A probe card inspection apparatus

Abstract

The utility model relates to probe card detection technical field especially a kind of probe card detection device, including shell body and multiple CCD cameras, the annular rotating disc is rotatably installed in shell body bottom surface, the inner shell is rotatably connected on rotating disc upper surface, connecting piece is fixed on the outer wall of inner shell, the CCD camera is fixed on connecting piece, the lens protection shell made of transparent material is fixed on the inner shell and is used to accommodate CCD camera lens, the top of shell body is fixed with cover plate, the probe card detection device provided by the utility model forms closed space to the probe card by inner shell and tray, can effectively prevent the impurity and water vapor pollution camera lens of air, by rotatable transparent material lens protection shell Secondary protection is carried out to lens, ensure the quality of image acquisition.

Description

Technical Field

[0001] This utility model relates to the field of probe card detection technology, and in particular to a probe card detection device. Background Technology

[0002] Probe cards are critical interfaces connecting test equipment and wafers in wafer testing. Their surfaces are covered with countless tiny, needle-like probes that directly contact the chip pads on the wafer to perform electrical performance tests and screen out qualified chips. Their performance directly determines the accuracy, reliability, and efficiency of the test results. Poor contact or misalignment of a single probe can lead to the misjudgment of an entire chip, causing significant losses. As chip manufacturing processes become increasingly advanced (e.g., 5nm, 3nm), chip pads become smaller and more closely spaced, demanding micron- or even nanometer-level precision from probe cards.

[0003] Therefore, before installing the probe card onto the probe station for formal testing, it must be comprehensively tested using specialized testing equipment to ensure it is in optimal working condition. Among these tests, ensuring that the tips of all probes on the probe card are on the same perfectly horizontal plane is crucial for ensuring that all probes can simultaneously and stably contact the chip pads. Probe testing typically uses a high-magnification CCD camera combined with image processing software for automated measurement. However, over long-term use, the lens surface of the CCD camera may become contaminated by impurities and water vapor in the air, affecting image clarity and consequently reducing the accuracy of the testing results. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies where the lens of a CCD camera is contaminated during image acquisition, and to propose a probe card detection device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] Design a probe card detection device, including an outer shell and multiple CCD cameras. An annular rotating disk is rotatably mounted on the bottom surface of the outer shell. An inner shell is rotatably connected to the upper surface of the rotating disk. A connector is fixed to the outer wall of the inner shell. The CCD cameras are fixed to the connector. A lens protective shell made of transparent material is fixed to the inner shell to accommodate the CCD camera lens. A cover plate is fixed to the top of the outer shell.

[0007] Preferably, a motor is fixedly connected to the cover plate, and the output end of the motor extends into the outer shell and is fixedly connected to the top of the inner shell.

[0008] Preferably, a connecting pipe is fixedly connected to the bottom surface of the cover plate, a central bevel gear is fixedly connected to the lower end surface of the connecting pipe, a planetary bevel gear is rotatably mounted on the outer wall of the inner housing, the lens protective shell is fixedly connected to the planetary bevel gear, and the planetary bevel gear meshes with the central bevel gear.

[0009] Preferably, it further includes a drive structure for driving the outer casing to rise and fall. The drive structure includes a vertical plate, a slide rail fixedly connected to the vertical plate, a sliding seat slidably fitted on the slide rail, a connecting plate fixedly connected to the sliding seat, and the connecting plate fixedly connected to the outer casing.

[0010] Preferably, the top of the upright plate is equipped with an electric cylinder for driving the sliding seat to move.

[0011] Preferably, the bottom of the upright plate is provided with a tray for holding the probe card to be tested.

[0012] Preferably, there are at least three CCD cameras, and all CCD cameras are distributed on the same circumference.

[0013] The probe card detection device proposed in this utility model has the following advantages: the probe card detection device provided by this utility model forms a sealed space with the inner shell and the tray to capture images of the probe card, which can effectively prevent air impurities and water vapor from contaminating the camera lens. The lens is further protected by a rotatable transparent lens protective shell to ensure the quality of image acquisition. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a probe card detection device proposed in this utility model.

[0015] Figure 2 This is a cross-sectional view of a probe card detection device proposed in this utility model.

[0016] Figure 3 This utility model proposes a probe card detection device. Figure 2 Enlarged view of point A in the middle.

[0017] Figure 4 This is a schematic diagram of the internal structure of the inner shell of a probe card detection device proposed in this utility model.

[0018] Figure 5 This is a schematic diagram of the internal structure of the outer shell of a probe card detection device proposed in this utility model.

[0019] Figure 6 This is a schematic diagram of the inner shell of a probe card detection device proposed in this utility model.

[0020] In the diagram: 1. Vertical plate; 2. Slide rail; 3. Electric cylinder; 4. Sliding seat; 5. Connecting plate; 6. Outer shell; 7. Cover plate; 8. Motor; 9. Tray; 10. Inner shell; 11. Rotating disk; 12. Connecting piece; 13. CCD camera; 14. Planetary bevel gear; 15. Central bevel gear; 16. Connecting pipe; 17. Lens protective shell. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Reference Figures 1-5 A probe card detection device includes a housing 6, at least three CCD cameras 13, and a drive structure for driving the housing 6 to rise and fall, wherein:

[0023] The driving structure includes a vertical plate 1, a slide rail 2 fixedly connected to the vertical plate 1, a sliding seat 4 slidably fitted on the slide rail 2, a connecting plate 5 fixedly connected to the sliding seat 4, and the connecting plate 5 fixedly connected to the outer shell 6. An electric cylinder 3 is provided at the top of the vertical plate 1 to drive the sliding seat 4 to move, and a tray 9 is provided at the bottom of the vertical plate 1 to support the probe card to be tested.

[0024] The upright plate 1 supports the slide rail 2 to make it vertically fixed. The electric cylinder 3 acts as a drive source to drive the sliding seat 4 to move vertically on the slide rail 2, thereby driving the outer shell 6 to rise and fall through the connecting plate 5. The probe card to be tested is placed on the tray 9. When the outer shell 6 descends, it covers the probe card to be tested.

[0025] like Figures 4-6 As shown, an annular rotating disk 11 is rotatably mounted on the bottom surface of the outer shell 6. An inner shell 10 is rotatably connected to the upper surface of the rotating disk 11. A connector 12 is fixed to the outer wall of the inner shell 10. A CCD camera 13 is fixed to the connector 12. All CCD cameras 13 are distributed on the same circumference. A lens protective shell 17 made of transparent material is fixed to the inner shell 10 to accommodate the lens of the CCD camera 13. A cover plate 7 is fixed to the top of the outer shell 6. A motor 8 is fixed to the cover plate 7. The output end of the motor 8 extends into the interior of the outer shell 6 and is fixed to the top of the inner shell 10.

[0026] When the outer shell 6 descends, it will cause the inner shell 10 to cover the probe card to be tested. After the motor 8 is powered on, it will drive the inner shell 10 to rotate. During the rotation of the inner shell 10, it will drive the CCD camera 13 to rotate around the probe card, so that the CCD camera 13 can capture images of the probe card to be tested from all directions through the lens protective shell 17. During the image acquisition process, since the inner shell 10 and the tray 9 form a sealed space surrounding the probe card, it can effectively prevent dust and impurities in the air from contaminating the lens during the image acquisition process.

[0027] like Figure 5 and Figure 6 As shown, a connecting pipe 16 is fixedly connected to the bottom surface of the cover plate 7, a central bevel gear 15 is fixedly connected to the lower end surface of the connecting pipe 16, a planetary bevel gear 14 is rotatably installed on the outer wall of the inner housing 10, the lens protective housing 17 is fixedly connected to the planetary bevel gear 14, and the planetary bevel gear 14 meshes with the central bevel gear 15.

[0028] During the rotation of the inner housing 10, the planetary bevel gear 14 is driven to rotate by the central bevel gear 15. The rotation of the planetary bevel gear 14 will drive the lens protective housing 17 to rotate. During the rotation of the lens protective housing 17, the impurities and moisture attached to its surface will be thrown off under the action of centrifugal force to prevent the contaminants on the surface of the lens protective housing 17 from affecting the image quality.

[0029] Workflow:

[0030] The probe card to be tested is placed on the tray 9. The electric cylinder 3 drives the sliding seat 4 to move vertically on the slide rail 2, thereby driving the outer shell 6 to rise and fall through the connecting plate 5. When the outer shell 6 falls, it covers the probe card to be tested.

[0031] When the motor 8 is started, the inner housing 10 is rotated. During the rotation of the inner housing 10, the CCD camera 13 will rotate around the probe card, so that the CCD camera 13 can capture images of the probe card to be tested from all directions through the lens protective shell 17. During the image acquisition process, since the inner housing 10 and the tray 9 form a sealed space surrounding the probe card, it can effectively prevent dust and impurities in the air from contaminating the lens during the image acquisition process.

[0032] During the rotation of the inner housing 10, the planetary bevel gear 14 is driven to rotate by the central bevel gear 15. The rotation of the planetary bevel gear 14 will drive the lens protective housing 17 to rotate. During the rotation of the lens protective housing 17, the impurities and moisture attached to its surface will be thrown off under the action of centrifugal force to prevent the contaminants on the surface of the lens protective housing 17 from affecting the image quality.

[0033] Compared with the prior art, the probe card detection device provided by this utility model forms a sealed space with the inner shell 10 and the tray 9 to collect images of the probe card, which can effectively prevent air impurities and water vapor from contaminating the camera lens. The lens is further protected by a rotatable transparent lens protective shell 17 to ensure the quality of image acquisition.

[0034] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A probe card detection device, comprising a housing (6) and a plurality of CCD cameras (13), characterized in that, The bottom surface of the outer shell (6) is rotatably mounted with an annular rotating disk (11), the upper surface of the rotating disk (11) is rotatably connected to an inner shell (10), a connector (12) is fixedly connected to the outer wall of the inner shell (10), the CCD camera (13) is fixed on the connector (12), a lens protective shell (17) made of transparent material is fixedly connected to the inner shell (10) to accommodate the lens of the CCD camera (13), and a cover plate (7) is fixedly connected to the top of the outer shell (6).

2. The probe card detection device according to claim 1, characterized in that, A motor (8) is fixedly connected to the cover plate (7), and the output end of the motor (8) extends into the outer shell (6) and is fixedly connected to the top of the inner shell (10).

3. The probe card detection device according to claim 2, characterized in that, A connecting pipe (16) is fixedly connected to the bottom surface of the cover plate (7), a central bevel gear (15) is fixedly connected to the lower end surface of the connecting pipe (16), a planetary bevel gear (14) is rotatably installed on the outer wall of the inner shell (10), the lens protective shell (17) is fixedly connected to the planetary bevel gear (14), and the planetary bevel gear (14) meshes with the central bevel gear (15).

4. The probe card detection device according to claim 3, characterized in that, It also includes a drive structure for driving the outer shell (6) to rise and fall. The drive structure includes a vertical plate (1), a slide rail (2) fixedly connected to the vertical plate (1), a sliding seat (4) slidably fitted on the slide rail (2), a connecting plate (5) fixedly connected to the sliding seat (4), and the connecting plate (5) fixedly connected to the outer shell (6).

5. The probe card detection device according to claim 4, characterized in that, The top of the upright plate (1) is equipped with an electric cylinder (3) for driving the sliding seat (4) to move.

6. The probe card detection device according to claim 5, characterized in that, The bottom of the upright plate (1) is provided with a tray (9) for carrying the probe card to be tested.

7. The probe card detection device according to claim 6, characterized in that, There are at least three CCD cameras (13), and all CCD cameras (13) are distributed on the same circumference.

Images