A wafer loading and unloading docking device

Abstract

This invention provides a wafer loading and unloading docking device, including a docking bin and a robotic arm. The docking bin is connected to a machine platform on one side and to a loading device on the other side. The loading device has a loading window that can be opened and closed. The robotic arm is located inside the docking bin and can move wafer cassettes through the loading window. The advantages of this invention are that it enables automatic docking of the overhead crane and the machine platform, replacing manual loading and unloading, improving work efficiency, shortening the handling cycle, reducing machine downtime, and increasing the overall utilization rate of the equipment.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, and in particular relates to a wafer loading and unloading docking device. Background Technology

[0002] To prevent contamination during the transfer of wafers through various production processes, wafer cassettes are typically placed in standard mechanical interface boxes (SMIF PODs) and transported by overhead cranes. When wafers need to be loaded, such as from the wafer cassettes to the cleaning machine's loading position, manual handling is usually used. This requires frequent coordination of overhead crane scheduling and machine status, resulting in low work efficiency, long handling cycles, and an inability to match the production rhythm of high-speed machines. This often leads to machine idleness and reduced overall equipment utilization. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a wafer loading and unloading docking device, which effectively solves the technical problems of low efficiency and long handling cycle of manual handling, resulting in idle waiting of the machine and reduced overall utilization of the equipment, and overcomes the shortcomings of the prior art.

[0004] The technical solution adopted in this utility model is: a wafer loading and unloading docking device, comprising,

[0005] The docking compartment is connected to the machine on one side and to the loading device on the other side. The loading device is equipped with a loading window that can be opened and closed.

[0006] A robotic arm, located inside the docking compartment, can move wafer cassettes through the loading window.

[0007] Furthermore, the loading device includes,

[0008] The loading body has a loading window located on the side near the docking compartment;

[0009] A fixed platform is mounted on the upper body;

[0010] A movable cover is disposed inside the upper body, surrounding the fixed platform, and is movably connected to the upper body. It can move up and down, and the movable cover has an opening on the side near the upper window.

[0011] Furthermore, the bottom of the fixed platform is provided with a lead screw, which is connected to the movable cover and can drive the movable cover to move up and down.

[0012] Furthermore, the upload window is provided with a movable baffle, which can slide up and down to open and close the upload window.

[0013] Furthermore, a baffle is provided on the top of the movable cover near the loading window, and the baffle is engaged with the bottom of the movable baffle, which can drive the movable baffle to move up and down.

[0014] Furthermore, a locking rod is provided on the side of the baffle near the movable baffle, and the locking rod engages with the bottom of the movable baffle.

[0015] Furthermore, the docking compartment is equipped with an intermediate platform, and the intermediate platform is equipped with a wafer sorting machine, which is used for wafer sorting.

[0016] Furthermore, an air filter is provided on the top of the docking compartment, and ventilation holes are provided on the bottom and side walls of the docking compartment.

[0017] Furthermore, the bottom of the docking compartment is equipped with lifting feet.

[0018] Furthermore, the robotic arm is equipped with a camera device.

[0019] The advantages and positive effects of this utility model are as follows: By adopting the above-mentioned technical solution, automatic docking of the overhead crane and the machine is achieved, replacing manual labor for automatic loading and unloading, improving work efficiency, shortening the handling cycle, reducing machine downtime, and improving the overall utilization rate of the equipment. By setting up a docking compartment, contamination of the wafer cassette during handling is reduced, and the cleanliness of the docking compartment is further improved by setting up an air filter. By setting up a loading device for precise docking with the SMIF POD cassette, the cassette cover and base can be separated while simultaneously moving the movable baffle up and down to promptly block the loading window, further reducing dust entry. By setting up an intermediate platform and a wafer sorter, wafers are prevented from slipping out of the wafer cassette, ensuring the stability of handling. Attached Figure Description

[0020] The above and other objects, features, and advantages of this utility model will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this utility model and form part of the specification. They are used together with the embodiments of this utility model to explain the utility model and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same parts or steps.

[0021] Figure 1 This is a front view of a wafer loading and unloading docking device according to an embodiment of this utility model.

[0022] Figure 2 This is a side view of a wafer loading and unloading docking device according to an embodiment of the present invention.

[0023] Figure 3 This is a top view of a wafer loading and unloading docking device according to an embodiment of the present invention.

[0024] Figure 4 This is a top view of the movable cover of a wafer loading and unloading docking device according to an embodiment of this utility model.

[0025] In the diagram: 10. Docking compartment; 11. First opening; 12. Second opening; 20. Robotic arm; 30. Intermediate platform; 31. Scraper; 40. Loading device; 41. Loading body; 42. Fixed platform; 421. Support rod; 43. Movable cover; 431. Lead screw; 432. Drive motor; 433. Connecting rod; 434. Baffle; 435. Clamping rod; 44. Connecting frame; 441. Inner partition; 442. Outer partition; 45. Loading window; 451. Movable baffle; 50. Loading position; 60. Unloading position; 70. Box cover; 80. Base. Detailed Implementation

[0026] This utility model provides a wafer loading and unloading docking device. The embodiments of this utility model will be described below with reference to the accompanying drawings.

[0027] In the description of the embodiments of this utility model, it should be understood that the terms "top," "bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, it should be noted that unless otherwise expressly specified and limited, the terms "set" and "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this utility model through specific circumstances.

[0028] like Figure 1 , Figure 2 and Figure 3As shown in the figure, an embodiment of the present invention provides a wafer loading and unloading docking device, including a docking bin 10, a robotic arm 20, and an intermediate platform 30. The docking bin 10 has a first opening 11 on one side, which connects to the loading position 50 and unloading position 60 of the platform. On the other side, it has a second opening 12, which connects to a loading device 40. The loading device 40 is used to load wafer cassettes. The first opening 11 and the second opening 12 are respectively located on opposite sides of the docking bin 10, so that the loading device 40 and the platform are located on opposite sides of the docking bin 10. The loading device 40 has a loading window 45, which can be opened and closed. During loading and unloading, the loading window 45 is open; when not loading or unloading, the loading window 45 is closed to prevent dust from entering the docking bin 10. The robotic arm 20 is located inside the docking bin 10 and is used to flip and transport wafer cassettes, transferring them between the loading device 40 and the platform. When wafer cassettes containing wafers are placed inside SMIF POD boxes, the openings of the cassettes face to the side. However, when loading and unloading wafer cassettes on certain machines, such as cleaning machines, the openings face upwards. Therefore, the wafer cassettes need to be flipped during transport. The robotic arm 20 is a six-axis robotic arm capable of flexibly flipping and transporting wafers. To prevent wafers from slipping out of the wafer cassettes during transport, an intermediate platform 30 is provided within the docking compartment 10. During loading, the wafer cassettes containing wafers are placed inside the SMIF POD boxes. An overhead crane transports the SMIF POD boxes to the loading device 40. The loading device 40 unlocks and opens the SMIF POD boxes, opening the loading window 45. The robotic arm 20 grips the wafer cassette through the loading window 45, flips it at a set angle, places it on the intermediate platform 30, and then moves the wafer cassette horizontally to the loading position 50 on the machine. During unloading, the robotic arm 20 grips the wafer cassette loaded with wafers on the unloading position 60 of the machine, moves it horizontally to the intermediate platform 30, then grips the wafer cassette, flips it at a set angle, and places the wafer cassette inside the SMIF POD box. The loading window 45 is closed, the loading device 40 locks the SMIF POD box, and the overhead crane transports the SMIF POD box to the next process.

[0029] Specifically, the loading device 40 includes a loading body 41, a fixed platform 42, and a movable cover 43. The loading body 41 is configured as a shell with an open top. A connecting frame 44 is fixed to the side near the docking compartment 10. The height of the connecting frame 44 is greater than the height of the loading body 41. The connecting frame 44 and the second opening 12 are detachably connected by bolts. An inner partition 441 and an outer partition 442 are fixed to the top of the connecting frame 44. A gap is provided between the inner partition 441 and the outer partition 442. A hollow loading window 45 is formed in the middle of the connecting frame 44. The fixed platform 42 is fixed to the top of the loading body 41 by a support rod 421. Figure 4As shown, a movable cover 43 is disposed inside the upper body 41, surrounding the fixed platform 42, and is movably connected to the upper body 41, allowing it to move up and down. The movable cover 43 has an opening on the side near the upper window 45. The movable cover 43 includes three vertically arranged side walls, with the side near the upper window 45 being open. For ease of observation, the three side walls can be made transparent. A first slider is fixed to the side wall of the movable cover 43, and a vertical first slide rail is fixed to the upper body 41 relative to the position of the first slider, allowing the first slider to slide along the first slide rail. The specific structure and connection method of the first slider and the first slide rail are existing technologies and will not be described in detail here. The first slider and the first slide rail are not shown in the figure.

[0030] The SMIF POD box includes a cover 70 and a base 80. The bottom of the cover 70 covers the base 80, and a locking device is connected to the cover 70 and the base 80. When the SMIF POD box is placed on the loading device 40, the base 80 is placed on the fixed platform 42, and the bottom of the cover 70 rests on the top of the movable cover 43. An unlocking device is installed on the fixed platform 42 to unlock and lock the locking device. During loading, after the SMIF POD box is placed on the loading device 40, the unlocking device unlocks the locking device, and the movable cover 43 moves the cover 70 upward, so that the opening of the movable cover 43 is aligned with the loading window 45. The robot arm 20 reaches into the movable cover 43 through the loading window 45 to grip the wafer box. During unloading, the robotic arm 20 extends through the loading window 45 into the movable cover 43 to place the wafer cassette onto the base 80. The movable cover 43 moves the cassette cover 70 downwards. When the bottom of the cassette cover 70 covers the base 80, the unlocking device reverses its action to lock the locking device. The SMIF POD cassette is a standard existing component, and neither the locking nor unlocking device is a current technology. The specific structure and connection method will not be described in detail here.

[0031] Specifically, a lead screw 431 is provided at the bottom of the fixed platform 42. The lead screw 431 is connected to the movable cover 43 and can drive the movable cover 43 to move up and down. The top of the lead screw 431 is rotatably connected to the bottom of the fixed platform 42, and a drive motor 432 is fixed at the bottom of the lead screw 431. The moving nut of the lead screw 431 is connected to the side wall of the movable cover 43 by a connecting rod 433. The drive motor 432 drives the lead screw 431 to rotate, and the moving nut drives the movable cover 43 to move up and down.

[0032] Preferably, the loading window 45 is provided with a movable baffle 451, which can slide up and down to open and close the loading window 45. To ensure the cleanliness of the docking compartment 10, when no loading or unloading is being performed, the movable baffle 451 blocks the loading window 45, closing the loading window 45. When loading or unloading is being performed, the baffle 434 drives the movable baffle 451 to slide upward. When the baffle 434 and the movable baffle 451 move upward together to between the inner partition 441 and the outer partition 442, the loading window 45 is opened, so that the loading window 45 faces the opening of the movable cover 43. To facilitate the sliding of the movable baffle 451, a second slider is fixed on the side of the movable baffle 451 near the connecting frame 44. A second slide rail is vertically installed on the connecting frame 44, and the second slider can slide along the second slide rail. The specific structure and connection method of the second slider and the second slide rail are existing technologies and will not be described in detail here. The second slider and the second slide rail are not shown in the figure.

[0033] Specifically, a baffle 434 is provided on the top of the movable cover 43 near the loading window 45. The baffle 434 is engaged with the bottom of the movable baffle 451, allowing the movable baffle 451 to move up and down. The baffle 434 is fixed to the top of the movable cover 43 near the loading window 45 and is parallel to the movable baffle 451. When the movable cover 43 moves the baffle 434 upward, the baffle 434 causes the movable baffle 451 to slide upward, opening the loading window 45. When the movable cover 43 moves the baffle 434 downward, the movable baffle 451 slides downward under the action of gravity.

[0034] Specifically, a locking rod 435 is provided on the side of the baffle 434 near the movable baffle 451, and the locking rod 435 engages with the bottom of the movable baffle 451. The locking rod 435 is horizontally fixed on the side of the baffle 434 near the movable baffle 451. When the movable cover 43 moves the baffle 434 upward, the locking rod 435 supports the bottom of the movable baffle 451, causing the movable baffle 451 to slide upward. When the movable cover 43 moves the baffle 434 downward, the movable baffle 451 slides downward under the action of gravity, and the locking rod 435 supports the bottom of the movable baffle 451, thus providing a positioning function.

[0035] Preferably, a wafer sorting machine 31 is provided on the intermediate stage 30 for wafer sorting. Wafers are typically non-circular in shape, with a V-shaped notch formed on them. To facilitate handling and processing, and to prevent damage from collisions between wafers placed in different orientations, wafers in the wafer cassette need to be sorted to align the V-shaped notches of all wafers. By setting the wafer sorting machine 31 on the intermediate stage 30, the robot arm 20 places the wafer cassette on the wafer sorting machine 31 for automatic wafer sorting. The wafer sorting machine 31 is existing technology, and its specific structure and connection method will not be described in detail here. Since the wafer cassette is placed with its opening facing upwards on the wafer sorting machine 31, during loading, the robot arm 20 first flips the wafer cassette at a set angle so that the opening faces upwards before placing it in the wafer sorting machine 31 for sorting. During unloading, the robot arm 20 first places the wafer cassette in the wafer sorting machine 31 for sorting, and then flips the wafer cassette.

[0036] Preferably, the docking chamber 10 is equipped with an air filter at its top, and ventilation holes are provided on its bottom and side walls. To reduce airborne dust entering the docking chamber 10, an air filter is installed at the top of the docking chamber 10, and ventilation holes are provided on its bottom and side walls. The air filter draws filtered air into the docking chamber 10, and airflow is created through the ventilation holes. The ventilation holes are located on the side walls of the docking chamber 10 where it is not connected to the machine tool and the loading device 40.

[0037] Preferably, for ease of observation, a viewing window is installed on the side wall with ventilation holes.

[0038] Preferably, for ease of maintenance, a door is installed on the side wall with ventilation holes to facilitate personnel access.

[0039] Preferably, a camera device is installed at the gripping end of the robotic arm 20. By setting the camera device, it is possible to detect whether the robotic arm 20 has accurately placed the wafer cassette on the loading position 50 of the machine. The camera device is specifically a CCD camera. Both the robotic arm 20 and the CCD camera are existing technologies, and their specific structures and connection methods will not be described in detail here.

[0040] Preferably, to facilitate adjustment of the height of the docking compartment 10 and ensure precise connection between the first opening 11 and the machine platform, a lifting foot is installed at the bottom of the docking compartment 10. Specifically, the lifting foot is a screw-type foot, threadedly connected to the bottom of the docking compartment 10.

[0041] Preferably, for ease of movement, the bottom of the docking compartment 10 is equipped with casters. When it is necessary to move the docking compartment 10, the lifting feet are turned so that the height of the lifting feet is less than the height of the casters.

[0042] Example: A wafer loading and unloading docking device includes a docking chamber 10, a robotic arm 20, and an intermediate platform 30, which are installed inside the docking chamber 10. A first opening 11 is provided on one side of the docking chamber 10, connecting to the loading position 50 and unloading position 60 of the machine. A second opening 12 is provided on the other side, connecting to a loading device 40. The loading device 40 and the machine are located on opposite sides of the docking chamber 10. The robotic arm 20 is a six-axis robotic arm with a CCD camera mounted on its gripping end. A wafer sorting machine 31 is mounted on the intermediate platform 30. The loading device 40 includes a loading body 41, a fixed platform 42, and a movable cover 43. The loading body 41 is a shell with an open top. A connecting frame 44 is fixed on the side near the docking chamber 10. The height of the connecting frame 44 is greater than the height of the loading body 41. The connecting frame 44 and the second opening 12 are detachably connected by bolts. An inner partition 441 and an outer partition 442 are fixed to the top of the connecting frame 44, with a gap between them. A hollow loading window 45 is formed in the middle of the connecting frame 44. The fixed platform 42 is fixed to the top of the loading body 41 by a support rod 421. A movable cover 43 is disposed inside the loading body 41, surrounding the fixed platform 42, and is movably connected to the loading body 41, allowing it to move up and down. The movable cover 43 has an opening on the side near the loading window 45. The movable cover 43 includes three vertically arranged side walls, with the side near the loading window 45 being open. The three side walls can be made transparent. A first slider is fixed to the side wall of the movable cover 43, and a first slide rail is fixed to the loading body 41 relative to the position of the first slider, allowing the first slider to slide along the first slide rail. A lead screw 431 is provided at the bottom of the fixed platform 42. The top of the lead screw 431 is rotatably connected to the bottom of the fixed platform 42. A drive motor 432 is fixed at the bottom of the lead screw 431. The moving nut of the lead screw 431 is connected to the side wall of the movable cover 43 by a connecting rod 433. The drive motor 432 drives the lead screw 431 to rotate, and the moving nut drives the movable cover 43 to move up and down. A movable baffle 451 is provided on the loading window 45. A second slider is fixed on the side of the movable baffle 451 near the connecting frame 44. A second slide rail is vertically installed on the connecting frame 44, and the second slider can slide along the second slide rail. A baffle 434 is provided on the top of the movable cover 43 near the loading window 45. A horizontal locking rod 435 is provided on the side of the baffle 434 near the movable baffle 451. The locking rod 435 engages with the bottom of the movable baffle 451. An air filter is provided on the top of the docking chamber 10, and ventilation holes are provided on the bottom and side walls of the docking chamber 10. A viewing window is installed on the side wall with ventilation holes. A compartment door is installed on the side wall with ventilation holes. The bottom of the docking compartment 10 is equipped with lifting feet and casters.

[0043] Workflow:

[0044] During loading, the wafer cassette is placed inside the SMIF POD box, and the overhead crane transports the SMIF POD box to the loading device 40. When the SMIF POD box is placed on the loading device 40, the base 80 rests on the fixed platform 42, and the bottom of the box cover 70 rests on the top of the movable cover 43. The unlocking device unlocks the locking device. The drive motor 432 drives the lead screw 431 to rotate, causing the movable cover 43 to move upward. As the movable cover 43 lifts the box cover 70, it also moves the baffle 434 upward. The baffle 434, through the locking rod 435, drives the movable baffle 451 to slide upward, opening the loading window 45. This aligns the opening of the movable cover 43 with the loading window 45, allowing the robotic arm 20 to reach into the movable cover 43 through the loading window 45 and grip the wafer cassette. The robot arm 20 first flips the wafer box at a set angle of 90° so that the opening of the wafer box faces upwards, and then places it in the wafer sorting machine 31 on the intermediate stage 30 for wafer sorting. Then the robot arm 20 picks up the wafer box and moves it to the material position 50 on the machine table, and uses a CCD camera device to detect whether it is placed in place.

[0045] During unloading, the robotic arm 20 grips the wafer cassette on the unloading position 60 of the machine and moves it horizontally to the wafer sorting machine 31 on the intermediate platform 30 for sorting. Then, the robotic arm 20 grips the wafer cassette, rotates it at a set angle of 90°, and extends through the loading window 45 into the movable cover 43 to place the wafer cassette on the base 80. The drive motor 432 drives the lead screw 431 to reverse, and the movable cover 43 moves the cassette cover 70 downward. When the bottom of the cassette cover 70 covers the base 80, the unlocking device reverses its action to lock the locking device. The overhead crane transports the SMIF POD cassette to the next process. As the movable cover 43 moves downward, the baffle 434 moves downward, and the movable baffle 451 slides downward under the action of gravity, closing the loading window 45.

[0046] The advantages and positive effects of this utility model are:

[0047] 1. It realizes the automatic docking of overhead cranes and machine tools, which can automatically load and unload materials instead of manual labor, improves work efficiency, shortens the handling cycle, reduces the idle time of machine tools, and improves the overall utilization rate of equipment.

[0048] 2. By setting up a docking compartment, the contamination of the wafer cassette during handling is reduced, and the cleanliness of the docking compartment is further improved by setting up an air filter.

[0049] 3. By setting up an uploading device that precisely docks with the SMIF POD box, the box cover and base can be separated while the movable baffle moves up and down to promptly cover the uploading window and further reduce the entry of dust.

[0050] 4. By setting up an intermediate stage and a wafer sorter, the wafers are prevented from slipping out of the wafer cassette, ensuring the stability of the handling process.

[0051] The embodiments of this disclosure have been described in detail above with reference to the accompanying drawings. It should be noted that implementations not illustrated or described in the drawings or the main text of the specification are forms known to those skilled in the art and have not been described in detail. Furthermore, the definitions of the various components described above are not limited to the specific structures, shapes, or methods mentioned in the embodiments, and those skilled in the art can easily modify or substitute them.

[0052] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A wafer loading and unloading docking device, characterized in that: include, The docking compartment is connected to the machine on one side and to the loading device on the other side. The loading device is equipped with a loading window that can be opened and closed. A robotic arm, located inside the docking compartment, can move wafer cassettes through the loading window.

2. The wafer loading and unloading docking device according to claim 1, characterized in that: The loading device includes, The loading body has a loading window located on the side near the docking compartment; A fixed platform is mounted on the upper body; A movable cover is disposed inside the upper body, surrounding the fixed platform, and is movably connected to the upper body. It can move up and down, and the movable cover has an opening on the side near the upper window.

3. The wafer loading and unloading docking device according to claim 2, characterized in that: The bottom of the fixed platform is equipped with a lead screw, which is connected to the movable cover and can drive the movable cover to move up and down.

4. A wafer loading and unloading docking device according to claim 2 or 3, characterized in that: The upload window is equipped with a movable baffle that can slide up and down to open and close the upload window.

5. A wafer loading and unloading docking device according to claim 4, characterized in that: The top of the movable cover is provided with a baffle on the side near the loading window. The baffle is engaged with the bottom of the movable baffle, which can drive the movable baffle to move up and down.

6. A wafer loading and unloading docking device according to claim 5, characterized in that: A locking rod is provided on the side of the baffle near the movable baffle, and the locking rod engages with the bottom of the movable baffle.

7. A wafer loading and unloading docking device according to any one of claims 1-3 and 5-6, characterized in that: The docking compartment is equipped with an intermediate platform, and the intermediate platform is equipped with a wafer sorting machine, which is used for sorting wafers.

8. A wafer loading and unloading docking device according to any one of claims 1-3 and 5-6, characterized in that: The top of the docking chamber is equipped with an air filter, and the bottom and side walls of the docking chamber are provided with ventilation holes.

9. A wafer loading and unloading docking device according to any one of claims 1-3 and 5-6, characterized in that: The bottom of the docking compartment is equipped with lifting feet.

10. A wafer loading and unloading docking device according to any one of claims 1-3 and 5-6, characterized in that: The robotic arm is equipped with a camera device.

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