Drying apparatus

Abstract

The application relates to a drying device. The drying device comprises a shell, a heating mechanism and a transmission mechanism. The shell has a drying cavity inside. The heating mechanism comprises a plurality of heating components, which are sequentially arranged in the drying cavity along a first direction. The transmission mechanism is arranged in the drying cavity and is configured to drive a to-be-dried piece to move along the first direction. The drying device drives the to-be-dried piece to move along the first direction and sequentially pass through the plurality of heating components through the transmission mechanism, so that continuous drying operation of the to-be-dried piece in the drying cavity can be realized, the problem of local overheating or uneven drying of the to-be-dried piece can be avoided, the heating temperature of different heating components can be regulated and controlled, the problem of damage of the to-be-dried piece caused by sudden change of the temperature in the drying cavity can be avoided, and the stability of the drying process is improved.

Description

Technical Field

[0001] This application relates to the field of photovoltaic equipment technology, and in particular to drying devices. Background Technology

[0002] Heterojunction solar cells, a highly promising high-efficiency battery technology in the photovoltaic field, are officially called crystalline silicon heterojunction solar cells, often abbreviated as HIT, HJT, or SHJ. With their unique symmetrical bifacial cell structure design, they possess significant advantages such as high conversion efficiency, low temperature coefficient, and strong stability, holding an important position in the photovoltaic market. This cell structure uses N-type crystalline silicon as the core substrate. On the front side, intrinsic amorphous silicon thin films and P-type amorphous silicon thin films are deposited sequentially to form a PN junction, while on the back side, intrinsic amorphous silicon thin films and N-type amorphous silicon thin films are deposited sequentially to construct the back surface field. This structural design places extremely high demands on the surface quality of the silicon substrate.

[0003] In the fabrication of heterojunction solar cells, silicon wafers typically undergo multiple processes, including initial polishing, gettering, texturing and cleaning, CVD coating, PVD coating, and screen printing. The texturing process, in particular, involves a series of steps such as cleaning, texture preparation, removal of surface contaminants and foreign matter, removal of metallic impurities, and elimination of mechanical damage layers, ultimately resulting in a clean silicon wafer with a uniform and stable textured structure. Since the silicon wafer substrate surface directly constitutes a crucial component of the heterojunction interface, any surface defects or impurities can lead to an increased carrier recombination rate at the junction interface, severely impacting the cell's photoelectric conversion efficiency. Therefore, ultra-high surface cleanliness and a uniform and stable textured structure are prerequisites for ensuring a good match between subsequent coating processes and the silicon wafer, ultimately achieving high-performance cells.

[0004] In related technologies, to maintain the high cleanliness of silicon wafers, drying tanks are often used to dry them, removing water and impurities adsorbed on the surface. However, in actual drying processes, after entering the drying tank, silicon wafers are often directly exposed to a single or rapidly changing high-temperature environment. This can lead to uneven heating of the silicon wafers and may damage them, resulting in problems such as cracking, microcracks, or surface defects. Utility Model Content

[0005] Therefore, it is necessary to provide a drying device to address the problems of uneven heating, damage, and defects that may occur during the silicon wafer drying process.

[0006] A drying apparatus, the drying apparatus comprising:

[0007] A housing having a drying chamber inside;

[0008] A heating mechanism, comprising a plurality of heating components, wherein the plurality of heating components are sequentially arranged within the drying chamber along a first direction;

[0009] A transmission mechanism is disposed within the drying chamber and is configured to drive the workpiece to be dried to move along the first direction.

[0010] In one embodiment, the heating temperature of the plurality of heating elements varies in a gradient along the first direction.

[0011] In one embodiment, a water collection plate is provided inside the housing, the water collection plate is located at the bottom of the transmission mechanism, and the width of the water collection plate gradually decreases towards the transmission mechanism.

[0012] In one embodiment, the water collection plate is provided with ventilation holes, and the heating component is located at the bottom of the water collection plate. The heating component is a heating blower.

[0013] In one embodiment, the drying device further includes a blower mechanism, which includes a plurality of blower components. The plurality of blower components are sequentially arranged in the drying chamber along the first direction, and the blower components are arranged in a one-to-one correspondence with the heating component.

[0014] In one embodiment, the blowing assembly includes a first blowing element and a second blowing element, the first blowing element and the second blowing element are respectively disposed on both sides of the drying chamber, and the first blowing element and the second blowing element blow air in opposite directions.

[0015] In one embodiment, the drying device further includes a plurality of temperature sensing components, which are sequentially arranged in the drying chamber along the first direction, and the temperature sensing components are arranged in a one-to-one correspondence with the blowing assembly.

[0016] In one embodiment, the housing is provided with an air inlet and an air outlet communicating with the drying chamber;

[0017] The drying device further includes a ventilation mechanism, which includes an air inlet pipe, an air outlet pipe, and a filter assembly. The air inlet pipe is connected to the air inlet, the air outlet pipe is connected to the air outlet, and the filter assembly is disposed on the air inlet pipe.

[0018] In one embodiment, the filtration assembly includes a particulate filter, an ozone filter, and a fan filter unit, wherein the particulate filter, the ozone filter, and the fan filter unit are sequentially arranged on the air inlet duct along the air inlet direction.

[0019] In one embodiment, the housing includes a drying body and an isolation door, the isolation door being sealed to an end of the drying body and forming the drying chamber; and / or

[0020] The transmission mechanism includes a lead screw structure and a displacement sensor. The lead screw structure and the displacement sensor are disposed in the drying chamber. The lead screw structure extends along the first direction and is configured to drive the workpiece to be dried to move along the first direction. The displacement sensor is configured to detect the position of the workpiece to be dried.

[0021] The aforementioned drying device, through a transmission mechanism, drives the workpiece to be dried along a first direction, sequentially passing it through multiple heating elements. This enables continuous drying of the workpiece within the drying chamber, avoiding the problems of localized overheating or uneven drying that can occur in traditional drying methods where the workpiece is stationary under a single heating environment. Simultaneously, by sequentially arranging multiple heating elements, the heating temperature of each element can be controlled, allowing the temperature within the drying chamber to gradually increase or decrease along the first direction. This prevents damage to the workpiece due to sudden temperature changes and improves the stability of the drying process. Furthermore, the cooperation between multiple heating elements and the transmission mechanism ensures that the workpiece completes the entire drying process within the drying chamber, eliminating the need for multiple transfers during the drying process. This reduces the risk of breakage and minimizes surface contamination of the workpiece. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a drying apparatus according to an embodiment of this application.

[0023] Figure 2 This is a cross-sectional structural schematic diagram of a water collection plate according to an embodiment of this application.

[0024] Figure 3 This is a cross-sectional structural schematic diagram of a water collection plate according to another embodiment of this application.

[0025] Icon labels:

[0026] 10. Drying device; 20. Parts to be dried;

[0027] 100. Shell; 110. Drying chamber; 120. Water collection plate; 121. Ventilation hole; 130. Drying body; 140. Isolation door;

[0028] 200. Heating mechanism; 210. Heating component;

[0029] 300. Transmission mechanism;

[0030] 400. Blowering mechanism; 410. Blowering assembly; 411. First blower component; 412. Second blower component;

[0031] 500. Temperature sensing components;

[0032] 610. Air inlet duct; 620. Air outlet duct; 631. Particulate matter filter; 632. Ozone filter; 633. Fan filter unit; 640. Ventilation duct; 650. Check valve. Detailed Implementation

[0033] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0034] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0035] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0036] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0037] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0038] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0039] See Figure 1 As shown, a schematic diagram of the structure of a drying device 10 in one embodiment of this application is shown. The drying device 10 provided in one embodiment of this application includes a housing 100, a heating mechanism 200 and a transmission mechanism 300. The drying device 10 is used to dry the workpiece 20 to be dried, for example, the workpiece 20 to be dried can be a heterojunction solar cell silicon wafer.

[0040] The housing 100 has a drying chamber 110 formed inside for drying operations, providing a closed space for the drying process and reducing interference from the external environment. In some embodiments, the housing 100 includes a drying body 130 and an isolation door 140. The drying body 130 has a hollow rectangular frame structure, and the isolation door 140 is sealed to the end of the drying body 130. For example, a sealing strip is provided at the connection between the isolation door 140 and the drying body 130, separating the drying chamber 110 enclosed by the isolation door 140 and the drying body 130 from the external environment. Therefore, the drying chamber 110 has good airtightness, preventing external contaminants from entering the drying chamber 110, ensuring the cleanliness of the drying environment, and reducing heat loss within the drying chamber 110.

[0041] The heating mechanism 200 includes multiple heating elements 210, which are sequentially arranged within the drying chamber 110 along a first direction, thereby forming multiple heating zones distributed along the first direction within the drying chamber 110. The first direction is the direction of movement of the workpiece 20 to be dried, which is also the length direction of the drying device 10. Figure 1 The first direction is X.

[0042] A transmission mechanism 300 is disposed within the drying chamber 110. The transmission mechanism 300 is configured to drive the workpiece 20 to be dried 20 along a first direction, enabling the workpiece 20 to sequentially pass through the heating areas where multiple heating components 210 are located. In some embodiments, the transmission mechanism 300 includes a lead screw structure and a displacement sensor. The lead screw structure and displacement sensor are disposed within the drying chamber 110. The lead screw structure extends along the first direction and is configured to drive the workpiece 20 to be dried 20 along the first direction. The displacement sensor is configured to detect the position of the workpiece 20. Exemplarily, the lead screw structure can be a combination of a servo motor and a planetary reducer, paired with a high-precision ball screw (C3 grade). The displacement sensor uses an infrared photoelectric through-beam sensor to ensure transmission accuracy. Thus, the lead screw structure can drive the workpiece 20 to be dried through each heating area according to a preset trajectory and speed, while the displacement sensor monitors the position of the workpiece 20 in real time, facilitating precise transmission of the workpiece 20 and improving the drying effect.

[0043] The drying device 10 provided in this embodiment drives the workpiece 20 to be dried along a first direction via a transmission mechanism 300, passing it sequentially through multiple heating elements 210. This enables continuous drying of the workpiece 20 within the drying chamber 110, avoiding the problems of localized overheating or uneven drying that may occur when the workpiece 20 is stationary in a single heating environment in traditional drying methods. Simultaneously, by sequentially arranging multiple heating elements 210, the heating temperature of different heating elements 210 can be adjusted, allowing the temperature within the drying chamber 110 to gradually increase or decrease along the first direction. This avoids damage to the workpiece 20 caused by sudden temperature changes, improving the stability of the drying process. Furthermore, the cooperation of multiple heating elements 210 with the transmission mechanism 300 allows the workpiece 20 to complete the entire drying process within the drying chamber 110, eliminating the need for multiple transfers during the drying process. This reduces the risk of breakage and minimizes surface contamination of the workpiece 20.

[0044] Furthermore, in some embodiments, the heating temperatures of the plurality of heating elements 210 vary gradually along the first direction. Specifically, the heating temperatures of the plurality of heating elements 210 can gradually increase from a low temperature along the movement direction of the workpiece 20 to be dried, or can be set to other reasonable gradient change forms according to the drying requirements of the workpiece 20 to be dried, such as first slowly increasing and then maintaining a stable temperature. For example, as... Figure 1The drying device 10 shown has seven heating elements 210, dividing the temperature within the drying chamber 110 into seven gradients: 40℃→50℃→60℃→70℃→80℃→95℃→110℃ (adjacent temperature differences ≤15℃). The 40-60℃ range is the pretreatment zone, the 70-80℃ range is the crystallization zone, and the 95℃-110℃ range is the shaping zone. This temperature gradient allows the workpiece 20 to gradually adapt to the temperature changes during its movement, thereby reducing the impact energy of temperature on the workpiece 20, improving its defect rate, and shortening the drying time.

[0045] It should be understood that the number of heating elements 210 is not limited to the above example. In other alternative embodiments, the number of heating elements 210 may also be two, three, four, five, six, eight, nine, etc.

[0046] Furthermore, in some embodiments, a water collecting plate 120 is provided inside the housing 100. The water collecting plate 120 is located at the bottom of the transmission mechanism 300, and the width of the water collecting plate 120 gradually decreases towards the transmission mechanism 300. Specifically, the water collecting plate 120 is generally narrower at the top and wider at the bottom. The width of the water collecting plate 120 is smaller on the side closer to the transmission mechanism 300, i.e., the top of the water collecting plate 120, and larger on the side farther from the transmission mechanism 300, i.e., the bottom of the water collecting plate 120. For example, see... Figure 2 As shown, the water collection plate 120 is a V-shaped plate, with the width of the V-shape gradually decreasing from bottom to top to facilitate the dispersion of water flow. See also, for example, [reference needed]. Figure 3 As shown, the water collection plate 120 is an arched plate with its arc surface protruding upwards, causing the width of the arched plate to gradually decrease from bottom to top. When the part to be dried 20 is a silicon wafer, the silicon wafer is fixed to the transmission mechanism 300 by a basket and moves with the transmission mechanism 300. When the silicon wafer first enters the drying chamber 110, the water it carries will drip onto the water collection plate 120 and flow along both sides of the water collection plate 120, facilitating the centralized collection and treatment of water.

[0047] See Figures 1 to 3 As shown, in some embodiments, ventilation holes 121 are provided through the water collection plate 120, and the ventilation holes 121 are evenly distributed on the water collection plate 120. The heating component 210 is disposed at the bottom of the water collection plate 120, and the heating component 210 is a heating blower. After the heating blower is started, the hot air generated can be transferred upward through the ventilation holes 121 to the workpiece 20 to be dried on the transmission mechanism 300, thereby effectively drying the workpiece 20 to be dried.

[0048] Further, see Figure 1As shown, in some embodiments, the drying device 10 further includes a blowing mechanism 400, which includes multiple blowing assemblies 410. These blowing assemblies 410 are sequentially arranged within the drying chamber 110 along a first direction, and each blowing assembly 410 corresponds to a heating element 210. Specifically, the number of blowing assemblies 410 is the same as the number of heating elements 210, with one blowing assembly 410 arranged within the heating area formed by each heating element 210. Therefore, the heat generated by the heating element 210 can be more evenly diffused to the area where the workpiece 20 is located under the blowing action of the blowing assembly 410. This allows for better control of the temperature of the drying chamber 110 as a whole and in a specific area, preventing localized heat accumulation, improving temperature uniformity, and facilitating gradient temperature control. Simultaneously, the gas flow accelerates the evaporation of moisture from the surface of the workpiece 20, improving drying efficiency and ensuring that the workpiece 20 receives sufficient and uniform drying treatment as it passes through each heating area, further enhancing the drying effect.

[0049] Continue reading Figure 1 As shown, in some embodiments, the blowing assembly 410 includes a first blowing element 411 and a second blowing element 412, which are respectively disposed on both sides of the drying chamber 110, and the first blowing element 411 and the second blowing element 412 blow air towards each other. Here, "blowing air towards each other" means that the first blowing element 411 blows air towards the second blowing element 412, while the second blowing element 412 blows air towards the first blowing element 411. For example, the first blowing element 411 and the second blowing element 412 can be fans, which are installed on the inner walls of both sides of the drying chamber 110. When the first blowing element 411 and the second blowing element 412 blow air towards each other, the temperature difference is reduced through forced convection, which helps to improve temperature uniformity and ensures that all parts of the component 20 to be dried are effectively dried, especially suitable for drying heterojunction solar cell silicon wafers with high requirements for surface uniformity.

[0050] Further, see Figure 1 As shown, in some embodiments, the drying apparatus 10 further includes a plurality of temperature sensing components 500, which are sequentially arranged in the drying chamber 110 along a first direction, and the temperature sensing components 500 are arranged in a one-to-one correspondence with the air blowing assembly 410. Specifically, a temperature sensing component 500 is provided in the heating area formed by each heating component 210, for example, two temperature sensing components 500 are provided in the heating area formed by each heating component 210, and the two temperature sensing components 500 are respectively arranged on both sides of the drying chamber 110. The temperature sensing component 500 can be a temperature sensor, used to detect the temperature of its area in real time, so as to adjust the drying temperature of each heating area, thereby improving the drying efficiency.

[0051] Furthermore, in some embodiments, the housing 100 is provided with an air inlet and an air outlet communicating with the drying chamber 110. The drying device 10 also includes a ventilation mechanism, which includes an air inlet duct 610, an air outlet duct 620, and a filter assembly. The air inlet duct 610 communicates with the air inlet, and the air outlet duct 620 communicates with the air outlet. A check valve 650 is provided on the air outlet duct 620. Specifically, see [reference needed]. Figure 1 As shown, the air inlet duct 610 and air outlet duct 620 of the ventilation mechanism are both connected to the ventilation duct 640. When air is supplied to the drying chamber 110, the ventilation duct 640 can be connected to an external air source, such as nitrogen or inert gas. When air is extracted from the drying chamber 110, the ventilation duct 640 can be connected to an external purification device or directly discharged. The ventilation mechanism can circulate and refresh the air in the drying chamber 110. The air inlet introduces external air through the air inlet duct 610, and the air outlet discharges the humid air from the drying chamber 110 through the air outlet duct 620, thereby maintaining the dryness of the air in the drying chamber 110, which is beneficial for the evaporation of moisture from the surface of the workpiece 20 to be dried and improves the drying efficiency.

[0052] Furthermore, the filter assembly is installed on the air inlet duct 610. The filter assembly can purify the incoming gas, optimize the air intake quality, and prevent pollutants in the external gas from entering the drying chamber 110 and contaminating the workpiece 20 to be dried. This helps to meet the cleanliness requirements of heterojunction solar cell silicon wafers.

[0053] In addition, in some embodiments, the ventilation mechanism may be configured with a blower, which is installed on the air inlet duct 610 or the air outlet duct 620 to accelerate the flow of gas in the air inlet duct 610, the drying chamber 110 and the air outlet duct 620, thereby improving ventilation efficiency.

[0054] Optionally, in some embodiments, the filtration assembly includes a particulate filter 631, an ozone filter 632, and a fan filter unit 633, which are sequentially arranged on the air inlet duct 610 along the air inlet direction. Specifically, see [reference needed]. Figure 1 As shown, after the gas enters the air inlet duct 610, it passes through the particulate filter 631, where particulate matter such as dust is removed, for example, to reduce the particulate matter content in the gas to <1 mg / m³. 3The air is then directed from the inlet duct 610 to the ozone filter 632, which can be an activated carbon filter, to reduce the ozone concentration. Next, the air is directed from the inlet duct 610 to the fan filter unit 633, also known as a laminar flow hood or air supply unit, where secondary filtration is performed to optimize the intake air quality. Thus, this filtration assembly reduces the particulate matter and ozone concentration within the drying chamber 110, improves the cleanliness of the drying chamber 110, enhances the intake air quality, and consequently improves the appearance of the silicon wafers being cut, enhances the quality of amorphous silicon deposition, and provides a clean environment for drying heterojunction solar cell silicon wafers.

[0055] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0056] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A drying apparatus (10), characterized in that, The drying device (10) includes: The housing (100) has a drying chamber (110) inside. A heating mechanism (200) includes a plurality of heating elements (210), which are arranged sequentially in the drying chamber (110) along a first direction (X); A transmission mechanism (300) is disposed in the drying chamber (110) and is configured to drive the workpiece (20) to be dried (20) to move along the first direction (X).

2. The drying apparatus (10) according to claim 1, characterized in that, The heating temperature of the plurality of heating elements (210) varies in a gradient along the first direction (X).

3. The drying apparatus (10) according to claim 1, characterized in that, The housing (100) is provided with a water collection plate (120), which is located at the bottom of the transmission mechanism (300), and the width of the water collection plate (120) gradually decreases toward the transmission mechanism (300).

4. The drying apparatus (10) according to claim 3, characterized in that, The water collection plate (120) is provided with ventilation holes (121), and the heating component (210) is located at the bottom of the water collection plate (120). The heating component (210) is a heating blower.

5. The drying apparatus (10) according to any one of claims 1-4, characterized in that, The drying device (10) further includes a blower mechanism (400), which includes a plurality of blower components (410). The plurality of blower components (410) are arranged sequentially in the drying chamber (110) along the first direction (X), and the blower components (410) are arranged in a one-to-one correspondence with the heating component (210).

6. The drying apparatus (10) according to claim 5, characterized in that, The blowing assembly (410) includes a first blowing element (411) and a second blowing element (412), the first blowing element (411) and the second blowing element (412) are respectively disposed on both sides of the drying chamber (110), and the first blowing element (411) and the second blowing element (412) blow air towards each other.

7. The drying apparatus (10) according to claim 5, characterized in that, The drying device (10) further includes a plurality of temperature sensing components (500), which are arranged sequentially in the drying chamber (110) along the first direction (X), and the temperature sensing components (500) are arranged in a one-to-one correspondence with the blowing assembly (410).

8. The drying apparatus (10) according to any one of claims 1-4, characterized in that, The housing (100) is provided with an air inlet and an air outlet that communicate with the drying chamber (110); The drying device (10) further includes a ventilation mechanism, which includes an air inlet pipe (610), an air outlet pipe (620), and a filter assembly. The air inlet pipe (610) is connected to the air inlet, the air outlet pipe (620) is connected to the air outlet, and the filter assembly is disposed on the air inlet pipe (610).

9. The drying apparatus (10) according to claim 8, characterized in that, The filtration assembly includes a particulate filter (631), an ozone filter (632), and a fan filter unit (633), which are arranged sequentially on the air inlet duct (610) along the air inlet direction.

10. The drying apparatus (10) according to claim 1, characterized in that, The housing (100) includes a drying body (130) and an isolation door (140), the isolation door (140) being sealed to the end of the drying body (130) and forming the drying chamber (110); and / or The transmission mechanism (300) includes a lead screw structure and a displacement sensor. The lead screw structure and the displacement sensor are disposed in the drying chamber (110). The lead screw structure extends along the first direction (X) and is configured to drive the workpiece (20) to be dried (20) to move along the first direction (X). The displacement sensor is configured to detect the position of the workpiece (20) to be dried.

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