A probe card replacement device

Abstract

The utility model provides a kind of probe card replacement device, comprising: first module and the second module for assembling probe card, the second module is equipped with the assembly cavity of accommodating first module insertion in upper;The inner wall of the assembly cavity is equipped with locking piece, the first module side wall is equipped with main assembly groove, the main assembly groove includes sliding slot and locking groove, when the locking piece is engaged in main assembly groove, the locking piece is twisted to locking groove and completes locking, when the first module and second module separate, the locking piece is twisted to sliding slot and separates from main assembly groove.The utility model quickly completes the disassembly of probe card chip detection equipment by probe card replacement device, cope with the situation that probe card separates inconveniently in disassembly process, avoid the damage of probe card and equipment main body disassembly process.

Description

Technical Field

[0001] This utility model belongs to the field of probe card assembly technology, and in particular relates to a probe card replacement device. Background Technology

[0002] A probe card is a specialized interface instrument used in semiconductor manufacturing to test the parameters of bare dies. It establishes a signal transmission channel between the tester and the chip through an array of flexible probes. Its core components include a test interface, a controller, and flexible probes. The application of wireless communication technology enables remote transmission of probe card status information and reception of test commands.

[0003] Probe cards typically need to be installed inside chip testing equipment. During the testing process, the corresponding probe cards are assembled inside the chip testing equipment. The probe cards are replaced according to the usage and testing needs. However, most existing technologies use bolt fixing to assemble with the chip testing equipment base. The internal space of the chip testing equipment is limited, making the disassembly process inconvenient and easily causing damage to the probe cards during disassembly. Utility Model Content

[0004] This utility model provides a probe card replacement device, which is implemented as follows: A probe card replacement device includes:

[0005] A first module and a second module for assembling probe cards, wherein the second module has an assembly cavity for accommodating the insertion of the first module;

[0006] The inner wall of the assembly cavity is provided with a locking member, and the side wall of the first module is provided with a main assembly groove. The main assembly groove includes a sliding groove and a locking groove. When the locking member is engaged in the main assembly groove, the locking member is twisted into the locking groove to complete the locking. When the first module and the second module are separated, the locking member is twisted into the sliding groove and then disengaged from the main assembly groove.

[0007] Preferably, the main assembly slot is provided with a ramp extending to the opening of the main assembly slot and a limiting plane, the area where the ramp is located is a chute, and the area where the limiting plane is located is a locking slot.

[0008] Preferably, the locking component includes a locking block, a retaining plate connected to one end of the locking block, and a spring. The side wall of the assembly cavity is provided with an elastic groove. The retaining plate is located in the elastic groove. One end of the locking block extends out of the elastic groove from the opening that communicates with the outside. One end of the spring is nested in a guide post provided in the elastic groove. The spring is connected to the end of the retaining plate away from the locking block.

[0009] Preferably, the lower end face of the locking block extending from the end of the elastic groove is provided with a downward pushing slope and a locking plane. When the locking block rotates to the limiting plane, the locking plane contacts and connects with the limiting plane. When the downward pushing slope rotates to the landslide slope, the downward pushing slope contacts and connects with the landslide slope. When the second module moves down, the landslide slope drives the downward pushing slope to retract into the elastic groove.

[0010] Preferably, an electromagnetic suction block is provided on the limiting plane, and when the locking plane is in contact with the limiting plane, the electromagnetic suction block and the locking block are magnetically connected.

[0011] Preferably, the end of the first module inserted into the assembly cavity is provided with a beveled structure, and when the first module is inserted into the assembly cavity, the beveled structure pushes the locking block back into the elastic groove.

[0012] Preferably, the upper end face of the locking block extending from the end of the elastic groove is provided with an upward pushing slope.

[0013] Compared with the prior art, the embodiments of this application have the following main advantages:

[0014] The probe card replacement device provided by this utility model utilizes the sliding slope and limiting plane of the main assembly groove in cooperation with the locking component. Through the combination of rotation and pulling actions, it completes rapid disassembly and assembly, improving the efficiency of probe card replacement. By using the probe card replacement device, the disassembly of the probe card chip detection equipment can be completed quickly, which can solve the problem of inconvenient probe card separation during the disassembly process and avoid damage to the probe card and the main body of the equipment during the disassembly process. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a probe card replacement device provided by this utility model.

[0016] Figure 2 This is a schematic diagram of the first module structure of a probe card replacement device provided by this utility model.

[0017] Figure 3 This is a schematic diagram of the main assembly slot structure of a probe card replacement device provided by this utility model.

[0018] Figure 4 This is a schematic diagram of the main assembly slot array distribution in a probe card replacement device provided by this utility model.

[0019] Figure 5 This is a schematic diagram of the locking component structure of a probe card replacement device provided by this utility model.

[0020] Explanation of reference numerals in the attached figures:

[0021] 110. First module; 111. Upper assembly plate; 112. Assembly cylinder; 120. Second module; 101. Assembly cavity; 102. Elastic groove; 200. Locking component; 210. Locking block; 220. Clamping plate; 230. Spring; 300. Main assembly groove; 201. Lower pushing surface; 202. Limiting plane; 203. Upper pushing surface; 310. Sloping surface; 320. Limiting plane; 330. Electromagnetic suction block; 301. Slide groove; 302. Locking groove. Detailed Implementation

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0023] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0024] This utility model embodiment provides a probe card replacement device, such as... Figures 1-5 As shown, the probe card replacement device includes:

[0025] The first module 110 and the second module 120 are fixed on the chip testing equipment. The bottom surface of the second module 120 is provided with screw holes for assembling probe cards. The upper part of the second module 120 is provided with an assembly cavity 101 to accommodate the insertion of the first module 110.

[0026] The inner wall of the assembly cavity 101 is provided with a locking member 200, and the side wall of the first module 110 is provided with a main assembly groove 300. The main assembly groove 300 includes a sliding groove 301 and a locking groove 302. When the locking member 200 is engaged in the main assembly groove 300, the locking member 200 is twisted into the locking groove 302 to complete the locking. When the first module 110 and the second module 120 are separated, the locking member 200 is twisted into the sliding groove 301 and then disengaged from the main assembly groove 300.

[0027] Specifically, the main assembly groove 300 is provided with a ramp 310 extending to the opening of the main assembly groove 300 and a limiting plane 320. The area where the ramp 310 is located is the groove 301, and the area where the limiting plane 320 is located is the locking groove 302. Here, the locking member 200 is provided with a downward pushing ramp 201 and a locking plane 202.

[0028] When the locking member 200 is located in the locking groove 302, the locking plane 202 is in contact with the limiting plane 320. The limiting plane 320 will lock the locking plane 202 of the locking member 200. At this time, the locking member 200 is not easy to disengage from the locking groove 302 due to the lack of horizontal thrust. When dismantling, the downward pushing slope 201 needs to be rotated to the landslide slope 310 first. Since the landslide slope 310 lacks the limiting plane 320 that restricts the locking plane 202, when the downward pushing slope 201 is in contact with the landslide slope 310, when the second module 120 moves down, the landslide slope 310 drives the lower locking member 200 to retract into the elastic groove 102; therefore, the second module 120 can be separated from the first module 110.

[0029] When replacing the probe card, the sliding slope 310 and limiting plane 320 of the main assembly slot 300 are used in conjunction with the locking part 200. After the rotation and pulling actions are combined, the disassembly and assembly are completed quickly, which improves the efficiency of probe card replacement. The probe card replacement device can quickly complete the disassembly of the probe card chip detection equipment and solve the problem of inconvenient probe card separation during the disassembly process.

[0030] In a preferred embodiment of this invention, the locking member 200 includes a locking block 210, a locking plate 220 connected to one end of the locking block 210, and a spring 230. The side wall of the assembly cavity 101 is provided with an elastic groove 102. The locking plate 220 is located in the elastic groove 102 and cannot be dislodged from the opening of the elastic groove 102 that communicates with the outside. One end of the locking block 210 extends out of the elastic groove 102. One end of the spring 230 is nested in a guide post provided in the elastic groove 102. One end of the spring 230 is connected to the end of the locking plate 220 away from the locking block 210, and the other end is nested in the guide post.

[0031] In this embodiment, the downward pushing inclined surface 201 and the locking plane 202 are disposed on the lower end surface of the locking block 210 extending from the end of the elastic groove 102; the upper end surface of the locking block 210 extending from the end of the elastic groove 102 is also provided with an upward pushing inclined surface 203.

[0032] In this application, the end of the first module 110 inserted into the assembly cavity 101 is provided with a slope structure. When the first module 110 is inserted into the assembly cavity 101, the slope structure pushes the upper pushing slope 203 of the locking block 210 to retract into the elastic groove 102. During the assembly process, the locking member 200 can be engaged in the main assembly groove 300 when the first module 110 is inserted into the assembly cavity 101.

[0033] In a further preferred embodiment of this utility model, an electromagnetic suction block 330 is provided on the limiting plane 320, and when the locking plane 202 is in contact with the limiting plane 320, the electromagnetic suction block 330 is magnetically connected to the locking block 210.

[0034] In this embodiment, the electromagnetic suction block 330 uses existing electromagnet technology, and the locking block 210 is made of ferromagnetic material that can be magnetically attracted. When the locking member 200 rotates and is located in the locking groove 302, the locking plane 202 contacts and connects with the limiting plane 320. The limiting plane 320 will lock the locking plane 202 of the locking member 200. The locking block 210 is magnetically connected to the electromagnetic suction block 330 located in the limiting plane 320. Here, a pressure sensor is also provided at the end of the locking groove 302. When the locking block 210 rotates to the end of the locking groove 302, a certain pressure value is generated on the pressure sensor, which will trigger the electromagnetic suction block 330. At this time, the locking block 210 and the locking block 210 exert magnetic attraction to limit the movement, ensuring that the probe card is not easily rotated during testing.

[0035] In a preferred embodiment of this invention, the main assembly slot 300 and the locking element 200 are in three sets, and multiple sets of locking are used to complete the locking and fixing; the main assembly slot 300 and the locking element 200 are respectively arranged in a circular array on the first module 110 and the second module 120.

[0036] It should be noted that, for the sake of simplicity, the foregoing embodiments are all described as a series of actions. However, those skilled in the art should understand that the present invention is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to the present invention. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to the present invention.

[0037] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Although this utility model has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of this utility model according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of this utility model. These technical solutions are also within the scope of protection of this utility model.

Claims

1. A probe card replacement device, characterized in that, include: The first module (110) and the second module (120) for assembling the probe card, wherein the second module (120) is provided with an assembly cavity (101) for accommodating the insertion of the first module (110); The inner wall of the assembly cavity (101) is provided with a locking member (200), and the side wall of the first module (110) is provided with a main assembly groove (300). The main assembly groove (300) includes a sliding groove (301) and a locking groove (302). When the locking member (200) is engaged in the main assembly groove (300), the locking member (200) is twisted into the locking groove (302) to complete the locking. When the first module (110) and the second module (120) are separated, the locking member (200) is twisted into the sliding groove (301) and then disengaged from the main assembly groove (300).

2. The probe card replacement device as described in claim 1, characterized in that, The main assembly slot (300) is provided with a ramp slope (310) extending to the opening of the main assembly slot (300) and a limiting plane (320). The area where the ramp slope (310) is located is a chute (301), and the area where the limiting plane (320) is located is a locking groove (302).

3. The probe card replacement device as described in claim 2, characterized in that, The locking component (200) includes a locking block (210), a retaining plate (220) connected to one end of the locking block (210), and a spring (230). The side wall of the assembly cavity (101) is provided with an elastic groove (102). The retaining plate (220) is located in the elastic groove (102). One end of the locking block (210) extends out of the elastic groove (102) from the opening communicating with the outside. One end of the spring (230) is nested in a guide post provided in the elastic groove (102). The spring (230) is connected to the end of the retaining plate (220) away from the locking block (210).

4. The probe card replacement device as described in claim 3, characterized in that, The lower end face of the locking block (210) extending from the end of the elastic groove (102) is provided with a downward pushing slope (201) and a locking plane (202). When the locking block (210) rotates to the limiting plane (320), the locking plane (202) contacts and connects with the limiting plane (320). When the downward pushing slope (201) rotates to the landslide slope (310), the downward pushing slope (201) contacts and connects with the landslide slope (310). When the second module (120) moves down, the landslide slope (310) drives the downward pushing slope (201) to retract into the elastic groove (102).

5. The probe card replacement device as described in claim 4, characterized in that, An electromagnetic suction block (330) is provided on the limiting plane (320). When the locking plane (202) is in contact with the limiting plane (320), the electromagnetic suction block (330) is magnetically connected to the locking block (210).

6. The probe card replacement device as described in claim 5, characterized in that, The first module (110) is inserted into the assembly cavity (101) at the end of which is provided with a beveled structure. When the first module (110) is inserted into the assembly cavity (101), the beveled structure pushes the locking block (210) to retract into the elastic groove (102).

7. The probe card replacement device as described in claim 6, characterized in that, The upper end face of the locking block (210) extending from the end of the elastic groove (102) is provided with an upward pushing slope (203).

Images