Integrated vacuum box helium detection and helium recovery apparatus

Abstract

The utility model relates to helium detection technical field, specifically disclose integrated vacuum box helium inspection and helium recovery equipment, include: box, one side of box is connected with the sealing door through the hinge, the inside fixed connection of box has the vacuum box, the top of box penetrates and has the helium pipeline, one side fixed connection of box inner top wall has first vacuum pump, one side fixed connection of baffle top has helium mass spectrum leak detector, the bottom fixed connection of bellows has the insertion short pipe, the bottom fixed connection of second gas pipe has the balance tank, the middle fixed connection of box inner bottom wall has low pressure tank, the other side fixed connection of baffle bottom has the compressor, the other side fixed connection of box inner bottom wall has high pressure tank, the utility model discloses through first vacuum pump, helium mass spectrum leak detector, compressor, high pressure tank, the collocation use of clamping plate and sucking disc, make workpiece's helium detection when can integratedly complete, can reduce the workroom to a certain extent, improve work efficiency, reduce the labor intensity of staff.

Description

Technical Field

[0001] This utility model belongs to the field of helium detection technology, specifically relating to an integrated vacuum chamber helium detection and helium recovery device. Background Technology

[0002] Helium leak detection, also known as helium gas leak testing, is a highly efficient inspection method. Helium leak detection equipment typically includes a vacuum system, a helium detection system, product piping, an electrical control system, pneumatic components, and tooling fixtures. During helium leak detection, the workpiece is usually placed inside a vacuum chamber, then the chamber is evacuated, and helium gas is introduced into the workpiece. The gas is then inserted into the vacuum chamber through a pipe at the detection end of the helium leak detector to check for leaks. However, the helium gas inside the chamber usually needs to be recovered for subsequent use after the detection process. Existing equipment is relatively fragmented, making it difficult to connect the entire process, resulting in time-consuming helium leak detection. Furthermore, operators need to manually return each piece of equipment to its original position, which is cumbersome and has certain shortcomings. Utility Model Content

[0003] The purpose of this invention is to provide an integrated vacuum chamber helium detection and helium recovery device to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] An integrated vacuum chamber helium detection and recovery device includes: a chamber body; a sealed door connected to one side of the chamber body via a hinge; a vacuum chamber fixedly connected inside the chamber body; a helium pipeline passing through the top of the chamber body; a first vacuum pump fixedly connected to one side of the inner top wall of the chamber body; a first suction pipe fixedly connected to the inlet end of the first vacuum pump; a first gas delivery pipe fixedly connected to the outlet end of the first vacuum pump, with the surface of the first gas delivery pipe fixed and extending through the outside of the chamber body; a partition fixedly connected to the middle of the inner side wall of the chamber body; a helium mass spectrometer leak detector fixedly connected to one side of the top of the partition; a detection tube fixedly connected inside the helium mass spectrometer leak detector, with the surface of the detection tube extending through the inside of the vacuum chamber; a corrugated pipe fixedly connected to the bottom end of the helium pipeline; an insertion short tube fixedly connected to the bottom end of the corrugated pipe; and a second vacuum pump fixedly connected to one side of the bottom of the partition, with a second suction pipe fixedly connected to the inlet end of the second vacuum pump. The second suction pipe is fixed to the surface and penetrates the interior of the vacuum chamber. The outlet of the second vacuum pump is fixedly connected to a second gas supply pipe. The bottom end of the second gas supply pipe is fixedly connected to a balance tank, which is fixedly connected to one side of the bottom wall of the chamber. A third vacuum pump is fixedly connected to one side of the bottom wall of the chamber. The inlet of the third vacuum pump is fixedly connected to a third suction pipe, which is fixed to the surface and penetrates the interior of the balance tank. The outlet of the third vacuum pump is fixedly connected to a third gas supply pipe. A low-pressure tank is fixedly connected to the middle of the bottom wall of the chamber, and the bottom end of the third gas supply pipe is fixed and penetrates the interior of the low-pressure tank. A compressor is fixedly connected to the other side of the bottom of the partition. The inlet of the compressor is fixedly connected to two fourth suction pipes, and the outlet of the compressor is fixedly connected to a fourth gas supply pipe. A high-pressure tank is fixedly connected to the other side of the bottom wall of the chamber, and the bottom end of the fourth gas supply pipe is fixed and penetrates the interior of the high-pressure tank.

[0006] Preferably, the vacuum chamber is internally equipped with a bidirectional lead screw, the surface of which is threaded through two threaded sleeves, and a push plate is fixedly connected to the surface of the threaded sleeves.

[0007] Preferably, a clamping plate is fixedly connected to one side of the push plate, and the surface of the clamping plate is provided with an anti-slip pad.

[0008] Preferably, a strip plate is fixedly connected to the surface of the inserted short tube, and two suction cups are fixedly connected inside the strip plate.

[0009] Preferably, the bottom end of one side of the high-pressure tank is fixed and has an exhaust pipe that passes through it, and the surface of the exhaust pipe is fixed and passes through the interior of the tank. A control valve is provided on the surface of the exhaust pipe.

[0010] Preferably, a control panel is fixedly connected to the bottom end of one side of the housing surface, and the control panel is electrically connected to the first vacuum pump, the helium mass spectrometer leak detector, the second vacuum pump, the third vacuum pump and the compressor respectively.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] (1) The workpiece can be inspected by the whole device. After the inspection is completed, the excess helium can be recovered and stored in time for subsequent use, which reduces the demand for new helium and saves natural resources. At the same time, the recovered helium can replace part or all of the new helium, which reduces production costs, reduces helium emissions and waste, and helps to reduce the burden on the environment.

[0013] (2) When helium is introduced into the workpiece, the connection between the inserted short tube and the workpiece can be stabilized. After the workpiece enters the vacuum chamber, it can be clamped stably to ensure its stability during testing. At the same time, it can adapt to the testing of workpieces of different sizes and has high flexibility. Attached Figure Description

[0014] Figure 1 This is a perspective view of the present utility model;

[0015] Figure 2 This is a cross-sectional view of the interior of the housing of this utility model;

[0016] Figure 3 This is a cross-sectional view of the clamping plate of this utility model;

[0017] In the diagram: 1. Box body; 2. Sealed door; 3. Vacuum box; 4. Helium pipeline; 5. First vacuum pump; 6. Helium mass spectrometer leak detector; 7. Detection tube; 8. Corrugated pipe; 9. Insertion short tube; 10. Second vacuum pump; 11. Balance tank; 12. Third vacuum pump; 13. Low-pressure tank; 14. Compressor; 15. Fourth extraction pipe; 16. High-pressure tank; 17. Exhaust pipe; 18. Two-way lead screw; 19. Threaded sleeve; 20. Push plate; 21. Clamping plate; 22. Anti-slip pad; 23. Strip plate; 24. Suction cup. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Example 1:

[0020] Please see Figure 1 and Figure 2 As shown, the integrated vacuum chamber helium detection and helium recovery equipment includes a chamber 1. A sealing door 2 is connected to one side of the chamber 1 via a hinge. A vacuum chamber 3 is fixedly connected inside the chamber 1. A helium pipe 4 passes through the top of the chamber 1. A first vacuum pump 5 is fixedly connected to one side of the inner top wall of the chamber 1. A first suction pipe is fixedly connected to the inlet end of the first vacuum pump 5, and a first gas delivery pipe is fixedly connected to the outlet end of the first vacuum pump 5. The surface of the first gas delivery pipe is fixed and extends through the outside of the chamber 1. A partition is fixedly connected to the middle of the inner wall of body 1. A helium mass spectrometer leak detector 6 is fixedly connected to one side of the top of the partition. A detection tube 7 is fixedly connected inside the helium mass spectrometer leak detector 6, and the surface of the detection tube 7 penetrates the interior of the vacuum chamber 3. A corrugated pipe 8 is fixedly connected to the bottom end of the helium pipeline 4. An insertion short pipe 9 is fixedly connected to the bottom end of the corrugated pipe 8. A second vacuum pump 10 is fixedly connected to one side of the bottom of the partition. A second extraction pipe is fixedly connected to the inlet end of the second vacuum pump 10. A second vacuum pump 10 is fixed to the surface and penetrates the interior of the vacuum chamber 3. The outlet end of the second vacuum pump 10 is fixedly connected to a second gas supply pipe. The bottom end of the second gas supply pipe is fixedly connected to a balance tank 11, and the balance tank 11 is fixedly connected to one side of the bottom wall of the chamber 1. A third vacuum pump 12 is fixedly connected to one side of the bottom wall of the chamber 1. The inlet end of the third vacuum pump 12 is fixedly connected to a third suction pipe, and the surface of the third suction pipe is fixed and penetrates the interior of the balance tank 11. The outlet end of the third vacuum pump 12 is fixedly connected to a third gas supply pipe. A low-pressure tank 13 is fixedly connected to the middle of the bottom wall of the chamber 1, and the bottom end of the third gas supply pipe is fixed and penetrates the interior of the low-pressure tank 13. A compressor 14 is fixedly connected to the other side of the bottom of the partition. The inlet end of the compressor 14 is fixedly connected to two fourth suction pipes 15, and the outlet end of the compressor 14 is fixedly connected to a fourth gas supply pipe. A high-pressure tank 16 is fixedly connected to the other side of the bottom wall of the chamber 1, and the bottom end of the fourth gas supply pipe is fixed and penetrates the interior of the high-pressure tank 16. The sealing door 2 allows the entire chamber 1 to be opened or closed. The vacuum chamber 3 allows the workpiece to be placed inside. The first vacuum pump 5 and the first suction pipe allow the vacuum chamber 3 to be evacuated. The detection pipe 7 allows the helium inside the vacuum chamber 3 to be detected. The corrugated pipe 8 allows the insertion short pipe 9 to be lowered to a certain length. The second vacuum pump 10, the second suction pipe, and the second gas delivery pipe allow the helium inside the vacuum chamber 3 to be drawn into the balance tank 11. The third vacuum pump 12 allows the excess helium inside the low-pressure tank 13 to be drawn into the low-pressure tank 13 after the gas reaches the preset value. The compressor 14, the fourth suction pipe 15, and the fourth gas delivery pipe allow the helium inside the balance tank 11 and the low-pressure tank 13 to enter the high-pressure tank 16. It should be noted that a closing door is provided on one side of the vacuum chamber 3 for easy opening or closing, making it convenient to place the workpiece.

[0021] A control panel is fixedly connected to the bottom of one side of the surface of the housing 1, and the control panel is electrically connected to the first vacuum pump 5, the helium mass spectrometer leak detector 6, the second vacuum pump 10, the third vacuum pump 12 and the compressor 14 respectively.

[0022] Example 2:

[0023] Please see Figure 1 and Figure 3 As shown, a bidirectional lead screw 18 is rotatably mounted inside the vacuum chamber 3. Two threaded sleeves 19 are threaded through the surface of the bidirectional lead screw 18, and push plates 20 are fixedly connected to the surface of the threaded sleeves 19. The bidirectional lead screw 18 allows the two threaded sleeves 19 to move toward each other or away from each other, thereby causing the two push plates 20 to move toward each other or away from each other. Two limiting grooves are formed in the inner bottom wall of the vacuum chamber 3, and the push plates 20 slide inside the limiting grooves, so that they play a limiting and guiding role during movement.

[0024] A clamping plate 21 is fixedly connected to one side of the push plate 20, and an anti-slip pad 22 is provided on the surface of the clamping plate 21. The clamping plate 21 and the anti-slip pad 22 enable the workpiece to be clamped and improve its stability.

[0025] A strip plate 23 is fixedly connected to the surface of the inserted short tube 9, and two suction cups 24 are fixedly connected inside the strip plate 23. The suction cups 24 are fixed inside the strip plate 23, and the suction cups 24 make the strip plate 23 and the inserted short tube 9 stable on the surface of the workpiece.

[0026] An exhaust pipe 17 is fixed to and extends through the bottom of one side of the high-pressure tank 16, and the surface of the exhaust pipe 17 is fixed to and extends through the interior of the housing 1. A control valve is provided on the surface of the exhaust pipe 17. The exhaust pipe 17 and the control valve allow the helium gas inside the high-pressure tank 16 to be subsequently discharged and used.

[0027] The working principle of this utility model is as follows: The operator first opens the sealed door 2, then opens the closed door on one side of the vacuum chamber 3, and then places the workpiece into the vacuum chamber 3. The operator rotates the bidirectional lead screw 18, which causes the two push plates 20 to move closer together, thereby causing the clamping plates 21 to move towards each other, clamping both sides of the workpiece and keeping it fixed. Then, the insertion short tube 9 is pulled down, so that the insertion short tube 9 is inserted into the workpiece, while the suction cup 24 is tightly adsorbed onto the surface of the workpiece. Then, the closed door is closed. At this time, the operator controls the first vacuum pump 5 to work, so that the first evacuation pipe evacuates air inside the vacuum chamber 3, keeping it vacuum. Then, the operator... Helium gas is introduced into helium pipeline 4, allowing it to enter the workpiece. Workers use the detection tube 7 on the helium mass spectrometer leak detector 6 to check for leaks inside the vacuum chamber 3. After the check, the worker starts the second vacuum pump 10. The second suction pipe at the inlet of the second vacuum pump 10 draws the helium from inside the vacuum chamber 3 into the balance tank 11. Once the balance tank 11 contains a sufficient amount of helium and reaches a certain preset value, the worker starts the third vacuum pump 12. The third suction pipe at the inlet of the third vacuum pump 12 draws the helium from the balance tank 11 into the low-pressure tank 13. After a certain period, the worker uses the compressor 14 to transfer the gas into the high-pressure tank 16 for subsequent use.

[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An integrated vacuum chamber helium detection and helium recovery device, characterized in that, include: A box (1) has a sealed door (2) connected to one side by a hinge. A vacuum chamber (3) is fixedly connected inside the box (1). A helium pipe (4) runs through the top of the box (1). A first vacuum pump (5) is fixedly connected to one side of the inner top wall of the box (1). A first suction pipe is fixedly connected to the inlet end of the first vacuum pump (5). A first gas delivery pipe is fixedly connected to the outlet end of the first vacuum pump (5). The surface of the first gas delivery pipe is fixed and runs through the outside of the box (1). The middle part of the inner side wall of the box (1) is fixed. A partition is fixedly connected to the vacuum chamber (3). A helium mass spectrometer leak detector (6) is fixedly connected to one side of the top of the partition. A detection tube (7) is fixedly connected inside the helium mass spectrometer leak detector (6), and the surface of the detection tube (7) penetrates the interior of the vacuum chamber (3). A corrugated pipe (8) is fixedly connected to the bottom end of the helium pipeline (4). An insertion short pipe (9) is fixedly connected to the bottom end of the corrugated pipe (8). A second vacuum pump (10) is fixedly connected to one side of the bottom of the partition. A second suction pipe is fixedly connected to the inlet end of the second vacuum pump (10), and the surface of the second suction pipe is fixedly connected to the bottom end of the vacuum chamber (3). A second vacuum pump (10) is fixedly connected to the outlet end of a second vacuum pump (10) and a second gas supply pipe is fixedly connected to the bottom end of the second gas supply pipe. A balance tank (11) is fixedly connected to one side of the bottom wall of the housing (1). A third vacuum pump (12) is fixedly connected to the inlet end of the third vacuum pump (12) and a third suction pipe is fixedly connected to the inlet end of the third vacuum pump (12). The surface of the third suction pipe is fixed and penetrates the interior of the balance tank (11). The outlet end of the third vacuum pump (12) is fixedly connected to the... There is a third gas supply pipe. A low-pressure tank (13) is fixedly connected to the middle of the bottom wall of the box (1). The bottom end of the third gas supply pipe is fixed and passes through the interior of the low-pressure tank (13). A compressor (14) is fixedly connected to the other side of the bottom of the partition. Two fourth suction pipes (15) are fixedly connected to the air inlet end of the compressor (14). A fourth gas supply pipe is fixedly connected to the air outlet end of the compressor (14). A high-pressure tank (16) is fixedly connected to the other side of the bottom wall of the box (1). The bottom end of the fourth gas supply pipe is fixed and passes through the interior of the high-pressure tank (16).

2. The integrated vacuum chamber helium detection and helium recovery equipment according to claim 1, characterized in that: The vacuum chamber (3) is equipped with a bidirectional lead screw (18) that rotates inside. The surface of the bidirectional lead screw (18) has two threaded sleeves (19) that are threaded through it. The surface of the threaded sleeves (19) is fixedly connected to a push plate (20).

3. The integrated vacuum chamber helium detection and helium recovery equipment according to claim 2, characterized in that: A clamping plate (21) is fixedly connected to one side of the push plate (20), and an anti-slip pad (22) is provided on the surface of the clamping plate (21).

4. The integrated vacuum chamber helium detection and helium recovery equipment according to claim 1, characterized in that: A strip plate (23) is fixedly connected to the surface of the insertion short tube (9), and two suction cups (24) are fixedly connected inside the strip plate (23).

5. The integrated vacuum chamber helium detection and helium recovery device according to claim 1, characterized in that: The bottom end of one side of the high-pressure tank (16) is fixed and has an exhaust pipe (17) through it, and the surface of the exhaust pipe (17) is fixed and penetrates the interior of the box (1). A control valve is provided on the surface of the exhaust pipe (17).

6. The integrated vacuum chamber helium detection and helium recovery device according to claim 1, characterized in that: A control panel is fixedly connected to the bottom of one side of the surface of the box (1), and the control panel is electrically connected to the first vacuum pump (5), the helium mass spectrometer leak detector (6), the second vacuum pump (10), the third vacuum pump (12) and the compressor (14).

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