A film sheet resistance double-sided testing device

Abstract

The utility model belongs to film square resistance technical field, and disclose a kind of film square resistance double-sided testing device, including positioning frame, the inside movable mounting of positioning frame has roll assembly, the outside of roll assembly is wound with film, the both sides of film are wound in the bottom of two roll assemblies respectively, the inside of positioning frame is provided with the swing mechanism located just below roll assembly between, the lower end transmission sleeve of swing mechanism is connected with transmission assembly, the rear end of transmission assembly extends to the back of positioning frame and is connected with driving motor. The utility model under the cooperation of connecting sleeve, make the guiding arc block that follow transmission assembly swing left and right can be in the cooperation of self-adapting guide pulley, and in the cooperation of positioning groove group make swing mechanism between roll assembly and transmission assembly, ensure that the probe head that swings left and right can alternately aim at the both sides of film outside two roll assemblies, to complete accurate measurement.

Description

Technical Field

[0001] This utility model belongs to the field of thin film sheet resistance technology, specifically a thin film sheet resistance double-sided testing device. Background Technology

[0002] Composite current collectors are functional thin films composed of multiple layers of materials, typically employing a "metal-polymer-metal" structure. They require coating technology to attach the metals to both sides of the polymer material, with current methods including vacuum coating, magnetron sputtering, and aqueous coating. However, magnetron sputtering and aqueous coating processes cannot record sheet resistance changes in real time, negatively impacting resistance detection. Furthermore, compared to aqueous coating, vacuum coating eliminates waste liquid pollution, aligning with green production trends. The evaporation boat in vacuum coating is the core component of resistance-heated evaporation coating, heating the evaporation material (such as metals or alloys) to a gaseous state via current, which is then deposited onto the substrate surface in a vacuum environment to form a thin film.

[0003] Thin film sheet resistance double-sided testing achieves the testing function by moving a set of test probes to make contact with both sides of the film. The film is wound on two rollers, and a drive mechanism makes a set of test probes contact the film on the two rollers respectively, thus achieving contact with both sides of the film and realizing double-sided testing. However, since the two rollers are independent of each other, drive mechanisms need to be set in multiple directions, and each drive mechanism needs to be equipped with a positioning mechanism to ensure good contact between the moved test probes and the film surface. This not only makes the coordination of the drive mechanisms complex, but also increases the cost of the equipment and the failure rate due to the need for positioning mechanisms.

[0004] Therefore, it is necessary to develop a double-sided thin-film sheet resistance testing device to address the shortcomings of existing technologies. Utility Model Content

[0005] To address the problems mentioned in the background art, this utility model provides a double-sided thin film sheet resistance testing device, which has the advantages of simple testing and calibration.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a double-sided thin film sheet resistance testing device, including a mounting frame, a roller assembly is movably mounted inside the mounting frame, a thin film is wound around the outside of the roller assembly, a swing mechanism is provided inside the mounting frame, a transmission component is drivenly sleeved at the lower end of the swing mechanism, one end of the transmission component extends to the back of the mounting frame and is connected to a drive motor; an adjustment component is connected to the upper end of the swing mechanism, a mounting rod is connected to the top of the adjustment component, several probes are mounted on the top of the mounting rod, positioning slots are provided on both the front and rear sides of the inner wall of the mounting frame, and the swing mechanism is movably engaged with the positioning slots. The swing mechanism (2), roller assembly (3), adjustment component (7), positioning slots (8) and transmission component (9) cooperate with each other to ensure that the probe (6) can alternately align with both sides of the outer film (4) of the roller assembly (3) to complete accurate measurement.

[0007] Furthermore, the roller assembly (3) has two parts, left and right, and the two sides of the film (4) are respectively wrapped around the bottom of the two roller assemblies (3); the swing mechanism (2) has two parts, front and back, located directly below the two roller assemblies (3). When the swing mechanism (2) is engaged with the left and right sides of the positioning groove group (8), the swing mechanism (2) is located between the transmission assembly (9) and the two roller assemblies (3) on the left and right sides respectively; the swing mechanism includes a connector sleeved outside the transmission assembly, the upper end of the connector is connected to a connecting sleeve, the upper end of the connecting sleeve is sleeved with a telescopic rod, the upper end of the telescopic rod is connected to a connecting frame, the upper end of the connecting frame is connected to a guide arc block, the outer surface of the guide arc block is smooth, and the outer surface of the guide arc block is flush with the roller. The two ends of the outer surface of the component are rolled together, and the center of the guide arc block is located between the connecting frame and the transmission component. The mounting frame includes a mounting plate disposed on the outside of the swing mechanism, the roller assembly and the film. The mounting frame has two first through holes on the front and rear sides. The two ends of the roller assembly are rotatably sleeved in the two corresponding first through holes through bearings. The mounting plate also has a second through hole located directly below the two first through holes on the front and rear sides. The two ends of the transmission component are rotatably sleeved in the second through hole through bearings. The mounting plate also has a third through hole on the back. The drive motor is fixedly installed inside the mounting plate. The rear end of the drive motor output shaft extends to the back of the mounting plate through the third through hole and is connected to the transmission component.

[0008] Furthermore, the positioning groove group includes a first positioning groove and a second positioning groove formed inside the mounting plate. The first positioning groove and the second positioning groove are respectively located between the second through hole and the two first through holes. The first positioning groove and the second positioning groove are respectively on two circular arcs with the second through hole as the center. The radii of the two circular arcs are different, and the circular arcs containing the inner cavities of the first positioning groove and the second positioning groove do not intersect.

[0009] Furthermore, the transmission assembly includes a transmission rod disposed inside the mounting bracket and fixedly sleeved inside the front and rear connectors. The two ends of the transmission rod pass through the front and rear second through holes and extend to the front and rear of the mounting plate. A transmission belt is provided on the back of the mounting plate. Two transmission wheels are sleeved inside the transmission belt. One transmission wheel is fixedly connected to the rear end of the transmission rod, and the other transmission wheel is fixedly connected to the rear end of the output shaft of the drive motor.

[0010] Furthermore, a transmission wheel connected to the rear end of the transmission rod includes a pulley, a transmission shaft is movably sleeved inside the pulley, one end of the transmission shaft is fixedly connected to the transmission rod, a connecting groove is formed in the middle of the outer surface of the transmission shaft, a spring is provided inside the connecting groove, and the two ends of the spring are respectively connected to the connecting groove and the pulley.

[0011] Furthermore, the connector includes a connecting ring that is fixedly sleeved on the outer surface of the transmission rod. The connecting ring is provided with two elastic clips on the side near the inner wall of the mounting plate. The two elastic clips swing left and right with the connecting ring and engage with the first positioning groove and the second positioning groove respectively.

[0012] Furthermore, the elastic clip consists of an anti-disengagement groove, a positioning protrusion, and a positioning spring. The anti-disengagement groove is formed on the back of the connecting ring, the positioning protrusion is slidably engaged inside the anti-disengagement groove, and the two ends of the positioning spring are respectively fixedly connected to the connecting ring and the positioning protrusion.

[0013] The positioning protrusions in the two elastic clips each have a smooth inclined surface on one side, and the smooth inclined surfaces of the two positioning protrusions are not on the same side. The positioning protrusions slide out of the first positioning groove and the second positioning groove through the smooth inclined surfaces.

[0014] Furthermore, the connecting sleeve includes a connecting rod fixedly connected to the upper end of the connecting ring. A limiting cavity is formed at the top of the connecting rod. The lower end of the telescopic rod is inserted into the interior of the limiting cavity and is connected to a buffer spring. The lower end of the buffer spring is connected to the bottom of the inner cavity of the limiting cavity.

[0015] Furthermore, the adjustment assembly includes a positioning frame disposed between the two telescopic rods, and guide grooves located at both ends of the positioning frame are opened on the facing surfaces of the two telescopic rods. Guide blocks are slidably engaged inside the guide grooves, and the guide blocks are fixedly connected to both ends of the positioning frame.

[0016] The mounting rod is fixedly connected to the end of the positioning frame away from the transmission component. An adjusting rod is rotatably connected to the middle of the positioning frame away from the mounting rod. The positioning rod is threaded onto the external side of the adjusting rod. The two ends of the positioning rod are fixedly connected to the facing surfaces of the two telescopic rods.

[0017] Furthermore, the roller assembly includes a roller disposed inside the mounting frame and wound around both sides of the film. The opening end of the roller is rotatably connected to the inside of the first through hole via a bearing. Both ends of the outer surface of the roller are rotatably sleeved with adaptive guide wheels located inside the mounting plate via bearings. The outer surface of the guide arc block is in rolling contact with the adaptive guide wheels.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0019] Due to the design of the guide arc block, in cooperation with the connecting sleeve, the guide arc block that swings left and right following the transmission component and the connector can automatically abut against the adaptive guide wheel. With the cooperation of the positioning groove group, the swinging mechanism is positioned between the roller assembly and the transmission component, thereby ensuring that the left and right swinging probe head can alternately align with both sides of the outer film of the two roller assemblies, thus completing accurate measurement.

[0020] Due to the design of the connector, this invention can drive the upper adjustment component, mounting rod, and probe head to swing left and right under the drive of the transmission component. Furthermore, with the cooperation of the positioning slot assembly, the swing mechanism can reach a predetermined angle, thereby ensuring that the swing mechanism can drive the probe head to the position aligned with the film. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of this utility model;

[0022] Figure 2 This is a side view of the present invention;

[0023] Figure 3 This is a sectional view of the front of the present invention;

[0024] Figure 4 for Figure 3 The front view of the mid-section;

[0025] Figure 5 This is a schematic diagram of the positioning frame of this utility model;

[0026] Figure 6 This is a schematic diagram of the swing mechanism of this utility model;

[0027] Figure 7This is a sectional view of the side of the swing mechanism of this utility model;

[0028] Figure 8 for Figure 7 A partial schematic diagram of the positioning protrusion in the middle;

[0029] Figure 9 This is a schematic diagram of the transmission wheel of this utility model;

[0030] Figure 10 This is a sectional view of the side of the transmission wheel of this utility model;

[0031] Figure 11 This is a schematic diagram of the structure of the adjustment component of this utility model;

[0032] Figure 12 This is a schematic diagram of the transfer of the thin film of this utility model between the coating mechanism and the roller assembly.

[0033] In the diagram: 1. Mounting bracket; 11. Mounting plate; 12. First through hole; 13. Second through hole; 14. Third through hole; 2. Swing mechanism; 21. Connector; 211. Connecting ring; 212. Anti-detachment groove; 213. Positioning protrusion; 214. Positioning spring; 22. Connecting sleeve; 221. Connecting rod; 222. Limiting cavity; 223. Buffer spring; 23. Telescopic rod; 24. Connecting bracket; 25. Guide arc block; 3. Roller assembly; 31. Roller; 32. 4. Adaptive guide wheel; 5. Thin film; 6. Mounting rod; 7. Probe head; 8. Adjustment assembly; 9. Positioning frame; 10. Guide groove; 11. Guide block; 12. Positioning rod; 13. Adjusting rod; 14. Positioning groove group; 15. First positioning groove; 16. Second positioning groove; 17. Transmission assembly; 18. Transmission rod; 19. Transmission belt; 10. Transmission wheel; 11. Pulley; 12. Transmission shaft; 13. Connecting groove; 14. Spring; 15. Drive motor. Detailed Implementation

[0034] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0035] like Figures 1 to 12As shown, this utility model provides a double-sided thin film sheet resistance testing device, including a mounting frame 1. Two left and right roller assemblies 3 are movably mounted inside the mounting frame 1. A thin film 4 is wound around the outside of the roller assemblies 3. The thin film 4 passes through a coating mechanism when transferred between the two rollers 3. The two sides of the thin film 4 are respectively wound around the bottom of the two roller assemblies 3. Two swing mechanisms 2 are arranged inside the mounting frame 1, located directly below the two roller assemblies 3. A transmission assembly 9 is driven and sleeved at the lower end of the two swing mechanisms 2. One end of the transmission assembly 9 extends to the back of the mounting frame 1 and is connected to a drive motor 10. An adjustment assembly 7 is connected to the upper end of the two swing mechanisms 2. A mounting rod 5 is connected to the top of the adjustment assembly 7. Several probes 6 are mounted on the top of the mounting rod 5. Positioning groove groups 8 are opened on both the front and rear sides of the inner wall of the mounting frame 1. The swing mechanisms 2 are movably engaged with the positioning groove groups 8. When the swing mechanisms 2 are engaged with the left and right sides of the positioning groove groups 8, the swing mechanisms 2 are respectively located between the transmission assembly 9 and the two left and right roller assemblies 3.

[0036] The swing mechanism 2 includes a connector 21 sleeved on the outside of the transmission assembly 9. The upper end of the connector 21 is connected to a connecting sleeve 22. The upper end of the connecting sleeve 22 is sleeved to a telescopic rod 23. The upper end of the telescopic rod 23 is connected to a connecting frame 24. The upper end of the connecting frame 24 is connected to a guide arc block 25. The outer surface of the guide arc block 25 is smooth. The outer surface of the guide arc block 25 is in rolling connection with both ends of the outer surface of the roller assembly 3. The center of the guide arc block 25 is located between the connecting frame 24 and the transmission assembly 9.

[0037] Due to the setting of the guide arc block 25, with the cooperation of the connecting sleeve 22, the guide arc block 25, which swings left and right with the transmission component 9 and the connector 21, can automatically abut against the adaptive guide wheel 32 with the cooperation of the adaptive guide wheel 32. With the cooperation of the positioning groove group 8, the swing mechanism 2 is positioned between the roller assembly 3 and the transmission component 9, thereby ensuring that the left and right swinging probe head 6 can alternately align with both sides of the outer film 4 of the two roller assemblies 3, thereby completing accurate measurement.

[0038] The mounting frame 1 includes a mounting plate 11 disposed outside the swing mechanism 2, the roller assembly 3, and the film 4. The mounting frame 1 has two first through holes 12 on both the front and rear sides. The two ends of the roller assembly 3 are rotatably sleeved inside the two corresponding first through holes 12 via bearings. The mounting plate 11 also has second through holes 13 located directly below the two first through holes 12 on both the front and rear sides. The two ends of the transmission assembly 9 are rotatably sleeved inside the second through holes 13 via bearings. The mounting plate 11 also has a third through hole 14 on the back side. The drive motor 10 is fixedly installed inside the mounting plate 11. The rear end of the output shaft of the drive motor 10 extends to the back side of the mounting plate 11 through the third through hole 14 and is connected to the transmission assembly 9.

[0039] The positioning groove group 8 includes a first positioning groove 81 and a second positioning groove 82 formed inside the mounting plate 11. The first positioning groove 81 and the second positioning groove 82 are respectively located between the second through hole 13 and the two first through holes 12. The first positioning groove 81 and the second positioning groove 82 are respectively on two circular arcs with the second through hole 13 as the center. The radii of the two circular arcs are different, and the circular arcs containing the inner cavities of the first positioning groove 81 and the second positioning groove 82 do not intersect.

[0040] Due to the positioning groove group 8, the swing mechanism 2 can automatically swing left and right with the transmission component 9 under the drive of the transmission component 9 and the drive motor 10, so as to ensure that the probe head 6 at the upper end of the swing mechanism 2 is aligned with both sides of the outer film 4 of the roller 31.

[0041] The transmission assembly 9 includes a transmission rod 91 disposed inside the mounting bracket 1 and fixedly sleeved inside the front and rear connectors 21. The two ends of the transmission rod 91 pass through the front and rear second through holes 13 and extend to the front and rear of the mounting plate 11. A transmission belt 92 is disposed on the back of the mounting plate 11. Two transmission wheels 93 are sleeved inside the transmission belt 92. One transmission wheel 93 is fixedly connected to the rear end of the transmission rod 91, and the other transmission wheel 93 is fixedly connected to the rear end of the output shaft of the drive motor 10.

[0042] Among them, a transmission wheel 93 connected to the rear end of the transmission rod 91 includes a pulley 931, a transmission shaft 932 is movably sleeved inside the pulley 931, one end of the transmission shaft 932 is fixedly connected to the transmission rod 91, a connecting groove 933 is opened in the middle of the outer surface of the transmission shaft 932, a spring 934 is installed inside the connecting groove 933, and the two ends of the spring 934 are respectively connected to the connecting groove 933 and the pulley 931;

[0043] Due to the configuration of the transmission wheel 93, the operation of the drive motor 10, in conjunction with the transmission rod 91 and the transmission belt 92, can drive the two swing mechanisms 2 to swing left and right. Moreover, due to the elastic torque transmission of the spring 934, the transmission rod 91 can rotate with the transmission wheel 93 and the transmission rod 92. At the same time, when the connector 21 engages with the positioning groove group 8 on its back, the torque transmission of the spring 934 can provide sufficient time for the drive motor 10 to stop running, thus avoiding overload damage caused by the drive motor 10 being unable to transmit after the swing mechanism 2 and the positioning groove group 8 are engaged.

[0044] The connector 21 includes a connecting ring 211 fixedly sleeved on the outer surface of the transmission rod 91. The connecting ring 211 is provided with two elastic clips on the side near the inner wall of the mounting plate 11. The two elastic clips swing left and right with the connecting ring 211 and are respectively engaged with the first positioning groove 81 and the second positioning groove 82.

[0045] The elastic clip consists of an anti-disengagement groove 212, a positioning protrusion 213, and a positioning spring 214. The anti-disengagement groove 212 is opened on the back of the connecting ring 211, the positioning protrusion 213 is slidably engaged inside the anti-disengagement groove 212, and the two ends of the positioning spring 214 are fixedly connected to the connecting ring 211 and the positioning protrusion 213 respectively.

[0046] The positioning protrusions 213 in the two elastic clips each have a smooth inclined surface on one side, and the smooth inclined surfaces of the two positioning protrusions 213 are not on the same side. The positioning protrusions 213 slide out of the first positioning groove 81 and the second positioning groove 82 through the smooth inclined surfaces.

[0047] Due to the configuration of the connector 21, it can drive the upper adjustment component 7, mounting rod 5 and probe 6 to swing left and right under the drive of the transmission component 9, and with the cooperation of the positioning groove group 8, the swing mechanism 2 can reach a predetermined angle, thereby ensuring that the swing mechanism 2 can drive the probe 6 to the position aligned with the film 4.

[0048] The connecting sleeve 22 includes a connecting rod 221 fixedly connected to the upper end of the connecting ring 211. A limiting cavity 222 is opened at the top of the connecting rod 221. The lower end of the telescopic rod 23 is inserted into the inside of the limiting cavity 222 and is connected to a buffer spring 223. The lower end of the buffer spring 223 is connected to the bottom of the inner cavity of the limiting cavity 222.

[0049] Due to the design of the connecting sleeve 22, under its elastic support, the telescopic rod 23 and the guide arc block 25 at the upper end of the connecting frame 24 can be driven to swing left and right through the transmission component 9 and the connector 21, so that the guide arc block 25 contacts the adaptive guide wheel 32 in sequence; moreover, under the elastic support of the connecting sleeve 22, the automatic contact range between the outer part of the guide arc block 25 and the adaptive guide wheel 32 can be increased, which can ensure that the guide arc block 25 can automatically roll with the adaptive guide wheel 32, so that the left and right swinging probe head 6 maintains a suitable distance between itself and the film 4 under the radial movement of the guide arc block 25.

[0050] The adjustment component 7 includes a positioning frame 71 disposed between two telescopic rods 23. The opposing surfaces of the two telescopic rods 23 are provided with guide grooves 72 located at both ends of the positioning frame 71. Guide blocks 73 are slidably engaged inside the guide grooves 72 and are fixedly connected to both ends of the positioning frame 71.

[0051] Mounting rod 5 is fixedly connected to the end of positioning frame 71 away from transmission component 9. Adjusting rod 75 is rotatably connected to the middle part of positioning frame 71 away from mounting rod 5. Positioning rod 74 is threaded onto the outside of adjusting rod 75. The two ends of positioning rod 74 are fixedly connected to the facing surfaces of two telescopic rods 23.

[0052] Due to the setting of the adjustment component 7, in cooperation with the swing mechanism 2, the operator can adjust the position of the mounting rod 5 and the probe head 6 through the adjustment component 7. This allows the guide block 25 to swing adaptively between the transmission component 9 and the two roller assemblies 3 in sequence with the cooperation of the adaptive guide wheel 32, ensuring that the probe head 6 can be aligned with the bottom of the outer film 4 of the two roller assemblies 3 in sequence.

[0053] The roller assembly 3 includes a roller 31 disposed inside the mounting frame 1 and wound around both sides of the film 4. The opening end of the roller 31 is rotatably connected to the inside of the first through hole 12 through a bearing. Both ends of the outer surface of the roller 31 are rotatably sleeved with adaptive guide wheels 32 located inside the mounting plate 11 through bearings. The outer surface of the guide arc block 25 is in rolling contact with the adaptive guide wheels 32.

[0054] Working principle and usage process of this utility model:

[0055] The film 4 is drawn out from the unwinding area in the coating mechanism. After passing through the first coating area in the coating mechanism, the coating of one side of the film 4 is completed. After passing through one of the winding rollers 31 to complete the inspection of the coated surface, it enters the second coating area in the coating mechanism to coat the other side of the film 4. After being drawn out, it passes through another winding roller 31 and then the inspection of the coated surface is completed. Finally, it enters the winding area in the coating mechanism.

[0056] The specific testing process is as follows: Figure 12 The film 4 is wound onto two rollers 31, and both sides of the film 4 are conveyed around the bottom of the two rollers 31 respectively. According to the thickness of the film 4, the overall length from the connector 21 to the guide arc block 25 is adjusted to ensure that the minimum distance when the outer surface of the guide arc block 25 swings around the transmission rod 91 is less than the distance between the transmission rod 91 and the adaptive guide wheel 32, while the maximum distance when the outer surface of the guide arc block 25 swings around the transmission rod 91 is greater than the distance between the transmission rod 91 and the adaptive guide wheel 32. Specifically, the adjusting rod 75 is rotated so that under the restriction of the positioning rod 74 and the cooperation of the guide groove 72 and the guide block 73, the positioning frame 71 is pushed to move. The movement of the positioning frame 71 drives the mounting rod 5 and several probes 6 at its outer end to move, so that the outer end of the probe 6 can stably contact the film 4 under the cooperation of the guide arc block 25 and the adaptive guide wheel 32 and maintain a suitable contact force. Then, the adjusting rod 75 is locked to fix the distance between the probe 6 and the roller 31, thereby determining the distance between the probe 6 and the film 4.

[0057] Then, starting the drive motor 10 will move the two pulleys 931 in cooperation with the transmission belt 92. The transmission shaft 932 and the spring 934 will drive the transmission rod 91 to rotate. The rotation of the transmission rod 91 will drive the connectors 21 at both ends to rotate. Since the rotation of the connectors 21 can be coordinated with the positioning groove group 8, the transmission component 9 can swing the connectors 21 left and right to the first positioning groove 81 and the second positioning groove 82. This allows the swinging mechanism 2 to swing within a fixed range. When the connectors 21 are engaged with the positioning groove group 8, the upper end of the connectors 21 will drive the guide arc block 25 to contact the outer surface of the adaptive guide wheel 32 through the connecting sleeve 22, the telescopic rod 23 and the connecting frame 24. Under the elastic support of the connecting sleeve 22, the farthest end of the outer surface of the swinging mechanism 2 will contact the adaptive guide wheel 32. At this time, the swinging mechanism 2 is located between the roller 31 and the transmission rod 91. The probe 6 follows the swinging mechanism 2, the adjustment component 7 and the mounting rod 5 to align with the film 4.

[0058] With the cooperation of the first positioning groove 81 and the second positioning groove 82, the swing mechanism 2, which swings left and right, can use the adjustment component 7 and the mounting rod 5 at its upper end to make the probe head 6 contact and calibrate the upper and lower sides of the outer film 4 of the two rollers 31 in sequence.

[0059] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0060] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A double-sided sheet resistance testing device for thin films, comprising a mounting frame (1), characterized in that: The mounting frame (1) is movably mounted with a roller assembly (3), and a film (4) is wound around the outside of the roller assembly (3); The mounting bracket (1) is provided with a swing mechanism (2) inside. The lower end of the swing mechanism (2) is connected to a transmission component (9). One end of the transmission component (9) extends to the back of the mounting bracket (1) and is connected to a drive motor (10). The upper end of the swing mechanism (2) is connected to an adjustment component (7), the top of the adjustment component (7) is connected to an installation rod (5), and a plurality of probes (6) are installed on the top of the installation rod (5). The mounting bracket (1) has positioning grooves (8) on both the front and rear sides of its inner wall, and the swing mechanism (2) is movably engaged with the positioning grooves (8). Among them, the swing mechanism (2), the roller assembly (3), the adjustment assembly (7), the positioning groove group (8) and the transmission assembly (9) cooperate with each other to ensure that the probe (6) can alternately align with both sides of the outer film (4) of the roller assembly (3) to complete the accurate measurement.

2. The thin film sheet resistance double-sided testing device according to claim 1, characterized in that: The roller assembly (3) has two parts, left and right, and the two sides of the film (4) are respectively wrapped around the bottom of the two roller assemblies (3); The swing mechanism (2) has two front and rear sides, located directly below the two roller assemblies (3). When the swing mechanism (2) is engaged with the left and right sides of the positioning groove group (8), the swing mechanism (2) is located between the transmission assembly (9) and the two left and right roller assemblies (3). The swing mechanism (2) includes a connector (21) sleeved on the outside of the transmission assembly (9). The upper end of the connector (21) is connected to a connecting sleeve (22). The upper end of the connecting sleeve (22) is sleeved to a telescopic rod (23). The upper end of the telescopic rod (23) is connected to a connecting frame (24). The upper end of the connecting frame (24) is connected to a guide arc block (25). The outer surface of the guide arc block (25) is smooth. The outer surface of the guide arc block (25) is in rolling connection with both ends of the outer surface of the roller assembly (3). The center of the guide arc block (25) is located between the connecting frame (24) and the transmission assembly (9). The mounting frame (1) includes a mounting plate (11) disposed outside the swing mechanism (2), the roller assembly (3) and the film (4). The mounting frame (1) has two first through holes (12) on the front and rear sides. The two ends of the roller assembly (3) are rotatably sleeved inside the two corresponding first through holes (12) through bearings. The mounting plate (11) also has a second through hole (13) located directly below the two first through holes (12) on the front and rear sides. The two ends of the transmission assembly (9) are rotatably sleeved inside the second through hole (13) through bearings. The mounting plate (11) also has a third through hole (14) on the back side. The drive motor (10) is fixedly installed inside the mounting plate (11). The rear end of the output shaft of the drive motor (10) extends to the back side of the mounting plate (11) through the third through hole (14) and is connected to the transmission assembly (9).

3. The thin film sheet resistance double-sided testing device according to claim 2, characterized in that: The positioning groove group (8) includes a first positioning groove (81) and a second positioning groove (82) opened inside the mounting plate (11). The first positioning groove (81) and the second positioning groove (82) are respectively located between the second through hole (13) and the two first through holes (12). The first positioning groove (81) and the second positioning groove (82) are respectively on two circular arcs with the second through hole (13) as the center. The radii of the two circular arcs are different. The circular arcs containing the inner cavities of the first positioning groove (81) and the second positioning groove (82) do not intersect.

4. The thin film sheet resistance double-sided testing device according to claim 3, characterized in that: The transmission assembly (9) includes a transmission rod (91) disposed inside the mounting bracket (1) and fixedly sleeved inside the front and rear connectors (21). The two ends of the transmission rod (91) pass through the front and rear second through holes (13) and extend to the front and rear of the mounting plate (11). A transmission belt (92) is provided on the back of the mounting plate (11). Two transmission wheels (93) are sleeved inside the transmission belt (92). One transmission wheel (93) is fixedly connected to the rear end of the transmission rod (91), and the other transmission wheel (93) is fixedly connected to the rear end of the output shaft of the drive motor (10).

5. A double-sided thin-film sheet resistance testing device according to claim 4, characterized in that: A transmission wheel (93) connected to the rear end of the transmission rod (91) includes a pulley (931). A transmission shaft (932) is movably sleeved inside the pulley (931). One end of the transmission shaft (932) is fixedly connected to the transmission rod (91). A connecting groove (933) is provided in the middle of the outer surface of the transmission shaft (932). A spring (934) is provided inside the connecting groove (933). The two ends of the spring (934) are connected to the connecting groove (933) and the pulley (931) respectively.

6. The thin film sheet resistance double-sided testing device according to claim 4, characterized in that: The connector (21) includes a connecting ring (211) fixedly sleeved on the outer surface of the transmission rod (91). The connecting ring (211) has two elastic clips on the side near the inner wall of the mounting plate (11). The two elastic clips swing left and right with the connecting ring (211) and are respectively engaged with the first positioning groove (81) and the second positioning groove (82).

7. A double-sided thin-film sheet resistance testing device according to claim 6, characterized in that: The elastic clip consists of an anti-disengagement groove (212), a positioning protrusion (213), and a positioning spring (214). The anti-disengagement groove (212) is opened on the back of the connecting ring (211). The positioning protrusion (213) is slidably engaged inside the anti-disengagement groove (212). The two ends of the positioning spring (214) are fixedly connected to the connecting ring (211) and the positioning protrusion (213) respectively. The positioning protrusions (213) in the two elastic clips each have a smooth inclined surface on one side, and the smooth inclined surfaces of the two positioning protrusions (213) are not on the same side. The positioning protrusions (213) slide out of the first positioning groove (81) and the second positioning groove (82) through the smooth inclined surface.

8. A double-sided thin-film sheet resistance testing device according to claim 6, characterized in that: The connecting sleeve (22) includes a connecting rod (221) fixedly connected to the upper end of the connecting ring (211). A limiting cavity (222) is opened at the top of the connecting rod (221). The lower end of the telescopic rod (23) is inserted into the inside of the limiting cavity (222) and is connected to a buffer spring (223). The lower end of the buffer spring (223) is connected to the bottom of the inner cavity of the limiting cavity (222).

9. A double-sided thin-film sheet resistance testing device according to claim 1, characterized in that: The adjustment assembly (7) includes a positioning frame (71) disposed between two telescopic rods (23). The opposing surfaces of the two telescopic rods (23) are provided with guide grooves (72) located at both ends of the positioning frame (71). Guide blocks (73) are slidably engaged inside the guide grooves (72). The guide blocks (73) are fixedly connected to both ends of the positioning frame (71). The mounting rod (5) is fixedly connected to the end of the positioning frame (71) away from the transmission component (9). The middle part of the positioning frame (71) away from the mounting rod (5) is rotatably connected to the adjusting rod (75). The external thread of the adjusting rod (75) is threaded with the positioning rod (74). The two ends of the positioning rod (74) are fixedly connected to the opposing surfaces of the two telescopic rods (23).

10. A double-sided thin-film sheet resistance testing device according to claim 2, characterized in that: The roller assembly (3) includes a roller (31) disposed inside the mounting frame (1) and wound around both sides of the film (4). The opening of the roller (31) is rotatably connected to the inside of the first through hole (12) through a bearing. Both ends of the outer surface of the roller (31) are rotatably sleeved with adaptive guide wheels (32) located inside the mounting plate (11) through bearings. The outer surface of the guide arc block (25) is in rolling contact with the adaptive guide wheel (32).

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