Double-sided developing jig

Abstract

The utility model provides a kind of developing jig of double-side development, for developing workpiece is developed, the developing jig of double-side development includes annular base, at least two support strips of the annular base edge inward protruding, clamping assembly being arranged on the support strip, the clamping assembly includes support block being arranged on the support strip, positioning rod being arranged on the side of the support block away from the support strip, drive member to drive the support block moves along radial direction.The developing jig of double-side development of the utility model can reduce the damage to developing workpiece, improve clamping stability, and can be adapted to different developing workpiece, improve versatility.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and specifically to a developing fixture for double-sided developing. Background Technology

[0002] Double-sided photolithography is widely used in industries such as semiconductor manufacturing and flat panel displays. In the development stage of double-sided lithography, both the front and back sides of the wafer or substrate need to be developed sequentially. Currently available development fixtures have the following problems:

[0003] Damage to the back-side pattern: Traditional fixtures use vacuum suction, which allows developer to easily penetrate into the vacuum suction cup, resulting in developer residue on the back side of the wafer and contaminating the back-side pattern. Furthermore, vacuum suction fixtures can damage the patterns or layers on the back side of the wafer.

[0004] Poor clamping stability: During the impact and immersion process of the developer, the fixture is not stable enough in clamping the wafer or substrate, and it is easy to deviate, shake or even fall off, which not only affects the development effect, but may also damage the wafer or substrate.

[0005] Low versatility: Existing fixtures are often designed for wafers or substrates of specific sizes and shapes, making it difficult to adapt to the production needs of products with different specifications. This limits the flexibility and efficiency of production and increases the production costs of enterprises.

[0006] In view of this, it is necessary to improve the existing developing fixtures to solve the above problems. Utility Model Content

[0007] The purpose of this invention is to provide a developing fixture for double-sided developing, so as to solve the problems of existing developing fixtures that easily damage the developing workpiece, have unstable clamping, and have poor versatility.

[0008] To achieve the above objectives, this utility model provides a double-sided developing fixture for developing workpieces. The double-sided developing fixture includes an annular base, at least two support bars protruding inward along the edge of the annular base, and a clamping assembly disposed on the support bars. The clamping assembly includes a support block disposed on the support bars, a positioning rod disposed on the side of the support block away from the support bars, and a driving member for driving the support block to move radially.

[0009] As a further improvement of this utility model, the positioning rod is used to clamp the developing workpiece radially, and each of the support blocks is provided with two positioning rods, which are spaced apart circumferentially along the annular base.

[0010] As a further improvement of this utility model, the positioning rod includes a rigid positioning post and an elastic alignment member. The elastic alignment member is disposed inside or outside the rigid positioning post so that the positioning rod provides a flexible pre-tightening force to the developing workpiece.

[0011] As a further improvement of this utility model, the elastic alignment member is either a spring plunger or an elastic silicone block.

[0012] As a further improvement of this utility model, the support bar is provided with a limiting groove extending radially, and the support block is provided with a limiting rod protruding into the limiting groove. When the driving member drives the support block to move radially, the limiting rod moves along the limiting groove, and the limiting groove restricts the movement direction of the limiting rod.

[0013] As a further improvement of this utility model, the surface of the limiting rod is provided with a flexible pad.

[0014] As a further improvement of this utility model, the clamping assembly further includes a support column disposed on the side of the support block away from the support bar, the support column being located radially inside the positioning rod, and the developing workpiece being placed axially on the support column.

[0015] As a further improvement of this utility model, the developing fixture for double-sided developing also includes an ejector, which abuts against the support column along the axial direction to drive the support column to move along the axial direction.

[0016] As a further improvement of this utility model, the support bar and the clamping assembly are arranged in an array along the circumferential direction.

[0017] As a further improvement of this utility model, the double-sided developing fixture also includes a central support platform and a quick-connect fitting disposed on the central support platform. The central support platform is located in the middle of the annular base and is spaced apart from the annular base. A plurality of the support bars are fixedly connected to the central support platform and the annular base. The quick-connect fitting is disposed on the side of the central support platform away from the support block.

[0018] The beneficial effects of this utility model are: the double-sided developing fixture of this utility model, by setting a driving component to drive the support block to move, thereby controlling the positioning rod to clamp the developing workpiece radially for developing operation, can reduce damage to the developing workpiece, improve clamping stability, and can be adapted to different developing workpieces, thus improving versatility. Attached Figure Description

[0019] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0020] Figure 1 This is a schematic diagram of the structure of the double-sided developing fixture of this utility model;

[0021] Figure 2 This is a schematic diagram of the double-sided developing fixture of this utility model from another angle.

[0022] Figure 3 This is a schematic diagram of the clamping assembly of the double-sided developing fixture of this utility model. Detailed Implementation

[0023] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0026] like Figures 1 to 3 As shown, the double-sided developing fixture 100 of this utility model is used to carry and position the developing workpiece, which includes, but is not limited to, wafers and substrates.

[0027] The double-sided developing fixture 100 includes an annular base 1, at least two support bars 2 protruding inward along the edge of the annular base 1, a clamping assembly 3 disposed on the support bars 2, a central support platform 4, a quick-connect member 5 disposed on the central support platform 4, and an ejector member.

[0028] The annular base 1 serves as the main support structure. The annular base 1 is circular in shape and made of corrosion-resistant, high-strength materials, such as stainless steel or engineering ceramics, more specifically 304 stainless steel or aluminum nitride ceramics, to ensure structural rigidity and chemical stability. In this embodiment, the annular base 1 is formed through CNC machining, precision casting, and finishing to ensure dimensional accuracy, with a roundness error ≤10μm. The surface of the annular base 1 undergoes passivation and / or coating anti-corrosion treatment.

[0029] The central support platform 4 is located in the middle of the annular base 1 and is spaced apart from the annular base 1. Multiple support bars 2 are fixedly connected to the central support platform 4 and the annular base 1. The central support platform 4 is used to support the central area of ​​the developing workpiece, and its surface is treated with polishing, anti-slip, insulation, etc., as needed. In this embodiment, the central support platform 4 is made of materials such as aluminum alloy or quartz glass. After processing, its surface is ground and polished, and anti-slip texture is etched. It is connected to the support bars 2 by bolts and assembled with locating pins to ensure coaxiality with the annular base 1.

[0030] In a preferred embodiment, an elastic buffer layer is provided between the central support platform 4 and the support bar 2 to absorb the impact of overturning and ensure the stability of the developed workpiece's posture.

[0031] In this embodiment, the support strip 2 and the annular base 1 are integrally formed. The support strip 2 and the annular base 1 are made of the same material and using the same process, and the support strip 2 are arranged in a circular array. In this embodiment, there are four support strips 2.

[0032] The support bar 2 is provided with a radially extending limiting groove 21. In this embodiment, each support bar 2 is provided with two limiting grooves 21, and the two limiting grooves 21 are arranged radially at intervals.

[0033] In this embodiment, the annular base 1, the support bar 2, and the central bearing platform 4 have the same thickness and are flush on both sides along the axial direction.

[0034] like Figure 3 As shown, the clamping assembly 3 includes a support block 31 disposed on the support bar 2, a positioning rod 32 disposed on the side of the support block 31 away from the support bar 2, a driving member for driving the support block 31 to move radially, and a support column 33 disposed on the side of the support block 31 away from the support bar 2.

[0035] The quick-connect component 5 is located on the side of the central support platform 4 away from the support block 31. The quick-connect component 5 is provided with a standardized interface for quick docking with external flipping equipment, such as a robotic arm or flipping platform. The interface includes, but is not limited to, positioning pins and locking buckles, to ensure that there is no relative displacement between the double-sided developing fixture 100 and the flipping equipment during the flipping process.

[0036] The developing workpiece is placed on the side of the plurality of support blocks 31 away from the support strip 2. The driving member is used to drive the support blocks 31 to move radially, and the positioning rod 32 is used to clamp the developing workpiece radially. In this embodiment, by setting the positioning rod 32 to clamp the developing workpiece radially for subsequent developing processes, damage to the back pattern can be avoided. By controlling the movement of the positioning rod 32 and support blocks 31 at different positions and controlling different movement distances, developing workpieces of different sizes and shapes can be accommodated, solving the problem of low versatility of existing fixtures.

[0037] In this embodiment, the support block 31 is columnar, and its axis is parallel to the axis of the annular base 1. The support block 31 is made of aluminum alloy or engineering plastic and is manufactured by CNC machining.

[0038] The drive unit uses a manual knob or an electric linear module to achieve an adjustable radial spacing of 0-30mm for the support blocks 31.

[0039] Each of the positioning rods 32 includes a rigid positioning post and an elastic alignment member. The elastic alignment member is disposed inside or outside the rigid positioning post to provide a flexible preload force to the developing workpiece. The elastic alignment member can be embedded inside the rigid positioning post or sleeved outside the rigid positioning post.

[0040] In this embodiment, the rigid positioning post is a rigid structure with a specific height, diameter, and taper to adapt to the edge of the developing workpiece and achieve preliminary mechanical alignment.

[0041] The elastic alignment component is either a spring plunger or an elastic silicone block. The elastic alignment component is used to compensate for the tolerance of the developing workpiece, ensuring that the positioning rod 32 can be accurately fitted with the developing workpiece in the horizontal direction, while buffering the impact during the developing process and avoiding damage to the developing workpiece by the rigid structure.

[0042] By setting up flexible alignment components, clamping stability is improved, avoiding problems such as offset, shaking, and falling off. This can also reduce damage to the wafer or substrate without affecting the development effect.

[0043] In a preferred embodiment, the positioning element is made of hard alloy or stainless steel and is ground and polished to ensure cylindricity and conical surface accuracy; the elastic alignment element is selected from one of stainless steel spring, silicone top block or pneumatic elastic module, and is integrated into the positioning post by threaded connection or embedded installation.

[0044] In this embodiment, each support block 31 is provided with two positioning rods 32, which are spaced apart circumferentially along the annular base 1. The presence of two positioning rods 32 on each support block 31 allows for better contact with the developing workpiece, preventing the problem of a single positioning rod 32 easily sliding relative to the developing workpiece.

[0045] The support column 33 is located radially inside the positioning rod 32, and the developing workpiece is placed axially on the support column 33. In this embodiment, the developing workpiece can be supported by the support column 33.

[0046] The ejector and the support column 33 abut against each other axially to drive the support column 33 to move axially. After development is complete, the developed workpiece can be ejected by controlling the movement of the ejector; that is, the support column 33 can act as a pin.

[0047] The support block 31 is provided with a limiting rod 311 protruding into the limiting groove 21. When the driving member drives the support block 31 to move radially, the limiting rod 311 moves along the limiting groove 21. The limiting groove 21 restricts the moving direction of the limiting rod 311, so that the support block 31 can only move radially without shaking.

[0048] The surface of the limiting rod 311 is provided with a flexible pad, which can be made of fluororubber or PU material, to increase the friction of the support block 31 when it moves. The flexible pad is fixed to the limiting rod 311 by adhesive bonding or slot embedding.

[0049] In this embodiment, the support bar 2 and the clamping component 3 are arranged in an array along the circumferential direction. Preferably, there are four support bars 2 and four clamping components 3.

[0050] The double-sided developing fixture 100 of this utility model is used as follows:

[0051] Assembly: Install the central bearing platform 4, clamping assembly 3, etc. onto the annular base 1 in sequence, and tighten them with positioning pins and bolts to ensure the relative position accuracy of each component, such as the coaxiality error of the positioning column ≤5μm.

[0052] Debugging: Manually or electrically adjust the clamping component 3, and test the smoothness of sliding and the reliability of locking of the support block 31;

[0053] Simulate workpiece clamping to check the elastic alignment effect of positioning rod 32 and the uniformity of clamping force;

[0054] Connect an external flipping device to test the stability of the developing jig during the flipping process and the alignment accuracy after flipping. If measured with an image measuring instrument, the alignment deviation should be ≤3μm.

[0055] This invention provides a specific experimental example and comparative example to verify the effect of the double-sided development fixture 100.

[0056] In the experimental example, the double-sided developing fixture 100 of this embodiment was used for production testing. A typical 8-inch wafer was selected, and 10 batches of double-sided developing were performed consecutively. The uniformity of the developing was statistically analyzed: linewidth consistency (Max-Min range) ≤1μm within the wafer; ≤1.5μm between wafers; ≤2nm between batches. The defect rate (wafer scratches) was statistically analyzed: the proportion of effective DIE scratches within the wafer ≤1%, and the proportion of scratches within the batch ≤10%.

[0057] In the comparative analysis, a conventional suction cup fixture was used for production testing. A typical 8-inch wafer was selected, and 10 batches were continuously subjected to double-sided development. Development uniformity was statistically analyzed, with linewidth consistency (Max-Min range) ≥1.5μm within the wafer; ≥1.8μm between wafers; and ≥2.5μm between batches. The workpiece defect rate (wafer scratches) was statistically analyzed, with the effective DIE scratch ratio within the wafer ≥5% and the scratch ratio within the batch ≥25%.

[0058] It is evident that the double-sided developing fixture 100 of this invention has high clamping stability and causes less damage to the developing workpiece.

[0059] The double-sided developing fixture 100 of this invention uses a driving component to move the support block 31, thereby controlling the positioning rod 32 to clamp the developing workpiece radially for developing operations. This reduces damage to the developing workpiece, improves clamping stability, and can be adapted to different developing workpieces, thus improving versatility.

[0060] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A double-sided developing fixture for developing workpieces, characterized in that: The double-sided developing fixture includes an annular base, at least two support bars protruding inward along the edge of the annular base, and a clamping assembly disposed on the support bars. The clamping assembly includes a support block disposed on the support bars, a positioning rod disposed on the side of the support block away from the support bars, and a driving member for driving the support block to move radially.

2. The developing fixture for double-sided development according to claim 1, characterized in that: The positioning rod is used to clamp the developing workpiece radially. Each support block is provided with two positioning rods, which are spaced apart circumferentially along the annular base.

3. The developing fixture for double-sided development according to claim 1, characterized in that: The positioning rod includes a rigid positioning post and an elastic alignment member. The elastic alignment member is disposed inside or outside the rigid positioning post so that the positioning rod provides a flexible preload force to the developing workpiece.

4. The developing fixture for double-sided development according to claim 3, characterized in that: The elastic alignment component is either a spring plunger or an elastic silicone block.

5. The developing fixture for double-sided development according to claim 1, characterized in that: The support bar has a radially extending limiting groove, and the support block has a limiting rod protruding into the limiting groove. When the driving member drives the support block to move radially, the limiting rod moves along the limiting groove, and the limiting groove restricts the movement direction of the limiting rod.

6. The developing fixture for double-sided development according to claim 5, characterized in that: The surface of the limiting rod is provided with a flexible pad.

7. The developing fixture for double-sided development according to claim 1, characterized in that: The clamping assembly further includes a support column disposed on the side of the support block away from the support bar, the support column being located radially inside the positioning rod, and the developing workpiece being placed axially on the support column.

8. The developing fixture for double-sided development according to claim 7, characterized in that: The double-sided developing fixture also includes an ejector, which abuts against the support column axially to drive the support column to move axially.

9. The developing fixture for double-sided development according to claim 1, characterized in that: The support bars and the clamping components are arranged in an array along the circumferential direction.

10. The developing fixture for double-sided development according to claim 1, characterized in that: The double-sided developing fixture also includes a central support platform and a quick-connect fitting disposed on the central support platform. The central support platform is located in the middle of the annular base and is spaced apart from the annular base. A plurality of support bars are fixedly connected to the central support platform and the annular base. The quick-connect fitting is disposed on the side of the central support platform away from the support block.

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