Lift wafer rack facilitating wafer stacking

Abstract

The utility model discloses a kind of lifting wafer racks facilitating wafer stacking, it is related to semiconductor wafer technical field, wherein, lifting wafer rack facilitating wafer stacking includes rack, lifting structure, support and plug-in board, lifting block in lifting structure is slidably installed on the lifting frame of connecting rack, support is fixed in lifting block, plug-in board is equipped with plug-in slot, its both sides are respectively equipped with mutually adapted first plug-in part and second plug-in part, extension direction is consistent with plug-in slot opening, so that multiple plug-in boards can be modularized stacked along vertical direction, support is equipped with the third plug-in part adapted with first plug-in part, for installing the plug-in board of bottom layer. Entire plug-in board group is lifted uniformly by lifting structure drive, so that mechanical arm only needs to calibrate one fixed position to carry out the plug-in operation of all wafers, efficiency is improved, the modularized stacking design of plug-in board can be flexibly adjusted capacity according to need, different production batch needs are adapted.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer technology, and in particular to a lifting wafer rack that facilitates wafer stacking. Background Technology

[0002] In the semiconductor manufacturing industry, wafers are the substrates for manufacturing integrated circuits. During production, inspection, transportation, and storage, wafers are typically placed in dedicated wafer racks. Traditional wafer racks usually have a series of slots at a fixed height, which are used to horizontally support and isolate multiple wafers.

[0003] However, this fixed wafer rack has the following significant drawbacks in practical applications: Because the height of each slot is fixed and varies, whether operated manually or using a robotic arm, each time a wafer is inserted or removed, it needs to be realigned with the specific spatial height of the current slot. This process requires frequent adjustments to the Z-axis position of the robotic arm, resulting in a complex and time-consuming operation. It also places higher demands on the motion control and positioning accuracy of automated equipment, reducing production efficiency. The total number of slots in a traditional wafer rack is determined during manufacturing and cannot be flexibly adjusted according to actual needs. When the number of wafers to be stored is less than the total number of slots, slots become empty, leading to a waste of equipment space and resources. Conversely, when the number of wafers exceeds the slot capacity, the excess wafers cannot be accommodated, requiring replacement or the use of another wafer rack. This lack of flexibility makes it difficult to adapt to dynamically changing production batches. Utility Model Content

[0004] The main purpose of this invention is to provide a lifting wafer rack that facilitates wafer stacking, which aims to make it easier to place wafers.

[0005] To achieve the above objectives, the present invention proposes a lifting wafer rack for facilitating wafer stacking, comprising: frame; A lifting structure, comprising a lifting block and a lifting frame, wherein the lifting frame is fixedly connected to the frame and the lifting block is slidably connected to the lifting frame; The bracket is fixedly connected to the lifting block; A plug-in plate is provided with a plug-in slot. The plug-in plate has a first plug-in part and a second plug-in part on opposite sides. The extension direction of the first plug-in part and the second plug-in part are consistent with the opening direction of the plug-in slot. The cross-sectional shape of the first plug-in part and the cross-sectional shape of the second plug-in part are adapted to each other for plugging into another plug-in plate and preventing the other plug-in plate from moving in a direction perpendicular to the opening direction of the plug-in slot. The bracket is provided with a third plug-in portion that is adapted to the first plug-in portion for plugging in the plug-in plate.

[0006] In one embodiment, the first insertion part is a limiting groove, and the second insertion part is a limiting slide bar; The extending direction of the limiting slide groove is consistent with the opening direction of the insertion groove, and the extending direction of the limiting slide bar is consistent with the opening direction of the insertion groove. Furthermore, the cross-sectional shape of the limiting groove is fitted with the cross-sectional shape of the limiting slide bar.

[0007] In one embodiment, the first insertion part is a limiting slide bar, and the second insertion part is a limiting slide groove; The extending direction of the limiting slide bar is consistent with the opening direction of the insertion groove, and the extending direction of the limiting slide groove is consistent with the opening direction of the insertion groove. Furthermore, the cross-sectional shape of the limiting groove is fitted with the cross-sectional shape of the limiting slide bar.

[0008] In one embodiment, the plug plate is provided with two limiting grooves, which are respectively located on opposite sides of the plug groove; The plug plate is provided with two limiting slides, which are located on opposite sides of the plug slot.

[0009] In one embodiment, the cross-section of both the limiting groove and the limiting slide are T-shaped.

[0010] In one embodiment, the lifting frame includes a drive motor, a lead screw, and a limiting rod, wherein the drive end of the drive motor is fixedly connected to the lead screw, and the lifting block is threadedly connected to the lead screw; The limiting rod and the lead screw are parallel, and the lifting block is slidably connected to the limiting rod.

[0011] In one embodiment, the support includes a back plate and a base plate that are fixedly connected to each other, and the back plate and the lifting block are fixedly connected. The end of the plug plate facing away from the plug slot opening abuts against the back plate; The base plate is provided with the third insertion part.

[0012] In one embodiment, the frame is rotatably connected to an abutment rod, the extension direction of the abutment rod is parallel to the movement direction of the lifting structure, and the rotation axis of the abutment rod and the axis of the abutment rod are eccentrically arranged so that the abutment rod is close to or away from the plug-in plate; The side wall of the plug plate is provided with an abutment notch corresponding to the abutment rod. When the abutment rod abuts against the abutment notch, it prevents the plug plate from moving along the opening direction of the plug groove.

[0013] In one embodiment, the frame is rotatably connected to two abutment rods, which are located on opposite sides of the plug plate.

[0014] In one embodiment, a damping element is provided at the connection between the abutment rod and the frame to limit the rotation of the abutment rod relative to the frame.

[0015] The technical solution of this utility model uses a support driven by the lifting structure, which allows multiple insertion plates to be lifted as a whole. The robotic arm or operator only needs to calibrate a fixed spatial coordinate to complete the insertion operation of all wafers. Each time a wafer is inserted, the lifting structure drives the support to move one slot distance, accurately positioning the next empty insertion slot to the fixed coordinate point. This completely avoids the problem of repeatedly positioning each slot at different heights in the traditional method, significantly improving insertion efficiency and facilitating fully automated operation. The insertion plates adopt a modular design, and multiple insertion plates can be flexibly stacked according to actual needs through the interlocking of the first insertion part and the second insertion part, thereby quickly and conveniently adjusting the total number of slots to adapt to different production batch sizes. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0017] Figure 1 A schematic diagram of an embodiment of the lifting wafer rack for easy wafer stacking provided by this utility model; Figure 2 This is a schematic diagram of the plug-in board structure; Figure 3 This is a schematic diagram of the assembly structure of the frame and support; Figure 4 This is a schematic diagram of the lifting wafer rack provided by this utility model for facilitating wafer stacking during the lifting process.

[0018] Explanation of icon numbers: 1. Frame; 11. Side plate; 2. Lifting structure; 21. Lifting block; 22. Lifting frame; 221. Drive motor; 222. Lead screw; 223. Limiting rod; 3. Bracket; 31. Back plate; 32. Base plate; 33. Third insertion part; 4. Insertion plate; 41. Insertion slot; 42. First insertion part; 43. Second insertion part; 44. Abutment notch; 45. Empty part; 5. Abutment rod.

[0019] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0021] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0022] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0023] In the semiconductor manufacturing industry, wafers are the substrates for manufacturing integrated circuits. During production, inspection, transportation, and storage, wafers are typically placed in dedicated wafer racks. Traditional wafer racks usually have a series of slots at a fixed height, which are used to horizontally support and isolate multiple wafers.

[0024] However, this fixed wafer rack has the following significant drawbacks in practical applications: Because the height of each slot is fixed and varies, whether operated manually or using a robotic arm, each time a wafer is inserted or removed, it needs to be realigned with the specific spatial height of the current slot. This process requires frequent adjustments to the Z-axis position of the robotic arm, resulting in a complex and time-consuming operation. It also places higher demands on the motion control and positioning accuracy of automated equipment, reducing production efficiency. The total number of slots in a traditional wafer rack is determined during manufacturing and cannot be flexibly adjusted according to actual needs. When the number of wafers to be stored is less than the total number of slots, slots become empty, leading to a waste of equipment space and resources. Conversely, when the number of wafers exceeds the slot capacity, the excess wafers cannot be accommodated, requiring replacement or the use of another wafer rack. This lack of flexibility makes it difficult to adapt to dynamically changing production batches.

[0025] This invention proposes a lifting wafer rack that facilitates wafer stacking.

[0026] Please see Figures 1 to 4 In one embodiment of this utility model, the lifting wafer rack that facilitates wafer stacking includes: Rack 1; The lifting structure 2 includes a lifting block 21 and a lifting frame 22. The lifting frame 22 is fixedly connected to the frame 1, and the lifting block 21 is slidably connected to the lifting frame 22. Support 3, which is fixedly connected to the lifting block 21; The plug-in plate 4 has a plug-in groove 41. The plug-in plate 4 has a first plug-in part 42 and a second plug-in part 43 on opposite sides. The extension direction of the first plug-in part 42 and the second plug-in part 43 is consistent with the opening direction of the plug-in groove 41. The cross-sectional shape of the first plug-in part 42 and the cross-sectional shape of the second plug-in part 43 are adapted to each other for plugging into another plug-in plate 4 and preventing the other plug-in plate 4 from moving in a direction perpendicular to the opening direction of the plug-in groove 41. The bracket 3 is provided with a third plug-in portion 33 that is adapted to the first plug-in portion 42 for plugging in the plug-in plate 4; The technical solution of this utility model allows the support 3 driven by the lifting structure 2 to lift multiple insertion plates 4 as a whole. The robotic arm or operator only needs to calibrate a fixed spatial coordinate to complete the insertion operation of all wafers. Each time a wafer is inserted, the lifting structure 2 drives the support 3 to move one slot distance, accurately positioning the next empty insertion slot 41 to the fixed coordinate point. This completely avoids the problem of repeated positioning for each slot of different height in the traditional method, significantly improving insertion efficiency and facilitating fully automated operation. The insertion plate 4 adopts a modular design, and the first insertion part 42 and the second insertion part 43 are interlocked. Multiple insertion plates 4 can be flexibly stacked according to actual needs, thereby quickly and conveniently adjusting the total number of slots to adapt to different production batches.

[0027] It is understood that the cross-sectional shapes of the first insertion part 42 and the second insertion part 43 are adapted to each other, and after insertion, they can prevent the other insertion plate 4 from moving in a direction perpendicular to the opening direction of the insertion slot 41. This ensures that multiple insertion plates 4 form a stable structure with good integrity after being stacked, ensuring the relative positional accuracy of all insertion slots 41, and providing a guarantee for the stable and safe placement of the wafer. At the same time, the third insertion part 33 on the support 3 is adapted to the first insertion part 42 of the insertion plate 4, ensuring that the bottommost insertion plate 4 can also be reliably connected and accurately positioned with the support 3.

[0028] For ease of understanding, the opening direction of the insertion slot 41 is defined as forward, the side opposite to the opening direction of the insertion slot 41 is defined as backward, the side of the insertion plate 4 facing the third insertion part 33 is defined as downward, and the side of the insertion plate 4 away from the third insertion part 33 is defined as upward. The above directional indications are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0029] In one embodiment, such as Figure 2 As shown, the first insertion part 42 is a limiting slide groove, and the second insertion part 43 is a limiting slide bar; The extending direction of the limiting slide groove is consistent with the opening direction of the insertion groove 41, and the extending direction of the limiting slide bar is consistent with the opening direction of the insertion groove 41. Furthermore, the cross-sectional shape of the limiting groove is fitted with the cross-sectional shape of the limiting slide bar.

[0030] Understandably, the insertion of the limiting slide bar along the limiting groove inherently provides guidance, enabling adjacent plug-in plates 4 to align quickly and accurately during stacking and assembly, without the need for additional connectors, resulting in a compact overall structure and space-saving design. Simultaneously, the surface contact between the limiting slide bar and the limiting groove effectively distributes and bears the load resulting from the increased number of stacked layers, ensuring the structure's load-bearing capacity.

[0031] like Figure 1 As shown, when it is necessary to add the plug-in plate 4, simply insert another plug-in plate 4 on the original topmost plug-in plate 4; similarly, when it is necessary to remove the plug-in plate 4, push the topmost plug-in plate 4 forward from top to bottom.

[0032] In another embodiment, the first insertion part 42 is a limiting slide bar, and the second insertion part 43 is a limiting slide groove; The extending direction of the limiting slide bar is consistent with the opening direction of the insertion groove 41, and the extending direction of the limiting slide groove is consistent with the opening direction of the insertion groove 41. Furthermore, the cross-sectional shape of the limiting groove is fitted with the cross-sectional shape of the limiting slide bar.

[0033] It is understood that regardless of whether the first plug-in part 42 is a limiting slide bar or a limiting slide groove, as long as the type of the first plug-in part 42 is opposite to the type of the second plug-in part 43, stacking locking can be achieved, which will not be discussed again here.

[0034] It is understandable that, such as Figure 2 and Figure 3 As shown, the type of the third plug-in part 33 is opposite to that of the first plug-in part 42, that is, the type of the third plug-in part 33 is the same as that of the second plug-in part 43. For example, when the first plug-in part 42 is a limiting slide bar, the third plug-in part 33 is in the form of a sliding groove, and the cross-sectional size and shape are adapted to each other with the cross-sectional size and shape of the first plug-in part 42; the same applies when the first plug-in groove 41 is a limiting sliding groove.

[0035] like Figure 2 As shown, the plug plate 4 is provided with two limiting slide grooves, which are located on opposite sides of the plug groove 41. The plug plate 4 is provided with two limiting slides, which are located on opposite sides of the plug groove 41.

[0036] It is understandable that the cooperation of the two limiting slides and the two limiting slides provides two precise guide paths for the plug-in plate 4, ensuring that the adjacent plug-in plates 4 can only move in the front-back direction when stacked, avoiding assembly jamming or increased frictional resistance caused by slight deflection due to single-point guidance, making the modular stacking and disassembly process smoother and more precise.

[0037] Optionally, the cross-section of the limiting groove and the cross-section of the limiting slide are both T-shaped.

[0038] It is understood that the T-shaped limiting slide bar, with its head forming a mechanical interlock after engagement, ensures that when the stacked plug-in plates 4 are subjected to a force perpendicular to the insertion direction, the limiting slide bar is firmly locked in the limiting groove, effectively preventing accidental loosening or separation between the plug-in plates 4, and greatly enhancing the integrity and reliability of the modular stack.

[0039] Optionally, the cross-section of the limiting groove and the cross-section of the limiting slide are both dovetail-shaped.

[0040] Optionally, the lifting frame 22 includes a drive motor 221, a lead screw 222 and a limiting rod 223. The drive end of the drive motor 221 is fixedly connected to the lead screw 222, and the lifting block 21 is threadedly connected to the lead screw 222. The limiting rod 223 and the lead screw 222 are parallel, and the lifting block 21 is slidably connected to the limiting rod 223.

[0041] It is understood that the fixed rotation angle of the drive motor 221 can be precisely converted into a tiny linear displacement of the lifting block 21, thereby achieving precise positioning of the four sets of insertion plates lifting one standard slot distance each time. This ensures the consistency between the fixed operating position of the robotic arm and the position of each new insertion slot 41, guaranteeing the accuracy and reliability of the insertion operation. The sliding connection between the limiting rod 223 and the lifting block 21 effectively restricts the degree of freedom of the lifting block 21 as it rotates with the lead screw 222, ensuring that it only performs pure vertical movement, avoiding swaying and wobble, and further improving the stability of the movement.

[0042] In some embodiments, there are two limiting rods 223, which are located on opposite sides of the lead screw 222.

[0043] like Figure 3 and Figure 4 As shown, the bracket 3 includes a back plate 31 and a base plate 32 that are fixedly connected to each other, and the back plate 31 and the lifting block 21 are fixedly connected. The end of the plug plate 4 facing away from the opening of the plug slot 41 abuts against the back plate 31; The base plate 32 is provided with the third insertion part 33.

[0044] It should be noted that the plug-in plate 4 abuts against the back plate 31, ensuring the consistency of the plug-in plates 4 at different heights in the front-back direction, that is, the longitudinal depth of all the plug-in slots 41 is uniform, ensuring the consistency of the positions of multiple plug-in plates 4; and the bottom plate 32 provides a supporting foundation for multiple plug-in plates 4.

[0045] Optionally, the frame 1 is rotatably connected to an abutment rod 5, the extension direction of the abutment rod 5 is parallel to the movement direction of the lifting structure 2, and the rotation axis of the abutment rod 5 and the axis of the abutment rod 5 are eccentrically set so that the abutment rod 5 is close to or away from the plug plate 4. The side wall of the plug plate 4 is provided with an abutment notch 44 corresponding to the abutment rod 5. When the abutment rod 5 abuts against the abutment notch 44, the plug plate 4 is prevented from moving along the opening direction of the plug groove 41.

[0046] Understandably, the first insertion part 42 and the second insertion part 43 restrict the movement of the plurality of insertion plates 4 to only the front-to-back direction, while the abutment rod 5 provides a simple and reliable mechanical locking mechanism. When it is necessary to fix the insertion plate 4, simply rotate the abutment rod 5, and its eccentric structure causes its radially protruding portion to press into the abutment notch 44 of the insertion plate 4, thereby restricting its movement from the side. This prevents the insertion plate 4 from accidentally slipping out, greatly improving the safety and reliability of equipment operation.

[0047] It is understandable that when a new connector plate 4 needs to be inserted, the abutment rod 5 can be flipped outwards without obstructing the connector plate 4. Furthermore, the abutment rod 5 can confirm whether the plurality of plug plates 4 are aligned. If they are not aligned, the abutment rod 5 cannot smoothly abut against the abutment notch 44.

[0048] Optionally, the frame 1 is rotatably connected to two abutment rods 5, which are located on opposite sides of the plug plate 4.

[0049] Optionally, a damping element is provided at the connection between the abutment rod 5 and the frame 1 to limit the rotation of the abutment rod 5 relative to the frame 1.

[0050] Understandably, the damping element provides continuous resistance to the rotation of the abutment rod 5, enabling the abutment rod 5 to maintain its position after rotation, preventing accidental or unintended rotation due to slight vibrations during equipment operation or its own gravity. This prevents the risk of the plug plate 4 failing to lock due to accidental loosening of the abutment rod 5, greatly enhancing the long-term reliability of the locking mechanism and the overall safety of the equipment.

[0051] It should be noted that the damping component is a rotary damper, and the abutment rod 5 is rotatably connected to the frame 1 through the rotary damper.

[0052] In some embodiments, a gap 45 is provided in the middle of the plug plate 4 corresponding to the plug slot 41 to facilitate the picking up and placing of wafers.

[0053] In some embodiments, the frame 1 is provided with a side plate 11 that extends in a vertical direction and abuts against the side wall of the plug-in plate 4 to restrict the movement direction of the plug-in plate 4.

[0054] The abutment rod 5 is rotatably connected to the side wall.

[0055] The above description is merely an exemplary embodiment of the present utility model and does not limit the scope of protection of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the scope of protection of the present utility model.

Claims

1. A lifting wafer rack for easy wafer stacking, characterized in that, include: frame; A lifting structure, comprising a lifting block and a lifting frame, wherein the lifting frame is fixedly connected to the frame and the lifting block is slidably connected to the lifting frame; The bracket is fixedly connected to the lifting block; A plug-in plate is provided with a plug-in slot. The plug-in plate has a first plug-in part and a second plug-in part on opposite sides. The extension direction of the first plug-in part and the second plug-in part are consistent with the opening direction of the plug-in slot. The cross-sectional shape of the first plug-in part and the cross-sectional shape of the second plug-in part are adapted to each other for plugging into another plug-in plate and preventing the other plug-in plate from moving in a direction perpendicular to the opening direction of the plug-in slot. The bracket is provided with a third plug-in portion that is adapted to the first plug-in portion for plugging in the plug-in plate.

2. The lifting wafer rack for facilitating wafer stacking as described in claim 1, characterized in that, The first insertion part is a limiting slide groove, and the second insertion part is a limiting slide bar; The extending direction of the limiting slide groove is consistent with the opening direction of the insertion groove, and the extending direction of the limiting slide bar is consistent with the opening direction of the insertion groove. Furthermore, the cross-sectional shape of the limiting groove is fitted with the cross-sectional shape of the limiting slide bar.

3. The lifting wafer rack for facilitating wafer stacking as described in claim 1, characterized in that, The first insertion part is a limiting slide bar, and the second insertion part is a limiting slide groove; The extending direction of the limiting slide bar is consistent with the opening direction of the insertion groove, and the extending direction of the limiting slide groove is consistent with the opening direction of the insertion groove. Furthermore, the cross-sectional shape of the limiting groove is fitted with the cross-sectional shape of the limiting slide bar.

4. The lifting wafer rack for facilitating wafer stacking as described in any one of claims 2 to 3, characterized in that, The plug plate is provided with two limiting slide grooves, which are located on opposite sides of the plug groove. The plug plate is provided with two limiting slides, which are located on opposite sides of the plug slot.

5. The lifting wafer rack for facilitating wafer stacking as described in claim 4, characterized in that, The cross-section of both the limiting slide groove and the limiting slide bar is T-shaped.

6. The lifting wafer rack for facilitating wafer stacking as described in claim 1, characterized in that, The lifting frame includes a drive motor, a lead screw, and a limit rod. The drive end of the drive motor is fixedly connected to the lead screw, and the lifting block is threadedly connected to the lead screw. The limiting rod and the lead screw are parallel, and the lifting block is slidably connected to the limiting rod.

7. The lifting wafer rack for facilitating wafer stacking as described in claim 1, characterized in that, The support includes a back plate and a base plate that are fixedly connected to each other, and the back plate and the lifting block are fixedly connected. The end of the plug plate facing away from the plug slot opening abuts against the back plate; The base plate is provided with the third insertion part.

8. The lifting wafer rack for facilitating wafer stacking as described in claim 7, characterized in that, The frame is rotatably connected to an abutment rod, the extension direction of the abutment rod is parallel to the movement direction of the lifting structure, and the rotation axis of the abutment rod and the axis of the abutment rod are eccentrically set so that the abutment rod is close to or away from the plug-in plate. The side wall of the plug plate is provided with an abutment notch corresponding to the abutment rod. When the abutment rod abuts against the abutment notch, it prevents the plug plate from moving along the opening direction of the plug groove.

9. The lifting wafer rack for facilitating wafer stacking as described in claim 8, characterized in that, The frame is rotatably connected to two abutment rods, which are located on opposite sides of the plug plate.

10. The lifting wafer rack for facilitating wafer stacking as described in claim 9, characterized in that, A damping element is provided at the connection between the abutment rod and the frame to limit the rotation of the abutment rod relative to the frame.

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