing part. The second fixing part is used to connect with an external structural component. The connecting plate is connected between the energy meter and the first fixing part and is used to adjust the position of the energy meter.

[0012] In one possible scenario of the first aspect, at least some of the corners of the fixing base are chamfered.

[0013] In a second aspect, a laser device is provided, comprising a laser and an energy measuring device as described in any of the above possibilities, wherein the laser is used to emit the light beam toward the energy measuring device.

[0014] In a second aspect, the laser device may further include a beam splitter capable of splitting the laser beam emitted from the laser into two optical paths with different emission directions, and the energy measuring device is located on one of the optical paths.

[0015] The technical advantages of this embodiment compared to the prior art are as follows: This energy measurement device avoids sensor overload or signal loss by adjusting the energy level with an attenuator, prevents energy leakage by compressing the dynamically diverging light spot with a focusing lens, and reduces measurement deviation by optimizing the Gaussian light spot energy distribution with a scattering plate. These three factors work together to achieve stable and accurate measurement of the dynamic laser beam, overcoming the limitations of static measurement. Simultaneously, this energy measurement device also reduces the wear and tear on the energy meter sensor from high-power lasers through power reduction by pre-positioning the attenuator and graded protection by dispersing energy with the scattering plate, thereby reducing maintenance costs and extending the device's lifespan. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments of this application or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of the energy meter provided in the embodiments of this application; Figure 2 This is a three-dimensional structural diagram of the energy measurement device provided in the embodiments of this application; Figure 3 This is a cross-sectional view of the energy measuring device provided in the embodiments of this application.

[0018] Explanation of reference numerals in the attached figures: 100. Energy measuring device; 10. Energy meter; 11. Energy sensor; 101. Window; 20. Dimming assembly; 21. Attenuator; 22. Diffuser; 23. Focusing lens; 30. Lens mount; 31. First mount; 32. Second mount; 33. Third mount; 301. Light-transmitting hole; 3011. First hole; 3012. Second hole; 3013. Third hole; 40. Fixing base; 41. First fixing plate; 411. First fixing part; 412. First bending part; 42. Second fixing plate; 421. Second fixing part; 422. Second bending part; 43. Connecting plate; 401. Chamfer; 40a. Clearance space; 91. Laser; 92. Beam splitter; 93. Reflector; 94. Galvanometer; 95. Workpiece to be processed. Detailed Implementation

[0019] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application. In the description of this application, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified. In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0020] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments.

[0021] This application provides a laser device; please refer to [link / reference]. Figure 1 The laser device includes a laser 91 and an energy measuring device 100. The laser 91 is capable of emitting a laser beam, and the energy measuring device 100 is used to receive all or part of the laser beam to measure the energy value of the laser pulse or continuous laser output within a specific time period.

[0022] Laser equipment includes, but is not limited to, laser processing equipment (such as laser drilling machines, laser cutting machines, laser marking machines, laser welding machines, etc.), laser surgical equipment (such as excimer laser therapy devices, laser beauty devices, etc.), and laser measuring equipment (such as laser spectrometers, laser interferometers, laser velocimeters, etc.). For laser processing and laser surgical equipment, the measurement optical path can be separated from the processing or surgical optical path by methods such as beam splitting, off-axis guidance, or time-division switching, ensuring that the main laser beam is not blocked, thus achieving laser beam emission. For laser measuring equipment, the laser beam can be completely absorbed and not emitted.

[0023] In this embodiment, a laser processing device is used as an example for description. Please refer to [link to relevant documentation]. Figure 1The laser device also includes a beam splitter 92, a reflector 93, and a galvanometer 94. The beam splitter 92 splits the laser beam output from the laser 91 into two optical paths with different transmission directions. One optical path is transmitted to the energy measurement device 100, and the other optical path continues to the reflector. The reflector can change the transmission direction of the laser beam so that the laser beam is accurately directed to the galvanometer 94. The galvanometer 94 can control the scanning trajectory of the laser beam through high-speed rotating mirrors, so that the laser beam can realize complex two-dimensional processing paths on the workpiece 95, such as drilling paths, cutting paths, and etching paths. The energy measurement device 100 can measure the laser energy in real time to ensure the stability of the laser energy during the laser processing, thereby ensuring the processing quality of the circuit board.

[0024] For other laser devices, only a beam splitter 92 is included. This beam splitter 92 can use one of the split beam paths for energy measurement, and the other beam path for laser operation, such as surgery or other parameter measurement. Of course, if real-time energy detection of the laser beam is not required, the beam splitter 92 can be omitted, and the entire beam can be directly directed to the energy measurement device 100. After the measurement is completed, the entire beam can then be directed to the workpiece. Alternatively, if energy detection of the laser beam is not required, the beam splitter 92 can be omitted, and the entire beam can be directly directed to the workpiece. There are no restrictions here.

[0025] The electronics manufacturing industry is constantly demanding miniaturization, high density, and flexibility of circuit boards, driving the development of laser processing equipment towards high dynamics and high speeds. During processing, the laser beam often operates through dynamic scanning and continuous movement. However, current laser energy measurement devices 100 are only suitable for energy detection scenarios involving static laser beams, relying on fixed optical paths and static spot receiving structures, and cannot adapt to the propagation characteristics and spot change patterns of dynamic laser beams.

[0026] To address the aforementioned problems, this application provides an energy measurement device 100. Please refer to [link to relevant documentation]. Figure 1 and Figure 2 The energy measuring device 100 includes an energy meter 10 and a dimming assembly 20. Both the dimming assembly 20 and the energy meter 10 are disposed in the optical path of the laser beam output from the laser 91 and arranged along the propagation direction of the laser beam. After being split by the beam splitter 92, the laser beam can be directed towards the energy meter 10 after passing through the dimming assembly 20.

[0027] Please combine Figure 3The energy meter 10 is capable of receiving and measuring the emitted laser beam after it has been adjusted by the dimming component 20. Specifically, the energy meter 10 includes a housing, a laser energy sensor 11, and a controller. The housing has a mounting cavity and a window 101 communicating with the mounting cavity. The energy sensor 11 and the controller are both disposed within the mounting cavity and are communicatively connected. The energy sensor 11 is positioned opposite the window 101 to receive the laser energy signal incident through the window 101 and converts the received laser energy signal into a measurable electrical signal. The controller can calculate the energy of the laser beam based on the electrical signal. A light-transmitting dustproof sheet may be provided at the window 101 to prevent external dust or impurities from entering the mounting cavity.

[0028] The dimming assembly 20 is used to adjust the incident laser beam so that the energy and propagation pattern of the laser beam directed towards the energy meter 10 are adjusted to the effective measurement range of the energy meter 10. Specifically, the dimming assembly 20 includes an attenuator 21, a focusing lens 23, and a scattering plate 22. The attenuator 21 and the scattering plate 22 are arranged along the transmission direction of the laser beam, that is, the attenuator 21 is placed before the scattering plate 22, and the laser beam passes through the attenuator 21 first and then the scattering plate 22. The focusing lens 23 is placed in the optical path of the laser beam. At this time, the focusing lens 23 can be placed after the scattering plate 22, that is, the setting order of the dimming assembly 20 is attenuator 21, scattering plate 22, and focusing lens 23; it can also be placed before the attenuator 21, that is, the setting order of the dimming assembly 20 is focusing lens 23, attenuator 21, and scattering plate 22; or it can be placed between the attenuator 21 and the scattering plate 22, that is, the setting order of the dimming assembly 20 is attenuator 21, focusing lens 23, and scattering plate 22. There is no limitation here. It should be noted that the terms "before", "after", and "between" mentioned above refer to the sequential order in which the laser beam passes through the optical path.

[0029] The attenuator 21 is used to precisely adjust the energy of the dynamic laser beam to the effective measurement range of the energy meter 10 sensor, preventing damage to the equipment due to excessive laser beam energy exceeding the sensor's tolerance threshold. The scattering plate 22 can uniformly diffuse the energy concentrated at the center of the spot through scattering, transforming it into a flat-topped spot with a gentle energy distribution, reducing the energy difference between the edge and center of the spot during dynamic movement, reducing the deviation between the waveform collected by the energy meter 10 and the actual energy, and improving the reliability of the measurement data. The focusing lens 23 is used to spatially focus and shape the laser beam that is prone to divergence during dynamic propagation, compressing the continuously moving dynamic spot within the effective receiving aperture of the energy meter 10, avoiding energy leakage caused by spot offset and divergence, and ensuring that the laser beam can be completely captured by the energy meter 10 regardless of whether it is in a high-speed scanning or continuous movement state.

[0030] The energy measurement device 100 achieves stable and accurate measurement of the dynamic laser beam by using an attenuator 21 to adjust the energy level and prevent sensor overload or signal loss, a focusing lens 23 to compress the dynamically diverging light spot and prevent energy leakage, and a scattering plate 22 to optimize the energy distribution of the Gaussian light spot and reduce measurement deviation. This overcomes the limitations of static measurement. Furthermore, the energy measurement device 100 uses the attenuator 21 to pre-position the power and the scattering plate 22 to provide graded protection against energy dispersion, reducing the wear and tear on the energy meter 10 sensor from high-power lasers, lowering maintenance costs, and extending the device's lifespan.

[0031] Depending on the position of the focusing lens 23, it can be applied to three different scenarios.

[0032] In one implementation, the focusing lens 23, attenuator 21, and diffuser 22 are arranged sequentially and at intervals along the beam emission direction. This arrangement is suitable for scenarios where the laser beam has high divergence during dynamic scanning (such as the spot diameter rapidly expanding with the propagation distance, commonly seen in high-speed scanning laser drilling and irregular contour cutting of flexible circuit boards). In such cases, the focusing lens 23 needs to prioritize calibrating the laser beam shape to prevent local overload caused by uneven energy distribution when the divergent spot passes through the attenuator 21. The focusing lens 23, positioned in front, can first compress the divergent dynamic spot into a regular circular spot, ensuring that the subsequent attenuator 21 can adjust the power of the uniform spot, preventing local ablation of the attenuator 21, and providing a stable basis for the energy homogenization of the diffuser 22.

[0033] As another embodiment therein, please refer to Figure 3 The attenuator 21, focusing lens 23, and diffuser 22 are arranged sequentially and at intervals along the beam emission direction. This arrangement is suitable for scenarios where the laser beam power is at a medium level (e.g., power between 100-500W, commonly used for printed circuit board etching and thin substrate cutting) and the divergence is moderate (the diameter of the light spot changes gradually during propagation). It is necessary to balance the order of "energy adjustment" and "shape calibration." Therefore, the laser power needs to be reduced to a safe range first by the attenuator 21, then the light spot shape is optimized by the focusing lens 23, and finally the energy is homogenized by the diffuser 22. Positioning the focusing lens 23 in the middle position avoids direct impact from high-power lasers on it, while ensuring that the focused light spot is fully homogenized by the diffuser 22, reducing energy fluctuations during dynamic scanning.

[0034] In another implementation, the attenuator 21, the diffuser 22, and the focusing lens 23 are arranged sequentially and at intervals along the beam emission direction. This arrangement is suitable for scenarios with high laser beam power (e.g., power greater than 500W, commonly used in cutting thick printed circuit boards and drilling holes in ceramic substrates). The attenuator 21 is used to reduce the power first, and the diffuser 22 disperses the energy peak before focusing the homogenized beam. This prevents the high energy density from directly affecting the focusing lens 23 and causing coating ablation. The focusing lens 23 is positioned at the rear, receiving the low-energy-density beam after attenuation and scattering. This ensures that the beam spot completely enters the receiving aperture of the energy meter 10 through focusing, while also preventing damage to the focusing lens 23 due to excessive energy, thus extending the lifespan of the optical components.

[0035] For ease of description, in the following embodiments, the focusing lens 23 is positioned between the attenuator 21 and the diffuser 22 (e.g., Figure 3 Let's take an example to illustrate.

[0036] Understandably, please refer to Figure 2 and Figure 3 The energy measurement device 100 also includes a mirror mount 30, which is mounted on the energy meter 10, and the dimming component 20 is mounted on the mirror mount 30. In this way, the dimming component 20 can be integrated with the energy meter 10 via the mirror mount 30, simplifying the overall installation process of the energy measurement device 100. It eliminates the need for a separate, independent fixing structure for the dimming component 20, reducing assembly complexity and space occupation, and is particularly suitable for the compact layout environment inside laser processing equipment. Secondly, the dimming component 20 and the energy meter 10 form a stable integrated structure via the mirror mount 30, effectively preventing displacement of the dimming component 20 caused by equipment vibration during dynamic laser processing. This ensures that the attenuator 21, focusing lens 23, and scattering plate 22 are always on the precise optical path of the laser beam, reducing measurement errors caused by optical path deviation and ensuring the stability of energy detection.

[0037] Optionally, the lens mount 30 can be detachably connected to the energy meter 10 to facilitate subsequent maintenance operations. When it is necessary to replace the components in the dimming assembly 20 (such as wear of the attenuator 21 or cleaning of the focusing lens 23), the dimming assembly 20 can be removed as a whole by disassembling the lens mount 30 without having to adjust the position of the energy meter 10 separately, thus reducing maintenance difficulty and time costs.

[0038] Understandably, please refer to Figure 3A mirror mount 30 is arranged around the window 101, and a through-hole 301 is provided inside the mirror mount 30. The through-hole 301 is located in the optical path, and the attenuator 21, focusing lens 23, and diffuser 22 are all disposed within the through-hole 301. The arrangement of the mirror mount 30 around the window 101 ensures that the through-hole 301 is precisely aligned with the window 101. The attenuator 21, focusing lens 23, and diffuser 22 form a coaxial optical path with the window 101 through the through-hole 301, which can minimize the optical path deviation of the dynamic laser beam during transmission. This ensures that the laser beam, after being adjusted by the dimming component 20, can accurately pass through the window 101 and enter the energy sensor 11 in the mounting cavity, avoiding energy loss or measurement deviation caused by optical path misalignment, and significantly improving detection accuracy. In addition, the dimming component 20 is built into the light-transmitting hole 301 of the lens mount 30. The lens mount 30 is used to stabilize and fix the attenuator 21, focusing lens 23 and diffuser 22, preventing the components from shifting due to dynamic processing vibration. The combined protection of the outer shell and the lens mount 30 prevents dust and oil in the processing environment from directly contacting the dimming component 20 and the energy sensor 11, effectively extending the service life of the components.

[0039] Optionally, the lens mount 30 includes a first mount 31, a second mount 32, and a third mount 33 that are detachably connected in sequence. The third mount 33 is detachably connected to the energy meter 10. The first mount 31 is disposed around the attenuator 21 and forms a first aperture 3011. The second mount 32 is disposed around the focusing lens 23 and forms a second aperture 3012. The third mount 33 is disposed around the diffuser 22 and forms a third aperture 3013. The first aperture 3011, the second aperture 3012, and the third aperture 3013 together form the light-transmitting aperture 301 of the lens mount 30. In this way, the three dimming elements—attenuator 21, focusing lens 23, and diffuser 22—can be installed in a single, fixed mounting. Each mounting is detachable from the others. When a dimming element (such as attenuator 21 worn or focusing lens 23 with damaged coating) needs replacement or maintenance, it is not necessary to disassemble the entire mounting 30 or energy meter 10; only the corresponding mounting needs to be disassembled. This significantly reduces maintenance difficulty and time costs, and avoids optical path calibration deviations caused by overall disassembly. Furthermore, the detachable connection structure allows for flexible adjustment of the dimming element arrangement. If the position of focusing lens 23 needs to be changed according to the laser processing scenario, only the connection order of the first mounting 31, the second mounting 32, and the third mounting 33 needs to be adjusted to quickly switch the arrangement of attenuator 21, focusing lens 23, and diffuser 22 without redesigning the entire mounting 30 structure, significantly improving the device's adaptability to different dynamic laser processing scenarios.

[0040] As an alternative implementation, the difference from the above implementation is that at least one of the first mounting portion 31, the second mounting portion 32, and the third mounting portion 33 can be independently set. The independently set mounting portion can be installed on other structural components to facilitate adjustment of the distance between the independent mounting portion and other mounting portions, or between the independent mounting portion and the energy meter 10. For example, when the laser beam wavelength changes, causing a change in focusing requirements, the second mounting portion 32 (which mounts the focusing lens 23) can be independently installed on an external adjustment bracket to adjust its distance from the first mounting portion 31 (which mounts the attenuator 21) and the third mounting portion 33 (which mounts the diffuser 22), thereby optimizing the focusing effect to adapt to the propagation characteristics of different wavelength lasers. Similarly, in high-power laser scenarios, when it is necessary to increase the distance between the attenuator 21 and the diffuser 22 to avoid energy superposition affecting component lifespan, the first mounting portion 31 or the third mounting portion 33 can be independently installed on other structural components to achieve flexible adjustment of the distance. This design can also adapt to the complex spatial layout inside laser processing equipment. When space is limited in some areas and the entire mirror mount 30 cannot be accommodated, specific mounting portions can be independently installed on available structural components.

[0041] Understandably, please refer to Figure 2 and Figure 3 The energy measurement device 100 also includes a mounting base 40, on which the energy meter 10 is mounted. The mounting base 40 can be used for installation with external structural components. The mounting base 40 provides a stable mounting carrier for the energy meter 10. Through reliable connection with external structural components (such as the frame of the laser processing equipment or the optical path support), it can effectively prevent the energy meter 10 from shifting due to equipment vibration during dynamic laser processing, ensuring that the energy meter 10 and structures such as the dimming component 20 and the beam splitter 92 always maintain a precise optical path alignment, preventing incomplete laser beam reception or measurement deviation caused by the offset of the energy meter 10, and ensuring the stability and accuracy of energy detection. In addition, the setting of the mounting base 40 allows for flexible adjustment of the installation position of the energy meter 10. According to the actual optical path layout of the laser processing equipment and the installation dimensions of the external structural components, the connection position between the mounting base 40 and the external structural components can be adjusted to achieve precise positioning of the energy meter 10, adapting to the installation requirements of different models of laser processing equipment and improving the versatility of the device.

[0042] Optionally, the mounting base 40 includes a first mounting plate 41 and a second mounting plate 42. The first mounting plate 41 includes a first mounting portion 411 and a first bent portion 412 arranged at an angle, forming an L-shape. The second mounting plate 42 includes a second mounting portion 421 and a second bent portion 422 arranged at an angle, forming an L-shape. The first bent portion 412 and the second bent portion 422 overlap and are detachably connected, so that the first mounting plate 41 and the second mounting plate 42 form an N-shaped structure. At this time, the first mounting portion 411 and the second mounting portion 421 are spaced apart, forming a clearance space 40a between them. The energy meter 10 is installed on the side of the first mounting portion 411 away from the second mounting portion 421. The second mounting portion 421 can be detachably connected to an external structural component. The clearance space 40a formed by the mounting base 40 can accommodate the internal pipelines, other components, or reserved operating space of the laser equipment, effectively adapting to the complex and compact layout environment inside the laser equipment, avoiding interference between the mounting base 40 and surrounding structures, and improving the compatibility of device installation. Furthermore, the detachable connection between the first bending portion 412 and the second bending portion 422 allows for flexible adjustment of the distance and relative angle between the first fixing portion 411 and the second fixing portion 421 according to the size of the energy meter 10 and the installation position of the external structural components. This ensures precise alignment of the optical path between the energy meter 10 and the dimming component 20 after installation, and also adapts to the connection requirements of different types of external structural components, enhancing installation flexibility. The detachable connection methods between the second fixing portion 421 and the external structural components include, but are not limited to, screw connections, welding, snap-fitting, and sleeve connections. The included angle between the first fixing portion 411 and the first bending portion 412 can be 90°, and the included angle between the second fixing portion 421 and the second bending portion 422 can also be 90°, but is not limited to this.

[0043] Optionally, if the propagation direction of the laser beam is taken as the horizontal direction, the first fixing part 411 and the second fixing part 421 are arranged in the vertical direction to raise the energy meter 10. The propagation direction of the laser beam can be defined as the X-axis direction, the direction perpendicular to the ground can be defined as the Z-axis direction, and the direction perpendicular to both the X-axis and Z-axis can be defined as the Y-axis direction.

[0044] Optionally, one of the first bent portion 412 and the second bent portion 422 is provided with a first strip-shaped hole, which extends along the Z-axis direction, while the other is provided with a first fixing hole. The first bent portion 412 and the second bent portion 422 are connected by a screw passing through the first strip-shaped hole and the first fixing hole. It can be understood that the first bent portion 412 may have a first strip-shaped hole, and the second bent portion 422 may have a first fixing hole; alternatively, the second bent portion 422 may have a first strip-shaped hole, and the first bent portion 412 may have a first fixing hole, with the screw passing through the first strip-shaped hole and screwed into the first fixing hole; or, the screw passing through the first strip-shaped hole and the first fixing hole may be screwed into a nut. The first bent portion 412 and the second bent portion 422 can be moved closer or further apart by adjusting the position of the screw in the first strip-shaped hole, thus enabling the energy meter 10 to move in the Z-axis direction.

[0045] Optionally, one of the first bent portion 412 and the second bent portion 422 is provided with a second strip-shaped hole, which can extend along the Y-axis direction, and the other is provided with a second fixing hole. The first bent portion 412 and the second bent portion 422 are connected by a screw passing through the second strip-shaped hole and the second fixing hole. It can be understood that the second strip-shaped hole can be provided on the first bent portion 412 and the second fixing hole can be provided on the second bent portion 422, or the second strip-shaped hole can be provided on the second bent portion 412 and the second fixing hole can be provided on the first bent portion 412, with the screw passing through the second strip-shaped hole and screwed into the second fixing hole; or the screw passes through the second strip-shaped hole and the second fixing hole and is screwed into the nut. In this way, the first fixed portion 411 can be moved relative to the second fixed portion 421 in the Y-axis direction by adjusting the position of the screw in the second strip-shaped hole, thus realizing the movement of the energy meter 10 in the Y-axis direction.

[0046] Understandably, please refer to Figure 2 and Figure 3The mounting base 40 also includes a connecting plate 43, which is installed between the energy meter 10 and the first mounting plate 41 and is used to adjust the position of the energy meter 10 relative to the second mounting plate 42. This adjustment includes, but is not limited to, fine-tuning the energy meter 10's position in the front-back, left-right, up-down, or angular directions. In this way, the energy measuring device 100 achieves multi-dimensional position adjustment of the energy meter 10 through the connecting plate 43. On the one hand, it can accurately adapt to the optical path calibration requirements under different dynamic laser processing scenarios. For example, when the focusing lens 23 adjusts its arrangement due to scene changes, the position of the energy meter 10 can be fine-tuned through the connecting plate 43 to ensure that the window 101 of the energy meter 10 and the light-transmitting hole 301 of the dimming component 20 always remain coaxially aligned, avoiding the laser beam not being fully incident on the sensor due to optical path misalignment, thus ensuring energy detection accuracy. On the other hand, the adjustment function of the connecting plate 43 reduces the accuracy requirements during the installation of the energy meter 10 and the mounting base 40, eliminating the need for precise positioning at once and allowing subsequent adjustments to compensate for installation errors, thus improving assembly efficiency. Meanwhile, when faced with differences in the external structure or changes in the optical path layout of different models of laser processing equipment, there is no need to redesign the structure of the fixed base 40. It can be adapted simply by adjusting the position of the energy meter 10 through the connecting plate 43, which greatly improves the versatility and reusability of the device and reduces the cost of equipment modification.

[0047] Optionally, when one of the first bent portion 412 and the second bent portion 422 has a first strip-shaped hole and the other has a first fixing hole, one of the connecting plate 43 and the first fixing portion 411 may have a third strip-shaped hole extending along the Y-axis, and the other may have a third fixing hole. The connecting plate 43 and the first fixing portion 411 can be connected by screws passing through the third strip-shaped hole and the third fixing hole. It can be understood that the connecting plate 43 may have a third strip-shaped hole, and the first fixing portion 411 may have a third fixing hole; alternatively, the first fixing portion 411 may have a third strip-shaped hole, and the connecting plate 43 may have a third fixing hole, with the screw passing through the third strip-shaped hole and screwed into the third fixing hole; or, the screw passing through the third strip-shaped hole and the third fixing hole may be screwed into a nut. The connecting plate 43 and the first fixing part 411 can be moved relative to the first fixing part 411 in the Y-axis direction by adjusting the position of the screw in the third strip hole, thus realizing the movement of the energy meter 10 in the Y-axis direction.

[0048] Understandably, at least some of the corners of the mounting base 40 are chamfered. This chamfering effectively eliminates sharp edges, preventing accidental hand or body injuries to installers when adjusting the position of the energy meter 10 or fixing the mounting base 40 to external structural components. It reduces installation obstacles, significantly lowers safety risks during operation, improves device safety, and makes installation and maintenance smoother, increasing operational efficiency. Furthermore, the chamfering provides some protection to the corners of the mounting base 40, preventing deformation and paint chipping due to impacts during transportation or equipment vibration, extending the service life of the mounting base 40, and maintaining its neat appearance, indirectly improving the overall durability and aesthetics of the device.

[0049] Chamfers can be provided on the first fixing plate 41, or chamfers can be provided on both the first fixing plate 41 and the second fixing plate 42. The position of the chamfer can be set according to the area most easily contacted during operation, such as the edge of the first fixing part 411 facing the second fixing part 421, or the circumferential edge of the second fixing part 421.

[0050] As an alternative implementation, the energy meter 10 can be adjusted bidirectionally in both the Z and Y axes using only the connecting base, with the positions of the first fixing plate 41 and the second fixing plate 42 fixed. In this case, the connecting base can also achieve adjustment in the Y-axis direction through the cooperation of the third slotted hole and the third fixing hole, and the energy meter 10 can be adjusted in the Z-axis direction through the threaded connection of the screw to the energy meter 10 and the sliding connection between the energy meter 10 and the fixing base 40 in the Z-axis direction.

[0051] As another alternative implementation, the connector may not have an adjustment function for the energy meter 10, but may only serve as a connection structure between the energy meter 10 and the first fixing plate 41. In this case, a connector with an appropriate thickness can be selected for installation according to the setting position of the energy meter 10.

[0052] It should be noted that the energy measuring device 100 can be applied not only to laser equipment, but also to other equipment, and can detect other non-laser beams, such as beams formed by non-laser strong light, infrared light, etc. There are no restrictions here.

[0053] The above are merely preferred embodiments of this application, and only specifically describe the technical principles of this application. These descriptions are only for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application, as well as other specific embodiments of this application that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of this application.

Claims

1. An energy measuring device, characterized in that, The device includes an energy meter and a dimming assembly. The energy meter is capable of receiving and measuring the light beam emitted after being adjusted by the dimming assembly. The dimming assembly includes an attenuator, a focusing lens, and a diffuser. The attenuator and the diffuser are arranged along the transmission direction of the light beam, and the focusing lens is disposed in the optical path of the light beam.

2. The energy measuring device as described in claim 1, characterized in that, The attenuator, the focusing lens, and the scattering plate are arranged sequentially at intervals along the transmission direction of the light beam.

3. The energy measuring device as described in claim 1, characterized in that, The energy measuring device also includes a mirror mount, which is mounted on the energy meter, and the dimming component is mounted on the mirror mount.

4. The energy measuring device as described in claim 3, characterized in that, The energy meter has a window at its incident end, and the mirror mount is arranged around the window. The mirror mount has a through-hole for light transmission, and the attenuator, the focusing lens, and the scattering plate are all arranged in the through-hole.

5. The energy measuring device as described in claim 4, characterized in that, The lens mount includes a first base, a second base, and a third base that are detachably connected in sequence along the transmission direction of the light beam. The third base is detachably connected to the energy meter. The first base is disposed around the attenuator and forms a first aperture. The second base is disposed around the focusing lens and forms a second aperture. The third base is disposed around the scattering plate and forms a third aperture. The first aperture, the second aperture, and the third aperture together form the light-transmitting aperture.

6. The energy measuring device as described in claim 1, characterized in that, The energy measuring device also includes a mounting base, on which the energy meter is mounted, and the mounting base is used to connect to an external structural component.

7. The energy measuring device as described in claim 6, characterized in that, The fixing base includes a first fixing plate, a second fixing plate, and a connecting plate. The first fixing plate includes a first fixing part and a first bending part arranged at an angle. The second fixing plate includes a second fixing part and a second bending part arranged at an angle. The first bending part and the second bending part are connected, and a clearance space is formed between the first fixing part and the second fixing part. The second fixing part is used to connect with an external structural component. The connecting plate is connected between the energy meter and the first fixing part and is used to adjust the position of the energy meter.

8. The energy measuring device as described in claim 6, characterized in that, The fixing base has chamfered edges at at least some of its corners.

9. A laser device, characterized in that, It includes a laser and an energy measuring device as described in any one of claims 1 to 8, wherein the laser is used to emit the light beam toward the energy measuring device.

10. The laser device as described in claim 9, characterized in that, The laser device also includes a beam splitter, which can split the laser beam emitted from the laser into two optical paths with different emission directions, and the energy measuring device is located on one of the optical paths.

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