Magnetic levitation device and magnetic levitation voice coil motor

Abstract

The application relates to the technical field of semiconductors, and discloses a magnetic suspension device and a magnetic suspension voice coil motor. The magnetic suspension device comprises a first component and a second component, and the first component and the second component can move relative to each other. The first component comprises a first magnet and a second magnet which are coaxially arranged, and the second magnet is annular and is arranged on the outside of the first magnet. The second component comprises at least two magnets which are coaxially arranged and are spaced apart along the axial direction, and each magnet in the second component is located between the first magnet and the second magnet. Wherein, the first magnet and the second magnet are both radially magnetized or both parallel magnetized, and the magnetization directions of the first magnet and the second magnet in the same radial plane are the same; each magnet in the second component is axially magnetized, and the magnetization directions of two adjacent magnets along the axial direction are opposite. In this way, the magnetic suspension device can ensure that the axial stability of the magnetic suspension device is improved and the fluctuation is reduced under the premise of having a certain magnetic suspension force.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a magnetic levitation device and a magnetic levitation voice coil motor. Background Technology

[0002] In the semiconductor manufacturing industry, the precision requirements for workpiece stages are constantly increasing, especially the motion precision of vertical micro stages used for vertical positioning, which is increasing year by year with the increasing demand for workpiece stages.

[0003] Vertical micro-motion stages typically employ a combination of a gravity compensation device (such as a magnetic levitation device) and a voice coil motor. The gravity compensation device compensates for the gravity of the vertical drive load of the vertical micro-motion stage, while the voice coil motor provides the driving force for the vertical movement of the stage. In certain specific applications, it is also necessary for the compensation force and displacement of the gravity compensation device to have a linear relationship to further improve the accuracy of the equipment.

[0004] However, the stability of current gravity compensation devices is poor, and the voice coil motor is required to provide additional driving force, which makes the voice coil motor prone to overheating and increasing heat dissipation. Utility Model Content

[0005] To address the aforementioned technical problems, this application provides a magnetic levitation device and a magnetic levitation voice coil motor.

[0006] In a first aspect, embodiments of this application provide a magnetic levitation device, including a first component and a second component. The first component has a first axis, and the first component and the second component are capable of relative movement along an axial direction parallel to the first axis. The first component includes a first magnet and a second magnet coaxially arranged, with the second magnet being annular and sleeved on the outside of the first magnet. The second component includes at least two magnets coaxially arranged and spaced apart along the axial direction. Each magnet in the second component is annular and sleeved on the outside of the first magnet, and is located radially between the first magnet and the second magnet, with the radial direction perpendicular to the axial direction. The first magnet and the second magnet are either radially magnetized or both are parallelly magnetized, and the magnetization directions of the first magnet and the second magnet are the same in the same radial plane. Each magnet in the second component is axially magnetized, and the magnetization directions of two adjacent magnets along the axial direction are opposite.

[0007] It can be understood that the radial magnetic fields generated by the first and second magnets interact with the axial magnetic fields generated by each magnet in the second component, ultimately producing a magnetic levitation force along the axial direction. By setting the first and second magnets with the same magnetization direction, the magnetic levitation force generated by the first magnet is opposite in direction to that generated by the second magnet. Furthermore, since the second magnet is fitted outside the first magnet, the magnitudes of the magnetic levitation forces generated by the first and second magnets are not the same. In this way, the axial stability of the magnetic levitation device can be improved and fluctuations reduced while ensuring that the magnetic levitation device has a certain magnetic levitation force. On the other hand, the magnets in the second component are magnetized in opposite directions, which can better make the magnetic levitation force and displacement of the device linearly related.

[0008] In a specific application scenario, the magnetic levitation device can be used as a gravity compensation device for a vertical micro-motion stage. Because the magnetic levitation device has good axial stability, it can accurately compensate for the gravity of the vertical drive load of the vertical micro-motion stage. Furthermore, the compensation force provided is linearly related to the displacement of the micro-motion stage, thus avoiding the need for the voice coil motor to output additional driving force, which helps reduce the heat dissipation of the voice coil motor.

[0009] In some possible implementations of the first aspect above, the number of first magnets is two or more, the two or more first magnets are coaxial and spaced apart along the axial direction, and the magnetization direction is the same; and / or, the number of second magnets is two or more, the two or more second magnets are coaxial and spaced apart along the axial direction, and the magnetization direction is the same.

[0010] In some possible implementations of the first aspect described above, the number of first magnets is the same as the number of second magnets, and both are two or more, wherein the magnetization directions of two adjacent first magnets along the axial direction are opposite, and the magnetization directions of two adjacent second magnets along the axial direction are opposite.

[0011] In some possible implementations of the first aspect described above, the second component includes at least three magnets that are coaxially spaced apart along the axial direction.

[0012] In some possible implementations of the first aspect described above, the number of first magnets is the same as the number of second magnets, and both are two; the magnetization directions of two adjacent first magnets along the axial direction are opposite, and the magnetization directions of two adjacent second magnets along the axial direction are opposite; the second component includes three magnets that are coaxially arranged and spaced apart along the axial direction.

[0013] In some possible implementations of the first aspect described above, the first component further includes a first bracket, which includes a first mounting groove and a second mounting groove. A first magnet is located in the first mounting groove and is connected to the groove wall of the first mounting groove; a second magnet is located in the second mounting groove and is connected to the groove wall of the second mounting groove.

[0014] In some possible implementations of the first aspect described above, the second component further includes a second support, the second support including a groove, each magnet in the second component being located within the groove and arranged sequentially along the depth direction of the groove, the depth direction of the groove being the same as the axial direction.

[0015] Secondly, embodiments of this application provide a magnetic levitation voice coil motor, including the magnetic levitation device of the first aspect described above and at least one coil, wherein the coil is disposed between two adjacent magnets along the axial direction in a second assembly.

[0016] In some possible implementations of the second aspect above, the number of the first magnet and the number of the second magnet are both one; the second component includes a third magnet and a fourth magnet, and a first coil is provided between the third magnet and the fourth magnet along the axial direction.

[0017] In some possible implementations of the second aspect above, the number of first magnets and the number of second magnets are both two; the second component includes a third magnet, a fourth magnet and a fifth magnet, and at least one coil includes a first coil and a second coil. Along the axial direction, the first coil is provided between the third magnet and the fourth magnet, and the second coil is provided between the fourth magnet and the fifth magnet.

[0018] The technical effects of the second aspect mentioned above can be referred to the technical effects of the first aspect, and will not be repeated here. The only difference is that the structures of the magnetic levitation device and the voice coil motor are combined into one device. Attached Figure Description

[0019] Figure 1 According to some embodiments of this application, a structural schematic diagram of a magnetic levitation device 1 is shown;

[0020] Figure 2 According to some embodiments of this application, a magnetization direction of a magnet in a magnetic levitation device 1 is shown;

[0021] Figure 3 According to some embodiments of this application, a structural schematic diagram of a magnetic levitation device 1a is shown;

[0022] Figure 4 According to some embodiments of this application, a magnetization direction of a magnet in a magnetic levitation device 1a is shown;

[0023] Figure 5 According to some embodiments of this application, a structural schematic diagram of a magnetic levitation device 1b is shown;

[0024] Figure 6 According to some embodiments of this application, a magnetization direction of a magnet in a magnetic levitation device 1b is shown;

[0025] Figure 7According to some embodiments of this application, a structural schematic diagram of a magnetic levitation device 1c is shown;

[0026] Figure 8 According to some embodiments of this application, a magnetization direction of a magnet in a magnetic levitation device 1c is shown;

[0027] Figure 9 According to some embodiments of this application, a structural schematic diagram of a magnetic levitation device 1d is shown;

[0028] Figure 10 According to some embodiments of this application, a magnetization direction of a magnet in a magnetic levitation device 1d is shown;

[0029] Figure 11 According to some embodiments of this application, a structural schematic diagram of a magnetic levitation device 1e is shown;

[0030] Figure 12 According to some embodiments of this application, a magnetization direction of a magnet in a magnetic levitation device 1e is shown;

[0031] Figure 13 According to some embodiments of this application, a structural schematic diagram of a magnetic levitation voice coil motor 2 is shown;

[0032] Figure 14 According to some embodiments of this application, a magnetic field diagram of a magnetic levitation voice coil motor 2 is shown;

[0033] Figure 15 According to some embodiments of this application, a curve showing the relationship between vertical resultant force and displacement in a magnetic levitation voice coil motor 2 is shown;

[0034] Figure 16 According to some embodiments of this application, a structural schematic diagram of a magnetic levitation voice coil motor 2a is shown;

[0035] Figure 17 According to some embodiments of this application, a magnetic field diagram of a magnetic levitation voice coil motor 2a is shown;

[0036] Figure 18 According to some embodiments of this application, a curve showing the relationship between vertical resultant force and displacement in a magnetic levitation voice coil motor 2a is shown;

[0037] Explanation of reference numerals in the attached figures:

[0038] 1-Magnetic levitation device; 1a-Magnetic levitation device; 1b-Magnetic levitation device; 1c-Magnetic levitation device; 1d-Magnetic levitation device; 1e-Magnetic levitation device;

[0039] 10 - First component; 110 - First magnet; 120 - Second magnet; 101 - First bracket; 101A - First mounting slot; 101B - Second mounting slot;

[0040] 20 - Second component; 210 - Third magnet; 220 - Fourth magnet; 230 - Fifth magnet; 201 - Second support; 201A - Groove;

[0041] 2-Magnetic levitation voice coil motor; 2a-Magnetic levitation voice coil motor;

[0042] 310 - First coil; 320 - Second coil. Detailed Implementation

[0043] The illustrative embodiments of this application include, but are not limited to, a magnetic levitation device and a magnetic levitation voice coil motor. To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in this application are described below in conjunction with the accompanying drawings.

[0044] Figure 1 This is a schematic diagram of the magnetic levitation device 1 in some embodiments of this application. It should be noted that, for ease of observation, Figure 1 The diagram shown is a cross-sectional view of the magnetic levitation device 1.

[0045] like Figure 1 As shown, the magnetic levitation device 1 includes a first component 10. The first component 10 includes a first magnet 110 and a second magnet 120, which are coaxially arranged. For example, the center lines of the first magnet 110 and the second magnet 120 are both a first axis L, thus the first component 10 has a first axis L. The second magnet 120 is annular and sleeved on the outside of the first magnet 110.

[0046] Continue reading Figure 1 The magnetic levitation device 1 further includes a second component 20. The second component 20 is capable of relative movement with the first component 10 along an axial direction parallel to the first axis L. The second component 20 includes at least two magnets coaxially spaced apart along the axial direction. Figure 1 The example uses at least two magnets, including a third magnet 210 and a fourth magnet 220. For instance, the centerline of each magnet in the second assembly 20 (e.g., the third magnet 210 and the fourth magnet 220) is also the first axis L. Furthermore, each magnet in the second assembly 20 (e.g., the third magnet 210 and the fourth magnet 220) is annular, fitted around the outside of the first magnet 110, and located radially between the first magnet 110 and the second magnet 120, wherein the radial direction is perpendicular to the axial direction.

[0047] In this assembly, both the first magnet 110 and the second magnet 120 are radially magnetized or parallel magnetized, and the magnetization directions of the first magnet 110 and the second magnet 120 are the same in the same radial plane (a plane parallel to the radial direction). Each magnet in the second assembly 20 (e.g., the third magnet 210 and the fourth magnet 220) is axially magnetized, and the magnetization directions of two adjacent magnets (e.g., the third magnet 210 and the fourth magnet 220) along the axial direction in the second assembly 20 are opposite.

[0048] It can be understood that the radial magnetic fields generated by the first magnet 110 and the second magnet 120 interact with the axial magnetic fields generated by each magnet in the second component 20 (e.g., the third magnet 210 and the fourth magnet 220), ultimately generating a magnetic levitation force along the axial direction. By setting the first magnet 110 and the second magnet 120 with the same magnetization direction, the magnetic levitation force generated by the first magnet 110 is opposite in direction to the magnetic levitation force generated by the second magnet 120. Furthermore, since the second magnet 120 is sleeved outside the first magnet 110, the magnitudes of the magnetic levitation forces generated by the first magnet 110 and the second magnet 120 are not the same (see [reference]). Figure 14 and Figure 17 In different embodiments, the magnetic field density near the second magnet 120 is obviously greater than that near the first magnet 110. This improves the axial stability of the magnetic levitation device 1 and reduces fluctuations while ensuring it possesses a certain magnetic levitation force. Furthermore, the magnetic forces between the third magnet 210 and the fourth magnet 220 in the second component 20 are in opposite directions. The forces they experience in the magnetic field of the first component 10 change differently with displacement and are in opposite directions, further reducing fluctuations in the magnetic levitation device 1 and maintaining better linearity.

[0049] It can be understood that one of the first component 10 and the second component 20 acts as a mover, and the other as a stator. The mover can move relative to the stator along the axial direction. The mover is subjected to a force from the stator along the axial direction, and this force is related to the relative position between the mover and the stator. Because the magnetic levitation device 1 has good axial stability and small fluctuations, the force can maintain a better linear relationship with the displacement of the mover when the relative position of the mover and the stator changes.

[0050] In a specific application scenario, the magnetic levitation device 1 can be used as a gravity compensation device for a vertical micro-motion stage. Due to the good axial stability of the magnetic levitation device 1, it can accurately compensate for the gravity of the vertical drive load of the vertical micro-motion stage (hereinafter referred to as the gravity of the micro-motion stage), and the compensation force (attractive or repulsive force on the micro-motion stage) provided is linearly related to the displacement of the micro-motion stage. This can avoid the voice coil motor from outputting additional driving force, which is beneficial to reducing the heat dissipation of the voice coil motor.

[0051] In some embodiments, such as Figure 1 As shown, the number of the first magnet 110 and the second magnet 120 can be one.

[0052] In other embodiments, there are two or more first magnets 110, which are coaxial and spaced apart along the axial direction, and have the same magnetization direction; and / or, there are two or more second magnets 120, which are coaxial and spaced apart along the axial direction, and have the same magnetization direction. Specific embodiments will be described in detail below, and will not be repeated here.

[0053] In some embodiments, the second component 20 includes at least three magnets that are coaxially spaced apart along the axial direction. Specific embodiments will be described in detail below, and will not be repeated here.

[0054] The technical solutions in this application will be described below with reference to specific embodiments. It should be noted that, without conflict, the technical features and solutions in each embodiment can be used in combination.

[0055] It should be noted that in this specification, similar reference numerals and letters indicate similar items. Therefore, once an item is defined in one figure, it will not be further defined and explained in subsequent figures.

[0056] In some embodiments, such as Figure 1 As shown, the magnetic levitation device 1 includes a first component 10. The first component 10 includes a first magnet 110 and a second magnet 120, which are coaxially arranged. For example, the center lines of the first magnet 110 and the second magnet 120 are both a first axis L, thus the first component 10 has a first axis L. The second magnet 120 is annular and sleeved on the outside of the first magnet 110.

[0057] Continue reading Figure 1 The magnetic levitation device 1 also includes a second component 20. The second component 20 and the first component 10 are capable of relative movement along an axis parallel to the first axis L. The second component 20 includes a third magnet 210 and a fourth magnet 220, which are coaxial and spaced apart along the axis. For example, the center lines of the third magnet 210 and the fourth magnet 220 are also the first axis L. The third magnet 210 and the fourth magnet 220 are both annular and sleeved on the outside of the first magnet 110, and are located radially between the first magnet 110 and the second magnet 120, wherein the radial direction is perpendicular to the axis direction.

[0058] The first magnet 110 and the second magnet 120 are both radially magnetized or both are parallel magnetized, and the magnetization direction of the first magnet 110 and the second magnet 120 is the same in the same radial plane (a plane parallel to the radial direction). The third magnet 210 and the fourth magnet 220 are both axially magnetized, and the magnetization directions are opposite.

[0059] In some embodiments, such as Figure 2 As shown, the first magnet 110 and the second magnet 120 are radially magnetized. Here, the magnetization direction is radially outward as an example. In other embodiments, the magnetization direction can be radially inward.

[0060] It can be understood that the magnetization direction indicates a direction from the south pole (S pole) to the north pole (N pole). Therefore, taking the first magnet 110 as an example, when the first magnet 110 is radially magnetized, the outer and inner surfaces of the first magnet 110 have opposite magnetic properties along the radial direction. The same applies to the second magnet 120.

[0061] In other embodiments, the first magnet 110 and the second magnet 120 are magnetized in parallel. Parallel magnetization means magnetizing along a direction parallel to a radial direction, that is, magnetizing to the left or right in a radial plane.

[0062] And, such as Figure 2 As shown, the third magnet 210 and the fourth magnet 220 are axially magnetized, and the magnetization directions are opposite along the axis. Taking the third magnet 210 as an example, the magnetism of the two end faces of the third magnet 210 along the axis is opposite. The same applies to the fourth magnet 220.

[0063] In some embodiments, such as Figure 1 As shown, both the first magnet 110 and the second magnet 120 are ring-shaped, wherein the projection of the ring shape onto the radial plane includes, but is not limited to, circular rings and rectangular rings.

[0064] In other embodiments, the first magnet 110 may be columnar, that is, the first magnet 110 is a solid structure. The projection of the columnar shape onto the radial plane includes, but is not limited to, a solid circle and a solid rectangle.

[0065] In some embodiments, such as Figure 1 As shown, both the first magnet 110 and the second magnet 120 are integral ring-shaped structures, and the projection of the integral ring-shaped structure onto the plane perpendicular to the radial direction is a complete circle.

[0066] In other embodiments, the first magnet 110 and / or the second magnet 120 may be a tile-shaped structure. Taking the first magnet 110 as an example, the first magnet 110 includes a plurality of tile-shaped magnetic sheets, which are arranged around the first axis L. Figure 1The circumferential direction shown is a complete circle. The circumferential direction is a ring-shaped direction around the first axis L, perpendicular to both the axis and the radial direction. Furthermore, the magnetization direction of each tile-shaped magnetic sheet is either radial or parallel. The second magnet 120 is similarly magnetized.

[0067] In some embodiments, the first magnet 110 and the second magnet 120 have the same dimensions along the axial direction.

[0068] In some embodiments, the third magnet 210 and the fourth magnet 220 have the same dimensions along the axial direction.

[0069] In some embodiments, the third magnet 210 and the fourth magnet 220 have the same dimensions in the radial direction.

[0070] In some embodiments, the material of the first magnet 110 includes a rare-earth permanent magnet with a high magnetic energy product, such as, for example, a neodymium iron boron permanent magnet or a samarium cobalt permanent magnet.

[0071] In some embodiments, the material of the second magnet 120 includes a rare-earth permanent magnet with a high magnetic energy product, such as, for example, a neodymium iron boron permanent magnet or a samarium cobalt permanent magnet.

[0072] In some embodiments, the material of the third magnet 210 includes a rare-earth permanent magnet with a high magnetic energy product, such as, for example, a neodymium iron boron permanent magnet or a samarium cobalt permanent magnet.

[0073] In some embodiments, the material of the fourth magnet 220 includes a rare-earth permanent magnet with a high magnetic energy product, such as, for example, a neodymium iron boron permanent magnet or a samarium cobalt permanent magnet.

[0074] As previously mentioned, in some embodiments, the second component 20 includes at least three magnets. The following example illustrates the second component 20 comprising three magnets.

[0075] Figure 3 A schematic diagram of the structure of the magnetic levitation device 1a in some embodiments of this application is shown. Figure 3 The magnetic levitation device 1a shown is Figure 1 The difference in the magnetic levitation device 1 shown is that the second component 20 also includes a fifth magnet 230. The third magnet 210, the fourth magnet 220 and the fifth magnet 230 are arranged alternately along the axial direction.

[0076] In some embodiments, such as Figure 4 As shown, the third magnet 210, the fourth magnet 220 and the fifth magnet 230 are all axially magnetized, and the magnetization directions of the third magnet 210 and the fourth magnet 220 are opposite, as are the magnetization directions of the fourth magnet 220 and the fifth magnet 230.

[0077] In some embodiments, the gap between the third magnet 210 and the fourth magnet 220 along the axial direction is the same as the gap between the fourth magnet 220 and the fifth magnet 230.

[0078] As mentioned earlier, in some embodiments, the number of first magnets 110 is two or more. The following example uses three first magnets 110.

[0079] Figure 5 A schematic diagram of the structure of the magnetic levitation device 1b in some embodiments of this application is shown. Figure 5 The magnetic levitation device 1b shown is Figure 1 The difference of the magnetic levitation device 1 shown is that the number of first magnets 110 is three, and the three first magnets 110 are coaxial and spaced apart along the axial direction.

[0080] In some embodiments, such as Figure 6 As shown, the three first magnets 110 are magnetized in the same direction. The three first magnets 110 can be radially magnetized or parallel magnetized, which will not be elaborated further.

[0081] As mentioned earlier, in some embodiments, the number of second magnets 120 is two or more. The following example uses three second magnets 120.

[0082] Figure 7 A schematic diagram of the structure of the magnetic levitation device 1c in some embodiments of this application is shown. Figure 7 The magnetic levitation device 1c shown is Figure 1 The difference of the magnetic levitation device 1 shown is that the number of second magnets 120 is three, and the three second magnets 120 are coaxial and spaced apart along the axial direction.

[0083] In some embodiments, such as Figure 8 As shown, the three second magnets 120 are magnetized in the same direction. The three second magnets 120 can be radially magnetized or parallel magnetized, which will not be elaborated further.

[0084] Figure 9 A schematic diagram of the structure of the magnetic levitation device 1d in some embodiments of this application is shown. Figure 9 The magnetic levitation device 1d shown is Figure 1 The difference in the magnetic levitation device 1 shown is that the number of the first magnet 110 is the same as the number of the second magnet 120, and both are two or more. Here, we take the example where the number of the first magnet 110 and the number of the second magnet 120 are both two.

[0085] In some embodiments, such as Figure 10 As shown, the magnetization directions of two adjacent first magnets 110 along the axial direction are opposite, and the magnetization directions of two adjacent second magnets 120 along the axial direction are also opposite.

[0086] For example, consider the first magnet 110. When all first magnets 110 are radially magnetized, in two adjacent first magnets 110 along the axial direction, one magnetizes radially outward, and the other magnetizes radially inward. When all first magnets 110 are parallelly magnetized, in two adjacent first magnets 110 along the axial direction, one magnetizes from left to right along a direction parallel to the radial direction, and the other magnetizes from right to left along a direction parallel to the radial direction. The second magnet 120 is similar.

[0087] Figure 11 A schematic diagram of the structure of the magnetic levitation device 1e in some embodiments of this application is shown. Figure 11 The magnetic levitation device 1e shown is Figure 9 The difference in the magnetic levitation device 1d shown is that the second component 20 includes three magnets coaxially arranged and spaced apart along the axial direction. The three magnets include a third magnet 210, a fourth magnet 220, and a fifth magnet 230. The third magnet 210, the fourth magnet 220, and the fifth magnet 230 can be referred to as... Figure 3 The description of the embodiments will not be repeated. Figure 12 The magnetization directions of the first magnet 110, the second magnet 120, the third magnet 210, the fourth magnet 220, and the fifth magnet 230 are shown in the above description and will not be repeated here.

[0088] It is understood that the other similarities between the magnetic levitation devices 1a / 1b / 1c / 1d / 1e in the embodiments of this application and the magnetic levitation device 1 can be referred to the relevant description of the magnetic levitation device 1, and will not be repeated here.

[0089] It should be noted that the magnetic levitation device 1e in the above embodiment can also be regarded as a first magnet combination consisting of a first magnet 110 (upward axial portion), a second magnet 120 (upward axial portion), a third magnet 210, and a fourth magnet 220, and a second magnet combination consisting of a first magnet 110 (downward axial portion), a second magnet 120 (downward axial portion), a fourth magnet 220, and a fifth magnet 230, arranged sequentially along the axial direction. The magnetization directions of the corresponding magnets in these two magnet combinations are opposite. The advantage of this combination is that the fourth magnet 220 can be reused, and the force directions of the two magnet combinations are the same, but they have a stronger magnetic field density, which can efficiently enhance the magnetic levitation force; and because the magnetic field density is higher, the leakage magnetic field in its non-working area will also be less.

[0090] Furthermore, in the magnetic levitation devices 1 / 1a / 1b / 1c / 1d / 1e of the above embodiments of this application, the first component 10 further includes a first bracket, the first bracket includes a first mounting groove and a second mounting groove, the first magnet 110 is located in the first mounting groove and is connected to the groove wall of the first mounting groove; the second magnet 120 is located in the second mounting groove and is connected to the groove wall of the second mounting groove.

[0091] In some embodiments, the first support is made of a non-magnetic material, such as aluminum, copper, titanium, stainless steel, plastic, or ceramic.

[0092] In the magnetic levitation devices 1 / 1a / 1b / 1c / 1d / 1e of the above embodiments of this application, the second component 20 further includes a second support. The second support includes a groove. Each magnet in the second component 20 is located in the groove and is arranged sequentially along the depth direction of the groove. The depth direction of the groove is the same as the axial direction.

[0093] In some embodiments, the second support is made of a non-magnetic material, such as aluminum, copper, titanium, stainless steel, plastic, or ceramic.

[0094] This application also provides a magnetic levitation voice coil motor, which includes the magnetic levitation devices 1 / 1a / 1b / 1c / 1d / 1e described in the above embodiments of this application. One of the first component 10 and the second component 20 can serve as the mover of the magnetic levitation voice coil motor, and the other can serve as the stator. For example, the first component 10 is the stator and the second component 20 is the mover; or the second component 20 is the stator and the first component 10 is the mover. The mover can move relative to the stator along the axial direction.

[0095] It is understood that the magnetic levitation voice coil motor also includes at least one coil, which is disposed between two adjacent magnets along the axial direction in the second component 20.

[0096] The following section discusses magnetic levitation voice coil motors, including... Figure 1 The magnetic levitation device 1 shown in the embodiment is an example. Figure 13 A schematic diagram of the structure of the magnetic levitation voice coil motor 2 in some embodiments is shown.

[0097] like Figure 13 As shown, the magnetic levitation voice coil motor 2 includes a magnetic levitation device 1 and a first coil 310. The magnetic levitation device 1 includes a first component 10 and a second component 20. The first component 10 serves as the mover, and the second component 20 serves as the stator.

[0098] The first component 10 includes a first magnet 110 and a second magnet 120. The first component 10 also includes a first support 101, the projection of which in a radial plane comprises multiple concentric rings. For example, the two inner concentric rings form a first mounting groove 101A, and the two outer concentric rings form a second mounting groove 101B. The first magnet 110 is located within the first mounting groove 101A and is connected to the groove wall of the first mounting groove 101A. The second magnet 120 is located within the second mounting groove 101B and is connected to the groove wall of the second mounting groove 101B.

[0099] The second component 20 includes a third magnet 210 and a fourth magnet 220. The second component 20 also includes a second support 201, which includes a groove 201A. The third magnet 210 and the fourth magnet 220 are located in the groove 201A and are arranged sequentially along the depth direction of the groove 201A, which is the same as the axial direction.

[0100] The first coil 310 is located in the groove 201A of the second bracket 201 and is located between the third magnet 210 and the fourth magnet 220 along the axial direction.

[0101] It can be understood that the first coil 310 is a rotating body, and its center line is the first axis L. After being energized, the first coil 310 can generate a Lorentz force (i.e., motor driving force) in the direction of the axis under the action of the magnetic field generated by the first magnet 110 and the second magnet 120. The amplitude of the Lorentz force is positively correlated with the amplitude of the input current, and the direction of the Lorentz force depends on the direction of the input current.

[0102] In some embodiments, the first coil 310 is made of enameled wire with a circular, rectangular or other shaped cross-section.

[0103] Figure 14 It shows Figure 13 The diagram shows the magnetic field lines of the magnetic levitation voice coil motor 2. Figure 14 As shown, the magnetic levitation device 1 has a stable magnetic field, which can provide vertical magnetic levitation force, and at the same time provide an effective magnetic field for the first coil 310 to generate the Lorentz force.

[0104] Figure 15 It shows Figure 13 The curves showing the vertical resultant force of the magnetic levitation force of the magnetic levitation device 1 and the Lorentz force after the first coil 310 is energized in the magnetic levitation voice coil motor 2, and the displacement. Figure 15As shown, within a stroke range of -2mm to 2mm, the vertical resultant force of the magnetic levitation voice coil motor 2 exhibits a linear variation with displacement, giving the motor constant stiffness characteristics. It should be noted that different lines in the figure represent different amplitudes of current flowing through the first coil 310. It can be seen that the magnitude of the current in the magnetic levitation voice coil motor 2 has almost no impact on the stiffness characteristics of the final vertical resultant force.

[0105] In the vertical micro-motion stage using the magnetic levitation voice coil motor 2, to ensure vertical output performance, the reed is used as a guiding element for vertical motion and a decoupling element for pitch and yaw. The magnetic levitation device in the magnetic levitation voice coil motor 2 is used not only to compensate for the gravity of the vertical micro-motion stage, but also to compensate for the reverse force of the reed.

[0106] In some embodiments, the reed is arranged between the mover and the external load. Within the range of motion, the elastic force of the reed increases or decreases linearly with the displacement. By adjusting the equivalent stiffness of the magnetic levitation voice coil motor 2, the forces applied by the magnetic levitation voice coil motor 2 and the reed on the vertical micro-motion stage can be made to be of the same magnitude but opposite in direction. That is, the vertical resultant force applied by the two on the vertical micro-motion stage tends to be a zero stiffness curve. This enables precise compensation for the gravity of the vertical micro-motion stage and the reverse force of the reed, improves the heating problem of the magnetic levitation voice coil motor 2, and improves the positioning accuracy of the vertical micro-motion stage.

[0107] The following section discusses magnetic levitation voice coil motors, including... Figure 11 The magnetic levitation device 1e shown in the embodiment is an example. Figure 16 A schematic diagram of the structure of the magnetic levitation voice coil motor 2a in some embodiments is shown.

[0108] like Figure 16 As shown, the magnetic levitation voice coil motor 2a includes a magnetic levitation device 1e, a first coil 310, and a second coil 320. The magnetic levitation device 1e includes a first component 10 and a second component 20. The first component 10 serves as the mover, and the second component 20 serves as the stator.

[0109] The first component 10 includes two first magnets 110 and two second magnets 120. The first component 10 also includes a first bracket 101, which includes a first mounting groove 101A and a second mounting groove 101B, as described above. The two first magnets 110 are sequentially arranged in the first mounting groove 101A along the axial direction, and the two second magnets 120 are sequentially arranged in the second mounting groove 101B along the axial direction.

[0110] The second component 20 includes a third magnet 210, a fourth magnet 220 and a fifth magnet 230. The second component 20 also includes a second support 201, which includes a groove 201A. The third magnet 210, the fourth magnet 220 and the fifth magnet 230 are sequentially arranged in the groove 201A along the axial direction.

[0111] The first coil 310 and the second coil 320 are both located in the groove 201A of the second bracket 201. Along the axial direction, the first coil 310 is located between the third magnet 210 and the fourth magnet 220, and the second coil 320 is located between the fourth magnet 220 and the fifth magnet 230.

[0112] It can be understood that both the first coil 310 and the second coil 320 are bodies of revolution, and their centerlines are both the first axis L. After being energized, the first coil 310 and the second coil 320 can generate a Lorentz force along the axial direction under the action of the magnetic field generated by the first magnet 110 and the second magnet 120. The amplitude of the Lorentz force is positively correlated with the amplitude of the input current, and the direction of the Lorentz force depends on the direction of the input current.

[0113] In some embodiments, the first coil 310 and the second coil 320 have the same dimensions in both the radial direction and the axial direction.

[0114] Figure 17 It shows Figure 16 The diagram shows the magnetic field lines of the magnetic levitation voice coil motor 2a. Figure 17 As shown, the magnetic levitation device 1e has a stable magnetic field, providing vertical magnetic levitation force, and simultaneously providing an effective magnetic field for the first coil 310 and the second coil 320 to generate the Lorentz force. Furthermore, this type of magnetic levitation device 1e has more concentrated magnetic field lines, resulting in less magnetic leakage in the non-working areas at the edges.

[0115] Figure 18 It shows Figure 16 The curves showing the relationship between the vertical resultant force of the magnetic levitation force of the magnetic levitation device 1e and the Lorentz force after the first coil 310 and the second coil 320 are energized, and the displacement in the magnetic levitation voice coil motor 2a shown. Figure 18 As shown, within a stroke range of -2.5mm to 2.5mm, the vertical resultant force of the magnetic levitation voice coil motor 2a exhibits a linear variation with displacement, resulting in constant stiffness characteristics. It should be noted that the different lines in the figure represent different amplitudes of current flowing through the first coil 310 and the second coil 320. It can be seen that the magnitude of the current in the magnetic levitation voice coil motor 2a has almost no impact on the stiffness characteristics of the final vertical resultant force.

[0116] The technical effects of the magnetic levitation voice coil motor 2a in this application embodiment can be referred to the technical effects of the magnetic levitation voice coil motor 2, and will not be repeated here.

[0117] In summary, the magnetic levitation voice coil motor of this application embodiment has the characteristics of compact structure, low heat generation, low power consumption, and constant stiffness within a small stroke range. Furthermore, the combined stiffness of the magnetic levitation voice coil motor and the spring stiffness is close to zero, which is beneficial to improving the overall integration and control accuracy of the equipment.

[0118] The above description illustrates the implementation of this application through specific embodiments. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application is presented in conjunction with some embodiments, this does not mean that the features of this application are limited to these embodiments. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many exemplary details are included in the above description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description.

[0119] In the description of the embodiments of this application, "and / or" is merely a way of describing the relationship between associated objects, indicating that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally indicates that the associated objects before and after are in an "or" relationship. When there are multiple associated objects, it can represent choosing one, choosing two, or choosing all.

[0120] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0121] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0122] The limitations mentioned in the embodiments of this application, such as parallel, perpendicular, and identical (e.g., identical length, identical width, etc.), are all relative to the current technological level, and not absolute and strict definitions in a mathematical sense. There may be a deviation within a predetermined angular range between two mutually parallel or perpendicular components. In one embodiment, the predetermined angle is 10°, and for example, the deviation may be within the range of ±5°.

[0123] Although this application has been illustrated and described with reference to certain preferred embodiments thereof, those skilled in the art will understand that various changes in form and detail may be made thereto without departing from the scope of this application.

Claims

1. A magnetic levitation device, characterized in that, It includes a first component (10) and a second component (20), the first component (10) having a first axis, and the first component (10) and the second component (20) being able to move relative to each other along an axial direction parallel to the first axis; The first component (10) includes a first magnet (110) and a second magnet (120) arranged coaxially, the second magnet (120) being ring-shaped and sleeved on the outside of the first magnet (110); The second component (20) includes at least two magnets that are coaxial and spaced apart along the axial direction. Each magnet in the second component (20) is annular and sleeved on the outside of the first magnet (110), and is located between the first magnet (110) and the second magnet (120) in a radial direction perpendicular to the axial direction. The first magnet (110) and the second magnet (120) are both radially magnetized or both are parallel magnetized, and the magnetization direction of the first magnet (110) and the second magnet (120) is the same in the same radial plane; each magnet in the second component (20) is axially magnetized, and the magnetization directions of two adjacent magnets along the axis are opposite.

2. The magnetic levitation device according to claim 1, characterized in that, The number of the first magnet (110) is two or more, and the two or more first magnets (110) are coaxial and spaced apart along the axis direction, and the magnetization direction is the same; And / or, The number of the second magnet (120) is two or more, and the two or more second magnets (120) are coaxial and spaced apart along the axis direction, and the magnetization direction is the same.

3. The magnetic levitation device according to claim 1, characterized in that, The number of the first magnet (110) is the same as the number of the second magnet (120), and both are two or more. The magnetization directions of two adjacent first magnets (110) along the axial direction are opposite, and the magnetization directions of two adjacent second magnets (120) along the axial direction are also opposite.

4. The magnetic levitation device according to claim 1, characterized in that, The second component (20) includes at least three magnets that are coaxial and spaced apart along the axis.

5. The magnetic levitation device according to claim 1, 3 or 4, characterized in that, The number of the first magnets (110) is the same as the number of the second magnets (120), and there are two of each. The magnetization directions of two adjacent first magnets (110) along the axial direction are opposite, and the magnetization directions of two adjacent second magnets (120) along the axial direction are also opposite. The second component (20) includes three magnets that are coaxial and spaced apart along the axis.

6. The magnetic levitation device according to claim 1, characterized in that, The first component (10) further includes a first bracket, the first bracket including a first mounting slot and a second mounting slot. The first magnet (110) is located in the first mounting groove and is connected to the groove wall of the first mounting groove; The second magnet (120) is located in the second mounting groove and is connected to the groove wall of the second mounting groove.

7. The magnetic levitation device according to claim 1, characterized in that, The second component (20) further includes a second support, the second support including a groove, In the second component (20), each magnet is located within the groove and is arranged sequentially along the depth direction of the groove, which is the same as the axial direction.

8. A magnetic levitation voice coil motor, characterized in that, Includes the magnetic levitation device according to any one of claims 1 to 7 and at least one coil. The coil is disposed between two adjacent magnets along the axial direction in the second component (20).

9. The magnetic levitation voice coil motor according to claim 8, characterized in that, The number of the first magnet (110) and the number of the second magnet (120) are both one; The second component (20) includes a third magnet and a fourth magnet, with a first coil disposed between the third magnet and the fourth magnet along the axial direction.

10. The magnetic levitation voice coil motor according to claim 8, characterized in that, The number of the first magnet (110) and the number of the second magnet (120) are both two; The second component (20) includes a third magnet, a fourth magnet, and a fifth magnet. At least one of the coils includes a first coil and a second coil, with the first coil disposed between the third magnet and the fourth magnet, and the second coil disposed between the fourth magnet and the fifth magnet, along the axial direction.

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