A sample tray for an electron microscope
Patent Information
- Application Number
- CN202522564392.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-03
- Publication Date
- 2026-10-27
- Estimated Expiration
- 2035-12-03
AI Technical Summary
[0003]然而，现有SEM标配的样品托盘存在明显技术局限，无法适配STEM探测器的使用需求：其一，标配托盘未预留STEM探测器的安装与信号接收空间，探测器需置于样品下方时，托盘结构会遮挡电子束信号，导致透射成像功能失效；其二，样品放置过程中缺乏精准定位结构，操作人员需多次校准样品位置，导致检测效率低下，尤其在批量样品检测场景中，该问题更为突出
（1）兼容性强，兼顾双重成像功能：本实用新型通过样品托盘与样品压片的通孔设计及托盘立柱的避让结构，既满足传统SEM表面成像时电子束对样品表面的入射需求，又为STEM探测器提供了样品下方的信号接收空间，托盘立柱可避让STEM探测器的信号接收部件（避免结构遮挡），样品托盘的通孔确保透射电子信号能有效传递至探测器，使单台SEM无需更换托盘即可完成表面成像与STEM透射成像的切换，显著提升设备利用率。
Smart Images
Figure CN224907965U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of electron microscopy, and specifically relates to a sample tray for electron microscopes. Background Technology
[0002] Electron microscopes (especially scanning electron microscopes, SEM) are core detection equipment in materials science, biomedicine, microelectronics, and other fields. Their functional expansion has always revolved around "acquiring more comprehensive sample information." Traditional SEMs primarily characterize sample surface morphology and composition by collecting backscattered or secondary electrons scattered from the sample surface. However, with evolving research needs, adding STEM detectors to SEMs allows the electron beam to penetrate thin samples and receive transmitted electron signals below the sample. This enables the acquisition of deeper information such as the sample's internal crystal structure and elemental distribution, giving a single SEM both "surface imaging" and "transmission imaging" capabilities. This has become a crucial development direction for SEMs today.
[0003] However, the standard sample trays in existing SEMs have obvious technical limitations and cannot meet the usage requirements of STEM detectors: First, the standard trays do not reserve space for the installation and signal reception of STEM detectors. When the detector needs to be placed under the sample, the tray structure will block the electron beam signal, causing the transmission imaging function to fail. Second, there is a lack of precise positioning structure during sample placement. Operators need to calibrate the sample position multiple times, resulting in low detection efficiency. This problem is more prominent, especially in batch sample detection scenarios.
[0004] Therefore, there is an urgent need for a sample tray that is compatible with conventional surface imaging and STEM transmission imaging, does not require conductive adhesive for fixation, and is easy to position, in order to meet the current multi-scenario detection needs. Utility Model Content
[0005] The purpose of this invention is to enable the use of a scanning electron microscope (STEM) for both conventional sample placement and STEM observation. When using the STEM detector, a corresponding countersunk hole is provided for sample placement. To prevent sample movement, a corresponding pressure cap is provided on top. The pressure cap has a specific positioning shape, which facilitates accurate and efficient placement and fixation of the sample pressure cap.
[0006] This utility model provides a sample tray for an electron microscope, comprising a sample tray, a sample pellet, a tray column, and a tray base. The sample tray has a sample hole for placing the sample. The sample tray has a limiting structure for positioning the sample pellet, which is placed above the sample and fixed to the sample tray by bolts. The sample tray also has a limiting structure for positioning the tray column, with the top of the tray column fixed to the sample tray by screws. The tray base has a limiting structure for positioning the tray column, and the bottom of the tray base is fixed to the tray column by screws. The tray base is used to connect to a movable sample stage of the electron microscope. The tray column is used to avoid the electron beam signal receiving structure of the STEM detector.
[0007] Preferably, the sample tray has a through hole for the STEM detector to receive the electron beam signal; the sample press has a through hole for the electron beam to enter.
[0008] Preferably, the sample tray has two symmetrically distributed grooves that limit the position of the sample press, and the sample press is fitted into the grooves to restrict its degree of freedom.
[0009] Preferably, the limiting structure of the sample tray for the tray column is a groove that matches the top structure of the tray column, so as to realize the positioning connection between the tray column and the sample tray.
[0010] Preferably, the pallet base has a groove that fits the bottom structure of the pallet column to limit the pallet column, thereby achieving a positioning connection between the pallet column and the pallet base.
[0011] Preferably, the sample tray has a sample hole adapted to hold a sample with a diameter of 3 mm.
[0012] The beneficial effects of this utility model are: (1) Strong compatibility and dual imaging function: This utility model, through the through hole design of the sample tray and sample pressing and the avoidance structure of the tray column, not only meets the electron beam incident requirements of the sample surface during traditional SEM surface imaging, but also provides a signal receiving space under the sample for the STEM detector. The tray column can avoid the signal receiving component of the STEM detector (avoiding structural obstruction). The through hole of the sample tray ensures that the transmitted electron signal can be effectively transmitted to the detector, so that a single SEM can complete the switching between surface imaging and STEM transmission imaging without changing the tray, which significantly improves the equipment utilization rate.
[0013] (2) No conductive adhesive required, convenient operation and no pollution: This utility model replaces the traditional conductive adhesive fixing method with the physical fixing method of "sample pressing plate + bolt + sample tray limiting groove". After the sample is placed, it is only necessary to embed the pressing plate into the limiting groove and tighten the bolt to complete the fixing. The operation steps are simplified. At the same time, it avoids the pollution of the sample and tray by the residual conductive adhesive. No subsequent cleaning process is required, reducing the detection cost. It is especially suitable for samples with high requirements for surface cleanliness.
[0014] (3) Precise positioning and improved detection efficiency: The symmetrical limiting groove of the sample tray, the matching limiting structure of the tray column, and the opening positioning structure of the tray base and the column form a positioning system. The sample tray can be automatically calibrated when it is embedded in the groove, without the need for repeated manual adjustment. The positioning connection between the column and the tray and base ensures the coaxiality of the overall structure and avoids imaging deviation caused by sample offset. When conducting batch testing, the sample positioning time can be shortened, which greatly improves the detection efficiency. Attached Figure Description
[0015] For ease of explanation, this utility model is described in detail below with reference to specific embodiments and accompanying drawings.
[0016] Figure 1 This is an overall cross-sectional view of the sample tray in this embodiment; Figure 2 This is a top view of the sample tray in this embodiment.
[0017] In the picture: 1-Sample tray; 2-Sample press; 3-Tray stand; 4-Tray base; 5-Screw; 6-Screw. Detailed Implementation
[0018] The following are specific embodiments of the present invention described in conjunction with the accompanying drawings, further illustrating the technical solution of the present invention. However, the present invention is not limited to these embodiments. Specific details such as particular configurations and components are provided in the following description merely to aid in a comprehensive understanding of the embodiments of the present invention. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. Furthermore, for clarity and brevity, descriptions of known functions and structures have been omitted.
[0019] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other.
[0020] like Figures 1-2As shown, this embodiment provides a sample tray for an electron microscope, including a sample tray 1, a sample press 2, a tray column 3, and a tray base 4; wherein, the sample tray 1 is provided with a sample hole for placing a sample, which can hold a sample with a diameter of 3mm; The sample tray 1 is equipped with a limiting structure to restrict the sample press 2. The sample press 2 is placed above the sample through the limiting structure and is fixed to the sample tray 1 by bolts 5. The sample tray 1 is equipped with a limiting structure to restrict the tray column 3. The top of the tray column 3 is fixedly connected to the sample tray 1 by screws 6. The tray base 4 is equipped with a limiting structure to restrict the tray column 3. The tray base 4 is fixedly connected to the bottom of the tray column 3 by screws 6. The tray base 4 is used to connect to the movable sample stage of the electron microscope. The tray column 3 is used to avoid the electron beam signal receiving structure of the STEM detector.
[0021] This embodiment further proposes that the sample tray 1 has a through hole for the STEM detector to receive the electron beam signal; and the sample press 2 has a through hole for the electron beam to enter.
[0022] This embodiment further proposes that the limiting structure for the sample tray 1 on the sample press 2 consists of two symmetrically distributed grooves, with the sample press 2 fitting and embedded within the grooves to restrict its degrees of freedom. The limiting structure for the sample tray 1 on the tray column 3 consists of a groove that matches the top structure of the tray column 3, achieving a positioning connection between the tray column 3 and the sample tray 1. The limiting structure for the tray base 4 on the tray column 3 consists of a groove that matches the bottom structure of the tray column 3, achieving a positioning connection between the tray column 3 and the tray base 4.
[0023] In this embodiment, the sample is placed on the sample tray 1, and the sample press 2 is placed on the sample through the limiting structure of the sample tray 1, and then tightened and fixed by bolts 5. At this time, the sample press 2 above the sample has through holes for the electron beam to hit the surface, and the through holes on the sample tray 1 on the back of the sample allow the STEM detector to receive the electron beam signal. Since the structure of the STEM detector that receives the electron beam signal occupies part of the volume, the sample tray 1 and the movable sample stage of the scanning electron microscope avoid the structure of the STEM detector that receives the electron beam signal through the tray column 3. When receiving the signal, the tray column 3 achieves complete avoidance. The tray base 4 is connected to the movable sample stage of the scanning electron microscope.
[0024] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0025] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
Claims
1. A sample tray for an electron microscope, characterized in that, Includes sample tray (1), sample press (2), tray column (3), and tray base (4); The sample tray (1) is provided with a sample hole for placing the sample; The sample tray (1) is provided with a limiting structure for limiting the sample press (2). The sample press (2) is placed above the sample through the limiting structure and is connected and fixed to the sample tray (1) by bolts (5). The sample tray (1) is provided with a limiting structure for limiting the tray column (3), and the top of the tray column (3) is fixedly connected to the sample tray (1) by screws (6); The tray base (4) is provided with a limiting structure to limit the tray column (3). The tray base (4) and the bottom of the tray column (3) are fixedly connected by screws (6). The tray base (4) is used to connect with the movable sample stage of the electron microscope. The tray column (3) is used to avoid the electron beam signal receiving structure of the STEM detector.
2. A sample tray for an electron microscope according to claim 1, characterized in that, The sample tray (1) has a through hole for the STEM detector to receive the electron beam signal; the sample press (2) has a through hole for the electron beam to enter.
3. A sample tray for an electron microscope according to claim 1, characterized in that, The limiting structure of the sample tray (1) for the sample press (2) is two symmetrically distributed grooves, and the sample press (2) is adapted to be embedded in the grooves to restrict the degree of freedom.
4. A sample tray for an electron microscope according to claim 1, characterized in that, The limiting structure of the sample tray (1) for the tray column (3) is a groove that matches the top structure of the tray column (3), thereby realizing the positioning connection between the tray column (3) and the sample tray (1).
5. A sample tray for an electron microscope according to claim 1, characterized in that, The limiting structure of the pallet base (4) for the pallet column (3) is a groove that is adapted to the bottom structure of the pallet column (3), so as to realize the positioning connection between the pallet column (3) and the pallet base (4).
6. A sample tray for an electron microscope according to claim 1, characterized in that, The sample tray (1) has a sample hole adapted to hold a sample with a diameter of 3 mm.