Heating device for an ion source and mass spectrometer

Abstract

The utility model relates to heating equipment technical field discloses a kind of heating device and mass spectrometer for ion source, and heating device includes sleeve, heating rod and gas nozzle structure, sleeve has import end and export end, sleeve has the first cavity through in axial direction in it, the peripheral wall of sleeve is equipped with the groove body being connected with the first cavity, groove body is connected with the import end of sleeve;Heating rod has gas inlet end and gas outlet end, heating rod has the second cavity through in axial direction in it, heating rod is inserted in the first cavity, the gas inlet end of heating rod is towards the import end of sleeve, the gas outlet end of heating rod is towards the export end of sleeve;The peripheral wall of heating rod is connected with pin, pin is inserted in groove body;Gas nozzle structure is installed in the gas inlet end of heating rod, and gas nozzle structure is used to pass into gas, so that gas passes through second cavity and blows towards the gas outlet end of heating rod.The utility model aims at solving the technical problem that pin on heating rod is easy to fall off or damage when assembling heating device.

Description

Technical Field

[0001] This utility model relates to the field of heating equipment technology, and in particular to a heating device for an ion source and a mass spectrometer. Background Technology

[0002] An ion source is a device that ionizes neutral atoms or molecules and extracts an ion beam from them. In a mass spectrometer, the ion source is heated by a heating device, causing the ion source to rapidly vaporize within a metal chamber, forming a uniform sample gas flow.

[0003] In related technologies, ion source heating devices include heating rods and sleeves. The heating rod is fitted inside the sleeve. When the heating rod is energized, it generates heat, which heats the gas passing through it and blows it toward the ion source. However, when installing the heating rod into the sleeve, the leads on the heating rod need to be bent before it can be inserted. Repeated bending of the leads can easily cause metal fatigue or breakage, resulting in the leads falling off or being damaged. Utility Model Content

[0004] The purpose of this invention is to provide a heating device and mass spectrometer for an ion source, so as to solve the problem that the pins on the heating rod fall off or are damaged when the heating rod is installed into the sleeve.

[0005] In a first aspect, this utility model provides a heating device for an ion source, comprising: A sleeve has an inlet end and an outlet end. The sleeve has a first cavity that extends through the shaft along the axis. The peripheral wall of the sleeve is provided with a groove that communicates with the first cavity. The groove communicates with the inlet end of the sleeve. A heating rod has an air inlet and an air outlet. The heating rod has a second cavity that extends axially. The heating rod is inserted into the first cavity. The air inlet of the heating rod faces the inlet of the sleeve, and the air outlet of the heating rod faces the outlet of the sleeve. The peripheral wall of the heating rod is connected with pins, and the pins are inserted into the groove. An air nozzle structure is installed at the air inlet end of the heating rod. The air nozzle structure is used to introduce gas so that the gas passes through the second cavity and blows towards the air outlet end of the heating rod.

[0006] Optionally, the groove includes a clearance groove and a receiving groove. The clearance groove is located between the inlet end of the sleeve and the receiving groove, and is connected to the inlet end of the sleeve and the receiving groove respectively. The pin is inserted into the receiving groove.

[0007] Optionally, the circumferential width of the clearance groove along the sleeve is smaller than the circumferential width of the receiving groove along the sleeve.

[0008] Optionally, the sleeve has four slots spaced apart on its peripheral wall, and the heating rod has four pins spaced apart on its peripheral wall, with each pin corresponding to one of the slots. Of the four pins, two are used to connect to the positive and negative terminals of the power supply, and the other two are used to provide feedback on the heating temperature of the heating rod.

[0009] Optionally, the heating device includes a limiting ring, and the outer peripheral wall of the heating rod is provided with a first limiting groove. The limiting ring is sleeved in the first limiting groove within the first cavity to restrict the radial movement of the heating rod along the sleeve.

[0010] Optionally, the heating device further includes a mesh cover structure installed at the outlet end of the sleeve.

[0011] Optionally, the heating device further includes a sealing ring, which is disposed between the air inlet end of the heating rod and the air nozzle structure, and respectively abuts against the air inlet end of the heating rod and the air nozzle structure.

[0012] Optionally, the nozzle structure includes a nozzle body and a mounting base sleeved on the nozzle body. The mounting base and the nozzle body form a mounting groove. The sealing ring is sleeved in the mounting groove. The mounting base is sleeved on the air inlet end of the heating rod.

[0013] Optionally, the heating device further includes a retaining ring, and the inner wall of the inlet end of the sleeve is provided with a second limiting groove, and the retaining ring is sleeved in the second limiting groove.

[0014] Secondly, this utility model also provides a mass spectrometer, which includes the heating device for the ion source.

[0015] This utility model provides a heating device for an ion source, the advantages of which are: The heating device of this utility model includes a sleeve, a heating rod, and a nozzle structure. The sleeve is an outer tube with a first cavity inside. The two ends of the sleeve are an inlet end and an outlet end communicating with the first cavity. The heating rod is an inner tube with a second cavity inside. The two ends of the heating rod are an inlet end and an outlet end communicating with the second cavity. When assembling the heating device, the nozzle structure is installed at the inlet end of the heating rod. The heating rod is inserted into the first cavity from the inlet end of the sleeve, and the leads are inserted into the groove from the inlet end of the sleeve to avoid bending the leads and causing damage. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the heating device provided in an embodiment of this utility model; Figure 2 An exploded view of the heating device provided in an embodiment of this utility model; Figure 3 Another exploded view of the heating device provided in this embodiment of the utility model; Figure 4 A cross-sectional schematic diagram of the heating device provided in an embodiment of this utility model; Figure 5 for Figure 3 A magnified view of a section at point A in the middle; Figure 6 for Figure 3 A magnified view of a section at point B in the middle.

[0018] The markings in the image are as follows: 10. Sleeve; 11. Inlet end; 12. Outlet end; 13. First cavity; 14. Tank; 141. Clearance groove; 142. Receiving groove; 15. Second limiting groove; 20. Heating rod; 21. Air inlet end; 22. Air outlet end; 23. Second cavity; 24. Pin; 25. First limiting groove; 30. Nozzle structure; 31. Nozzle body; 32. Mounting base; 33. Mounting groove; 40. Limiting ring; 50. Mesh cover structure; 60. Sealing ring; 70. Snap ring; 100. Heating device. Detailed Implementation

[0019] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0020] In the description of this utility model, it should be noted that the terms "upper", "lower", "front", "rear", "inner", "outer" and other terms used in this utility model to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device and components referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0021] In the description of this utility model, it should be understood that the terms "first," "second," etc., are used to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this utility model, "first" information can also be referred to as "second" information, and similarly, "second" information can also be referred to as "first" information.

[0022] like Figures 1 to 4 As shown, this embodiment of the present invention provides a heating device 100 for an ion source. The heating device 100 includes a sleeve 10, a heating rod 20, and a gas nozzle structure 30. The sleeve 10 has an inlet end 11 and an outlet end 12. The sleeve 10 has a first cavity 13 that extends axially through it. The peripheral wall of the sleeve 10 is provided with a groove 14 that communicates with the first cavity 13. The groove 14 communicates with the inlet end 11 of the sleeve 10. The heating rod 20 has an air inlet end 21 and an air outlet end 22. The heating rod 20 has a... A second cavity 23 extends axially through the heating rod 20, which is inserted into the first cavity 13. The inlet end 21 of the heating rod 20 faces the inlet end 11 of the sleeve 10, and the outlet end 22 of the heating rod 20 faces the outlet end 12 of the sleeve 10. The peripheral wall of the heating rod 20 is connected with pins 24, which are inserted into the groove 14. A nozzle structure 30 is installed at the inlet end 21 of the heating rod 20 and is used to introduce gas so that the gas passes through the second cavity 23 and blows towards the outlet end 22 of the heating rod 20.

[0023] In this embodiment, the sleeve 10 is an outer tube, and the sleeve 10 has a first cavity 13 inside. The two ends of the sleeve 10 are an inlet end 11 and an outlet end 12 communicating with the first cavity 13. The heating rod 20 is an inner tube, and the heating rod 20 has a second cavity 23 inside. The two ends of the heating rod 20 are an air inlet end 21 and an air outlet end 22 communicating with the second cavity 23. The heating rod 20 is fitted inside the sleeve 10, with the air inlet end 21 corresponding to the position of the inlet end 11, and the air outlet end 22 corresponding to the position of the outlet end 12.

[0024] The heating rod 20 has pins 24 on its peripheral wall. The pins 24 can be copper wire or other conductive structures. The pins 24 correspond to the positions of the grooves 14 of the sleeve 10 and are inserted into the grooves 14. One end of the pin is connected to the heating rod 20, and the other end extends outward and is connected to an external power source. By applying voltage to the heating rod 20, heat is generated.

[0025] Based on the above technical solution, when assembling the heating device 100, the air nozzle structure 30 is installed at the air inlet end 21 of the heating rod 20, the heating rod 20 is inserted into the first cavity 13 from the inlet end 11 of the sleeve 10, and the pin 24 is inserted into the groove 14 from the inlet end 11 of the sleeve 10 to avoid bending the pin 24 and causing damage to the pin 24. After assembly, the air inlet end 21 of the heating rod 20 faces the inlet end 11 of the sleeve 10, and the air outlet end 22 of the heating rod 20 faces the outlet end 12 of the sleeve 10.

[0026] In use, the heating rod 20 is heated by applying voltage to it. When the gas to be heated (such as nitrogen) is blown into the second cavity 23 from the nozzle structure 30, it is heated in the second cavity 23 and becomes a high-temperature gas. Then it is blown out from the outlet end 22 of the heating rod 20 (or the outlet end 12 of the sleeve 10). The high-temperature gas is continuously blown toward the ion source, thereby heating the ion source.

[0027] In some embodiments, such as Figure 2 As shown, the tank 14 is disposed on the peripheral wall of the sleeve 10 near the inlet end 11. Correspondingly, the pin 24 is connected to the peripheral wall of the heating rod 20 near the air inlet end 21. In this way, the size of the tank 14 is too large, which would cause insufficient structural rigidity of the sleeve 10.

[0028] In some embodiments, such as Figure 2 and Figure 3 As shown, the tank 14 includes a clearance groove 141 and a receiving groove 142. The clearance groove 141 is located between the inlet end 11 of the sleeve 10 and the receiving groove 142, and connects the inlet end 11 of the sleeve 10 and the receiving groove 142 respectively. The pin 24 is inserted into the receiving groove 142.

[0029] Specifically, both the clearance groove 141 and the receiving groove 142 extend axially along the sleeve 10. In the axial direction of the sleeve 10, the clearance groove 141 is located between the inlet end 11 of the sleeve 10 and the receiving groove 142. One end of the clearance groove 141 is connected to the inlet end 11 of the sleeve 10, and the other end is connected to the receiving groove 142. When assembling the heating device 100, the heating rod 20 is inserted into the inside of the sleeve 10. During the movement of the heating rod 20, the pin 24 is inserted from the clearance groove 141 into the receiving groove 142. After assembly, the pin 24 is inserted into the receiving groove 142. In this embodiment, the clearance groove 141 is provided between the inlet end 11 of the sleeve 10 and the receiving groove 142, which allows the pin 24 to be inserted from the clearance groove 141 into the receiving groove 142, avoiding the need to bend the pin 24 before inserting it into the receiving groove 142, and preventing the pin 24 from experiencing metal fatigue or breakage.

[0030] In some embodiments, such as Figure 5 As shown, the circumferential width of the clearance groove 141 along the sleeve 10 is smaller than the circumferential width of the receiving groove 142 along the sleeve 10.

[0031] Specifically, the clearance groove 141 has a circumferential width of L1 along the sleeve 10, and the receiving groove 142 has a circumferential width of L2 along the sleeve 10. L1 is greater than the outer diameter of the pin 24 and less than L2, so that the pin 24 can pass through the clearance groove 141 and be inserted into the receiving groove 142. Furthermore, the receiving groove 142 has a certain amount of bending space to facilitate connection to an external power supply. In some embodiments, after installation, pin 24 is inserted into the receiving groove 142 and does not contact the sleeve 10, so as to avoid damage to pin 24 by the high temperature sleeve 10.

[0032] In some embodiments, such as Figures 1 to 3 As shown, the sleeve 10 has four slots 14 spaced apart on its peripheral wall, and the heating rod 20 has four pins 24 spaced apart on its peripheral wall. Each pin 24 is inserted into each slot 14 in a corresponding manner. Among the four pins 24, two pins 24 are used to connect to the positive and negative terminals of the power supply, and the other two pins 24 are used to provide feedback on the heating temperature of the heating rod 20.

[0033] For example, the sleeve 10 has four equally spaced grooves 14 on its peripheral wall, each groove 14 including a clearance groove 141 and a receiving groove 142, and the heating rod 20 has four equally spaced pins 24 on its peripheral wall. During assembly of the heating device 100, each pin 24 is inserted into each receiving groove 142 from each clearance groove 141. After assembly, two pins 24 serve as power lines, connected to the positive and negative terminals of an external power supply, used to apply voltage to the heating rod 20; the other two pins 24 serve as feedback lines, connected to the control board, used to provide feedback on the heating temperature of the heating rod 20. By adjusting the applied voltage and time, the heating temperature of the heating rod 20 can be adjusted.

[0034] In some embodiments, such as Figures 2 to 4 As shown, the heating device 100 includes a limiting ring 40. The outer peripheral wall of the heating rod 20 is provided with a first limiting groove 25. The limiting ring 40 is sleeved in the first limiting groove 25 in the first cavity 13 to limit the radial movement of the heating rod 20 along the sleeve 10.

[0035] Specifically, the heating rod 20 is fitted inside the sleeve 10 and has a gap with the inner wall of the sleeve 10. The limiting ring 40 is fitted into the first limiting groove 25 of the heating rod 20 and abuts against the outer peripheral wall of the heating rod 20 and the inner peripheral wall of the sleeve 10 respectively, thereby restricting the heating rod 20 from moving radially and preventing the heating rod 20 from becoming loose and affecting the heating effect.

[0036] For example, the first limiting groove 25 is provided on the outer peripheral surface near the outlet end 12. After the heating rod 20 is fully inserted into the sleeve 10, the limiting ring 40 is embedded at the bottom position of the sleeve 10.

[0037] In some embodiments, such as Figures 2 to 4 As shown, the heating device 100 also includes a mesh cover structure 50, which is installed at the outlet end 12 of the sleeve 10.

[0038] Specifically, the mesh structure 50 is a mesh with multiple arrayed small holes. When the mesh structure 50 is installed at the outlet end 12 of the sleeve 10, after the gas second cavity 23 is heated into high-temperature gas, the small holes on the mesh divide the airflow into airflow bundles and slow down the airflow speed.

[0039] In some embodiments, such as Figures 2 to 4 As shown, the heating device 100 also includes a sealing ring 60, which is disposed between the air inlet end 21 of the heating rod 20 and the air nozzle structure 30, and respectively abuts against the air inlet end 21 of the heating rod 20 and the air nozzle structure 30, preventing gas in the second cavity 23 from overflowing from the connection between the air nozzle structure 30 and the heating rod 20, thereby increasing the overall airtightness of the heating device 100.

[0040] For example, the sealing ring 60 is an O-ring, a rubber ring, or a silicone ring.

[0041] In some embodiments, such as Figure 5 As shown, the nozzle structure 30 includes a nozzle body 31 and a mounting base 32 sleeved on the nozzle body 31. The mounting base 32 and the nozzle body 31 form a mounting groove 33. The sealing ring 60 is sleeved in the mounting groove 33. The mounting base 32 is sleeved on the air inlet end 21 of the heating rod 20.

[0042] Specifically, the nozzle body 31 is hollow, with one end connected to an external air source and the other end extending into the second cavity 23. Gas to be heated is introduced into the second cavity 23 through the nozzle body 31. The mounting base 32 is arranged around the outer periphery of the nozzle body 31, forming an annular mounting groove 33. The shape and size of the sealing ring 60 are adapted to the shape and size of the mounting groove 33, embedding the sealing ring 60 within the mounting groove 33. The mounting base 32 is fitted onto the outer periphery of the air inlet end 21 of the heating rod 20, ensuring a tight connection between the nozzle structure 30 and the heating rod 20. The sealing ring 60 enhances the airtightness of the connection between the nozzle structure 30 and the heating rod 20.

[0043] In some embodiments, such as Figures 2 to 4 As shown, the heating device 100 also includes a retaining ring 70, and the inner wall of the inlet end 11 of the sleeve 10 is provided with a second limiting groove 15, and the retaining ring 70 is sleeved in the second limiting groove 15.

[0044] Specifically, the snap ring 70, also known as a retaining ring, elastic retaining ring, or snap ring, is an elastic open metal ring that uses the preload generated by its elastic deformation to fix itself in the groove (i.e., the limiting groove) of a shaft or hole for axial positioning, preventing parts from falling off, and limiting the range of motion.

[0045] In this embodiment, after the heating rod 20 is inserted into the sleeve 10, the retaining ring 70 is embedded in the second limiting groove 15. The preload of the retaining ring 70 restricts the heating rod 20 from moving axially, preventing the heating rod 20 from coming out of the inlet end 11 of the sleeve 10 and improving the structural stability of the heating device 100.

[0046] Secondly, this utility model also provides a mass spectrometer, including a heating device 100 for an ion source, which is as described above and will not be described in detail in this embodiment.

[0047] It should be understood that the term "and / or" as used in this specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations. It should be noted that, herein, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or system that includes that element.

[0048] The sequence numbers of the above-described embodiments of this utility model are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments. The above descriptions are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A heating device for an ion source, characterized in that, The heating device includes: A sleeve has an inlet end and an outlet end. The sleeve has a first cavity that extends through the shaft along the axis. The peripheral wall of the sleeve is provided with a groove that communicates with the first cavity. The groove communicates with the inlet end of the sleeve. A heating rod has an air inlet and an air outlet. The heating rod has a second cavity that extends axially. The heating rod is inserted into the first cavity. The air inlet of the heating rod faces the inlet of the sleeve, and the air outlet of the heating rod faces the outlet of the sleeve. The peripheral wall of the heating rod is connected with pins, and the pins are inserted into the groove. An air nozzle structure is installed at the air inlet end of the heating rod. The air nozzle structure is used to introduce gas so that the gas passes through the second cavity and blows towards the air outlet end of the heating rod.

2. The heating device for an ion source according to claim 1, characterized in that, The groove includes a clearance groove and a receiving groove. The clearance groove is located between the inlet end of the sleeve and the receiving groove, and is connected to the inlet end of the sleeve and the receiving groove respectively. The pin is inserted into the receiving groove.

3. The heating device for an ion source according to claim 2, characterized in that, The clearance groove has a circumferential width along the sleeve that is smaller than the circumferential width of the receiving groove along the sleeve.

4. The heating device for an ion source according to claim 1, characterized in that, The sleeve has four slots spaced apart on its peripheral wall, and the heating rod has four pins spaced apart on its peripheral wall, with each pin corresponding to one of the slots. Of the four pins, two are used to connect to the positive and negative terminals of the power supply, and the other two are used to provide feedback on the heating temperature of the heating rod.

5. The heating device for an ion source according to claim 1, characterized in that, The heating device includes a limiting ring, and the outer peripheral wall of the heating rod is provided with a first limiting groove. The limiting ring is sleeved in the first limiting groove within the first cavity to restrict the radial movement of the heating rod along the sleeve.

6. The heating device for an ion source according to claim 1, characterized in that, The heating device also includes a mesh cover structure, which is installed at the outlet end of the sleeve.

7. The heating device for an ion source according to claim 1, characterized in that, The heating device also includes a sealing ring, which is disposed between the air inlet end of the heating rod and the air nozzle structure, and respectively abuts against the air inlet end of the heating rod and the air nozzle structure.

8. The heating device for an ion source according to claim 7, characterized in that, The nozzle structure includes a nozzle body and a mounting base sleeved on the nozzle body. The mounting base and the nozzle body form a mounting groove. The sealing ring is sleeved in the mounting groove. The mounting base is sleeved on the air inlet end of the heating rod.

9. The heating device for an ion source according to claim 1, characterized in that, The heating device also includes a retaining ring, and the inner wall of the inlet end of the sleeve is provided with a second limiting groove, and the retaining ring is sleeved in the second limiting groove.

10. A mass spectrometer, characterized in that, Includes the heating device for an ion source as described in any one of claims 1 to 9.

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