An isothermal plate etching capillary core structure

Abstract

The utility model discloses a kind of even temperature plate etching capillary core structures, belong to even temperature plate technical field, including capillary core base material, the surface of capillary core base material is provided with first effect layer, the surface of first effect layer is provided with second effect layer, first effect layer includes transition layer, transition layer is arranged on the surface of capillary core base material;The utility model is protected by multilayer film layer cooperation, significantly improve corrosion resistance: transition layer improves film layer bonding strength, corrosion resistance layer resists working medium and environmental corrosion, antioxidant layer prevents oxidation, effectively solve the problem that traditional single metal capillary core is easily corroded, easy oxidation;The utility model is designed by nano porous structure through capillary optimization layer, with very strong hydrophilicity and suitable porosity, with the micron level etching hole of base material forms multistage capillary structure, ensure the rapid transmission of working medium, will not reduce capillary force and heat dissipation efficiency due to the setting of protective film layer.

Description

Technical Field

[0001] This utility model belongs to the field of heat spreader technology, specifically relating to a heat spreader etched capillary core structure. Background Technology

[0002] Vapor chambers, as highly efficient heat dissipation components, are widely used in electronic equipment, new energy vehicles, and other fields. Their core component is the capillary wick, which uses capillary force to circulate the working fluid, thereby rapidly transferring heat. Etching technology, due to its ability to create high-precision, highly consistent capillary structures, has become one of the mainstream methods for fabricating capillary wicks.

[0003] Most etched capillary wicks in existing technologies are single-metal substrate structures. However, these capillary wicks have the following problems during long-term use: First, the metal substrate is easily corroded by the working fluid in the heat spreader, especially under high temperature and high pressure, the corrosion is more severe, leading to capillary wall peeling, increased pore size, decreased capillary force, and affecting the heat dissipation efficiency of the heat spreader; Second, the metal substrate is prone to oxidation reaction in air or working fluid, and the generated oxide layer will block the capillary pores, further reducing the service life of the capillary wick. Utility Model Content

[0004] To address the problems mentioned in the background section, this invention provides a heat spreader etched capillary core structure, which improves its corrosion resistance, oxidation resistance, and extends its service life.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a heat spreader etched capillary core structure, comprising a capillary core substrate, wherein a first effect layer is disposed on the surface of the capillary core substrate, and a second effect layer is disposed on the surface of the first effect layer.

[0006] The first effect layer includes a transition layer disposed on the surface of the capillary core substrate.

[0007] Preferably, the capillary core substrate is made of oxygen-free copper or aluminum alloy.

[0008] Preferably, a corrosion-resistant layer is provided on the side of the transition layer away from the capillary core substrate.

[0009] Preferably, a reinforcing support film layer is provided on the side of the corrosion-resistant layer away from the transition layer.

[0010] Preferably, the second effect layer includes a thermally conductive enhancement layer disposed on one side of the reinforced support film layer.

[0011] Preferably, a capillary optimization layer is provided on the side of the thermally conductive enhancement layer away from the reinforced support film layer.

[0012] Preferably, an antioxidant layer is provided on the side of the capillary optimization layer away from the thermally conductive enhancement layer.

[0013] Compared with the prior art, the beneficial effects of this utility model are: 1. This utility model significantly improves corrosion resistance through multi-layer synergistic protection: the transition layer enhances the bonding strength of the film layers, the corrosion-resistant layer resists corrosion from the working fluid and environment, and the anti-oxidation layer prevents oxidation, effectively solving the problems of easy corrosion and oxidation of traditional single metal capillary wicks.

[0014] 2. This utility model adopts a nanoporous structure design through the capillary optimization layer, which has strong hydrophilicity and suitable porosity. It forms a multi-level capillary structure with the micron-level etched holes of the substrate, ensuring the rapid transport of the working fluid. The capillary force and heat dissipation efficiency will not be reduced due to the setting of the protective film layer. Attached Figure Description

[0015] Figure 1 This is a three-dimensional cross-sectional structural diagram of the present invention; Figure 2 This is a side view sectional diagram of the structure of this utility model; Figure 3 This is a schematic diagram of the structure of the first effect layer of this utility model; Figure 4 This is a schematic diagram of the structure of the second effect layer of this utility model.

[0016] In the figure: 1. Capillary core substrate; 2. First effect layer; 21. Transition layer; 22. Corrosion resistant layer; 23. Reinforcing support film layer; 3. Second effect layer; 31. Thermal conductivity enhancement layer; 32. Capillary optimization layer; 33. Antioxidant layer. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Example 1 Please see Figure 1-4 The present invention provides the following technical solution: a heat spreader etched capillary core structure, including a capillary core substrate 1, a first effect layer 2 disposed on the surface of the capillary core substrate 1, and a second effect layer 3 disposed on the surface of the first effect layer 2.

[0019] The first effect layer 2 includes a transition layer 21, which is disposed on the surface of the capillary core substrate 1.

[0020] Specifically, the capillary core substrate 1 is made of oxygen-free copper or aluminum alloy.

[0021] By adopting the above technical solution, the transition layer 21 is an effect layer, which is made of nickel or chromium and prepared by magnetron sputtering. Nickel and chromium have good compatibility with copper and aluminum substrates and can form a strong metallurgical bond, effectively improving the bonding strength between the subsequent corrosion-resistant layer 22 and the capillary core substrate 1, and preventing the film layer from falling off during long-term use. The transition layer 21 prepared by magnetron sputtering has good uniformity and high purity and will not cause blockage of the capillary structure.

[0022] Specifically, a corrosion-resistant layer 22 is provided on the side of the transition layer 21 away from the capillary core substrate 1.

[0023] By adopting the above technical solution, the corrosion-resistant layer 22 is a titanium nitride layer, a silicon carbide layer, or an alumina ceramic layer, which is prepared by physical vapor deposition or sol-gel method. Titanium nitride and silicon carbide have excellent acid and alkali corrosion resistance and wear resistance. The alumina ceramic layer has high chemical stability and can effectively resist the erosion of the working fluid in the heat exchange plate, while preventing external moisture and impurities from corroding the substrate.

[0024] Specifically, a reinforced support film layer 23 is provided on the side of the corrosion-resistant layer 22 away from the transition layer 21.

[0025] By adopting the above technical solution, the reinforced support film layer 23 is used as the effect layer. It is made of nano-ceramic coating as raw material and connected to the capillary core substrate 1 by hot pressing or chemical vapor deposition, thereby improving the structural strength of the capillary core.

[0026] In this embodiment, the transition layer 21 is an effect layer, made of nickel or chromium, and prepared by magnetron sputtering. Nickel and chromium have good compatibility with copper and aluminum substrates, forming a strong metallurgical bond, effectively improving the bonding strength between the subsequent corrosion-resistant layer 22 and the capillary core substrate 1, and preventing the film from peeling off during long-term use. The transition layer 21 prepared by magnetron sputtering has good uniformity and high purity, and will not block the capillary structure. The corrosion-resistant layer 22 is a titanium nitride layer, silicon carbide layer, or alumina ceramic layer, prepared by physical vapor deposition or sol-gel method. Titanium nitride and silicon carbide have excellent acid and alkali corrosion resistance and wear resistance. The alumina ceramic layer has high chemical stability, which can effectively resist the erosion of the working fluid in the heat exchanger, and at the same time prevent external moisture and impurities from corroding the substrate. The reinforcing support film layer 23 is an effect layer, made of nano-ceramic coating as raw material, and connected to the capillary core substrate 1 by hot pressing or chemical vapor deposition, thereby improving the structural strength of the capillary core.

[0027] Example 2 The difference between this embodiment and embodiment 1 is that, specifically, the second effect layer 3 includes a thermally conductive enhancement layer 31, which is disposed on one side of the reinforced support film layer 23.

[0028] By adopting the above technical solution, the thermally conductive enhancement layer 31 is an effect layer, and the selected material is graphene or diamond film, which has an extremely high thermal conductivity, can significantly reduce the thermal resistance of the capillary wick, accelerate the heat transfer, and thus improve the thermal conductivity efficiency.

[0029] Specifically, a capillary optimization layer 32 is provided on the side of the thermally conductive enhancement layer 31 away from the reinforced support film layer 23.

[0030] By adopting the above technical solution, the capillary optimization layer 32 is a nanoporous silica layer or a porous alumina layer. This film layer has extremely strong hydrophilicity, which can ensure the rapid spread and flow of the working fluid in the capillary pores and make up for the hydrophilicity reduction problem that may be caused by the corrosion-resistant layer 22. The nano-level pore structure and the micron-level etched holes of the substrate form a multi-level capillary structure, which further enhances the capillary force and ensures the heat dissipation efficiency of the heat spreader.

[0031] Specifically, an antioxidant layer 33 is provided on the side of the capillary optimization layer 32 away from the thermal conductivity enhancement layer 31.

[0032] By adopting the above technical solution, the antioxidant layer 33 is a silane coupling agent layer or a zirconium oxide layer, prepared by immersion coating or atomic layer deposition process. The silane coupling agent layer can form a dense organic protective film on the surface of the capillary core, preventing oxygen from contacting the substrate and each film layer; the zirconium oxide layer has good high-temperature stability and can still maintain good antioxidant performance in high-temperature environments; this film layer covers the entire outer surface and edge end face of the capillary core, achieving all-round antioxidant protection.

[0033] In this embodiment, during use: the thermally enhanced layer 31 is the effect layer, made of graphene or diamond film, which has extremely high thermal conductivity, significantly reducing the thermal resistance of the capillary wick and accelerating heat transfer, thereby improving thermal efficiency. The capillary optimization layer 32 is a nanoporous silica layer or a porous alumina layer. This film has strong hydrophilicity, ensuring rapid spreading and flow of the working fluid within the capillary pores, compensating for the potential decrease in hydrophilicity caused by the corrosion-resistant layer 22. The nanoscale pore structure and the micron-level etched holes of the substrate form a multi-level capillary structure, further enhancing capillary force and ensuring the heat dissipation efficiency of the heat spreader. The anti-oxidation layer 33 is a silane coupling agent layer or a zirconium oxide layer, prepared using immersion coating or atomic layer deposition processes. The silane coupling agent layer forms a dense organic protective film on the surface of the capillary wick, preventing oxygen from contacting the substrate and each film layer. The zirconium oxide layer has good high-temperature stability and maintains good anti-oxidation performance even at high temperatures. This film layer covers the entire outer surface and edge end face of the capillary wick, achieving all-round anti-oxidation protection.

[0034] The working principle and usage process of this utility model: This utility model has a good corrosion resistance effect through the first effect layer 2 and a good anti-oxidation effect through the second effect layer 3.

[0035] When the first effect layer 2 is used, the transition layer 21 is the effect layer, which is a nickel layer or a chromium layer, prepared by magnetron sputtering. Nickel and chromium have good compatibility with copper and aluminum substrates, and can form a strong metallurgical bond, effectively improving the bonding strength between the subsequent corrosion-resistant layer 22 and the capillary core substrate 1, and preventing the film layer from falling off during long-term use. The transition layer 21 prepared by magnetron sputtering has good uniformity and high purity, and will not cause blockage of the capillary structure. The corrosion-resistant layer 22 is a titanium nitride layer, a silicon carbide layer, or an alumina ceramic layer, prepared by physical vapor deposition or sol-gel method. Titanium nitride and silicon carbide have excellent acid and alkali corrosion resistance and wear resistance. The alumina ceramic layer has high chemical stability, which can effectively resist the erosion of the working fluid in the heat spreader, and at the same time prevent external moisture and impurities from corroding the substrate. The reinforcing support film layer 23 is the effect layer, which uses a nano-ceramic coating as raw material and is connected to the capillary core substrate 1 by hot pressing or chemical vapor deposition, thereby improving the structural strength of the capillary core.

[0036] When the second effect layer 3 is used, the thermal conductivity enhancement layer 31 is the effect layer, made of graphene or diamond film, which has extremely high thermal conductivity. This significantly reduces the thermal resistance of the capillary core, accelerates heat transfer, and thus improves thermal conductivity efficiency. The capillary optimization layer 32 is a nanoporous silica layer or a porous alumina layer. This film has strong hydrophilicity, ensuring rapid spreading and flow of the working fluid within the capillary pores, compensating for the potential decrease in hydrophilicity caused by the corrosion-resistant layer 22. The nanoscale pore structure and the micron-level etched holes of the substrate form a multi-level capillary structure, further enhancing capillary force and ensuring the heat dissipation efficiency of the heat spreader. The anti-oxidation layer 33 is a silane coupling agent layer or a zirconium oxide layer, prepared using immersion coating or atomic layer deposition processes. The silane coupling agent layer forms a dense organic protective film on the surface of the capillary core, preventing oxygen from contacting the substrate and various film layers. The zirconium oxide layer has good high-temperature stability and maintains good anti-oxidation performance even at high temperatures. This film layer covers the entire outer surface and edge end face of the capillary core, achieving all-round anti-oxidation protection.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A heat spreader etched capillary core structure, comprising a capillary core substrate (1), characterized in that: The surface of the capillary core substrate (1) is provided with a first effect layer (2), and the surface of the first effect layer (2) is provided with a second effect layer (3). The first effect layer (2) includes a transition layer (21) disposed on the surface of the capillary core substrate (1).

2. The heat spreader etched capillary core structure according to claim 1, characterized in that: The capillary core substrate (1) is made of oxygen-free copper or aluminum alloy.

3. The heat spreader etched capillary core structure according to claim 2, characterized in that: A corrosion-resistant layer (22) is provided on the side of the transition layer (21) away from the capillary core substrate (1).

4. The heat spreader etched capillary core structure according to claim 3, characterized in that: A reinforced support film layer (23) is provided on the side of the corrosion-resistant layer (22) away from the transition layer (21).

5. The heat spreader etched capillary core structure according to claim 4, characterized in that: The second effect layer (3) includes a thermally conductive enhancement layer (31), which is disposed on one side of the reinforced support film layer (23).

6. The heat spreader etched capillary core structure according to claim 5, characterized in that: A capillary optimization layer (32) is provided on the side of the thermally conductive enhancement layer (31) away from the reinforcing support film layer (23).

7. The heat spreader etched capillary core structure according to claim 6, characterized in that: An antioxidant layer (33) is provided on the side of the capillary optimization layer (32) away from the thermally conductive enhancement layer (31).

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