Wafer heating control system for a wafer metrology apparatus

Abstract

The utility model discloses a wafer heating control system of wafer measurement equipment relates to the field of semiconductor measurement. Including power, contactor, regulator, transparent shell, infrared temperature measurement sensor, wafer, emergency stop button, PLC controller, signal isolator, temperature control switch, thermistor and heating disc, and the regulator is connected with the heating disc through power line, and the heating disc is placed with wafer, and the heating disc outside is provided with transparent shell, and the transparent shell is provided with infrared temperature measurement sensor, and the infrared temperature measurement sensor is connected with PLC controller through signal line, and the heating disc bottom is provided with thermistor and temperature control switch, and the thermistor is connected with PLC controller, regulator through signal line and signal isolator, and the temperature control switch is connected with emergency stop button through contactor, and the contactor is also connected with power, regulator through power line, and the contactor is connected with PLC controller through signal line. The utility model discloses through four kinds of protection means to guarantee that fast heating can be safely carried out.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor measurement, specifically to a wafer heating control system for a wafer measurement device. Background Technology

[0002] Chinese patent CN203787397U discloses a wafer heating device, including a heating cavity, a base, a heater, a temperature sensor, a controller, a fixing boss, and a power meter. The device monitors the heating temperature using the temperature sensor and the thermal power using the power meter to ensure uniform wafer temperature during heating, and uses a ring-shaped fixing boss to prevent wafer tilting. The aforementioned prior art focuses more on the uniformity of heating and the structural composition of the heating device. For safety control related to heating, it uses a temperature controller for temperature monitoring but does not consider temperature sensor failure or protective measures in case of failure.

[0003] In summary, this utility model designs a wafer heating control system for a wafer metrology device. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this utility model is to provide a wafer heating control system for wafer metrology equipment. This system is suitable for removing residual chemicals from the wafer surface by heating and drying. It can quickly heat the wafer to the target temperature and control the temperature. It also employs three different types of temperature sensors for temperature control and alarm functions, avoiding the occurrence of the same fault when using the same type of sensor. In addition, it includes an emergency stop button for easy emergency stop operations by external operators.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a wafer heating control system for a wafer metrology device, comprising a power supply, a contactor, an adjuster, a transparent housing, an infrared temperature sensor, a wafer, an emergency stop button, a PLC controller, a signal isolator, a temperature control switch, a resistance temperature detector (RTD), and a heating plate. The adjuster is connected to the heating plate via a power line. A wafer is placed on the heating plate. A transparent housing is provided outside the heating plate, and an infrared temperature sensor is installed on the transparent housing. The infrared temperature sensor is connected to the PLC controller via a signal line. A RTD and a temperature control switch are installed at the bottom of the heating plate. The RTD is connected to the PLC controller and the adjuster via a signal line and a signal isolator. The temperature control switch is connected to the emergency stop button via a contactor. The contactor is also connected to the power supply and the adjuster via a power line, and the contactor is connected to the PLC controller via a signal line.

[0006] Preferably, the PLC controller compares the temperature values ​​of the thermal resistor and the infrared temperature sensor to control the on / off state of the contactor.

[0007] Preferably, if the temperature signal from the resistance temperature detector received by the regulator exceeds the set target heating temperature of the heating plate, the regulator will sound an alarm and stop heating.

[0008] Preferably, the temperature control switch limits the maximum heating temperature of the heating plate and controls the on / off state of the contactor.

[0009] Preferably, the emergency stop button is used to manually control the contactor to disconnect.

[0010] Preferably, the regulator is a thyristor regulator with a built-in PID control program.

[0011] Preferably, the temperature control switch is a mechanical or electronic temperature control switch that operates independently of the PLC controller and regulator.

[0012] Preferably, the emergency stop button is a normally closed button, connected in series in the coil control circuit of the contactor.

[0013] Preferably, the on / off state of the contactor is controlled by any one of the regulator, PLC controller, temperature control switch and emergency stop button.

[0014] Preferably, the temperature measurement signal of the thermal resistor is divided into two paths: one path is directly input to the regulator as a feedback signal for PID control, and the other path is input to the PLC controller via a signal isolator as a monitoring signal.

[0015] The beneficial effects of this utility model are:

[0016] This invention implements temperature control and alarm functions through a resistance temperature detector (RTD) and a regulator; it controls the on / off state of the contactor by comparing the temperature values ​​collected by the RTD and the infrared temperature sensor from the PLC controller; it limits the maximum heating temperature of the heating plate and simultaneously controls the contactor's on / off state through a temperature control switch; and it manually stops the heating process via an emergency stop button. These four methods ensure safe rapid heating, significantly improving drying and inspection rates as well as the safety of the control system. Attached Figure Description

[0017] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments;

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] In the diagram, 1-power line; 2-transparent casing; 3-infrared temperature sensor; 4-wafer; 5-signal line; 6-temperature control switch; 7-thermal resistance; 8-heating plate; 9-power supply; 10-emergency stop button; 11-contactor; 12-regulator; 13-PLC controller; 14-signal isolator. Detailed Implementation

[0020] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0021] Reference Figure 1 The specific embodiment adopts the following technical solution: A wafer heating control system for a wafer measurement device includes a power supply 9, a contactor 11, an adjuster 12, a transparent shell 2, an infrared temperature sensor 3, a wafer 4, an emergency stop button 10, a PLC controller 13, a signal isolator 14, a temperature control switch 6, a thermal resistor 7, and a heating plate 8. The adjuster is connected to the heating plate 8 via a power line 1. A wafer 4 is placed on the heating plate 8. A transparent shell 2 is provided outside the heating plate 8. An infrared temperature sensor 3 is provided on the transparent shell 2. The infrared temperature sensor 3 is connected to the PLC controller via a signal line 5. A thermal resistor 7 and a temperature control switch 6 are provided at the bottom of the heating plate 8. The thermal resistor 7 is connected to the PLC controller 13 and the adjuster 12 via a signal line 5 and a signal isolator 14. The temperature control switch 6 is connected to the emergency stop button 10 via the contactor 11. The contactor 11 is also connected to the power supply 9 and the adjuster 12 via the power line 1. The contactor 11 is connected to the PLC controller 13 via a signal line 5.

[0022] It is worth noting that the PLC controller 13 compares the temperature values ​​of the thermal resistor and the infrared temperature sensor to control the on / off state of the contactor.

[0023] It is worth noting that if the temperature signal from the resistance temperature detector received by the regulator 12 exceeds the set target heating temperature of the heating plate, the regulator will alarm and stop heating.

[0024] It is worth noting that the temperature control switch 6 limits the maximum heating temperature of the heating plate and controls the on / off state of the contactor.

[0025] It is worth noting that the emergency stop button 10 is used to manually control the contactor to disconnect.

[0026] It is worth noting that the regulator 12 is a thyristor regulator with a built-in PID control program.

[0027] It is worth noting that the temperature control switch 6 is a mechanical or electronic temperature control switch that operates independently of the PLC controller and regulator.

[0028] It is worth noting that the emergency stop button 10 is a normally closed button, connected in series in the coil control circuit of the contactor.

[0029] It is worth noting that the on / off state of the contactor 11 is triggered and controlled by any one of the regulator, PLC controller, temperature control switch and emergency stop button.

[0030] In addition, the temperature measurement signal of the thermal resistor 7 is divided into two paths: one path is directly input to the regulator as a feedback signal for PID control, and the other path is input to the PLC controller via a signal isolator as a monitoring signal.

[0031] In this specific embodiment, the power supply, contactor, regulator, and heating plate are connected via a power line for heating the heating plate; the thermal resistor feeds back the real-time detected temperature value to the regulator via a signal line and a signal isolator, and the regulator performs temperature control through a built-in PID program; thus, the following four layers of protection are achieved:

[0032] First protection: If the temperature signal from the resistance temperature detector received by the regulator exceeds the set target heating temperature of the heating plate, the regulator will alarm and stop heating;

[0033] Dual protection: If the temperature signals received by the PLC controller from the RTD and the infrared temperature sensor differ by more than 10°C, the PLC controller will output an alarm signal and control the contactor to disconnect, and the heating plate will stop heating.

[0034] Triple protection: The temperature setting value of the temperature control switch is equal to the target temperature of the heating plate + 30℃. When this temperature is reached, the temperature control switch controls the contactor to open, and the heating plate stops heating.

[0035] Four-fold protection: When staff observe an abnormal condition in the heating plate, they can press the emergency stop button to disconnect the control contactor and stop the heating plate from heating.

[0036] This specific implementation uses a resistance temperature detector (RTD) and a regulator for temperature control and alarm functions; it compares the temperature values ​​from the RTD and infrared temperature sensor collected by the PLC controller to control the contactor's on / off state; a temperature control switch limits the maximum heating temperature of the heating plate while simultaneously controlling the contactor's on / off state; and an emergency stop button manually stops the heating process. These four methods ensure safe and rapid heating.

[0037] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A wafer heating control system for a wafer metrology device, characterized in that, The system includes a power supply, contactor, regulator, transparent housing, infrared temperature sensor, wafer, emergency stop button, PLC controller, signal isolator, temperature control switch, RTD (Resistant Temperature Detector), and heating plate. The regulator is connected to the heating plate via a power line. The wafer is placed on the heating plate. The heating plate is surrounded by a transparent housing, on which the infrared temperature sensor is mounted. The infrared temperature sensor is connected to the PLC controller via a signal line. The bottom of the heating plate has an RTD and a temperature control switch. The RTD is connected to the PLC controller and regulator via a signal line and a signal isolator. The temperature control switch is connected to the emergency stop button via a contactor. The contactor is also connected to the power supply and regulator via a power line, and to the PLC controller via a signal line.

2. The wafer heating control system of the wafer measurement equipment according to claim 1, characterized in that, The PLC controller compares the temperature values ​​collected by the thermal resistor and the infrared temperature sensor to control the on / off state of the contactor.

3. The wafer heating control system of the wafer measurement equipment according to claim 1, characterized in that, If the temperature signal from the resistance temperature detector received by the regulator exceeds the set target heating temperature of the heating plate, the regulator will sound an alarm and stop heating.

4. The wafer heating control system of the wafer measurement equipment according to claim 1, characterized in that, The temperature control switch limits the maximum heating temperature of the heating plate and controls the on / off state of the contactor.

5. The wafer heating control system of the wafer measurement equipment according to claim 1, characterized in that, The emergency stop button is used to manually disconnect the contactor.

6. The wafer heating control system of a wafer measurement device according to claim 1, characterized in that, The regulator is a thyristor regulator with a built-in PID control program.

7. The wafer heating control system of the wafer measurement equipment according to claim 1, characterized in that, The temperature control switch is a mechanical or electronic temperature control switch that operates independently of the PLC controller and regulator.

8. The wafer heating control system of a wafer measurement device according to claim 1, characterized in that, The emergency stop button is a normally closed button, connected in series in the coil control circuit of the contactor.

9. The wafer heating control system of a wafer measurement device according to claim 1, characterized in that, The on / off state of the contactor is triggered and controlled by any one of the regulator, PLC controller, temperature control switch and emergency stop button.

10. The wafer heating control system of a wafer measurement device according to claim 1, characterized in that, The temperature measurement signal from the thermal resistor is divided into two paths: one path is directly input to the regulator as a feedback signal for PID control, and the other path is input to the PLC controller via a signal isolator as a monitoring signal.

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