A silicon charge cleaning basket
Patent Information
- Application Number
- CN202521295562.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-06
- Publication Date
- 2026-10-27
- Estimated Expiration
- 2036-07-06
AI Technical Summary
[0002]现有的硅片清洗花篮只能静放硅片,由于要避免清洗时硅片粘黏在一起,清洗篮中都设置有隔片将硅片隔开,由于硅片静止不动,硅片与清洗篮的接触点就可能无法清洗到,尤其是硅片的底部、与隔片贴合的位置,影响清洗效果
[0009]本实用新型的有益效果为:将硅片对准限位槽并放置在转动拖杆以及挡杆之间,将清洗篮放入清洗槽后,动力机构可以驱动转动拖杆转动,从而带动硅片转动,让硅片的每个部位都能被有效清洗,消除了清洗死角,保证了清洗效果。
Smart Images

Figure CN224910080U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of silicon material cleaning equipment, and in particular to a silicon material cleaning basket. Background Technology
[0002] Existing silicon wafer cleaning baskets can only hold silicon wafers stationary. In order to prevent the silicon wafers from sticking together during cleaning, the cleaning baskets are equipped with partitions to separate the silicon wafers. Since the silicon wafers are stationary, the contact points between the silicon wafers and the cleaning baskets may not be cleaned, especially the bottom of the silicon wafers and the parts that are in contact with the partitions, which affects the cleaning effect. Utility Model Content
[0003] To address the problems mentioned in the background art, the purpose of this utility model is to provide a silicon material cleaning basket.
[0004] To achieve the above objectives, the technical solution of this utility model is as follows:
[0005] A silicon material cleaning basket includes two parallel end plates arranged longitudinally. Each end plate has a lifting ring at its top. Two baffles are horizontally spaced between the two end plates. Two rotating drag rods are rotatably mounted below the baffles between the two end plates. The baffles and the rotating drag rods are arranged in a semi-circular pattern. Several annular limiting grooves are axially arranged on the outer circumference of each rotating drag rod and baffle. Both ends of the rotating drag rods extend axially beyond the two end plates. Friction wheels are fixedly connected to the ends of the rotating drag rods. A power mechanism for driving the friction wheels to rotate is installed at the bottom of a cleaning tank that is compatible with the silicon material cleaning basket.
[0006] Furthermore, the power mechanism includes a motor, a drive shaft, and drive wheels. The drive shaft is rotatably mounted laterally at the bottom of the cleaning tank. Two drive wheels are fixedly sleeved on the drive shaft. The motor is installed outside the cleaning tank and is connected to the drive shaft for transmission. When the hoisting mechanism puts the silicon material cleaning basket into the cleaning tank, the two drive wheels are respectively placed between two pairs of friction wheels.
[0007] Furthermore, the outer circumferential surfaces of both the friction wheel and the drive wheel are rough, anti-slip surfaces.
[0008] Furthermore, the stop bar is rotatably connected to the end plate.
[0009] The beneficial effects of this utility model are as follows: the silicon wafer is aligned with the limiting groove and placed between the rotating drag bar and the stop bar. After the cleaning basket is placed into the cleaning tank, the power mechanism can drive the rotating drag bar to rotate, thereby driving the silicon wafer to rotate, so that every part of the silicon wafer can be effectively cleaned, eliminating cleaning dead corners and ensuring the cleaning effect. Attached Figure Description
[0010] Figure 1 This is a perspective view of the cleaning basket in an embodiment of the present invention;
[0011] Figure 2 This is a schematic diagram showing the use of a silicon material cleaning basket and a cleaning tank.
[0012] Explanation of the attached drawing numbers: 1. End plate, 11. Lifting ring, 2. Stop bar, 3. Rotating drag bar, 4. Limiting groove, 5. Friction wheel, 6. Cleaning tank, 7. Drive shaft, 8. Drive wheel, 9. Motor, 10. Lifting mechanism, 110. Silicon wafer. Detailed Implementation
[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.
[0014] like Figures 1-2 As shown, a silicon material cleaning basket includes two parallel end plates 1, which are arranged longitudinally. A lifting ring 11 is provided at the top of each end plate 1. Two baffles 2 are horizontally spaced between the upper parts of the two end plates 1, and the baffles 2 are rotatably connected to a short plate. Two rotating drag rods 3 are rotatably installed between the two end plates 1 below the baffles 2. The two baffles 2 and the two rotating drag rods 3 are arranged in a semi-circular pattern. Several annular limiting grooves 4 are axially arranged on the outer circumferential surfaces of the rotating drag rods 3 and the baffles 2. The two ends of the axial direction extend beyond the two end plates 1 respectively. The end of the rotating drag bar 3 is fixedly connected to a friction wheel 5. The bottom of the cleaning tank 6, which is matched with the silicon material cleaning basket, is horizontally provided with a drive shaft 7. The drive shaft 7 is connected to the side wall of the cleaning tank 6 through a waterproof bearing. Two drive wheels 8 are fixedly sleeved on the drive shaft 7. A motor 9 is horizontally installed on the outside of the cleaning tank 6. The motor 9 is connected to the drive shaft 7. When the hoisting mechanism 10 puts the silicon material cleaning basket into the cleaning tank 6, the two drive wheels 8 are respectively placed between the two pairs of friction wheels 5.
[0015] In actual use, the silicon wafer 110 is aligned with the limiting groove 4 and placed between the rotating drag rod 3 and the stop rod 2. After the cleaning basket is placed into the cleaning tank 6, the motor 9 is turned on to drive the rotating drag rod 3 to rotate, thereby driving the silicon wafer 110 to rotate. This ensures that every part of the silicon wafer 110 can be effectively cleaned, avoiding cleaning dead corners and ensuring the cleaning effect.
[0016] In this embodiment, the outer circumferential surfaces of both the friction wheel 5 and the drive wheel 8 are rough anti-slip surfaces to prevent the friction wheel 5 from slipping relative to the drive wheel 8 and to ensure the transmission effect.
[0017] In this embodiment, the stop bar 2 is rotatably connected to the end plate 1 to avoid excessive friction between the silicon wafer 110 and the stop bar 2.
[0018] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A silicon material cleaning basket, comprising two parallel end plates (1), the end plates (1) being arranged longitudinally, and a lifting ring (11) being provided at the top of the end plates (1), characterized in that, Two baffles (2) are installed horizontally between the two end plates (1). Two rotating rods (3) are rotatably installed below the two baffles (2) between the two end plates (1). The two baffles (2) and the two rotating rods (3) are arranged in a semi-circular pattern. Several annular limiting grooves (4) are axially arranged on the outer circumferential surfaces of the rotating rods (3) and the baffles (2). The two ends of the rotating rods (3) extend axially beyond the two end plates (1). Friction wheels (5) are fixedly connected to the ends of the rotating rods (3). A power mechanism for driving the friction wheels (5) to rotate is installed at the bottom of the cleaning tank (6) that is matched with the silicon cleaning basket.
2. The silicon material cleaning basket according to claim 1, characterized in that, The power mechanism includes a motor (9), a transmission shaft (7), and a drive wheel (8). The transmission shaft (7) is rotatably mounted on the bottom of the cleaning tank (6). Two drive wheels (8) are fixedly sleeved on the transmission shaft (7). The motor (9) is installed outside the cleaning tank (6) and is connected to the transmission shaft (7) for transmission. When the hoisting mechanism (10) puts the silicon material cleaning basket into the cleaning tank (6), the two drive wheels (8) are respectively placed between two pairs of friction wheels (5).
3. The silicon material cleaning basket according to claim 2, characterized in that, The outer circumferential surfaces of the friction wheel (5) and the drive wheel (8) are both rough anti-slip surfaces.
4. A silicon material cleaning basket according to claim 1, characterized in that, The stop bar (2) is rotatably connected to the end plate (1).