A detecting device of silicon strain gauge-glass micro-fusion pressure sensor
Patent Information
- Application Number
- CN202522299849.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-30
- Publication Date
- 2026-10-27
- Estimated Expiration
- 2035-10-30
AI Technical Summary
现有技术中大都采用功能单一的设备进行分项测试，检测压力时使用压力校准器，检测温漂需要单独使用高低温试验箱，由人工操作并记录数据，手动连接线缆费时费力，存在测试效率低下，人工读数、录入有误差的缺点，单项测试覆盖不全面，不能实现多应力状态的综合测试
[0005]本实用新型工作时，连接测试装置，将待测试的压力传感器通过夹具夹持固定在高低温试验箱内，夹具通过连接管路与压力控制器相连接，待测压力传感器通过数据传输线束与控制系统电连接，在检测过程中由控制系统对每个待测压力传感器的输出信号进行存储记录并计算标准值，控制高低温试验箱的温度可以实现在不同温度下对待测压力传感器进行压力测试。与现有技术相比，本实用新型的有益效果在于：第一，本装置温度控制方便，可以在不同温度、压力下对硅应变片-玻璃微熔压力传感器的气密性、压力响应进行测试，也可以同时控制温度与压力，对硅应变片-玻璃微熔压力传感器进行多应力状态的综合测试，测试结果直接传输至控制系统进行存储、分析与计算，可快速得出受检压力传感器的测试结果，提高检测效率。第二，本装置的连接管路中设置了多个压力表和压力计，便于检测系统管路中压力是否均衡，在系统出现漏气时可以便于检修。第三，本装置结构简单，管路连接简便，在生产完即可完成待测压力传感器的组装与测试，节省了向外部检测机构送检的时间及费用成本。
Smart Images
Figure CN224906197U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sensor detection technology, and in particular to a detection device for a silicon strain gauge-glass micro-melting pressure sensor. Background Technology
[0002] Silicon strain gauge-glass micro-fusion pressure sensors sense pressure by bonding a piezoresistive resistor to a stainless steel diaphragm through high-temperature sintering. When there is gas or liquid pressure on the other side of the stainless steel diaphragm, the diaphragm undergoes a slight deformation, causing a corresponding change in the piezoresistive resistor sintered on the diaphragm. This technology is one of the mainstream technologies in the mid-to-high-end pressure sensor market today, characterized by high stability, high reliability, and a wide operating temperature range. It is widely used in automotive, industrial control, and aerospace fields. After production, performance tests such as hermeticity and pressure response need to be performed. Current technologies mostly use single-function equipment for individual tests. Pressure testing uses a pressure calibrator, and temperature drift testing requires a separate high and low temperature test chamber. Data is recorded manually, and manually connecting cables is time-consuming and labor-intensive, resulting in low testing efficiency, errors in manual reading and data entry, incomplete single-item testing coverage, and an inability to achieve comprehensive testing under multiple stress conditions. Utility Model Content
[0003] The purpose of this invention is to overcome the deficiencies in the prior art and provide a detection device for a silicon strain gauge-glass micro-melting pressure sensor, which enables rapid, accurate and comprehensive performance testing of the silicon strain gauge-glass micro-melting sensor, thereby improving detection efficiency.
[0004] The purpose of this utility model is achieved as follows: A testing device for a silicon strain gauge-glass micro-melting pressure sensor includes a high and low temperature test chamber. The pressure sensor to be tested is clamped and fixed inside the high and low temperature test chamber by a fixture. The fixture is connected to the outlet of an air pump via a connecting pipe. An outlet valve, an outlet pressure gauge, and a pressure controller are sequentially arranged on the connecting pipe. The outlet valve is connected to the outlet of the air pump, and the pressure controller is connected to the fixture. A pressure measuring pipe is connected to the outlet of the high and low temperature test chamber, and the pressure measuring pipe is connected to the test end of the pressure gauge. The pressure sensor to be tested and the pressure controller are electrically connected to the control system via data transmission harnesses.
[0005] In operation, this invention connects to a testing device, clamps and fixes the pressure sensor to be tested inside a high and low temperature test chamber. The clamp is connected to a pressure controller via connecting pipes, and the pressure sensor is electrically connected to the control system via a data transmission harness. During the testing process, the control system stores and records the output signal of each pressure sensor and calculates a standard value. Controlling the temperature of the high and low temperature test chamber allows for pressure testing of the pressure sensor at different temperatures. Compared with existing technologies, the advantages of this invention are: First, the device offers convenient temperature control, enabling testing of the airtightness and pressure response of silicon strain gauge-glass micro-fused pressure sensors at different temperatures and pressures. It can also simultaneously control temperature and pressure to perform comprehensive testing of silicon strain gauge-glass micro-fused pressure sensors under multiple stress states. The test results are directly transmitted to the control system for storage, analysis, and calculation, allowing for rapid determination of the test results of the pressure sensor under test and improving testing efficiency. Second, the device's connecting pipes are equipped with multiple pressure gauges and pressure gauges, facilitating the detection of pressure imbalance in the system pipes and enabling convenient maintenance in case of system leaks. Third, this device has a simple structure and easy pipeline connection. The assembly and testing of the pressure sensor to be tested can be completed after production, saving the time and cost of sending it to an external testing agency for testing.
[0006] Furthermore, the control system includes a main controller, a data storage and analysis module, and a signal conditioning and acquisition module. The main controller is electrically connected to the air pump, the high and low temperature test chamber, and the signal conditioning and acquisition module via data cables. The data storage and analysis module analyzes and calculates the acquired data, and the signal conditioning and acquisition module provides excitation power to the pressure sensor under test and acquires its output electrical signal.
[0007] Furthermore, the connecting pipeline is also equipped with a three-way valve, the air inlet of the three-way valve is connected to the air outlet of the air pump, one air outlet of the three-way valve is connected to the air inlet of the high and low temperature test chamber, and the other air outlet is connected to the air inlet of the pressure controller.
[0008] Furthermore, the upper part of the air pump is equipped with an air pump pressure gauge for detecting the internal pressure of the air pump.
[0009] Furthermore, the pressure controller is a precision pressure controller with a measurement accuracy of ±0.1%FS to ±0.01%FS.
[0010] Furthermore, the pressure gauge is a digital pressure gauge.
[0011] Furthermore, an exhaust valve is also provided on the pressure testing pipeline. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of the external structure of this utility model.
[0013] In the diagram above, 1 is an air pump, 2 is an air pump pressure gauge, 3 is a connecting pipe, 4 is an air outlet valve, 5 is an air outlet pressure gauge, 6 is a pressure controller, 7 is a pressure sensor under test, 8 is a data transmission harness, 9 is a control system, 10 is a three-way valve, 11 is an exhaust valve, 12 is a high and low temperature test chamber, 13 is a pressure measuring pipe, and 14 is a pressure gauge. Detailed Implementation
[0014] like Figure 1 The device shown is a testing device for a silicon strain gauge-glass micro-melting pressure sensor, including a high and low temperature test chamber 12. The pressure sensor 7 to be tested is clamped and fixed in the high and low temperature test chamber 12 by a fixture. The fixture is connected to the outlet of an air pump 1 through a connecting pipe 3. An outlet valve 4, an outlet pressure gauge 5 and a pressure controller 6 are sequentially provided on the connecting pipe 3. The outlet valve 4 is connected to the outlet of the air pump 1, and the pressure controller 6 is connected to the fixture. The outlet of the high and low temperature test chamber 12 is connected to a pressure measuring pipe 13, which is connected to the test end of a pressure gauge 14. The pressure sensor 7 to be tested and the pressure controller 6 are electrically connected to a control system 9 through a data transmission harness 8.
[0015] The control system 9 includes a main controller, a data storage and analysis module, and a signal conditioning and acquisition module. The main controller is electrically connected to the air pump 1, the high and low temperature test chamber 12, and the signal conditioning and acquisition module via a data cable. The data storage and analysis module analyzes and calculates the acquired data. The signal conditioning and acquisition module provides excitation power to the pressure sensor 7 under test and acquires its output electrical signal.
[0016] A three-way valve 10 is also provided on the connecting pipe 3. The air inlet of the three-way valve 10 is connected to the air outlet of the air pump 1. One air outlet of the three-way valve 10 is connected to the air inlet of the high and low temperature test chamber 12, and the other air outlet is connected to the air inlet of the pressure controller 6. This controls the internal pressure of the high and low temperature test chamber and helps to improve the speed of temperature regulation.
[0017] The air pump 1 is equipped with an air pump pressure gauge 2 on its upper part for detecting the internal pressure of the air pump.
[0018] Pressure controller 6 is a precision pressure controller with a measurement accuracy of ±0.1%FS to ±0.01%FS.
[0019] The pressure gauge 14 is a digital pressure gauge. Digital pressure gauges are easy to operate, have stable performance, and provide intuitive and stable readings.
[0020] The pressure testing pipeline 13 is also equipped with an exhaust valve 11, which allows the gas inside the high and low temperature test chamber 12 to be discharged. This is used for two purposes: first, to discharge gas normally after the test is completed; and second, to release pressure in advance to prevent the high and low temperature test chamber 12 from bursting due to excessive internal pressure during the test.
[0021] In operation, the present invention connects to the testing device, and the pressure sensor 7 to be tested is clamped and fixed in the high and low temperature test chamber 12 by a fixture. The fixture is connected to the pressure controller 6 through the connecting pipe 3. The pressure sensor 7 to be tested and the pressure controller 6 are electrically connected to the control system 9 through the data transmission harness 8, respectively. The temperature and pressure of the high and low temperature test chamber 12 are adjusted to the target set temperature and target set pressure. During the test, the pressure controller 6 and the pressure sensor 7 to be tested simultaneously send pressure feedback signals. The signal conditioning circuit and the data storage and analysis module analyze and calculate the collected data to determine whether the error between the pressure response of the pressure sensor to be tested and the pressure response of the pressure controller 6 is within the standard range. If it exceeds the standard range, it is unqualified. The calculated result is fed back to the human-machine interface and saved by the operator.
[0022] This device offers convenient temperature control, enabling testing of the airtightness and pressure response of silicon strain gauge-glass micro-fused pressure sensors under varying temperatures and pressures. It can also simultaneously control temperature and pressure for comprehensive testing of silicon strain gauge-glass micro-fused pressure sensors under multiple stress states. Test results are directly transmitted to the control system for storage, analysis, and calculation, allowing for rapid determination of the test results for the pressure sensor under test and improving testing efficiency. The device features a simple structure and convenient piping connections, allowing for the assembly and testing of the pressure sensor to be tested immediately after production, saving time and costs associated with sending it to external testing institutions.
[0023] This utility model is not limited to the above embodiments. Based on the technical solutions disclosed in this utility model, those skilled in the art can make some substitutions and modifications to some of the technical features without creative labor, and these substitutions and modifications are all within the protection scope of this utility model.
Claims
1. A detection device for a silicon strain gauge-glass micro-melting pressure sensor, characterized in that: The system includes a high and low temperature test chamber. Inside the chamber, a pressure sensor to be tested is held and fixed by a clamp. The clamp is connected to the outlet of an air pump via a connecting pipe. The connecting pipe is sequentially equipped with an outlet valve, an outlet pressure gauge, and a pressure controller. The outlet valve is connected to the outlet of the air pump, and the pressure controller is connected to the clamp. A pressure measuring pipe is connected to the outlet of the high and low temperature test chamber and is connected to the test end of the pressure gauge. The pressure sensor to be tested and the pressure controller are electrically connected to the control system via data transmission harnesses.
2. The detection device for a silicon strain gauge-glass micro-melting pressure sensor according to claim 1, characterized in that: The control system includes a main controller, a data storage and analysis module, and a signal conditioning and acquisition module. The main controller is electrically connected to the air pump, the high and low temperature test chamber, and the signal conditioning and acquisition module via data cables. The data storage and analysis module analyzes and calculates the acquired data, and the signal conditioning and acquisition module provides excitation power to the pressure sensor under test and acquires its output electrical signal.
3. The detection device for a silicon strain gauge-glass micro-melting pressure sensor according to claim 1, characterized in that: The connecting pipeline is also equipped with a three-way valve. The air inlet of the three-way valve is connected to the air outlet of the air pump. One air outlet of the three-way valve is connected to the air inlet of the high and low temperature test chamber, and the other air outlet is connected to the air inlet of the pressure controller.
4. The detection device for a silicon strain gauge-glass micro-melting pressure sensor according to claim 1, characterized in that: The upper part of the air pump is equipped with an air pump pressure gauge for detecting the internal pressure of the air pump.
5. The detection device for a silicon strain gauge-glass micro-melting pressure sensor according to claim 1, characterized in that: The pressure controller is a precision pressure controller with a measurement accuracy of ±0.1%FS to ±0.01%FS.
6. The detection device for a silicon strain gauge-glass micro-melting pressure sensor according to claim 1, characterized in that: The pressure gauge is a digital pressure gauge.
7. The detection device for a silicon strain gauge-glass micro-melting pressure sensor according to claim 1, characterized in that: An exhaust valve is also installed on the pressure testing pipeline.