A filter for optical measurement

Abstract

The utility model discloses a filter for optical measurement, including base support layer, the top fixed mounting of base support layer has low refractive layer, the top fixed mounting of low refractive layer has reflection layer, the top fixed mounting of reflection layer has interval layer, the top fixed mounting of interval layer has two anti -layer, the top fixed mounting of two anti -layer has transition layer, the top fixed mounting of transition layer has three anti -layer, and the material of base support layer is fused quartz glass. This one is used for filter for optical measurement, in the process of daily use, the material of low refractive layer, interval layer and transition layer is same and is silica, it has high infrared reflectivity and low visible light absorption, does not affect the signal of target visible light wave band, the material of reflection layer, two anti -layer and three anti -layer is same and is indium tin oxide, and it has high adhesion with base support layer, and chemical inertness is high, can prevent film layer oxidation or fall off, prolongs the life.

Description

Technical Field

[0001] This utility model relates to the field of optical measurement technology, specifically to a filter used for optical measurement. Background Technology

[0002] Optical measurement is a high-tech application combining optoelectronic and mechanical measurement technologies. Utilizing computer technology, it enables rapid and accurate measurements, facilitating recording, storage, printing, and retrieval. It is explained that optical measurement is primarily used in modern industrial inspection, mainly to check the form and position tolerances and numerical aperture of products to ensure they meet standards. Optical measurements require the use of filters, thus necessitating a specific type of filter for optical measurement.

[0003] When operators perform optical measurements, they often use corresponding optical measurement filters. Although existing filters can achieve the purpose of measurement, in actual use, infrared stray light may interfere with the measurement, which may reduce the accuracy of the measurement. Furthermore, they cannot accurately select the target wavelength or eliminate stray light interference from adjacent bands, thus reducing their practicality. Utility Model Content

[0004] The purpose of this invention is to provide a filter for optical measurement, in order to solve the problem mentioned in the background art that operators often use corresponding optical measurement filters when performing optical measurement work. Although existing filters can achieve the purpose of measurement, infrared stray light may interfere with the measurement in actual use, which may reduce the accuracy of the measurement. Furthermore, they cannot accurately select the target wavelength and eliminate stray light interference from adjacent bands, thus reducing their practicality.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a filter for optical measurement, comprising a substrate support layer, a low-refractive layer fixedly mounted on the top of the substrate support layer, a reflective layer fixedly mounted on the top of the low-refractive layer, a spacer layer fixedly mounted on the top of the reflective layer, a second reflective layer fixedly mounted on the top of the spacer layer, a transition layer fixedly mounted on the top of the second reflective layer, and a third reflective layer fixedly mounted on the top of the transition layer, wherein the substrate support layer is made of fused silica glass.

[0006] Preferably, the low-refractive layer, the spacer layer, and the transition layer are made of silicon dioxide, and the reflective layer, the second reflective layer, and the third reflective layer are made of indium tin oxide.

[0007] Preferably, a low-emissivity layer is fixedly installed on top of the three reflective layers, a high-emissivity layer is fixedly installed on top of the low-emissivity layer, an adjustment layer is fixedly installed on top of the high-emissivity layer, an enhancement layer is fixedly installed on top of the adjustment layer, an optimization layer is fixedly installed on top of the enhancement layer, and a stabilizing layer is fixedly installed on top of the optimization layer.

[0008] Preferably, the low-emissivity layer, the regulating layer, and the optimizing layer are made of magnesium fluoride, and the high-emissivity layer, the reinforcing layer, and the stabilizing layer are made of zinc sulfide.

[0009] Preferably, an anti-reflection layer is fixedly installed on the top of the stabilizing layer, and the anti-reflection layer is made of magnesium fluoride.

[0010] Preferably, a wear-resistant and anti-fouling layer is fixedly installed on the top of the anti-reflective layer, and the material of the wear-resistant and anti-fouling layer is diamond-like carbon.

[0011] Compared with the prior art, the beneficial effects of this utility model are: This type of filter for optical measurement uses silicon dioxide as the material for the low-refractive layer, spacer layer, and transition layer during daily use. It has both high infrared reflectivity and low visible light absorption, so it does not affect the target's visible light signal. The reflective layer, second reflective layer, and third reflective layer are all made of indium tin oxide, which has strong adhesion to the substrate support layer and high chemical inertness, preventing the film from oxidizing or peeling off and extending its service life. At the same time, the six-layer alternating structure can increase the infrared cutoff depth, which can completely suppress the interference of infrared stray light on the measurement, thereby improving the measurement accuracy.

[0012] This type of filter for optical measurement uses magnesium fluoride as the material for the low-emission layer, adjustment layer, and optimization layer during daily use. The high-emission layer, enhancement layer, and stabilization layer are made of zinc sulfide, which has a low refractive index. The large difference in refractive index between the two layers creates a strong interference effect, achieving narrow-band high transmittance. Both materials have extremely low water vapor transmittance, maintaining stable filtering performance even in humid environments. At the same time, the six-layer film system can control the filter half-bandwidth to within 5nm, accurately selecting the target wavelength and eliminating stray light interference from adjacent bands. Attached Figure Description

[0013] Figure 1 This is the front view of the present invention; Figure 2 This is a side sectional view of the present invention; Figure 3 For the present utility model Figure 2 Enlarged view of a portion of point A in the middle; Figure 4 This is a front sectional view of the present invention; Figure 5 This is a schematic diagram of the top structure of the base support layer of this utility model.

[0014] In the diagram: 1. Substrate support layer; 2. Low-refractive layer; 3. Reflective layer; 4. Spacer layer; 5. Secondary reflector layer; 6. Transition layer; 7. Triple reflector layer; 8. Low-reflection layer; 9. High-reflection layer; 10. Adjustment layer; 11. Reinforcement layer; 12. Optimization layer; 13. Stabilizing layer; 14. Anti-reflective layer; 15. Wear-resistant and anti-fouling layer. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example 1:

[0016] Please see Figures 1-5 A filter for optical measurement includes a substrate support layer 1, a low-refractive-index layer 2 fixedly mounted on top of the substrate support layer 1, a reflective layer 3 fixedly mounted on top of the low-refractive-index layer 2, a spacer layer 4 fixedly mounted on top of the reflective layer 3, a second reflective layer 5 fixedly mounted on top of the spacer layer 4, a transition layer 6 fixedly mounted on top of the second reflective layer 5, and a third reflective layer 7 fixedly mounted on top of the transition layer 6. The substrate support layer 1 is made of fused silica glass, the low-refractive-index layer 2, the spacer layer 4, and the transition layer 6 are made of silicon dioxide, and the reflective layer 3, the second reflective layer 5, and the third reflective layer 7 are made of indium tin oxide.

[0017] In this invention, silicon dioxide possesses both high infrared reflectivity and low visible light absorption, thus not affecting the target's visible light band signal. Indium tin oxide has strong adhesion to the substrate support layer 1 and high chemical inertness, preventing film oxidation or peeling and extending its service life. Simultaneously, the six-layer alternating structure can increase the infrared cutoff depth to above OD5, completely suppressing the interference of infrared stray light on the measurement, thereby improving the measurement accuracy. It adopts an alternating structure of "high refractive index reflective layer + low refractive index spacer layer," and the multi-layer superposition allows infrared light to be reflected and canceled multiple times at the film interface, resulting in extremely low transmittance. While blocking infrared light, it can retain the target's visible light band light signal to the maximum extent, avoiding the decrease in measurement sensitivity caused by film absorption. Example 2:

[0018] Please see Figures 1-5A filter for optical measurement, wherein a low-emission layer 8 is fixedly mounted on the top of a three-reflection layer 7, a high-emission layer 9 is fixedly mounted on the top of the low-emission layer 8, an adjustment layer 10 is fixedly mounted on the top of the high-emission layer 9, an enhancement layer 11 is fixedly mounted on the top of the adjustment layer 10, an optimization layer 12 is fixedly mounted on the top of the enhancement layer 11, and a stabilizing layer 13 is fixedly mounted on the top of the optimization layer 12. The low-emission layer 8, the adjustment layer 10, and the optimization layer 12 are made of magnesium fluoride, and the high-emission layer 9, the enhancement layer 11, and the stabilizing layer 13 are made of zinc sulfide.

[0019] In this invention, magnesium fluoride has a low refractive index, while zinc sulfide has a high refractive index. The large difference in refractive index between the two materials creates a strong interference effect, achieving narrow-band high transmittance. Both materials have extremely low water vapor transmittance, maintaining stable filtering performance even in humid environments. Simultaneously, the six-layer film system can control the filtering half-bandwidth to within 5nm, accurately selecting the target wavelength and eliminating stray light interference from adjacent bands. While "accurately selecting," it can maximize the retention of the target wavelength's optical signal, avoiding a decrease in measurement sensitivity due to film layer loss. It can maintain filtering performance in complex environments, ensuring the reliability of long-term measurements. Example 3:

[0020] Please see Figures 1-5 A filter for optical measurement, wherein an antireflection layer 14 is fixedly installed on the top of a stabilizing layer 13, and the antireflection layer 14 is made of magnesium fluoride, and a wear-resistant and anti-fouling layer 15 is fixedly installed on the top of the antireflection layer 14, and the wear-resistant and anti-fouling layer 15 is made of diamond-like carbon.

[0021] In this invention, the refractive index of the antireflection layer 14 is highly compatible with that of air and zinc sulfide, which can significantly reduce the surface reflectivity, improve the transmittance of the target wavelength, reduce measurement errors caused by reflected light, and ensure good uniformity of the film layer to avoid uneven light intensity distribution caused by local reflectivity differences. The wear-resistant and anti-fouling layer 15 has extremely high hardness, which can resist friction and scratches during the measurement process and prevent surface scratches from affecting light transmittance. The surface is hydrophobic and oleophobic, which can reduce the adhesion of fingerprints and oil stains, and the film layer is not easily damaged during cleaning, thus maintaining long-term stable optical performance.

[0022] Working principle: First, the low-refractive-index layer 2, spacer layer 4, and transition layer 6 are all made of silicon dioxide, which has both high infrared reflectivity and low visible light absorption, so it does not affect the signal in the visible light band of the target. The reflective layer 3, secondary reflective layer 5, and triple reflective layer 7 are all made of indium tin oxide, which has strong adhesion to the substrate support layer 1 and high chemical inertness, which can prevent the film from oxidizing or peeling off and extend its service life. At the same time, the six-layer alternating structure can increase the infrared cutoff depth to above OD5, which can completely suppress the interference of infrared stray light on the measurement, thereby improving the measurement accuracy. Second, the low-refractive-index layer 8, adjustment layer 10, and optimization layer 12 are all made of magnesium fluoride, which has a low refractive index. The high-refractive-index layer 9, enhancement layer 10, and transition layer 12 are all made of magnesium fluoride. Layer 11 and stabilizing layer 13 are made of the same material, zinc sulfide, which has a high refractive index. The large difference in refractive index between the two layers can form a strong interference effect, achieving narrow-band high transmittance. Both materials have extremely low water vapor transmittance, maintaining stable filtering performance even in humid environments. At the same time, the six-layer film system can control the half-bandwidth of the filter to within 5nm, accurately selecting the target wavelength and eliminating stray light interference from adjacent bands. Finally, the refractive index of antireflection layer 14 has a high degree of matching with air and zinc sulfide, which can significantly reduce surface reflectivity, improve the transmittance of the target wavelength, and reduce measurement errors caused by reflected light. The wear-resistant and anti-fouling layer 15 has extremely high hardness, resisting friction and scratches during the measurement process and preventing surface scratches from affecting light transmittance.

[0023] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A filter for optical measurement, comprising a substrate support layer (1), characterized in that: A low-refractive layer (2) is fixedly installed on the top of the base support layer (1), a reflective layer (3) is fixedly installed on the top of the low-refractive layer (2), a spacer layer (4) is fixedly installed on the top of the reflective layer (3), a double reflective layer (5) is fixedly installed on the top of the spacer layer (4), a transition layer (6) is fixedly installed on the top of the double reflective layer (5), and a triple reflective layer (7) is fixedly installed on the top of the transition layer (6). The base support layer (1) is made of fused silica glass.

2. A filter for optical measurement according to claim 1, characterized in that: The low-refractive layer (2), the spacer layer (4) and the transition layer (6) are made of silicon dioxide, and the reflective layer (3), the second reflective layer (5) and the third reflective layer (7) are made of indium tin oxide.

3. A filter for optical measurement according to claim 1, characterized in that: A low-emission layer (8) is fixedly installed on the top of the three-layer reflector (7), a high-emission layer (9) is fixedly installed on the top of the low-emission layer (8), an adjustment layer (10) is fixedly installed on the top of the high-emission layer (9), an enhancement layer (11) is fixedly installed on the top of the adjustment layer (10), an optimization layer (12) is fixedly installed on the top of the enhancement layer (11), and a stabilizing layer (13) is fixedly installed on the top of the optimization layer (12).

4. A filter for optical measurement according to claim 3, characterized in that: The low-emissivity layer (8), adjustment layer (10) and optimization layer (12) are made of magnesium fluoride, and the high-emissivity layer (9), reinforcement layer (11) and stabilizing layer (13) are made of zinc sulfide.

5. A filter for optical measurement according to claim 3, characterized in that: An anti-reflection layer (14) is fixedly installed on the top of the stabilizing layer (13), and the anti-reflection layer (14) is made of magnesium fluoride.

6. A filter for optical measurement according to claim 5, characterized in that: The top of the antireflective layer (14) is fixedly installed with a wear-resistant and anti-fouling layer (15), and the material of the wear-resistant and anti-fouling layer (15) is diamond-like carbon.

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