Probe card airtightness detection jig

Abstract

The utility model belongs to airtightness detection technical field provides a kind of probe card airtightness detection fixture, including jig main body, sealing washer and pressing plate, jig main body is formed into semi-closed structure, the inside of jig main body is formed into inner chamber, the opening end of inner chamber is provided with accommodation groove, sealing washer is installed in accommodation groove, probe card is placed in accommodation groove and can compress sealing washer and close inner chamber;Pressing plate is provided with several fastening pegs, jig main body is provided with several corresponding screw holes with fastening peg, and fastening peg fastening connection screw hole so that pressing plate compresses probe card;Jig main body is provided with air inlet component, detection gas enters the inner chamber of jig main body from air inlet component and carries out detection, jig main body is also provided with air outlet component, and gas can be released from air outlet component after detection is completed.The utility model's probe card airtightness detection fixture can complete airtightness detection to probe card by observing the air pressure change of barometer, and the result of wafer level test is ensured accurate and correct.

Description

Technical Field

[0001] This utility model belongs to the field of airtightness testing technology, and in particular relates to a probe card airtightness testing fixture. Background Technology

[0002] With the advancement of semiconductor chip manufacturing processes, automotive-grade chips have achieved higher performance and power efficiency. At the same time, the rapid development of new energy vehicles and consumer electronics has placed higher demands on the reliability and traceability of automotive-grade chips, which in turn has led to higher requirements for automotive-grade chip testing.

[0003] In wafer-level testing, high and low temperature (-40~125℃) testing is the most basic requirement for verifying the reliability of automotive-grade chips. Therefore, the probe card must have good airtightness during wafer-level testing. Otherwise, if the probe card leaks during high and low temperature testing, it will cause the probe card to fail and affect the test results. Therefore, it is necessary to provide a probe card airtightness testing fixture to perform airtightness testing on the probe card first to ensure the accuracy of wafer-level testing results. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a probe card airtightness testing fixture, including a fixture body, a sealing ring and a pressure plate. The fixture body is formed as a semi-closed structure, and the interior of the fixture body is formed as an inner cavity. The opening end of the inner cavity is provided with a placement groove. The sealing ring is installed in the placement groove. The probe card is placed in the placement groove and can press the sealing ring to close the inner cavity.

[0005] The pressure plate is provided with a plurality of fastening pins, and the fixture body is provided with a plurality of threaded holes corresponding to the fastening pins. The fastening pins are fastened to the threaded holes so that the pressure plate presses the probe card.

[0006] The fixture body is provided with an air intake component, through which detection gas enters the inner cavity of the fixture body for detection. The fixture body is also provided with an air outlet component, through which gas can be released after detection is completed.

[0007] Optionally, in some technical solutions, the air intake assembly includes an air intake hole disposed on the main body of the fixture, an air intake pipe connected to the air intake hole, a pressure gauge installed on the air intake pipe, and a throttle valve installed at the front end of the pressure gauge. Gas is detected entering the inner cavity through the air intake hole via the throttle valve and the air intake pipe, and the pressure gauge detects the gas pressure in the inner cavity.

[0008] Optionally, in some technical solutions, a first switching valve is provided at the front end of the air inlet, and the first switching valve controls the air inlet pipe to connect to the inner cavity.

[0009] Optionally, in some technical solutions, the pressure gauge is a digital display pressure gauge, and the throttling valve is a throttling check valve.

[0010] Optionally, in some technical solutions, the venting component includes a venting hole disposed on the fixture body and a second switching valve installed on the venting hole. The venting hole communicates with the inner cavity, and the detection gas in the inner cavity can be released through the venting hole and the second switching valve.

[0011] Optionally, in some technical solutions, a pressure relief valve is also provided at the front end of the second switching valve, through which the maximum air pressure of the inner cavity can be set.

[0012] Optionally, in some technical solutions, the fastening screw is a hand-tightening screw, the fastening screw is equipped with a pressure block, and the pressure block is adapted to press the fastening screw to tighten the probe card.

[0013] Optionally, in some technical solutions, the pressure plate has a ring-shaped structure, and a plurality of the fastening nails are arranged circumferentially and evenly on the ring surface of the pressure plate.

[0014] Optionally, in some technical solutions, the number of fastening pins is not less than four.

[0015] Optionally, in some technical solutions, the side of the fixture body is provided with a groove, which is suitable for facilitating the handling of the fixture body.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] This utility model provides a probe card airtightness testing fixture, comprising a fixture body, a sealing ring, and a pressure plate. The fixture body is a semi-enclosed structure with an inner cavity. An installation groove is provided at the opening end of the inner cavity, and the sealing ring is installed in the installation groove. The probe card is placed in the installation groove and can press the sealing ring to seal the inner cavity. The pressure plate is provided with several fastening screws, and the fixture body is provided with several threaded holes corresponding to the fastening screws. The fastening screws are fastened to the threaded holes, causing the pressure plate to press the probe card. An air inlet assembly is provided on the fixture body, through which detection gas enters the inner cavity of the fixture body for testing. An air outlet assembly is also provided on the fixture body, through which gas can be released after testing. This utility model's probe card airtightness testing fixture can perform airtightness testing on the probe card by observing the pressure change of a barometer, ensuring the accuracy of wafer-level testing results. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the probe card airtightness testing fixture of this utility model.

[0019] Illustration:

[0020] 1. Fixture body; 2. Sealing ring; 3. Pressure plate; 4. Inner cavity; 5. Mounting groove; 6. Fastening screw; 7. Threaded hole; 8. Probe clip; 9. Air intake assembly; 10. Air outlet assembly; 11. Air inlet; 12. Air inlet pipe; 13. Pressure gauge; 14. Throttling valve; 15. First switching valve; 16. Air outlet; 17. Second switching valve; 18. Pressure relief valve; 19. Pressure block; 20. Groove. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0022] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0023] Furthermore, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components; they can refer to a wireless connection or a wired connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0025] like Figure 1As shown, an embodiment of this utility model provides a probe card airtightness testing fixture, including a fixture body 1, a sealing ring 2, and a pressure plate 3. The fixture body 1 is formed as a semi-closed structure, and the interior of the fixture body 1 is formed as an inner cavity 4. The opening end of the inner cavity 4 is provided with a placement groove 5. The sealing ring 2 is installed in the placement groove 5, and the probe card 8 is placed in the placement groove 5 and can press the sealing ring 2 to close the inner cavity 4. The pressure plate 3 is provided with a plurality of fastening nails 6, and the fixture body 1 is provided with a plurality of threaded holes 7 corresponding to the fastening nails 6. The fastening nails 6 are fastened to the threaded holes 7 so that the pressure plate 3 presses the probe card 8. The fixture body 1 is provided with an air inlet assembly 9, and the detection gas enters the inner cavity 4 of the fixture body 1 from the air inlet assembly 9 for detection. The fixture body 1 is also provided with an air outlet assembly 10, and the gas can be released from the air outlet assembly 10 after the detection is completed. The probe card 8 airtightness testing fixture in this embodiment can perform airtightness testing on the probe card 8 by observing the air pressure change of the barometer 13, ensuring the accuracy of the wafer-level testing results. Preferably, both the fixture body 1 and the pressure plate 3 are made of steel, and the shapes of the fixture body 1 and the pressure plate 3 can be adapted to the shape of the probe card 8 being tested, such as being designed as a circle or a regular polygon. The sealing ring 2 is a rubber ring, which can be placed directly in the placement groove 5 or fixedly installed in the placement groove 5 by adhesive. In this embodiment, the fixture body 1 has a cylindrical structure, the pressure plate 3 has a ring-shaped structure, and the sealing ring 2 is bonded to the placement groove; the sealing ring 2 is an O-ring sealing ring.

[0026] Further, in this embodiment, the air intake assembly 9 includes an air intake hole 11 disposed on the fixture body 1, an air intake pipe 12 connected to the air intake hole 11, a pressure gauge 13 installed on the air intake pipe 12, and a throttle valve 14 installed at the front end of the pressure gauge 13. The detection gas enters the inner cavity 4 through the air intake hole 11 via the throttle valve 14 and the air intake pipe 12, and the pressure gauge 13 detects the gas pressure in the inner cavity 4. Specifically, in order to enable the detection gas to enter the inner cavity 4 of the fixture body 1 to perform detection operations on the probe card 8, an air intake hole 11 is opened on the side of the fixture body 1 to connect to the inner cavity 4. The air intake hole 11 can be connected to the air intake pipe 12 through an air intake connector, and the detection gas can enter the inner cavity 4 through the air intake pipe 12 and the air intake hole 11. In this embodiment, to facilitate the observation of the test results, a pressure gauge 13 is also installed at the air inlet end of the air inlet pipe 12. When the air inlet pressure reaches the detection value, the air source of the air inlet pipe 12 is shut off. During the test, the test result can be determined by observing whether the pressure gauge 13 shows a drop in pressure. To facilitate the control of the flow rate of the test gas entering the inner cavity 4, a throttle valve 14 is installed on the air inlet pipe 12 and at the front end of the pressure gauge 13. The throttle valve 14 is configured as a one-way throttle valve, which can only allow air in but not out. The amount of gas entering the inner cavity 4 is controlled by the throttle valve 14, and the reading of the pressure gauge 13 is observed to be controlled within a predetermined range to avoid excessive gas supply and damage to the probe card 8. Preferably, to facilitate the observation of the test gas pressure, the pressure gauge 13 in this embodiment is a digital display pressure gauge 13. During the test, the pressure value can be directly displayed on the screen, which intuitively displays the test pressure and improves the convenience of the test.

[0027] Furthermore, in this embodiment, a first switching valve 15 is provided at the front end of the air inlet 11, and the first switching valve 15 controls the air inlet pipe 12 to connect to the inner cavity 4. Specifically, in order to facilitate the connection between the air inlet 11 and the air inlet pipe 12 on the fixture body 1, a first switching valve 15 is installed on the air inlet 11. The two ends of the first switching valve 15 are airtightly connected to the air inlet 11 and the air inlet pipe 12, respectively. During testing, the first switching valve 15 is in a normally open state.

[0028] Furthermore, in this embodiment, the venting assembly 10 includes a venting hole 16 disposed on the fixture body 1 and a second switching valve 17 installed on the venting hole 16. The venting hole 16 communicates with the inner cavity 4, and the detection gas in the inner cavity 4 can be released through the venting hole 16 and the second switching valve 17. Specifically, after the test is completed, the detection gas in the inner cavity 4 must be released before the pressure plate 3 can be opened, because if any fastening screw 6 is loosened directly, the probe card 8 will pop up, which will damage the probe card 8. In order to release the detection gas in the inner cavity 4, a venting hole 16 is also provided on the side of the fixture body 1, and a second switching valve 17 is installed on the venting hole 16. During the test, the second switching valve 17 is in a normally closed state. After the test is completed, the second switching valve 17 is opened to release the detection gas in the inner cavity 4. After the release is completed, the fastening screw 6 is loosened and the pressure plate 3 is opened to remove the probe card 8 after the test is completed, ensuring that the probe card 8 is not damaged.

[0029] Furthermore, in this embodiment, a pressure relief valve 18 is also provided at the front end of the second switching valve 17, through which the maximum air pressure of the inner cavity 4 can be set. Specifically, in order to protect the probe card 8, a pressure relief valve 18 is provided at the front end (i.e., the air inlet side) of the second switching valve 17. The pressure relief valve 18 is set with a pressure relief value. When the air pressure in the inner cavity 4 is greater than the pressure relief value (e.g., 0.6 MPa), the pressure relief valve 18 will automatically open to prevent the high pressure from damaging the probe card 8.

[0030] Furthermore, in this embodiment, the fastening screw 6 is a hand-tightening screw, and the fastening screw 6 is equipped with a pressure block 19, which is adapted to clamp the probe clip 8. The pressure plate 3 has a ring structure, and a number of fastening screws 6 are evenly arranged circumferentially on the ring surface of the pressure plate 3, with no less than four fastening screws 6. The side of the fixture body 1 is provided with a groove 20, which is suitable for facilitating the handling of the fixture body 1.

[0031] Furthermore, the method for performing airtightness testing on the probe card 8 testing fixture in this embodiment is as follows: Before testing, a control group is set up. A simulation plate of the same size as the probe card 8 is placed on the fixture, and then the pressure plate 3 on the fixture is tightened by hand screws. A surfactant solution is poured onto the surface of the simulation plate. The air source is turned on, and compressed air is adjusted to a stable input pressure of 0.4 MPa through the throttle valve 14. The change in air pressure is observed through the digital display pressure gauge 13. The measurement accuracy of the digital display pressure gauge 13 is 1%. After the air pressure in the inner cavity 4 of the fixture stabilizes, the air source is turned off, and 3 minutes are waited. The change in the value of the digital display pressure gauge 13 is observed. If the value of the pressure gauge 13 is stably displayed at 0.400 MPa, and no bubbles are generated in the surfactant solution, it indicates that the airtightness between the fixture and the simulation plate is good and there is no leakage. The control group setting is complete. During testing, place the probe card 8 on the fixture, then tighten the pressure plate 3 on the fixture using a hand screw, and pour a surfactant solution onto the surface of the probe card 8. Turn on the air source, and adjust the compressed air pressure to a stable 0.4 MPa through the throttle valve 14. Observe the pressure change using the digital pressure gauge 13. After the air pressure in the fixture cavity 4 stabilizes, turn off the air source and wait for 3 minutes. Observe the change in the value of the digital pressure gauge 13. If the value of the pressure gauge 13 is stably displayed at 0.400 MPa, it indicates that the probe card 8 has good airtightness. If the value of the digital pressure gauge 13 is less than 0.400 MPa, it indicates that the probe card 8 has poor airtightness and leakage. At the same time, observe whether bubbles are generated in the surfactant solution on the surface of the probe card 8. If bubbles are present, it indicates that the probe card 8 has poor airtightness and leakage; if no bubbles are present, it indicates that the probe card has good airtightness. Based on the above phenomena, if the airtightness of probe card 8 is poor, it will be returned to the previous section for repair, and tested again after the repair is completed; if the airtightness of probe card 8 is good, the test requirements are met, and it will proceed to the next section.

[0032] Furthermore, the principle of the probe card 8 testing fixture for airtightness testing in this embodiment is as follows: After compressed air is adjusted by the throttle valve 14, a stable airflow enters the inner cavity 4 of the fixture, creating a pressure difference between the inner cavity 4 and the surface of the probe card 8. When the air source is turned off, if the probe card 8 experiences poor sealing or leakage, the air pressure changes, and the test result is reflected by the change in the value of the digital pressure gauge. Simultaneously, the pressure difference also increases the surface tension of water molecules in the surfactant solution, thereby generating bubbles, which visually demonstrates the test result.

[0033] Furthermore, by applying the above-mentioned detection method to the probe card 8 detection fixture of this utility model, the sealing condition of the probe card 8 can be detected, ensuring product quality. Moreover, the detection method is simple to operate, and the detection results can be obtained intuitively, allowing for a direct determination of whether the probe card 8 is effectively sealed.

[0034] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A probe card airtightness testing fixture, characterized in that, The fixture includes a main body, a sealing ring, and a pressure plate. The main body is formed as a semi-closed structure, and the interior of the main body is formed as an inner cavity. The opening end of the inner cavity is provided with a placement groove. The sealing ring is installed in the placement groove, and the probe is placed in the placement groove and can press the sealing ring to close the inner cavity. The pressure plate is provided with a plurality of fastening pins, and the fixture body is provided with a plurality of threaded holes corresponding to the fastening pins. The fastening pins are fastened to the threaded holes so that the pressure plate presses the probe card. The fixture body is provided with an air intake component, through which detection gas enters the inner cavity of the fixture body for detection. The fixture body is also provided with an air outlet component, through which gas can be released after detection is completed.

2. The probe card airtightness testing fixture as described in claim 1, characterized in that, The air intake assembly includes an air intake hole disposed on the main body of the fixture, an air intake pipe connected to the air intake hole, a pressure gauge installed on the air intake pipe, and a throttle valve installed at the front end of the pressure gauge. Gas is detected entering the inner cavity through the air intake hole via the throttle valve and the air intake pipe, and the pressure gauge detects the gas pressure in the inner cavity.

3. The probe card airtightness testing fixture as described in claim 2, characterized in that, A first switching valve is provided at the front end of the air inlet, and the first switching valve controls the air inlet pipe to connect to the inner cavity.

4. The probe card airtightness testing fixture as described in claim 2 or 3, characterized in that, The pressure gauge is a digital display pressure gauge, and the throttle valve is a throttle one-way valve.

5. The probe card airtightness testing fixture as described in claim 1, characterized in that, The air outlet assembly includes an air outlet hole disposed on the fixture body and a second switch valve installed on the air outlet hole. The air outlet hole communicates with the inner cavity, and the detection gas in the inner cavity can be released through the air outlet hole and the second switch valve.

6. The probe card airtightness testing fixture as described in claim 5, characterized in that, The second switching valve is also provided with a pressure relief valve at its front end, through which the maximum air pressure of the inner cavity can be set.

7. The probe card airtightness testing fixture as described in claim 1, characterized in that, The fastening screw is a hand-tightening screw, and the fastening screw is equipped with a pressure block, which is adapted to press the probe card with the fastening screw.

8. The probe card airtightness testing fixture as described in claim 1, characterized in that, The pressure plate has a ring-shaped structure, and a number of the fastening nails are evenly arranged circumferentially on the ring surface of the pressure plate.

9. The probe card airtightness testing fixture as described in claim 7 or 8, characterized in that, The number of fastening screws shall not be less than four.

10. The probe card airtightness testing fixture as described in claim 1, characterized in that, The jig body has a groove on its side, which is suitable for facilitating the handling of the jig body.

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