A multi-slice adjustment mechanism

Abstract

The utility model discloses a kind of adjustment mechanism of multiple slices, including adjustment assembly and moving assembly;Adjustment assembly includes adjustment base, and the lower end of adjustment base is equipped with adjustment X direction module, and the driving end of adjustment X direction module is distributed with several adjustment Y direction modules along Y direction, and the driving end of each adjustment Y direction module is equipped with one adjustment T direction module, and the driving end of each adjustment T direction module is vertically connected with one adjustment base plate upwards, and the front and rear end of adjustment base is equipped with detection light source, and the top of detection light source is provided with detection camera;Moving assembly includes adjustment transfer module, and the driving end of adjustment transfer module is equipped with front transfer adsorption seat and rear transfer adsorption seat, and the top of front transfer adsorption seat and rear transfer adsorption seat is equipped with transfer suction nozzle. The adjustment mechanism of multiple slices is between conveying mechanism and IV detection mechanism, by X direction, Y direction control, reach the XYT direction adjustment of multiple slices, satisfy the position requirement of subsequent IV detection.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon wafer inspection, and in particular to a multi-segment adjustment mechanism. Background Technology

[0002] After printing, crystalline silicon photovoltaic solar wafers require AOI (Automated Optical Inspection) color testing and IV (Inductively Coupled Inspection) testing. AOI, based on optical principles, detects common defects (including color) encountered during printing production. IV testing involves testing the current and voltage characteristic curves (IV curves) of the photovoltaic module. Only wafers that pass this test will proceed to the next stage of production. Current silicon wafer production sizes are increasingly smaller, often dividing the entire wafer into two halves, quarters, or even six-part wafers, collectively referred to as multi-wafer production. The pairing and adjustment positions between the conventional inspection structure and the silicon wafer are located on the inspection mechanism, leading to increased complexity and larger movement amplitude in the overall inspection structure. Utility Model Content

[0003] One objective of this invention is to provide a multi-segment adjustment mechanism that moves the silicon wafer position adjustment structure during IV testing to the rear end of the conveying mechanism, thereby controlling the adjustment of the XYT angles of multiple wafers through a simple structure.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A multi-segment adjustment mechanism includes an adjustment component and a moving component;

[0006] The adjustment assembly includes an adjustment base, an adjustment X-axis module is installed at the lower end of the adjustment base, several adjustment Y-axis modules are distributed along the Y-axis on the drive end of the adjustment X-axis module, an adjustment T-axis module is installed on the drive end of each adjustment Y-axis module, an adjustment base plate is vertically connected to the drive end of each adjustment T-axis module, a detection light source is installed at the front and rear ends of the adjustment base, and a detection camera is arranged above the detection light source.

[0007] The moving component includes an adjustment and transfer module, on the drive end of which a front transfer adsorption seat and a rear transfer adsorption seat are installed, and both the front transfer adsorption seat and the rear transfer adsorption seat are equipped with transfer nozzles.

[0008] As a preferred technical solution, an X-axis sensor is fixed to the outer side of the X-axis adjustment module, and an X-axis sensing plate is fixedly connected to the lower end of the Y-axis adjustment module. The X-axis sensor and the X-axis sensing plate are connected by signal.

[0009] As a preferred technical solution, both the Y-axis adjustment module and the T-axis adjustment module are servo motors that drive the moving end to perform linear movements via screws.

[0010] As a preferred technical solution, several of the Y-axis adjustment modules are distributed at equal intervals along the horizontal direction along the length direction of the X-axis adjustment module.

[0011] As a preferred technical solution, there are two detection light sources, which are distributed on the front and rear sides of the adjustment base plate.

[0012] As a preferred technical solution, an adjustment and transfer movable plate is connected to the drive end of the adjustment and transfer module, and adjustment and transfer vertical cylinders are fixed on both sides of the adjustment and transfer movable plate. The drive end of one adjustment and transfer vertical cylinder is connected to the front transfer adsorption seat, and the drive end of the other adjustment and transfer vertical cylinder is connected to the rear transfer adsorption seat.

[0013] As a preferred technical solution, detection sensors are fixed on the front side of the front transfer adsorption seat and the rear side of the rear transfer adsorption seat, and the number of detection sensors corresponds to the number of adjustment base plates.

[0014] The beneficial effects of this utility model are as follows: It provides a multi-segment adjustment mechanism, which is located between the conveying mechanism and the IV detection mechanism. By controlling the X and Y directions, the XYT direction of the multi-segment can be adjusted to meet the position requirements of subsequent IV detection. Attached Figure Description

[0015] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0016] Figure 1 This is a schematic diagram of the overall structure of a multi-segment adjustment mechanism as described in the embodiment;

[0017] Figure 2 This is a schematic diagram of the first structure of the adjustment component described in the embodiment (with a detection light source);

[0018] Figure 3 This is a schematic diagram of the second structure of the adjustment component described in the embodiment (without a detection light source);

[0019] Figure 4 This is a partial structural diagram of the mobile component described in the embodiment.

[0020] Figures 1 to 4 middle:

[0021] 1. Adjust the base; 2. Adjust the X-axis module; 3. Adjust the Y-axis module; 4. Adjust the T-axis module; 5. Adjust the base plate; 6. Detect the light source; 7. Detect the camera; 8. Adjust the transfer module; 9. Front transfer adsorption seat; 10. Rear transfer adsorption seat; 11. Transfer nozzle; 12. X-axis sensor; 13. X-axis sensor plate; 14. Adjust the transfer movable plate; 15. Adjust the transfer vertical cylinder; 16. Detect the sensor. Detailed Implementation

[0022] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0023] like Figures 1 to 4 As shown in this embodiment, a multi-segment adjustment mechanism includes an adjustment component and a moving component. The adjustment component includes an adjustment base 1, an adjustment X-axis module 2 is installed at the lower end of the adjustment base 1, a plurality of adjustment Y-axis modules 3 are distributed along the Y-axis on the drive end of the adjustment X-axis module 2, an adjustment T-axis module 4 is installed on the drive end of each adjustment Y-axis module 3, an adjustment base plate 5 is vertically connected to the drive end of each adjustment T-axis module 4, a detection light source 6 is installed at the front and rear ends of the adjustment base 1, and a detection camera 7 is arranged above the detection light source 6. The moving component includes an adjustment transfer module 8, a front transfer adsorption seat 9 and a rear transfer adsorption seat 10 are installed on the drive end of the adjustment transfer module 8, and a transfer nozzle 11 is installed on both the front transfer adsorption seat 9 and the rear transfer adsorption seat 10.

[0024] Before the conveying mechanism moves the multi-segment pieces to the IV testing mechanism, the adjustment and transfer module 8 in the moving assembly controls the front transfer adsorption seat 9 to grab the multi-segment pieces from the conveying mechanism into the adjustment assembly. When placed on the adjustment base plate 5, the detection light source 6 shines upward to confirm the existence of multi-segment pieces. After that, the detection camera 7 takes pictures of the current position of each multi-segment piece. Then, it is adjusted according to the subsequent IV testing position. The adjustment X-axis module 2 independently controls different adjustment Y-axis modules 3 to move in the X direction. At the same time, each adjustment Y-axis module 3 controls the movement of one multi-segment piece in the Y direction. Then, the adjustment T-axis module 4 controls the adjustment of the angle direction. After the detection camera 7 confirms that the position of each multi-segment piece is correct, the rear transfer adsorption seat 10 moves down to grab a batch of multi-segment pieces and inputs them into the subsequent IV testing mechanism.

[0025] An X-axis sensor 12 is fixed to the outside of the X-axis module 2, and an X-axis sensor 13 is fixedly connected to the lower end of the Y-axis module 3. The X-axis sensor 12 and the X-axis sensor 13 are connected by signal. The X-axis sensor 12 limits the distance that the multiple segments can move in the horizontal direction, so as to ensure that the multiple segments in the same batch will not collide.

[0026] Both the Y-axis adjustment module 3 and the T-axis adjustment module 4 are driven by servo motors via screws to move linearly. The servo motors drive the linear motion on the linear modules, improving the accuracy of the movement position.

[0027] Several Y-axis adjustment modules 3 are distributed at equal intervals along the horizontal direction on the length direction of the X-axis adjustment module 2. The equal interval distribution is conducive to the independent adjustment of multiple parts in the same batch.

[0028] There are two detection light sources 6, which are distributed on the front and back sides of the adjustment base plate 5. The front and back detection light sources 6, together with the detection camera 7, can accurately see whether there are multiple segments on the current adjustment base plate 5, or whether the multiple segments are too offset to be adjusted.

[0029] An adjustment and transfer movable plate 14 is connected to the drive end of the adjustment and transfer module 8. Adjustment and transfer vertical cylinders 15 are fixed on both sides of the adjustment and transfer movable plate 14. The drive end of one adjustment and transfer vertical cylinder 15 is connected to the front transfer adsorption seat 9, and the drive end of the other adjustment and transfer vertical cylinder 15 is connected to the rear transfer adsorption seat 10. While the front transfer adsorption seat 9 picks up a row of multi-segment pieces to the adjustment base plate 5, the rear transfer adsorption seat 10 picks up a row of multi-segment pieces that have been adjusted to the correct position on the adjustment base plate 5 and puts them into the IV detection mechanism. The operation is carried out synchronously to improve the adjustment efficiency.

[0030] Both the front side of the front transfer adsorption seat 9 and the rear side of the rear transfer adsorption seat 10 are fixed with detection sensors 16. The number of detection sensors 16 corresponds to the number of adjustment base plates 5. The detection sensors 16 detect the gripping status of each multi-segment piece.

[0031] It should be stated that the above-described specific embodiments are merely preferred embodiments of this utility model and the technical principles applied thereto. Within the scope of the technology disclosed in this utility model, any variations or substitutions that are easily conceived by those skilled in the art should be covered within the protection scope of this utility model.

Claims

1. A multi-segment adjustment mechanism, characterized in that, Includes adjustment components and moving components; The adjustment assembly includes an adjustment base, an adjustment X-axis module is installed at the lower end of the adjustment base, several adjustment Y-axis modules are distributed along the Y-axis on the drive end of the adjustment X-axis module, an adjustment T-axis module is installed on the drive end of each adjustment Y-axis module, an adjustment base plate is vertically connected to the drive end of each adjustment T-axis module, a detection light source is installed at the front and rear ends of the adjustment base, and a detection camera is arranged above the detection light source. The moving component includes an adjustment and transfer module, on the drive end of which a front transfer adsorption seat and a rear transfer adsorption seat are installed, and both the front transfer adsorption seat and the rear transfer adsorption seat are equipped with transfer nozzles.

2. The multi-segment adjustment mechanism according to claim 1, characterized in that, An X-axis sensor is fixed to the outer side of the X-axis adjustment module, and an X-axis sensing plate is fixedly connected to the lower end of the Y-axis adjustment module. The X-axis sensor and the X-axis sensing plate are connected by signal.

3. The multi-segment adjustment mechanism according to claim 1, characterized in that, Both the Y-axis adjustment module and the T-axis adjustment module are servo motors that drive the moving end to perform linear movements via screws.

4. The multi-segment adjustment mechanism according to claim 1, characterized in that, Several of the Y-axis adjustment modules are distributed at equal intervals along the horizontal direction along the length direction of the X-axis adjustment module.

5. The multi-segment adjustment mechanism according to claim 1, characterized in that, There are two detection light sources, which are distributed on the front and rear sides of the adjustment base plate.

6. The multi-segment adjustment mechanism according to claim 1, characterized in that, An adjustment and transfer movable plate is connected to the drive end of the adjustment and transfer module. An adjustment and transfer vertical cylinder is fixed on both sides of the adjustment and transfer movable plate. The drive end of one adjustment and transfer vertical cylinder is connected to the front transfer adsorption seat, and the drive end of the other adjustment and transfer vertical cylinder is connected to the rear transfer adsorption seat.

7. The multi-segment adjustment mechanism according to claim 1, characterized in that, Both the front side of the front transfer adsorption seat and the rear side of the rear transfer adsorption seat are fixed with detection sensors, and the number of detection sensors corresponds to the number of adjustment base plates.

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