Shutter movement device

Abstract

The utility model discloses a kind of diaphragm moving devices, belong to the technical field of electron microscope, to solve the problems of existing diaphragm moving operation efficiency, no spare diaphragm, poor positioning accuracy and cannot be automated. The device includes diaphragm motor cavity, and X-axis, Y-axis diaphragm motor installed thereon;X-axis diaphragm motor is composed of diaphragm fixing device and X-axis linear drive device, Y-axis diaphragm motor is composed of Y-axis displacement device and Y-axis displacement yield device, diaphragm fixing device fixes diaphragm with two rows of holes, X / Y-axis drive device moves diaphragm in plane by stepping motor, precision screw pair drive, bellows realizes vacuum seal, ceramic ball and ceramic piece cooperate to reduce resistance, beryllium copper sheet assists Y-axis fine adjustment. The device can be computer automated control, without blind operation, spare hole avoids shutdown, positioning accuracy is high, compact structure and adapt to vacuum environment, improve scanning electron microscope use efficiency and imaging reliability.

Description

Technical Field

[0001] This utility model belongs to the technical field of electron microscopes, and specifically relates to an aperture moving device. Background Technology

[0002] Scanning electron microscopy (SEM), a key instrument for characterizing microstructures, works by using a focused high-energy electron beam to scan a sample. It collects the physical information excited by the interaction between the electron beam and the material, magnifies it, and then images it, enabling precise analysis of the material's microstructure. The size of the electron beam is a core factor affecting the imaging resolution of SEM; a smaller electron beam significantly improves image resolution, providing observers with clearer microscopic details and ensuring the accuracy of analytical results.

[0003] In practical applications, scanning electron microscopes need to operate in an ultra-high vacuum environment, and the adjustment of the electron beam size must be achieved through physical means. Current technology relies on a single electron beam aperture structure for electron beam size adjustment, which has several drawbacks: First, aperture movement requires the operator to use an adjustment rod via a mechanical fine-tuning handwheel on the microscope tube. This process is entirely dependent on the operator's experience and feel, essentially a "blind operation," requiring repeated switching between the operating equipment and the observed image, resulting in extremely low operational efficiency. Second, it cannot achieve automated and intelligent operation controlled by a computer, making it difficult to adapt to the operational needs of modern precision equipment. Third, the aperture typically only has one row of aperture holes, with no spare structure. If an aperture hole is damaged during high-frequency use, the machine must be shut down for maintenance, severely impacting equipment efficiency. Fourth, the aperture positioning accuracy is low and repeatability is poor. Achieving high-precision displacement requires a complex and expensive structural design, which is not economical. Fifth, the aperture hole sizes are limited, and there is a lack of spare apertures, making it impossible to flexibly meet the imaging needs of different resolutions. Furthermore, when the existing aperture is damaged, the vacuum environment needs to be disrupted for maintenance, and the time span to restore the ultra-high vacuum operating environment after maintenance is long, which further reduces the overall efficiency of the scanning electron microscope.

[0004] Therefore, there is an urgent need for an aperture moving device that can achieve automated operation, precise positioning, good repeatability, has a backup aperture structure, and is economically efficient, in order to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0005] The purpose of this utility model is to overcome the shortcomings of the prior art and provide an aperture moving device to solve the technical problems of low operation efficiency, lack of automated control, no spare aperture, poor positioning accuracy, poor repeatability and insufficient economy of existing aperture moving devices, so as to realize accurate and efficient movement of the aperture and flexible switching of multiple aperture aperture sizes.

[0006] This utility model provides an aperture moving device, which adopts the following technical solution: An aperture moving device includes an aperture motor cavity, and an X-axis aperture motor and a Y-axis aperture motor mounted on the aperture motor cavity; The X-axis aperture motor includes an aperture fixing device and an aperture X-axis linear drive device. The aperture fixing device is connected to the aperture X-axis linear drive device, and the flange of the aperture X-axis linear drive device is fixed to the corresponding installation position of the aperture motor cavity. The aperture fixing device is used to fix the aperture. The Y-axis aperture motor includes a Y-axis displacement device and a Y-axis displacement yielding device. The Y-axis displacement yielding device is connected to the Y-axis displacement device and abuts against the aperture fixing device. The X-axis linear drive device drives the aperture fixing device to move along the X-axis, and the Y-axis displacement device drives the Y-axis displacement yielding device to move the aperture fixing device along the Y-axis, thereby enabling the aperture holes of different sizes on the aperture to be switched to the electron beam.

[0007] Preferably, the aperture fixing device includes an aperture fixing seat, a ceramic plate, a beryllium copper plate, an X-axis adapter, a first insulating post, an aperture pressure plate, and an aperture pressure plate hinge shaft; One end of the first insulating post is connected to the X-axis adapter, and the other end of the X-axis adapter is connected to the beryllium copper sheet. The end of the beryllium copper sheet away from the X-axis adapter is connected to the aperture fixing seat. The ceramic sheet is fixed to the side of the aperture fixing seat. The aperture pressing plate is assembled into a "door" shape through the aperture pressing plate hinge shaft and pressed onto the aperture fixing seat. The aperture is fixed on the aperture fixing seat.

[0008] Preferably, the X-axis linear drive device includes a first stepper motor, a first coupling, a first precision threaded pair, an inner side of a first crossed roller guide, an outer side of a first crossed roller guide, a first bellows, and an X-axis aperture motor base. The shaft of the first stepper motor is connected to one end of the first coupling, and the other end of the first coupling is connected to the screw of the first precision threaded pair; the nut part of the first precision threaded pair is connected to the inner side of the first cross roller guide, and the outer side of the first cross roller guide is connected to the X-axis aperture motor seat; the end of the X-axis aperture motor seat away from the first stepper motor is connected to the first bellows, and the other end of the first bellows is connected to the first insulating post of the aperture fixing device.

[0009] Preferably, the Y-axis displacement yielding device includes a ceramic ball, a ceramic ball fixing sleeve, a ceramic ball fixing seat, and a second insulating column; The second insulating post is connected to the ceramic ball fixing seat, the ceramic ball is placed inside the ceramic ball fixing seat, the ceramic ball fixing sleeve is connected to the ceramic ball fixing seat by threads and fixes the ceramic ball, and the exposed part of the ceramic ball abuts against the ceramic plate of the aperture fixing device.

[0010] Preferably, the Y-axis displacement device includes a second precision threaded pair, an outer side of a second crossed roller guide, a second coupling, a second stepper motor, an inner side of the second crossed roller guide, a second bellows, and a Y-axis aperture motor mount. The shaft of the second stepper motor is connected to one end of the second coupling, and the other end of the second coupling is connected to the screw of the second precision threaded pair; the nut part of the second precision threaded pair is connected to the inner side of the second cross roller guide, and the outer side of the second cross roller guide is connected to the Y-axis aperture motor seat; the end of the Y-axis aperture motor seat away from the second stepper motor is connected to the second bellows, and the other end of the second bellows is connected to the second insulating column of the Y-axis displacement yielding device.

[0011] Preferably, the aperture is provided with two rows of aperture holes of different sizes, the two rows of aperture holes including working aperture holes and spare aperture holes.

[0012] Preferably, the beryllium copper sheet is used to deform when the Y-axis displacement yielding device pushes against it, thereby achieving fine adjustment of the aperture in the Y-axis direction.

[0013] Preferably, the linear moving parts of the X-axis linear drive device and the Y-axis displacement device are located outside the vacuum, while the aperture fixing device and the Y-axis displacement yielding device are located inside the vacuum.

[0014] Preferably, the ceramic ball cooperates with the ceramic sheet to reduce the frictional resistance when the aperture fixing device moves.

[0015] The beneficial effects of this utility model are: (1) To achieve automated and intelligent operation and improve efficiency: This utility model uses a first stepper motor and a second stepper motor as the driving source, which can be connected to a computer control system to realize automated control of aperture movement. The operator does not need to perform "blind operation" through mechanical fine adjustment handwheel, avoiding repeated switching between operating equipment and observed image, and greatly improving aperture adjustment efficiency and operation convenience.

[0016] (2) Backup aperture design to ensure continuous operation of equipment: The aperture of this utility model is provided with two rows of aperture holes of different sizes, including working aperture holes and backup aperture holes. When the working aperture hole is damaged due to high frequency use, it can be quickly switched to the backup aperture hole by the X-axis and Y-axis aperture motors without stopping the machine for maintenance. This effectively avoids the equipment downtime problem caused by aperture damage in the prior art and ensures the continuous and stable operation of the scanning electron microscope.

[0017] (3) Precise positioning and good repeatability: The transmission mechanism of this utility model adopts a first precision thread pair and a second precision thread pair, in conjunction with a first cross roller guide and a second cross roller guide, to ensure the straightness and positioning accuracy of the aperture movement; at the same time, the motor drive avoids the subjective error of manual operation, and the repeatability of the aperture movement is significantly improved, meeting the requirements of high-precision imaging.

[0018] (4) Compact structure and excellent economy: By combining precision threaded pairs with cross roller guides, the overall volume of the device is effectively reduced while ensuring high precision. The structure is compact and the manufacturing cost is controllable. Compared with the complex and expensive structure used in the prior art to achieve high precision, this utility model significantly improves the economy of the product while taking into account both precision and reliability.

[0019] (5) Low frictional resistance and smooth adjustment: The ceramic ball of the Y-axis displacement yielding device abuts against the ceramic plate of the aperture fixing device. The combination of ceramic materials greatly reduces the frictional resistance during the aperture movement, making the Y-axis adjustment of the aperture smoother, while reducing component wear and extending the service life of the device.

[0020] (6) Strong adaptability to vacuum environment: The aperture fixing device and the Y-axis displacement yielding device are located in the vacuum, while the linear moving parts of the aperture X-axis linear drive device and the Y-axis displacement device are located outside the vacuum. The sealing connection is achieved through the first and second bellows, which not only ensures the ultra-high vacuum operating environment of the scanning electron microscope, but also avoids the maintenance difficulties caused by the operation of the drive components in the vacuum, further improving the efficiency of the equipment. Attached Figure Description

[0021] For ease of explanation, this utility model is described in detail below with reference to specific embodiments and accompanying drawings.

[0022] Figure 1 This is a schematic diagram of the overall structure of this embodiment; Figure 2 This is a schematic diagram of the aperture fixing device in this embodiment; Figure 3 This is a schematic diagram of the X-axis linear drive device for the aperture in this embodiment; Figure 4 This is a schematic diagram of the Y-axis displacement device and the Y-axis displacement yielding device in this embodiment.

[0023] In the picture: 100-Aperture motor cavity; 200-Aperture fixing device; 210-Aperture; 220-Aperture fixing seat; 230-Ceramic plate; 240-Beryllium copper plate; 250-X-axis adapter; 260-First insulating post; 270-Aperture pressing plate; 280-Aperture pressing plate hinge shaft; 300 - X-axis linear drive device for aperture; 310 - First stepper motor; 320 - First coupling; 330 - First precision threaded pair; 340 - Inner side of the first crossed roller guide; 350 - Outer side of the first crossed roller guide; 360 - First bellows; 370 - X-axis aperture motor base; 400 - Y-axis displacement device; 410 - Second stepper motor; 420 - Second coupling; 430 - Second precision threaded pair; 440 - Inner side of the second crossed roller guide; 450 - Outer side of the second crossed roller guide; 460 - Second bellows; 470 - Y-axis aperture motor base; 500 - Y-axis displacement yielding device; 510 - ceramic ball; 520 - ceramic ball fixing sleeve; 530 - ceramic ball fixing seat; 540 - second insulating column. Detailed Implementation

[0024] The following are specific embodiments of the present invention described in conjunction with the accompanying drawings, further illustrating the technical solution of the present invention. However, the present invention is not limited to these embodiments. Specific details such as particular configurations and components are provided in the following description merely to aid in a comprehensive understanding of the embodiments of the present invention. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. Furthermore, for clarity and brevity, descriptions of known functions and structures have been omitted.

[0025] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0026] like Figures 1-4 As shown, this embodiment provides an aperture moving device, including an aperture motor cavity 100, and an X-axis aperture motor and a Y-axis aperture motor mounted on the aperture motor cavity 100. The X-axis aperture motor includes an aperture fixing device 200 and an aperture X-axis linear drive device 300, and the Y-axis aperture motor includes a Y-axis displacement device 400 and a Y-axis displacement yielding device 500. The connection relationship and working process of each component are as follows: The aperture fixing device 200 includes an aperture 210, an aperture fixing seat 220, a ceramic plate 230, a beryllium copper plate 240, an X-axis adapter 250, a first insulating post 260, an aperture pressing plate 270, and an aperture pressing plate hinge shaft 280. One end of the first insulating post 260 is fixedly connected to the X-axis adapter 250, and the other end of the X-axis adapter 250 is connected to the beryllium copper plate 240. The beryllium copper plate 240 is located away from the X-axis adapter 250. One end is connected and fixed to the aperture fixing seat 220; the ceramic plate 230 is fixed to the side of the aperture fixing seat 220; the aperture pressing plate 270 is assembled into a "door" shape through the aperture pressing plate hinge shaft 280 and pressed onto the aperture fixing seat 220, pressing the aperture 210 tightly and fixing it in the preset installation groove of the aperture fixing seat 220. The aperture 210 is provided with two rows of aperture holes of different sizes, namely the working aperture hole and the spare aperture hole.

[0027] The X-axis linear drive device 300 includes a first stepper motor 310, a first coupling 320, a first precision threaded pair 330, an inner side 340 of a first crossed roller guide, an outer side 350 of the first crossed roller guide, a first bellows 360, and an X-axis aperture motor mount 370. The shaft of the first stepper motor 310 is connected to one end of the first coupling 320, and the other end of the first coupling 320 is connected to the screw of the first precision threaded pair 330. The nut portion of the first precision threaded pair 330 is connected to the inner side 340 of the first crossed roller guide, and the outer side 350 of the first crossed roller guide is connected to the X-axis aperture motor mount 370. The end of the X-axis aperture motor mount 370 away from the first stepper motor 310 is connected to the first bellows 360, and the other end of the first bellows 360 is connected to the first insulating post 260 of the aperture fixing device 200. The X-axis linear drive device 300 is fixed to the corresponding mounting position of the aperture motor cavity 100 by flange bolts.

[0028] The Y-axis displacement device 400 includes a second stepper motor 410, a second coupling 420, a second precision threaded pair 430, an inner side 440 of a second crossed roller guide, an outer side 450 of a second crossed roller guide, a second bellows 460, and a Y-axis aperture motor seat 470. The shaft of the second stepper motor 410 is connected to one end of the second coupling 420, and the other end of the second coupling 420 is connected to the screw of the second precision threaded pair 430. The nut portion of the second precision threaded pair 430 is connected to the inner side 440 of the second crossed roller guide, and the outer side 450 of the second crossed roller guide is connected to the Y-axis aperture motor seat 470. The end of the Y-axis aperture motor seat 470 away from the second stepper motor 410 is connected to the second bellows 460, and the other end of the second bellows 460 is connected to the second insulating post 540 of the Y-axis displacement yielding device 500. The Y-axis displacement device 400 is fixed to the aperture motor cavity 100 by bolts and is arranged perpendicular to the X-axis aperture motor.

[0029] The Y-axis displacement yielding device 500 includes a ceramic ball 510, a ceramic ball fixing sleeve 520, a ceramic ball fixing seat 530, and a second insulating post 540. The second insulating post 540 is threadedly connected to the ceramic ball fixing seat 530. The ceramic ball 510 is placed in the spherical groove of the ceramic ball fixing seat 530. The ceramic ball fixing sleeve 520 is threadedly connected to the ceramic ball fixing seat 530 to limit and fix the ceramic ball 510. The part of the ceramic ball 510 exposed in the spherical groove is in close contact with the ceramic plate 230 of the aperture fixing device 200.

[0030] This invention achieves the switching of different sizes of aperture holes on the aperture 210 through the coordinated drive of the X-axis and Y-axis. The specific process is as follows: X-axis movement: When it is necessary to adjust the position of the aperture 210 along the X-axis, the first stepper motor 310 is started. The first stepper motor 310 outputs torque, which is transmitted to the screw of the first precision threaded pair 330 through the first coupling 320. The rotation of the screw drives the nut part to move linearly along the screw axis. Since the nut of the first precision threaded pair 330 is fixedly connected to the inner side 340 of the first crossed roller guide, the inner side 340 of the first crossed roller guide moves linearly along the outer side 350 of the first crossed roller guide, which in turn drives the aperture fixing device 200 to move along the X-axis through the first bellows 360, thereby realizing the position adjustment of the aperture 210 in the X-axis direction.

[0031] Y-axis movement: When the position of the aperture 210 needs to be adjusted along the Y-axis, the second stepper motor 410 is started. The second stepper motor 410 outputs torque, which is transmitted to the screw of the second precision threaded pair 430 through the second coupling 420. The rotation of the screw drives the nut part to move linearly along the screw axis. The nut of the second precision threaded pair 430 is fixedly connected to the inner side 440 of the second cross roller guide. The inner side 440 of the second cross roller guide moves linearly along the outer side 450 of the second cross roller guide, which drives the Y-axis displacement yielding device 500 to move along the Y-axis through the second bellows 460. The ceramic ball 510 of the Y-axis displacement yielding device 500 pushes against the ceramic plate 230 of the aperture fixing device 200, causing the beryllium copper plate 240 between the X-axis adapter 250 and the aperture fixing seat 220 to undergo elastic deformation, thereby driving the aperture 210 to move along the Y-axis, realizing the fine adjustment of the position in the Y-axis direction.

[0032] Aperture switching: Through the coordinated drive of the X-axis aperture motor and the Y-axis aperture motor, the aperture 210 can move flexibly in the XY plane, moving working apertures of different sizes on the aperture 210 to the area below the electron beam, thereby adjusting the size of the electron beam; when a working aperture is damaged, it can be quickly switched to a backup aperture through the above driving method, without stopping the machine for maintenance, ensuring continuous operation of the equipment.

[0033] In this embodiment, the linear movement parts of the X-axis linear drive device 300 and the Y-axis displacement device 400 are located outside the vacuum environment, while the aperture fixing device 200 and the Y-axis displacement yielding device 500 are located inside the vacuum environment. The first bellows 360 and the second bellows 460 achieve both vacuum sealing and meet the motion transmission requirements, ensuring that the ultra-high vacuum operating environment of the scanning electron microscope is not affected. Simultaneously, the cooperation between the ceramic ball 510 and the ceramic plate 230 reduces frictional resistance, the elastic deformation design of the beryllium copper plate 240 enables precise micro-adjustment in the Y-axis direction, and the first precision threaded pair 330 and the second precision threaded pair 430 ensure positioning accuracy. This allows the device to achieve both automation and high efficiency while possessing excellent precision and reliability.

[0034] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0035] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

Claims

1. An aperture moving device, characterized in that, It includes an aperture motor cavity (100), and an X-axis aperture motor and a Y-axis aperture motor mounted on the aperture motor cavity (100); The X-axis aperture motor includes an aperture fixing device (200) and an aperture X-axis linear drive device (300). The aperture fixing device (200) is connected to the aperture X-axis linear drive device (300), and the flange of the aperture X-axis linear drive device (300) is fixed to the corresponding installation position of the aperture motor cavity (100). The aperture fixing device (200) is used to fix the aperture (210). The Y-axis aperture motor includes a Y-axis displacement device (400) and a Y-axis displacement yielding device (500). The Y-axis displacement yielding device (500) is connected to the Y-axis displacement device (400), and the Y-axis displacement yielding device (500) abuts against the aperture fixing device (200). The X-axis linear drive device (300) drives the aperture fixing device (200) to move along the X-axis, and the Y-axis displacement device (400) drives the Y-axis displacement yielding device (500) to move the aperture fixing device (200) along the Y-axis, so as to realize the switching of aperture holes of different sizes on the aperture (210) to the electron beam.

2. The aperture moving device according to claim 1, characterized in that, The aperture fixing device (200) includes an aperture fixing seat (220), a ceramic plate (230), a beryllium copper plate (240), an X-axis adapter (250), a first insulating post (260), an aperture pressure plate (270), and an aperture pressure plate hinge shaft (280). One end of the first insulating post (260) is connected to the X-axis adapter (250), and the other end of the X-axis adapter (250) is connected to the beryllium copper sheet (240). The end of the beryllium copper sheet (240) away from the X-axis adapter (250) is connected to the aperture fixing seat (220). The ceramic sheet (230) is fixed to the side of the aperture fixing seat (220). The aperture pressing plate (270) is assembled into a "door" shape through the aperture pressing plate hinge shaft (280) and pressed onto the aperture fixing seat (220). The aperture (210) is fixed on the aperture fixing seat (220).

3. The aperture moving device according to claim 1, characterized in that, The X-axis linear drive device (300) includes a first stepper motor (310), a first coupling (320), a first precision threaded pair (330), an inner side of the first crossed roller guide (340), an outer side of the first crossed roller guide (350), a first bellows (360), and an X-axis aperture motor base (370). The shaft of the first stepper motor (310) is connected to one end of the first coupling (320), and the other end of the first coupling (320) is connected to the screw of the first precision threaded pair (330); the nut part of the first precision threaded pair (330) is connected to the inner side (340) of the first cross roller guide, and the outer side (350) of the first cross roller guide is connected to the X-axis aperture motor seat (370); the end of the X-axis aperture motor seat (370) away from the first stepper motor (310) is connected to the first bellows (360), and the other end of the first bellows (360) is connected to the first insulating post (260) of the aperture fixing device (200).

4. The aperture moving device according to claim 1, characterized in that, The Y-axis displacement yielding device (500) includes a ceramic ball (510), a ceramic ball fixing sleeve (520), a ceramic ball fixing seat (530), and a second insulating column (540). The second insulating post (540) is connected to the ceramic ball fixing seat (530), the ceramic ball (510) is placed inside the ceramic ball fixing seat (530), the ceramic ball fixing sleeve (520) is connected to the ceramic ball fixing seat (530) by threads and fixes the ceramic ball (510), and the exposed part of the ceramic ball (510) abuts against the ceramic plate (230) of the aperture fixing device (200).

5. The aperture moving device according to claim 1, characterized in that, The Y-axis displacement device (400) includes a second stepper motor (410), a second coupling (420), a second precision threaded pair (430), an inner side of a second crossed roller guide (440), an outer side of a second crossed roller guide (450), a second bellows (460), and a Y-axis aperture motor seat (470). The shaft of the second stepper motor (410) is connected to one end of the second coupling (420), and the other end of the second coupling (420) is connected to the screw of the second precision threaded pair (430); the nut part of the second precision threaded pair (430) is connected to the inner side (440) of the second cross roller guide, and the outer side (450) of the second cross roller guide is connected to the Y-axis aperture motor seat (470); the end of the Y-axis aperture motor seat (470) away from the second stepper motor (410) is connected to the second bellows (460), and the other end of the second bellows (460) is connected to the second insulating column (540) of the Y-axis displacement yielding device (500).

6. The aperture moving device according to claim 1, characterized in that, The aperture (210) is provided with two rows of aperture holes of different sizes, including working aperture holes and spare aperture holes.

7. The aperture moving device according to claim 2, characterized in that, The beryllium copper sheet (240) is used to deform when the Y-axis displacement yielding device (500) pushes against it, so as to realize the fine adjustment of the Y-axis direction of the aperture (210).

8. The aperture moving device according to claim 1, characterized in that, The linear moving parts of the X-axis linear drive device (300) and Y-axis displacement device (400) of the aperture are located outside the vacuum, while the aperture fixing device (200) and Y-axis displacement yielding device (500) are located inside the vacuum.

9. The aperture moving device according to claim 4, characterized in that, The ceramic ball (510) works in conjunction with the ceramic sheet (230) to reduce the frictional resistance when the aperture fixing device (200) moves.

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