A high uniformity probe card

Abstract

The utility model discloses a kind of high same measurement number probe card, it is related to probe card technical field, including substrate, substrate top surface middle part is equipped with connecting plate, substrate is discoid, connecting port is set in the connecting plate four around place of substrate top surface, substrate bottom surface is coaxially fixed with mounting ring, multiple guide columns are symmetrically protruded in the mounting ring inside of substrate bottom surface, and PCB board is inserted with guide column in substrate bottom surface;The utility model is through the cooperation of guide frame and connecting plate bottom end lug, lug slides in guide groove, it is convenient to the plug of connecting plate and play the guiding effect, the stability of plug-in process is improved, and then connecting plate and different test equipment can be accurately docked;Second spring on the lug bottom surface is further matched with substrate, to provide buffer when plugging;Finally solve the problem that uneven force is caused by the direct fixation of connecting plate and substrate connection in existing probe card, contact point is easy to wear, improve the connection stability and use efficiency of probe card.

Description

Technical Field

[0001] This utility model relates to the field of probe card technology, and in particular to a high-simultaneous-number probe card. Background Technology

[0002] In the field of semiconductor chip testing, high-simultaneous-test-count probe cards are key equipment for realizing the simultaneous testing of multiple chips, and their performance directly affects the testing efficiency and accuracy. As the integration of chips continues to increase, higher requirements are placed on the structural stability of probe cards, the reliability of PCB board installation, and the connection flexibility of connector boards. In existing probe cards, the connection plate and the substrate are directly fixed together. This makes the contact points prone to wear due to uneven force during insertion and removal, reducing connection reliability and service life. Furthermore, it is difficult to adapt to the connection requirements of different test equipment, limiting the versatility of the probe card. Therefore, improvements are needed to address these issues. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies by proposing a high-simultaneous measurement probe card.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a high-resolution probe card, comprising a substrate, a connecting plate mounted in the center of the top surface of the substrate, the substrate being disc-shaped, a connection port being provided around the connecting plate on the top surface of the substrate, a mounting ring being coaxially fixed to the bottom surface of the substrate, and multiple guide posts being symmetrically protruded from the bottom surface of the substrate within the mounting ring, and a PCB board being inserted into the bottom surface of the substrate through the guide posts.

[0005] Preferably, two rotating shafts are symmetrically rotatably mounted on the outer wall of the mounting ring. The opposite ends of the two rotating shafts are coaxially fixed with knobs. The shafts inside the mounting ring are threaded, and clamping frames are sleeved on the threads of the two rotating shafts. The clamping frames clamp the two sides of the PCB board respectively.

[0006] Preferably, a first spring connected to the inner wall of the mounting ring is fixed to both sides of the opposite sides of the two clamping frames, and a limit block is fixed to the opposite ends of the two rotating shafts.

[0007] Preferably, multiple probes are uniformly fixed to the bottom surface of the PCB board.

[0008] Preferably, the connecting plate has multiple connecting holes on its top surface and a guide frame fixed to the substrate at its lower end. The guide frame has guide grooves on both sides, and the connecting plate has a protrusion at its bottom end located in the guide groove.

[0009] Preferably, a plurality of second springs are fixedly connected at equal intervals to the bottom surface of the protrusion, and the bottom end of the second spring is fixedly connected to the top surface of the substrate.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model, through the cooperation of the guide frame and the bottom protrusion of the connecting plate, allows the protrusion to slide within the guide groove, facilitating the insertion and removal of the connecting plate and improving the stability of the insertion and removal process. This enables precise docking of the connecting plate with different testing equipment. Furthermore, the cooperation of the second spring on the bottom surface of the protrusion with the substrate provides cushioning during insertion and removal, reducing wear at the contact points caused by uneven force, improving connection reliability and service life. This allows the connecting plate to flexibly adapt to the connection requirements of different testing equipment. Ultimately, this solves the problem of uneven force during insertion and removal and easy wear at the contact points caused by the direct fixing of the connecting plate and the substrate in existing probe cards, improving the connection stability and efficiency of the probe card. Attached Figure Description

[0011] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings: Figure 1 This is a first-view schematic diagram of the overall structure proposed in this utility model; Figure 2 This is a first-view schematic diagram of the overall structure proposed in this utility model; Figure 3 This is a schematic diagram of the overall structure of the PCB board proposed in this utility model; Figure 4 This is a schematic cross-sectional view of the connecting plate proposed in this utility model.

[0012] The numbers in the diagram are: 1. Base plate; 2. Connecting plate; 3. Connecting port; 4. Knob; 5. Mounting ring; 6. Clamping frame; 7. Rotating shaft; 8. First spring; 9. PCB board; 10. Probe; 11. Guide post; 12. Guide frame; 13. Second spring. Detailed Implementation

[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0014] Example: See Figures 1 to 4This utility model discloses a high-precision probe card, comprising a substrate 1, a connecting plate 2 mounted on the center of the top surface of the substrate 1, the substrate 1 being disc-shaped, and connection ports 3 formed around the connecting plate 2 on the top surface of the substrate 1. A mounting ring 5 is coaxially fixed to the bottom surface of the substrate 1, and multiple guide posts 11 are symmetrically protruding from the bottom surface of the substrate 1 within the mounting ring 5. A PCB board 9 is inserted into the bottom surface of the substrate 1 through the guide posts 11. The substrate 1 is made of aluminum alloy, which is lightweight and has high structural strength, providing a solid foundation for the overall device. Stable support; the connecting plate 2 is made of FR-4 epoxy glass cloth substrate 1. The connecting plate 2 made of this material has good insulation performance and is suitable for signal transmission; the above structure forms the basic frame of the device, providing a stable carrier for the installation of each component; two rotating shafts 7 are symmetrically rotatably mounted on the outer wall of the mounting ring 5. The opposite ends of the two rotating shafts 7 are coaxially fixed with knobs 4. The shafts of the two rotating shafts 7 located inside the mounting ring 5 are threaded, and clamping frames 6 are sleeved on the threads of the two rotating shafts 7. The clamping frames 6 clamp the PC respectively. The two sides of board B9; the rotating shaft 7 is made of 45# steel with a nickel-plated surface. The 45# steel and nickel-plated shaft 7 provides high hardness and corrosion resistance, ensuring smooth rotation and durability; the knob 4 is made of ABS plastic, offering a comfortable feel and easy operation; through the above structure, quick clamping and fixing of PCB board 9 is achieved, improving the convenience of PCB board 9 installation and removal; the two clamping frames 6 have first clamps fixed to the opposite sides of their back sides, which are connected to the inner wall of the mounting ring 5. Spring 8 and limit blocks are fixed to the opposite ends of the two rotating shafts 7. The first spring 8 is made of 65Mn spring steel, which has good elasticity and strong toughness, and can provide stable guidance for the clamping frame 6. The limit blocks are made of polytetrafluoroethylene, which has a low coefficient of friction and can reduce wear on the rotating shafts 7. Through the above structure, the smoothness of the movement of the clamping frame 6 is ensured, while preventing excessive movement of the clamping frame 6, thus improving the stability of the PCB board 9 installation.

[0015] In this invention, multiple probes 10 are uniformly fixed to the bottom surface of the PCB board 9. The probes 10 are made of pure copper plated with silver, which provides good conductivity and stable contact, enabling precise transmission of test signals. This structure achieves effective contact with the chip, providing a channel for test signal transmission and ensuring test accuracy. Multiple connection holes are provided on the top periphery of the connecting plate 2. A guide frame 12, fixed to the substrate 1, is sleeved at the lower end of the connecting plate 2. Guide grooves are provided on both sides of the guide frame 12, and a protrusion located within the guide groove is provided at the bottom of the connecting plate 2. The guide frame 12 is made of stainless steel, which provides a robust structure that is not easily deformed, ensuring accurate connection. The movement of plate 2 is guided precisely; the connecting hole is threaded, which facilitates fixed connection with external equipment; the above structure provides precise guidance for the insertion and removal of connecting plate 2, and facilitates fixed connection with external equipment, improving the reliability of the connection; multiple second springs 13 are fixedly fixed at equal intervals on the bottom surface of the protrusion, and the bottom end of the second spring 13 is fixedly fixed to the top surface of the base plate 1; the second spring 13 is made of 304 stainless steel, which is corrosion resistant and has long-lasting elasticity, and can effectively buffer the force during the insertion and removal process; the above structure reduces the wear of the contact points when connecting plate 2 is inserted and removed, extends the service life of the device, and improves the flexibility and versatility of the connection.

[0016] Working Principle: When using this invention, first install the PCB board 9. Align the PCB board 9 with the guide post 11 on the bottom surface of the substrate 1 and insert it. Rotate the knob 4 on the outer wall of the mounting ring 5, causing the rotating shaft 7 to rotate. Since the shaft 7 is threaded within the mounting ring 5, the threaded clamping frame 6 moves towards the PCB board 9 under the action of the threads. Simultaneously, the first spring 8 is stretched, acting as a guide to ensure the clamping frame 6 moves smoothly along a straight line until it tightly clamps both sides of the PCB board 9, thus fixing the PCB board 9. When it is necessary to remove the PCB board 9, rotate the knob 4 in the opposite direction. The clamping frame 6 retracts under the action of the threads on the rotating shaft 7, allowing the PCB board to be removed. Board 9; When connected to the testing equipment, the connection port 3 on the top surface of the connecting board 2 is a connector that can connect to the PCB board 9, facilitating connection with the testing machine and transmission of detection signals; the connection hole is used to fix it to the external equipment to ensure a stable docking; during the insertion and removal process, the protrusion at the bottom of the connecting board 2 slides in the guide groove of the guide frame 12, providing guidance for insertion and removal and ensuring accurate docking; at the same time, the second spring 13 on the bottom surface of the protrusion will deform according to the insertion and removal force, playing a buffering role and reducing wear at the contact point; the probe 10 on the bottom surface of the PCB board 9 contacts the chip, realizing simultaneous testing of multiple chips, while the limiting block can prevent the clamping frame 6 from moving excessively when the rotating shaft 7 rotates, ensuring the stability of clamping; at this point, the device is used.

[0017] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-resolution probe card, comprising a substrate (1), characterized in that: A connecting plate (2) is installed in the middle of the top surface of the substrate (1). The substrate (1) is in the shape of a disc. A connecting port (3) is opened around the connecting plate (2) on the top surface of the substrate (1). A mounting ring (5) is coaxially fixed to the bottom surface of the substrate (1). Multiple guide posts (11) are symmetrically protruded inside the mounting ring (5) on the bottom surface of the substrate (1). A PCB board (9) is inserted into the bottom surface of the substrate (1) through the guide posts (11).

2. The high-resolution measurement probe card according to claim 1, characterized in that: Two rotating shafts (7) are symmetrically rotatably mounted on the outer wall of the mounting ring (5). The opposite ends of the two rotating shafts (7) are coaxially fixed with knobs (4). The shafts of the two rotating shafts (7) located inside the mounting ring (5) are threaded. Clamping frames (6) are sleeved on the threads of the two rotating shafts (7). The clamping frames (6) clamp the two sides of the PCB board (9) respectively.

3. A high-resolution probe card according to claim 2, characterized in that: The two clamping frames (6) are fixedly connected to the inner wall of the mounting ring (5) on both sides of their opposite sides, and the two rotating shafts (7) are fixedly connected to the opposite ends of the clamping frames (6).

4. A high-resolution probe card according to claim 3, characterized in that: Multiple probes (10) are uniformly fixed to the bottom surface of the PCB board (9).

5. A high-resolution probe card according to claim 4, characterized in that: The connecting plate (2) has multiple connecting holes on its top surface and a guide frame (12) fixed to the substrate (1) at its lower end. The guide frame (12) has guide grooves on both sides and a protrusion in the guide groove at the bottom of the connecting plate (2).

6. A high-resolution probe card according to claim 5, characterized in that: Multiple second springs (13) are fixedly connected at equal intervals on the bottom surface of the protrusion, and the bottom end of the second spring (13) is fixedly connected to the top surface of the substrate (1).

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