Uniform linear laser generator and detection device

Abstract

The application discloses a uniform linear laser generator and a detection device. The uniform linear laser generator comprises a laser light source, a light source collimating mirror, a diverging mirror and a uniform mirror. The light source collimating mirror collimates light rays in at least a line width direction of outgoing light rays of the laser light source. The diverging mirror diverges light rays in a line length direction of outgoing light rays of the light source collimating mirror. The uniform mirror homogenizes the light rays in the line length direction of the outgoing light rays of the diverging mirror into linear laser, and the diverging mirror and the uniform mirror are both cylindrical mirrors. Thus, the uniform linear laser generator does not use a Powell prism or a cylindrical rod mirror, and can avoid the shortcomings of the Powell prism or the cylindrical rod mirror. For example, compared with the Powell prism, the yield of the diverging mirror and the uniform mirror is high and the cost is low, resulting in that the yield of the uniform linear laser is high and the cost is low, and the uniform linear laser is convenient for mass production. Compared with the cylindrical rod mirror, the uniform linear laser does not need to identify a film coating direction, does not affect transmission efficiency and does not generate stray light, and has better consistency.

Description

Technical Field

[0001] This application relates to laser devices, and more particularly to uniform line laser generators and detection devices. Background Technology

[0002] Uniform line laser generators include Powell prisms or cylindrical rod mirrors. Powell prisms have low yield rates, making mass production impossible. For example, the top of a Powell prism is a complex two-dimensional aspherical surface, which contributes to its low yield and hinders mass production. Furthermore, Powell prisms are expensive, impacting the cost of mass production.

[0003] Although the yield rate of cylindrical rod lenses is higher than that of Powell prisms, the coating direction needs to be identified after the cylindrical rod lens is coated. Without coating, the transmission efficiency will be affected and stray light will be generated.

[0004] Therefore, it is necessary to improve the uniform line laser generator. Utility Model Content

[0005] The purpose of this application is to disclose a uniform line laser generator and a detection device.

[0006] In a first aspect, this application discloses a uniform line laser generator. The uniform line laser generator includes a laser source, a collimating lens, a diverging lens, and a homogenizing lens. The collimating lens collimates at least the linewidth direction of the emitted light from the laser source. The diverging lens diverges the linelength direction of the emitted light from the collimating lens, where the linelength direction can be either the linelength direction or the linewidth direction. The homogenizing lens homogenizes the linelength direction of the emitted light from the diverging lens into a line laser. Both the diverging lens and the homogenizing lens are cylindrical mirrors.

[0007] In some embodiments, the uniform line laser generator further includes a recolliding lens located between the light source collimating lens and the diverging lens, which collimates the light rays along the line length direction.

[0008] In some embodiments, the recollimating lens includes a cylindrical lens.

[0009] In some embodiments, the recolliding lens includes a plano-convex cylindrical lens that protrudes toward the light source collimating lens; or, the recolliding lens includes a plano-concave cylindrical lens that is recessed toward the light source collimating lens; or, the recolliding lens includes a biconvex cylindrical lens; or, the recolliding lens includes a biconcave cylindrical lens.

[0010] In some embodiments, the uniform line laser generator includes at least one of the following features: a) The re-collimating lens and the diverging lens are attached to each other, or the re-collimating lens and the diverging lens are spaced apart; b) At least one of the recolliding lens and the diverging lens is roughened; c) At least one of the recollimating lens, the diverging lens, and the homogenizing lens is covered with an antireflective coating.

[0011] In some embodiments, with the direction of light propagation as the front, a linewidth aperture is provided in front of the collimating lens of the light source; the linewidth aperture intercepts stray light in the linewidth direction, and / or, with the direction of light propagation as the front, a line length aperture is provided behind the collimating lens; the line length aperture intercepts stray light in the line length direction, and the light emitted from the line length aperture is directed toward the collimating lens.

[0012] In some embodiments, the diverging lens includes a plano-convex cylindrical lens that convexes toward the collimating lens away from the light source; or, the diverging lens includes a plano-concave cylindrical lens that is recessed toward the collimating lens away from the light source; or, the diverging lens includes a biconvex cylindrical lens; or, the diverging lens includes a biconcave cylindrical lens.

[0013] In some embodiments, the uniform mirror comprises a plano-convex cylindrical mirror that protrudes toward the diverging mirror; or, the uniform mirror comprises a plano-concave cylindrical mirror that is recessed toward the diverging mirror; or, the uniform mirror comprises a biconvex cylindrical mirror; or, the uniform mirror comprises a biconcave cylindrical mirror.

[0014] In some embodiments, a front aperture of the diverging mirror is provided between the diverging mirror and the uniform mirror, and the front aperture of the diverging mirror intercepts stray light incident on the uniform mirror.

[0015] Secondly, this application discloses a detection device. The detection device includes any of the aforementioned uniform line laser generators.

[0016] For the uniform line laser generator and detection device, both the diverging mirror and the uniform mirror are cylindrical mirrors, not Powell prisms or cylindrical rod mirrors. Therefore, the uniform line laser generator can avoid the disadvantages of Powell prisms or cylindrical rod mirrors. For example, compared with Powell prisms, the diverging mirror and the uniform mirror have higher yields and lower costs, resulting in high yields and low costs for the uniform line laser, which is easy to mass-produce. Compared with cylindrical rod mirrors, it is not necessary to identify the coating direction, does not affect the transmission efficiency, and does not generate stray light. The uniformity of the cylindrical mirror is also better. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the first uniform line laser generator of this application; Figure 2 yes Figure 1 The optical path diagram of the uniform line laser generator is shown below. Figure 3 yes Figure 1 The diagram shows the laser uniformity distribution of a uniform line laser generator. Figure 4 This is a schematic diagram of the second type of uniform line laser generator in this application. Detailed Implementation

[0018] The technical solutions in the embodiments (or "implementations") of this application will be clearly and completely described herein with reference to the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.

[0019] If the embodiments of this application contain terms relating to directional indications or positional relationships (such as up, down, left, right, front, back, inside, outside, top, bottom, center, vertical, horizontal, longitudinal, transverse, length, width, counterclockwise, clockwise, axial, radial, circumferential, etc.), such terms are only used to explain the relative positional relationships and movement of the components in a specific posture (as shown in the attached figures); if the specific posture changes, the directional indications or positional relationships will also change accordingly. Furthermore, the terms "first" and "second" used in the embodiments of this application are only for descriptive convenience and should not be construed as indicating or implying relative importance.

[0020] See Figure 1 , Figure 2 and Figure 4 This application discloses a uniform line laser generator. The uniform line laser generator includes a laser source 1, a source collimating lens 2, a diverging lens 4, and a uniform lens 5. The laser source 1 has a fast axis and a slow axis, such as a laser diode (LD), a laser diode bar, or a quasi-continuous laser diode array. The source collimating lens 2 collimates at least the linewidth direction of the emitted light from the laser source 1; that is, it can collimate only the linewidth direction, or it can collimate both the linewidth and linelength directions. The purpose is to ensure that the light spot meets the linewidth, depth of field, and Gaussianness requirements in the linewidth direction at a specified working distance. Here, the name of this application is explained. The prefixes in the name are only used to distinguish different components. The common parts of each name have the same function. In some cases, the common parts may have the same structure or not. For example, the common part "collimating lens" in the source collimating lens 2 and the secondary collimating lens 3 indicates that their function is collimation. The prefixes "source" and "secondary" are used to distinguish them. The same principle applies to the linewidth aperture, line length aperture, and front aperture of the diverging lens. The collimating lens 2 of the light source is a spherical or aspherical mirror made of glass or quartz. For example, the collimating lens 2 of the light source can be a plano-convex spherical mirror, a plano-concave spherical mirror, or a biconvex spherical mirror.

[0021] See Figure 1 , Figure 2 and Figure 4 The diverging mirror 4 diverges the light rays emitted from the collimating mirror 2 along the line length direction. For a uniform line laser generator, the line length can be calculated using the fast axis and the line width using the slow axis, or vice versa. In other words, the line length direction can be either the fast axis direction or the slow axis direction. The structure of the diverging mirror 4 is not limited, as long as it can achieve the aforementioned divergence function. Figure 1 , Figure 2 and Figure 4 The illustration shows only one diverging mirror 4, but the number of diverging mirrors 4 is not limited to this. The homogenizing mirror 5 homogenizes the light rays emitted from the diverging mirror 4 in the longitudinal direction into line laser light. There can be only one homogenizing mirror 5, or multiple homogenizing mirrors. In this application, both the diverging mirror 4 and the homogenizing mirror 5 are cylindrical mirrors, and cylindrical mirrors have curvature in the longitudinal direction. See [reference needed]. Figure 1 and Figure 4 In this application, the Y-axis is used as the linear length direction, and the diverging mirror 4 and the uniform mirror 5 have curvature in the Y-axis direction. If the Z-axis is used as the linear length direction, then the diverging mirror 4 and the uniform mirror 5 have curvature in the Z-axis direction.

[0022] As described above, both the diverging mirror 4 and the homogenizing mirror 5 of the uniform line laser generator are cylindrical mirrors, not Powell prisms or cylindrical rod mirrors. Therefore, the uniform line laser generator avoids the disadvantages of Powell prisms or cylindrical rod mirrors. For example, compared to Powell prisms, the diverging mirror 4 and the homogenizing mirror 5 have higher yields and lower costs, resulting in a high yield and low cost for the uniform line laser, facilitating mass production. Compared to using cylindrical rod mirrors, it eliminates the need to identify the coating direction, does not affect transmission efficiency, and does not generate stray light; the cylindrical mirrors also offer better consistency. Furthermore, designers can flexibly calculate and design the radius of curvature of the cylindrical mirrors based on specific parameters of the laser source 1 (such as the size of the emission point and the divergence angle) and the final application requirements. This design freedom allows for very precise and customized control of the beam. Finally, the uniform line laser generator has a simple optical path, stable system, and good homogenization effect (see [reference needed]). Figure 3 This is because the optical path of a cylindrical mirror system based on refraction is relatively intuitive and simple. Once debugged and fixed, its performance is very stable and reliable, and it is not easily affected by environmental factors (such as slight vibrations and temperature changes) that cause performance drift.

[0023] See Figure 1 , Figure 2 and Figure 4The uniform line laser generator further includes a re-collimating lens 3, which is located between the light source collimating lens 2 and the diverging lens 4, and collimates the light rays in the line length direction. That is, when the fast axis is taken as the line length, the re-collimating lens 3 collimates the light rays in the fast axis direction. When the slow axis is taken as the line length, the re-collimating lens 3 collimates the light rays in the slow axis direction. With the re-collimating lens 3 included, the light source collimating lens 2 can collimate the light rays in both the line width and line length directions, but primarily collimates the light rays in the line width direction. In this case, the re-collimating lens 3 collimates the light rays in the line length direction.

[0024] As described above, by setting the secondary collimating lens 3 to collimate the light rays along the linear length direction, the light rays at the edge of the light source collimating lens 2 can be utilized, improving the light utilization rate and resulting in better uniformity of the light spot. The fact that both the light source collimating lens 2 and the secondary collimating lens 3 collimate the light rays along the linear length direction will result in a smaller light spot and a smaller volume for the secondary collimating lens 3.

[0025] In some embodiments, the re-collimating lens 3 comprises a cylindrical lens. Cylindrical lenses are low-cost, have a high yield rate, and are suitable for mass production. See also Figure 1 and Figure 4 In this application, when the collimating lens 3 is a cylindrical mirror with the Y-axis as the linear length direction, it has curvature in the Y-axis direction. If the Z-axis is taken as the linear length direction, then when the collimating lens 3 is a cylindrical mirror, it has curvature in the Z-axis direction.

[0026] See Figure 1 and Figure 2 The re-collimating lens 3 includes a plano-convex cylindrical lens, which protrudes toward the light source collimating lens 2. See also Figure 4 The re-collimating lens 3 includes a plano-concave cylindrical lens, which is recessed toward the light source collimating lens 2. In other embodiments, the re-collimating lens 3 can be a biconvex cylindrical lens, a biconcave cylindrical lens, or a meniscus cylindrical lens, for example, a meniscus cylindrical lens that protrudes toward the light source collimating lens 2.

[0027] In the above embodiments, the re-collimating lens 3 includes a plano-concave cylindrical lens or a plano-convex cylindrical lens. Compared with biconvex cylindrical lenses and biconcave cylindrical lenses, plano-concave cylindrical lenses or plano-convex cylindrical lenses have simpler structures, are easier to mass-produce, and have lower costs. Consequently, the cost of the uniform line laser generator is lower, and it is easier to mass-produce.

[0028] In some embodiments, the uniform line laser generator includes at least one of the following features: a) The re-collimating lens 3 and the diverging lens 4 are attached together, which can be achieved by... Figure 1 and Figure 3 The re-collimating lens 3 and the diverging lens 4 shown are attached together. Alternatively, the re-collimating lens 3 and the diverging lens 4 can also form a cylindrical shape when attached together, or see [link to relevant documentation]. Figure 1 and Figure 4 The re-collimating lens 3 and the diverging lens 4 are spaced apart. As described above, when the re-collimating lens 3 and the diverging lens 4 are in contact, they occupy a small volume, saving space. When the re-collimating lens 3 and the diverging lens 4 are spaced apart, the surface shape requirements for each of them are low, making them easier to manufacture. Regarding the contact... (b) At least one of the re-collimating lens 3 and the diverging lens 4 is roughened. For example, after roughening, the surface roughness of the re-collimating lens 3 or the surface roughness of the diverging lens 4 is no greater than 0.2 micrometers. Roughening improves light transmittance, reduces stray light, and increases the Gaussian degree of the light spot.

[0029] c) At least one of the recollimating lens 3, the diverging lens 4, and the homogenizing lens 5 is covered with an antireflective coating. The type of antireflective coating is not limited, nor is the method of application. By covering the lens with the antireflective coating, the light transmittance is increased, stray light is reduced, and the Gaussian degree of the light spot is improved.

[0030] See Figure 1 and Figure 4 A linewidth aperture 6 is positioned in front of the collimating lens 2 of the light source, with the direction of light propagation as the front. The linewidth aperture 6 intercepts stray light in the linewidth direction. The structure of the linewidth aperture 6 is not limited; for example, the linewidth aperture 6 can be a circular aperture. The distance between the linewidth aperture 6 and the collimating lens 2 along the direction of light propagation depends on the structural characteristics of the product, and is generally better to be as small as possible.

[0031] As described above, by using the linewidth aperture 6 to block stray light in the linewidth direction, the subsequent homogenized light will not be affected by stray light, thus resulting in better light uniformity.

[0032] See Figure 1 and Figure 4 With the direction of light propagation as the foreground, a linear aperture 7 is positioned behind the re-collimating lens 3. The linear aperture 7 intercepts stray light along the linear direction, and the outgoing light from the linear aperture 7 is directed towards the re-collimating lens 3. The distance between the linear aperture 7 and the re-collimating lens 3 along the direction of light propagation depends on the structural characteristics of the product, and is generally better the smaller it is. The aperture of the linear aperture 7 is not larger than the aperture of the re-collimating lens 3. The structure of the linear aperture 7 is not limited; for example, the linear aperture 7 can be a circular aperture.

[0033] As described above, the linewidth aperture 6 and linelength aperture 7 work together to intercept stray light in both the linelength and linewidth directions. This prevents the subsequent homogenized light from being affected by stray light, resulting in better light uniformity. With the light propagation direction as the foreground, the linelength aperture 7 is positioned in front of the linewidth aperture 6. The uniform line laser generator can adjust the linewidth first, then the linelength, facilitating manufacturing processes. Furthermore, the linewidth aperture 6 can be integrated with the light source collimating lens 2, saving space. When the uniform line laser generator only uses the linelength aperture 7, it can also intercept stray light in the linewidth direction, preventing the subsequent homogenized light from being affected by stray light, thus resulting in even better light uniformity.

[0034] See Figure 1 and Figure 2 The diverging mirror 4 includes a plano-convex cylindrical mirror that protrudes away from the collimating mirror 2 of the light source. When the uniform line laser generator includes a re-collimating mirror 3, and the diverging mirror 4 is a plano-convex cylindrical mirror, the plano-convex cylindrical mirror protrudes towards the re-collimating mirror 3. See also Figure 4 The diverging mirror 4 includes a plano-concave cylindrical mirror, which is concave in a direction away from the collimating mirror 2 of the light source. When the uniform line laser generator includes a re-collimating mirror 3, and the diverging mirror 4 is a plano-convex cylindrical mirror, the plano-convex cylindrical mirror is concave in a direction away from the re-collimating mirror 3. In some embodiments, the diverging mirror 4 may also be a meniscus cylindrical mirror, which convex in a direction away from the diverging mirror 4. In other embodiments, the diverging mirror 4 is a biconcave cylindrical mirror, or a biconvex cylindrical mirror.

[0035] As described above, the diverging mirror 4 includes a plano-convex cylindrical mirror or a plano-concave cylindrical mirror. Compared to biconvex and biconcave cylindrical mirrors, the plano-convex or plano-concave cylindrical mirror has a simpler structure, is easier to mass-produce, and has a lower cost. Consequently, the uniform line laser generator has a lower cost and is easier to mass-produce.

[0036] See Figure 1 and Figure 2 The uniform mirror 5 includes a plano-convex cylindrical mirror, which protrudes toward the diverging mirror 4. See also Figure 4 The uniform mirror 5 includes a plano-concave cylindrical mirror, which is recessed toward the diverging mirror 4. In some embodiments, the uniform mirror 5 is a biconvex cylindrical mirror or a biconcave cylindrical mirror. In other embodiments, the uniform mirror 5 is a meniscus cylindrical mirror, which protrudes away from the diverging mirror 4.

[0037] As described above, the uniform mirror 5 includes a plano-convex cylindrical mirror or a plano-concave cylindrical mirror. Compared with biconvex and biconcave cylindrical mirrors, the plano-convex or plano-concave cylindrical mirror has a simpler structure, is easier to mass-produce, and has a lower cost. Consequently, the uniform line laser generator has a lower cost and is easier to mass-produce.

[0038] See Figure 1 and Figure 4 A front aperture 8 is provided between the diverging mirror 4 and the uniform mirror 5 to intercept stray light incident on the uniform mirror 5. The structure of the front aperture 8 is not limited; for example, it can be a circular aperture. The distance between the front aperture 8 and the diverging mirror 4 along the direction of light propagation depends on the structural characteristics of the product, and is generally better the smaller it is. The structure of the front aperture 8 is not limited; for example, it can be a circular aperture.

[0039] As described above, the light rays incident on the homogenizing mirror 5 are intercepted, so the subsequent homogenized light rays will not be affected by stray light, thus resulting in better light uniformity.

[0040] Although the re-cylindrical mirror 3, the diverging mirror 4, and the homogenizing mirror 5 are all cylindrical mirrors, their cylindrical shapes are not limited to those shown in the figure. Figure 1 and Figure 4 The structures shown, the direction of the protrusions or indentations of the cylindrical surfaces between them is not limited to that shown. Figure 1 and Figure 4 The directions shown are based on their respective functions.

[0041] Secondly, this application discloses a detection device. The detection device includes any of the aforementioned uniform line laser generators. The detection device may be, for example, a 3D profilometer or a high-uniformity line spot detection device.

[0042] It should be noted that the technical solutions or features described in the above embodiments can be combined or supplemented with each other without conflict. The scope of protection of this application is not limited to the precise structures described in the above embodiments and shown in the accompanying drawings; all modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A uniform line laser generator, characterized in that, It includes a laser source (1), a collimating lens (2), a diverging lens (4), and a homogenizing lens (5), wherein; The collimating lens (2) of the light source collimates at least the light rays in the linewidth direction of the emitted light rays from the laser light source (1); The diverging mirror (4) diverges the light rays emitted from the collimating mirror (2) along the midline direction; The homogenizing mirror (5) homogenizes the light rays in the line length direction of the emitted light rays from the diverging mirror (4) into line lasers; both the diverging mirror (4) and the homogenizing mirror (5) are cylindrical mirrors.

2. The uniform line laser generator according to claim 1, characterized in that, The uniform line laser generator also includes a re-collimating lens (3), which is located between the light source collimating lens (2) and the diverging lens (4) to collimate the light rays in the line length direction.

3. The uniform line laser generator according to claim 2, characterized in that, The recollimating lens (3) includes a cylindrical lens.

4. The uniform line laser generator according to claim 3, characterized in that, The re-collimating lens (3) includes a plano-convex cylindrical lens, which protrudes toward the light source collimating lens (2); Alternatively, the re-collimating lens (3) may include a plano-concave cylindrical lens, which is recessed toward the light source collimating lens (2); Alternatively, the re-collimating lens (3) may include a biconvex cylindrical lens; Alternatively, the recollimating lens (3) may include a biconcave cylindrical lens.

5. The uniform line laser generator according to claim 2, characterized in that, The uniform line laser generator includes at least one of the following features: a) The re-collimating lens (3) and the diverging lens (4) are attached to each other, or the re-collimating lens (3) and the diverging lens (4) are spaced apart; b) At least one of the recolliding lens (3) and the diverging lens (4) is roughened; c) At least one of the recollimating lens (3), the diverging lens (4) and the homogenizing lens (5) is covered with an antireflective coating.

6. The uniform line laser generator according to claim 2, characterized in that, With the direction of light propagation as the front, a linewidth aperture (6) is provided in front of the collimating lens (2) of the light source; the linewidth aperture (6) intercepts stray light in the linewidth direction; And / or, with the direction of light propagation as the front, a linear aperture (7) is provided behind the re-collimating lens (3), the linear aperture (7) intercepts stray light in the direction of linear length, and the outgoing light of the linear aperture (7) is directed toward the re-collimating lens (3).

7. The uniform line laser generator according to claim 1 or 2, characterized in that, The diverging lens (4) includes a plano-convex cylindrical lens that protrudes toward the collimating lens (2) away from the light source; Alternatively, the diverging lens (4) may include a plano-concave cylindrical lens that is recessed toward the collimating lens (2) away from the light source; Alternatively, the diverging mirror (4) may include a biconvex cylindrical mirror; Alternatively, the diverging mirror (4) may include a biconcave cylindrical mirror.

8. The uniform line laser generator according to claim 1 or 2, characterized in that, The uniform mirror (5) includes a plano-convex cylindrical mirror that protrudes toward the diverging mirror (4); Alternatively, the uniform mirror (5) may include a plano-concave cylindrical mirror that is recessed toward the diverging mirror (4); Alternatively, the uniform mirror (5) may include a biconvex cylindrical mirror; Alternatively, the uniform mirror (5) may include a biconcave cylindrical mirror.

9. The uniform line laser generator according to claim 8, characterized in that, A front aperture (8) is provided between the diverging mirror (4) and the uniform mirror (5), and the front aperture (8) intercepts stray light incident on the uniform mirror.

10. A detection device, characterized in that, Includes the uniform line laser generator as described in any one of claims 1 to 9.

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