Electron microscope and scanning device

Abstract

The application relates to the field of microscopes, in particular to an electron microscope and a scanning device. The electron microscope comprises a lens assembly, a sample chamber and an airflow control device; the lens assembly comprises a lens barrel, an isolation valve and an objective lens, the isolation valve is installed between the lens barrel and the objective lens to communicate or isolate the lens barrel and the objective lens; the sample chamber is used for placing a sample, and the sample chamber communicates with the objective lens; the airflow control device communicates with the sample chamber to exhaust or vacuumize the sample chamber. The electron microscope provided by the application realizes the physical isolation of the lens barrel and the sample chamber through the isolation valve, and cooperates with the independent airflow control device, so that the sample replacement process no longer affects the stability of the lens barrel vacuum system, thereby realizing efficient, clean and reliable rapid sample replacement under the premise of ensuring the imaging quality.

Description

Technical Field

[0001] This application relates to the field of microscopy, and in particular to an electron microscope and scanning device. Background Technology

[0002] Scanning electron microscopy (SEM) is a large, precision instrument used for high-resolution micro-area morphology analysis. Maintaining a high vacuum in the sample chamber is essential when using an SEM. Traditional benchtop SEMs require the entire vacuum system—sample chamber, microscope tube, and pipette tip—to be completely exposed to the atmosphere when changing samples. This process has several significant drawbacks: 1. Low sample change efficiency: After each sample change, the entire vacuum system needs to be re-vacuumed, which seriously affects the efficiency of scientific research and testing. In addition, the nozzle cannot maintain a high vacuum state, which affects the stability and lifespan of the electron source.

[0003] 2. High load on vacuum system: Frequent cavitation and vacuuming will cause wear and tear on vacuum components such as molecular pumps and mechanical pumps, shortening their service life.

[0004] 3. Contamination risk: When the vacuum system is exposed to the atmosphere, pollutants such as water vapor and dust in the air may enter the vacuum system, contaminating the sample chamber, microscope tube, aperture and inner wall, and affecting the imaging quality. Utility Model Content

[0005] The purpose of this application is to provide an electron microscope and scanning device to solve the problems of low sample changing efficiency, high vacuum system load and contamination risk in existing electron microscopes when changing samples.

[0006] This application provides an electron microscope, including a lens assembly, a sample chamber, and an airflow control device; The lens assembly includes a lens barrel, an isolation valve, and an objective lens. The isolation valve is installed between the lens barrel and the objective lens to connect or isolate the lens barrel and the objective lens. The sample chamber is used to hold the sample, and the sample chamber is in communication with the objective lens; The airflow control device is connected to the sample chamber to exhaust or evacuate the sample chamber.

[0007] In the above technical solution, the airflow control device further includes a vacuum mechanism; The vacuuming mechanism includes a pump assembly, a valve assembly, and a vacuum pipe. The pump assembly is connected to the sample chamber via the vacuum pipe, and the valve assembly is installed on the vacuum pipe to open or close the vacuum pipe.

[0008] In the above technical solution, the pump body assembly further includes a mechanical pump and a molecular pump; the air extraction pipe includes a first pipe, a second pipe and a third pipe; the valve assembly includes a first valve, a second valve and a third valve; The first pipeline is disposed between the mechanical pump and the molecular pump, and the first valve is installed in the first pipeline; the second pipeline is disposed between the mechanical pump and the sample chamber, and the second valve is installed in the second pipeline; the third pipeline is disposed between the molecular pump and the sample chamber, and the third valve is installed in the third pipeline.

[0009] In the above technical solution, the airflow control device further includes an air release mechanism; The venting mechanism includes a venting valve and a venting pipe. The venting pipe is connected to the sample chamber, and the venting valve is installed on the venting pipe to open or close the venting pipe.

[0010] In the above technical solution, the venting mechanism further includes a gas source container; the gas source container is connected to the end of the venting pipe away from the sample chamber, so as to supply dry inert gas to the sample chamber.

[0011] In the above technical solution, the airflow control device further includes a vacuum sensor; the vacuum sensor is installed inside the sample chamber to detect the vacuum level inside the sample chamber.

[0012] In the above technical solution, the airflow control device further includes a control mechanism; The control mechanism is communicatively connected to the isolation valve to control the opening or closing of the isolation valve; The control mechanism is communicatively connected to the valve assembly to control the valve assembly to open or close. The control mechanism is communicatively connected to the vent valve to control the vent valve to open or close. The control mechanism is communicatively connected to the vacuum sensor.

[0013] In the above technical solution, the sample chamber further includes a sample stage, a main chamber body, and a chamber door; The main body of the compartment has an opening, the compartment door is installed at the opening, and the compartment door and the main body of the compartment enclose a receiving cavity; The sample stage is connected to the compartment door, which is movable relative to the main body of the compartment to allow the sample stage to enter or leave the receiving cavity through the opening.

[0014] In the above technical solution, the door is further attached to the main body of the compartment by adsorption.

[0015] This application also provides a scanning device, including the electron microscope described above.

[0016] Compared with the prior art, the beneficial effects of this application are as follows: The electron microscope provided in this application achieves physical isolation between the microscope tube and the sample chamber through an isolation valve. Combined with an independent airflow control device, the sample replacement process no longer affects the stability of the microscope tube vacuum system, thereby achieving efficient, clean, and reliable rapid sample replacement while ensuring imaging quality.

[0017] This application also provides a scanning device, including the electron microscope described in the above-described scheme. Based on the above analysis, it is clear that the scanning device also possesses the aforementioned beneficial effects, which will not be elaborated upon further here. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of the electron microscope provided in this application; Figure 2 A schematic diagram of the sample replacement process provided for this application.

[0020] In the figure: 1-Sample chamber; 2-Sample stage; 3-Chamber door; 4-Objective lens; 5-Isolation valve; 6-Eye tube; 7-Mechanical pump; 8-Valve assembly; 801-First valve; 802-Second valve; 803-Third valve; 9-Vent valve; 10-Vacuum gauge; 11-Molecular pump; 12-Control mechanism. Detailed Implementation

[0021] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0024] Example 1 See Figure 1 As shown, the electron microscope provided in this application includes a lens assembly, a sample chamber 1, and an airflow control device; the lens assembly includes a microscope tube 6, an isolation valve 5, and an objective lens 4, the isolation valve 5 is installed between the microscope tube 6 and the objective lens 4 to connect or isolate the microscope tube 6 and the objective lens 4; the sample chamber 1 is used to place a sample, and the sample chamber 1 is connected to the objective lens 4; the airflow control device is connected to the sample chamber 1 to exhaust or evacuate the sample chamber 1.

[0025] Specifically, the isolation valve 5 is located between the microscope tube 6 (containing components such as the electron gun and optical path system) and the objective lens 4, forming a switchable physical barrier. The sample chamber 1 is connected to the objective lens 4 and is used to hold the sample to be tested; the sample chamber 1 is a vacuum-prone area, and its vacuum state can be independently controlled by an external airflow control system.

[0026] By closing the isolation valve 5, the connection between the sample chamber 1 and the microscope tube 6 can be severed during sample change, ensuring that core components such as the electron gun inside the microscope tube 6 are always under high vacuum. After sample change, there is no need to wait for the microscope tube 6 to be evacuated again; simply restore the vacuum in the sample chamber 1 and open the isolation valve 5 to connect it to the microscope tube 6, and observation can begin immediately, greatly improving equipment efficiency. The isolation valve 5 effectively prevents the microscope tube 6 from frequently contacting the atmosphere, reducing the load on the vacuum pump and the risk of contamination inside the microscope tube 6.

[0027] The electron microscope provided in this application achieves physical isolation between the microscope tube 6 and the sample chamber 1 through the isolation valve 5. Combined with an independent airflow control device, the sample replacement process no longer affects the stability of the vacuum system of the microscope tube 6, thereby achieving efficient, clean, and reliable rapid sample replacement while ensuring imaging quality.

[0028] In an optional embodiment, the airflow control device includes a vacuum mechanism; the vacuum mechanism includes a pump assembly, a valve assembly 8, and a vacuum pipe. The pump assembly is connected to the sample chamber 1 through the vacuum pipe, and the valve assembly 8 is installed on the vacuum pipe to open or close the vacuum pipe.

[0029] In this embodiment, by connecting the pump assembly to the sample chamber 1 via a dedicated evacuation pipe, and with the precise opening and closing of the valve assembly 8, the sample chamber 1 can independently complete the vacuuming process while isolated from the microscope tube 6. Before sample replacement, the isolation valve 5 is opened, and then the sample chamber 1 is evacuated to atmospheric pressure. The sample chamber 1 is then opened for sample replacement. After sample replacement, the sample chamber 1 is evacuated again. During this process, the microscope tube 6 system maintains a high vacuum and does not need to participate in the evacuation cycle.

[0030] In this optional embodiment, the pump assembly includes a mechanical pump 7 and a molecular pump 11; the evacuation pipeline includes a first pipeline, a second pipeline, and a third pipeline; the valve assembly 8 includes a first valve 801, a second valve 802, and a third valve 803; the first pipeline is disposed between the mechanical pump 7 and the molecular pump 11, and the first valve 801 is installed in the first pipeline; the second pipeline is disposed between the mechanical pump 7 and the sample chamber 1, and the second valve 802 is installed in the second pipeline; the third pipeline is disposed between the molecular pump 11 and the sample chamber 1, and the third valve 803 is installed in the third pipeline.

[0031] In this embodiment, the mechanical pump 7 is responsible for coarse evacuation, reducing the sample chamber 1 from atmospheric pressure to a medium vacuum, thus preventing the molecular pump 11 from being directly damaged by atmospheric impact. The molecular pump 11 further evacuates the sample chamber 1 to a high vacuum to a preset value to meet the working requirements of the electron microscope. The first valve 801 in the first pipeline, the second valve 802 in the second pipeline, and the third valve 803 in the third pipeline are all gate valves, which can open different evacuation paths as needed.

[0032] Specifically, in the initial stage of vacuuming, the first valve 801 is closed and the second valve 802 is opened, and the mechanical pump 7 performs coarse evacuation of the sample chamber 1 through the second pipe; after the coarse evacuation is completed, the second valve 802 is closed and the first valve 801 and the third valve 803 are opened, and the molecular pump 11 is connected to the sample chamber 1 through the first pipe and the third pipe to complete the high vacuum evacuation.

[0033] In an optional embodiment, the airflow control device further includes a venting mechanism; the venting mechanism includes a venting valve 9 and a venting pipe, the venting pipe is connected to the sample chamber 1, and the venting valve 9 is installed on the venting pipe to open or close the venting pipe.

[0034] In this embodiment, a venting pipe is installed to connect the sample chamber 1 to the external environment, and a venting valve 9 is configured on this pipe to control the on / off state of the venting process. This design allows the system to introduce external gases (such as dry inert gas or air) in an orderly manner when needed, gradually releasing the negative or positive pressure within the sample chamber 1. The venting valve 9 controls the gas inflow rate, avoiding airflow impacts caused by sudden pressure changes, effectively preventing sample damage, and improving the safety and repeatability of sample processing.

[0035] In an optional embodiment, the venting mechanism further includes a gas source container; the gas source container is connected to the end of the venting pipe away from the sample chamber 1 to supply dry inert gas to the sample chamber 1. While achieving stable depressurization of the sample chamber 1, it effectively avoids the intrusion of moisture, oxygen and particulate matter, and significantly improves the sample protection level, system cleanliness and environmental adaptability.

[0036] In an optional embodiment, the airflow control device further includes a vacuum sensor; specifically, a vacuum gauge 10, which is installed inside the sample chamber 1 to detect the vacuum level within the sample chamber 1. Based on the results detected by the vacuum sensor, the operator can determine the state within the sample chamber 1, thereby enabling corresponding scanning or sample replacement operations.

[0037] In an optional embodiment, the airflow control device further includes a control mechanism 12; the control mechanism 12 is communicatively connected to the isolation valve 5 to control the isolation valve 5 to open or close; the control mechanism 12 is communicatively connected to the valve assembly 8 to control the valve assembly 8 to open or close; the control mechanism 12 is communicatively connected to the venting valve 9 to control the venting valve 9 to open or close; and the control mechanism 12 is communicatively connected to the vacuum sensor.

[0038] In this embodiment, the first valve 801, the second valve 802, the third valve 803, the isolation valve 5, and the vent valve 9 (specifically, the electromagnetic vent valve 9) are all electrically controlled valves. The control mechanism 12 is communicatively connected to them, enabling automatic control of the entire airflow path, thus improving the system's automation level, operational safety, process repeatability, and human-machine interaction experience. Figure 2 As shown in the figure, a schematic diagram of the sample replacement process is presented.

[0039] Example 2 The electron microscope in this second embodiment is an improvement on the above embodiments. The technical content disclosed in the above embodiments will not be described again, and the content disclosed in the above embodiments also belongs to the content disclosed in this second embodiment.

[0040] See Figure 1 As shown, in the optional scheme of this embodiment, the sample chamber 1 includes a sample stage 2, a chamber body and a chamber door 3; the chamber body is provided with an opening, the chamber door 3 is installed at the opening, and the chamber door 3 and the chamber body enclose a receiving cavity; the sample stage 2 is connected to the chamber door 3, and the chamber door 3 can move relative to the chamber body to drive the sample stage 2 to enter or leave the receiving cavity from the opening.

[0041] In this embodiment, the sample stage 2 is connected to the door 3 so that the door 3 can support and fix the sample stage 2, simplifying the structure. Furthermore, when the operator changes samples, the door 3 can be opened from the outside to move the sample stage 2 out of the receiving cavity, making it convenient for the operator to load the sample onto the sample stage 2. Afterwards, closing the door 3 automatically sends the sample back into the receiving cavity, improving operational convenience.

[0042] In this embodiment, the door 3 is magnetically connected to the main body of the chamber. Alternatively, the door 3 is magnetically connected to the main body of the chamber, facilitating quick opening or sealing of the sample chamber 1 by the operator.

[0043] Example 3 Embodiment 3 of this application provides a scanning device, including the electron microscope of any of the above embodiments, and thus has all the beneficial technical effects of the electron microscope of any of the above embodiments, which will not be repeated here.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application. In addition, those skilled in the art can understand that although some embodiments herein include certain features included in other embodiments but not other features, combinations of features from different embodiments are meant to be within the scope of this application and form different embodiments.

Claims

1. An electron microscope, characterized in that, Includes lens assembly, sample chamber and airflow control device; The lens assembly includes a lens barrel, an isolation valve, and an objective lens. The isolation valve is installed between the lens barrel and the objective lens to connect or isolate the lens barrel and the objective lens. The sample chamber is used to hold the sample, and the sample chamber is in communication with the objective lens; The airflow control device is connected to the sample chamber to exhaust or evacuate the sample chamber.

2. The electron microscope according to claim 1, characterized in that, The airflow control device includes a vacuum pumping mechanism; The vacuuming mechanism includes a pump assembly, a valve assembly, and a vacuum pipe. The pump assembly is connected to the sample chamber via the vacuum pipe, and the valve assembly is installed on the vacuum pipe to open or close the vacuum pipe.

3. The electron microscope according to claim 2, characterized in that, The pump assembly includes a mechanical pump and a molecular pump; the evacuation conduit includes a first conduit, a second conduit, and a third conduit; the valve assembly includes a first valve, a second valve, and a third valve. The first pipeline is disposed between the mechanical pump and the molecular pump, and the first valve is installed in the first pipeline; the second pipeline is disposed between the mechanical pump and the sample chamber, and the second valve is installed in the second pipeline; the third pipeline is disposed between the molecular pump and the sample chamber, and the third valve is installed in the third pipeline.

4. The electron microscope according to claim 2, characterized in that, The airflow control device also includes a venting mechanism; The venting mechanism includes a venting valve and a venting pipe. The venting pipe is connected to the sample chamber, and the venting valve is installed on the venting pipe to open or close the venting pipe.

5. The electron microscope according to claim 4, characterized in that, The venting mechanism also includes a gas source container; the gas source container is connected to the end of the venting pipe away from the sample chamber to supply dry inert gas to the sample chamber.

6. The electron microscope according to claim 5, characterized in that, The airflow control device also includes a vacuum sensor; the vacuum sensor is installed inside the sample chamber to detect the vacuum level inside the sample chamber.

7. The electron microscope according to claim 6, characterized in that, The airflow control device also includes a control mechanism; The control mechanism is communicatively connected to the isolation valve to control the opening or closing of the isolation valve; The control mechanism is communicatively connected to the valve assembly to control the valve assembly to open or close. The control mechanism is communicatively connected to the vent valve to control the vent valve to open or close. The control mechanism is communicatively connected to the vacuum sensor.

8. The electron microscope according to claim 1, characterized in that, The sample chamber includes a sample stage, a main chamber body, and a chamber door; The main body of the compartment has an opening, the compartment door is installed at the opening, and the compartment door and the main body of the compartment enclose a receiving cavity; The sample stage is connected to the compartment door, which is movable relative to the main body of the compartment to allow the sample stage to enter or leave the receiving cavity through the opening.

9. The electron microscope according to claim 8, characterized in that, The door is magnetically attached to the main body of the compartment.

10. A scanning device, characterized in that, Including an electron microscope as described in any one of claims 1 to 9.

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