A hollow cathode vacuum coating power supply

Abstract

This utility model relates to the technical field of vacuum coating power supplies, and in particular to a hollow cathode vacuum coating power supply. A dustproof component is installed at the rear end of the hollow cathode vacuum coating power supply body, improving convenience during transportation or storage, and also improving ease of use when the power supply body needs to be used. The power supply body includes a hollow cathode vacuum coating power supply body, a power interface, a communication interface, a cathode heating output port, an auxiliary bias output port, and an interlock interface. The rear end of the hollow cathode vacuum coating power supply body is respectively provided with the power interface, communication interface, cathode heating output port, auxiliary bias output port, and interlock interface. The dustproof component protects the power interface, communication interface, cathode heating output port, auxiliary bias output port, and interlock interface from dust.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum coating power supplies, and in particular to a hollow cathode vacuum coating power supply. Background Technology

[0002] Hollow cathode vacuum coating power supplies, as the core power and control unit of vacuum coating machines, are typically manufactured separately by specialized power supply manufacturers and then transported to the user's site for integrated installation. These power supplies integrate various external electrical interfaces with different functions, including a main power input interface, a high-voltage, high-current arc output interface, a control signal interface, and a water-cooling interface. The performance and reliability of these interfaces directly determine the stability of the entire coating system.

[0003] Currently, during the transportation, storage, and on-site installation of power supplies, their exposed electrical interfaces are easily exposed to complex environments, suffering from dust, moisture, and even impacts. However, existing vacuum-coated power supplies (such as the solution disclosed in Chinese invention patent CN118450647A) mainly focus on internal heat dissipation and on / off control, and their heat dissipation duct design actually exacerbates the risk of dust accumulation inside the enclosure. More importantly, these types of power supplies generally lack specific protection for electrical interfaces during the critical "transportation and installation" stage. When contaminants penetrate the metal contact surface before the interface is connected, it can lead to increased contact resistance, causing overheating at the connection point, electrical sparks, or even arcing, posing a serious hidden danger to subsequent stable operation.

[0004] Although some power supplies affix temporary dustproof stickers to their interfaces, this method is weak, prone to peeling, and fails to provide protection during operation, making it impractical. Therefore, designing a structure that can provide continuous and effective physical protection for critical electrical interfaces throughout the entire lifecycle of the power supply, from manufacturing and transportation to field operation, has become a pressing practical problem in this field. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a hollow cathode vacuum coating power supply.

[0006] This utility model discloses a hollow cathode vacuum coating power supply, comprising a hollow cathode vacuum coating power supply body, a power interface, a communication interface, a cathode heating output port, an auxiliary bias output port, and an interlock interface. The power interface, communication interface, cathode heating output port, auxiliary bias output port, and interlock interface are respectively located at the rear end of the hollow cathode vacuum coating power supply body. It also includes a dustproof component, which protects the power interface, communication interface, cathode heating output port, auxiliary bias output port, and interlock interface from dust during transportation or storage. When the hollow cathode vacuum coating power supply body needs to be used, the connector passes through the dustproof component and connects to the power interface, communication interface, cathode heating output port, auxiliary bias output port, and interlock interface, improving convenience.

[0007] Preferably, the dustproof assembly includes a frame, a housing, through holes, side plates, threaded grooves, bolts, clamping plates, and sealing components. The hollow cathode vacuum coating power supply body has two sets of frames at its rear end, two sets of clamping plates at the bottom of the housing, multiple sets of through holes at the rear end of the housing, and a side plate at the top of the housing with a circular hole through which a bolt passes. The hollow cathode vacuum coating power supply body has a threaded groove at its rear end, and multiple sets of sealing components are installed inside the housing, with each through hole sealed by a sealing component. During installation, the two sets of clamping plates on the housing are inserted into the two sets of frames, then the circular hole is aligned with the threaded groove. The bolt is then passed through the circular hole and threaded into the threaded groove, thus completing the housing installation. The sealing components seal the through holes. The plug passes through one set of through holes, thus releasing the seal and improving operational convenience.

[0008] Preferably, the sealing assembly includes a shaft pin, a connecting plate, and a sealing plate. The connecting plate is hinged to the housing via the shaft pin, and a sealing plate is provided at the bottom end of the connecting plate. Under normal conditions, the sealing plate, under its own weight, cooperates with the connecting plate and the shaft pin to seal a set of through holes. When the plug passes through the through holes, the sealing plate releases the seal on the through holes with the cooperation of the shaft pin and the connecting plate, improving convenience.

[0009] Preferably, the bolt also includes an annular flat washer, and the bolt is fitted with an annular flat washer; the bolt increases the contact area with the side plate with the annular flat washer, thereby improving the connection firmness.

[0010] Preferably, it also includes an observation window, with an observation port provided at the top of the housing and an observation window installed on the observation port; the operator can enter the inside of the housing through the sealing gasket to operate the plug, improving convenience.

[0011] Preferably, it also includes a sealing gasket, and a sealing gasket is provided at the rear end of the hollow cathode vacuum coating power supply body; the sealing gasket seals the gap between the hollow cathode vacuum coating power supply body and the housing, thereby improving the sealing performance.

[0012] Preferably, corner protectors are also included, with corner protectors provided at the four corners of the hollow cathode vacuum coating power supply body; the four sets of corner protectors work together to protect the hollow cathode vacuum coating power supply body from impacts and improve safety.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: When the worker installs the dustproof component at the rear end of the hollow cathode vacuum coating power supply body, the dustproof component protects the power interface, communication interface, cathode heating output port, auxiliary bias output port, and interlock interface from dust during transportation or storage. At the same time, when the hollow cathode vacuum coating power supply body needs to be used, the plug connector passes through the dustproof component and connects to the power interface, communication interface, cathode heating output port, auxiliary bias output port, and interlock interface, improving convenience. Attached Figure Description

[0014] Figure 1 This is an exploded structural diagram of the present invention; Figure 2 This is an enlarged structural diagram of the hollow cathode vacuum coating power supply body and sealing gasket, etc. Figure 3 This is an enlarged structural diagram of the shell and clamping plate, etc. Figure 4 yes Figure 3 A partially enlarged structural diagram of section A in the middle; Figure 5 This is an enlarged structural diagram of the sealing plate and connecting plate, etc. Figure 6 This is a schematic diagram of the first isometric structure of this utility model; Figure 7 This is a schematic diagram of the second isometric structure of this utility model.

[0015] The following are labels in the attached diagram: 1. Hollow cathode vacuum coating power supply body; 2. Power interface; 3. Communication interface; 4. Cathode heating output port; 5. Auxiliary bias output port; 6. Frame; 7. Housing; 8. Through hole; 9. Side plate; 10. Threaded groove; 11. Bolt; 12. Shaft pin; 13. Connecting plate; 14. Sealing plate; 15. Annular flat gasket; 16. Observation window; 17. Sealing gasket; 18. Corner protector; 19. Interlock interface; 20. Frame plate. Detailed Implementation

[0016] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. This utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of this utility model more thorough and complete. Example 1

[0017] like Figures 1 to 7 As shown, this utility model discloses a hollow cathode vacuum coating power supply, including a hollow cathode vacuum coating power supply body 1, a power interface 2, a communication interface 3, a cathode heating output port 4, an auxiliary bias output port 5, and an interlock interface 19. The rear end of the hollow cathode vacuum coating power supply body 1 is respectively provided with the power interface 2, the communication interface 3, the cathode heating output port 4, the auxiliary bias output port 5, and the interlock interface 19. It also includes a dustproof component, which is provided at the rear end of the hollow cathode vacuum coating power supply body 1 to prevent dust from entering the power interface 2, the communication interface 3, the cathode heating output port 4, the auxiliary bias output port 5, and the interlock interface 19. like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the dustproof assembly includes a frame 6, a housing 7, through holes 8, a side plate 9, a threaded groove 10, bolts 11, a retaining plate 20, and a sealing assembly. The hollow cathode vacuum coating power supply body 1 has two sets of frames 6 at its rear end, and two sets of retaining plates 20 at its bottom end. The housing 7 has multiple sets of through holes 8 at its rear end, and a side plate 9 at its top end. The side plate 9 has a round hole through which a bolt 11 passes. The hollow cathode vacuum coating power supply body 1 has a threaded groove 10 at its rear end. The housing 7 has multiple sets of sealing assemblies inside, and each set of through holes 8 is sealed by a sealing assembly.

[0018] In this embodiment, during installation, the two sets of clips 20 on the housing 7 are inserted into the inner sides of the two sets of clip frames 6 respectively. Then, the round hole is aligned with the threaded groove 10. Then, the bolt 11 is passed through the round hole and threadedly connected to the threaded groove 10, thereby completing the installation of the housing 7. The sealing components seal the through holes 8 respectively. The plug passes through a set of through holes 8, thereby releasing the seal of the sealing components. When transporting or storing the hollow cathode vacuum coating power supply body 1, the dustproof components perform dustproof operations on the power interface 2, communication interface 3, cathode heating output port 4, auxiliary bias output port 5 and interlock interface 19. Example 2

[0019] like Figures 1 to 7As shown in Figure 2, a hollow cathode vacuum coating power supply of the present invention includes a hollow cathode vacuum coating power supply body 1, a power interface 2, a communication interface 3, a cathode heating output port 4, an auxiliary bias output port 5, and an interlock interface 19. The rear end of the hollow cathode vacuum coating power supply body 1 is respectively provided with the power interface 2, the communication interface 3, the cathode heating output port 4, the auxiliary bias output port 5, and the interlock interface 19. It also includes a dustproof component. The rear end of the hollow cathode vacuum coating power supply body 1 is provided with a dustproof component, which performs dustproof operation on the power interface 2, the communication interface 3, the cathode heating output port 4, the auxiliary bias output port 5, and the interlock interface 19. like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the dustproof assembly includes a frame 6, a housing 7, through holes 8, a side plate 9, a threaded groove 10, bolts 11, a clamping plate 20, and a sealing assembly. The hollow cathode vacuum coating power supply body 1 has two sets of frame 6 at its rear end, two sets of clamping plates 20 at the bottom end of the housing 7, multiple sets of through holes 8 at the rear end of the housing 7, a side plate 9 at the top end of the housing 7, and a round hole on the side plate 9 through which a bolt 11 passes. The hollow cathode vacuum coating power supply body 1 has a threaded groove 10 at its rear end, and multiple sets of sealing assemblies are provided inside the housing 7, with each set of through holes 8 sealed by a sealing assembly. like Figure 5 As shown, the sealing assembly includes a shaft pin 12, a connecting plate 13 and a sealing plate 14. The connecting plate 13 is hinged to the housing 7 via the shaft pin 12, and the sealing plate 14 is provided at the bottom end of the connecting plate 13. It also includes an annular flat washer 15, an observation window 16, a sealing gasket 17, and corner protectors 18. The annular flat washer 15 is fitted on the bolt 11. An observation port is provided at the top of the housing 7. An observation window 16 is installed on the observation port. A sealing gasket 17 is provided at the rear end of the hollow cathode vacuum coating power supply body 1. Corner protectors 18 are provided at the four corners of the hollow cathode vacuum coating power supply body 1.

[0020] In this embodiment, during installation, the two sets of retaining plates 20 on the housing 7 are inserted into the inner sides of the two sets of retaining frames 6 respectively. Then, the round hole is aligned with the threaded groove 10, and the bolt 11 is passed through the round hole and threaded into the threaded groove 10, thereby completing the installation of the housing 7. The sealing components seal the through holes 8 respectively. The plug passes through a set of through holes 8, thereby releasing the seal of the sealing components. When transporting or storing the hollow cathode vacuum coating power supply body 1, the dustproof components perform dustproof operations on the power interface 2, communication interface 3, cathode heating output port 4, auxiliary bias output port 5, and interlock interface 19. Under normal conditions, the sealing plate 14, under its own weight, cooperates with the connecting plate 13 and the shaft pin 12 to seal a set of through holes 8. When the plug passes through the through hole 8, the sealing plate 14 releases the seal on the through hole 8 with the cooperation of the shaft pin 12 and the connecting plate 13. The operator operates the plug to enter the inner side of the housing 7 through the sealing gasket 17. The four sets of corner protectors 18 cooperate with each other to protect the hollow cathode vacuum coating power supply body 1 from impact.

[0021] The bolt 11 and sealing gasket 17 of the hollow cathode vacuum coating power supply of this utility model are commercially available. Technical personnel in this industry only need to install and operate them according to the accompanying instruction manual, without requiring any creative work from those skilled in the art.

[0022] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A hollow cathode vacuum coating power supply, comprising a hollow cathode vacuum coating power supply body (1), a power interface (2), a communication interface (3), a cathode heating output port (4), an auxiliary bias output port (5), and an interlock interface (19), wherein the rear end of the hollow cathode vacuum coating power supply body (1) is respectively provided with the power interface (2), the communication interface (3), the cathode heating output port (4), the auxiliary bias output port (5), and the interlock interface (19), characterized in that, It also includes a dustproof component. The hollow cathode vacuum coating power supply body (1) is provided with a dustproof component at the rear end. The dustproof component performs dustproof operation on the power interface (2), communication interface (3), cathode heating output port (4), auxiliary bias output port (5) and interlock interface (19).

2. The hollow cathode vacuum coating power supply as described in claim 1, characterized in that, The dustproof assembly includes a frame (6), a housing (7), a through hole (8), a side plate (9), a threaded groove (10), a bolt (11), a clamping plate (20), and a sealing assembly. The hollow cathode vacuum coating power supply body (1) has two sets of frames (6) at its rear end, and two sets of clamping plates (20) at the bottom of the housing (7). The housing (7) has multiple sets of through holes (8) at its rear end, and a side plate (9) at its top end. A round hole is provided on the side plate (9), and a bolt (11) passes through the round hole. The hollow cathode vacuum coating power supply body (1) has a threaded groove (10) at its rear end. The housing (7) has multiple sets of sealing assemblies inside, and each set of through holes (8) is sealed by a set of sealing assemblies.

3. The hollow cathode vacuum coating power supply as described in claim 2, characterized in that, The sealing assembly includes a shaft pin (12), a connecting plate (13) and a sealing plate (14). The connecting plate (13) is hinged to the housing (7) via the shaft pin (12), and the sealing plate (14) is provided at the bottom end of the connecting plate (13).

4. The hollow cathode vacuum coating power supply as described in claim 2, characterized in that, It also includes an annular flat washer (15), which is fitted onto the bolt (11).

5. A hollow cathode vacuum coating power supply as described in claim 2, characterized in that, It also includes an observation window (16), and the top of the housing (7) is provided with an observation port, on which the observation window (16) is installed.

6. The hollow cathode vacuum coating power supply as described in claim 1, characterized in that, It also includes a sealing gasket (17), and the rear end of the hollow cathode vacuum coating power supply body (1) is provided with a sealing gasket (17).

7. A hollow cathode vacuum coating power supply as described in claim 1, characterized in that, It also includes corner protectors (18), and corner protectors (18) are provided at the four corners of the hollow cathode vacuum coating power supply body (1).

Images