A hand-held film positioning device suitable for advanced semiconductor packaging

Abstract

The utility model discloses a handheld film clamping positioning device suitable for semiconductor advanced packaging, including the body subassembly for clamping release film, the body subassembly includes opposite fixed bottom plate and opposite floating floating plate, be provided with the guide shaft between bottom plate and floating plate to guarantee that floating plate moves along the predetermined straight line, still be provided with film clamping lever between bottom plate and floating plate, and the floating plate moves along the predetermined straight line through the film clamping lever control, the left and right sides of floating plate are fixed with a film clamping claw respectively, and the left and right sides of bottom plate are provided with an avoidance slot for the film clamping claw to pass through respectively. The utility model discloses it can quickly shift the release film of clamping limit to the high temperature mould of new equipment stably, satisfies the demand of semiconductor packaging compression forming.

Description

Technical Field

[0001] This utility model relates to the field of advanced semiconductor packaging compression molding, and in particular to a handheld film positioning device suitable for advanced semiconductor packaging. Background Technology

[0002] In recent years, semiconductor advanced packaging compression molding technology has developed rapidly. Because compression molding eliminates the traditional injection molding process, the injection nozzle and flow channel materials used in the injection process can also be saved. It can save about two-thirds of the resin used in traditional one-molded plastic packaging products. As a result, advanced packaging compression molding equipment has flourished.

[0003] Because the release film must be used to peel off the molding resin during compression molding, and this type of press is limited by space and cannot be equipped with a film coating device, it can only be equipped with a robot to transport the cut release film to the mold inside the press and adsorb it, and then compress and seal it. In the development stage of new equipment, when the single press does not have a matching robot, a handheld film clamping and positioning device suitable for advanced semiconductor packaging is needed. The cut release film is manually placed into the above device, and then the device is flipped by hand to replace the robot in entering the high-temperature mold and positioning it. The release film is pressed down until the mold adsorbs it under vacuum, and then the clamping is released and the device is removed. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a handheld film clamping and positioning device suitable for advanced semiconductor packaging. This device can quickly and stably transfer the clamped and limited release film into the high-temperature mold of the new equipment, thus meeting the requirements of semiconductor packaging compression molding.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A handheld film clamping and positioning device suitable for advanced semiconductor packaging includes a body assembly for clamping a release film. The body assembly includes a relatively fixed base plate and a relatively floating float plate. A guide shaft is provided between the base plate and the float plate to ensure that the float plate moves along a predetermined straight line. A film clamping lever is also provided between the base plate and the float plate, and the film clamping lever controls the movement of the float plate along the predetermined straight line. A film clamping claw is fixed on each of the left and right sides of the float plate, and a clearance groove is provided on each of the left and right sides of the base plate for the film clamping claw to pass through. Driving the float plate to move closer to or away from the base plate realizes the closing or opening of the film clamping claw. Driving the film clamping claw to move closer to the base plate realizes the restriction of the release film and completes the film clamping action. Driving the film clamping claw away from the base plate releases the restriction of the release film.

[0007] Preferably, a spring is provided between the bottom plate and the floating plate. The spring resets and pushes the bottom plate and the floating plate away from each other, and the clamping claw approaches the bottom plate to complete the clamping action.

[0008] Preferably, the distal end of the membrane lever is connected to the base plate via a hinge pin, and the middle part of the membrane lever is connected to two clamping bearings that abut against the surface of the floating plate.

[0009] Preferably, the base plate is further provided with a knob plunger at the proximal end of the clamping lever. The knob plunger has an extended state and a retracted state. The extended knob plunger is located on the movement path of the proximal end of the clamping lever, and the retracted knob plunger is offset from the movement path of the proximal end of the clamping lever.

[0010] Preferably, the assembly further includes a base assembly for placing the body component. The base assembly includes a base, a support column located on the side wall of the base, a first top membrane column, and a second top membrane column. The body component has a plurality of clearance holes that are adapted to the first top membrane column and the second top membrane column.

[0011] Preferably, both the bottom plate and the sidewall of the floating plate have multiple through-holes for clearance.

[0012] Preferably, the first top membrane column, the second top membrane column and the clearance hole are in a clearance fit state, or the top of the first top membrane column and the second top membrane column are provided with vent holes.

[0013] Preferably, the sidewall of the base plate is provided with an adhesive strip, which is located on the moving path of the clamping claw.

[0014] Preferably, a handle is fixed to each of the left and right sides of the base plate and the membrane lever.

[0015] Preferably, a positioning plate is provided at the lower front and lower left and right sides of the base plate, and the positioning plates are used to accurately position the mold positioning blocks of the packaging equipment.

[0016] Compared with the prior art, the advantages of this utility model are as follows:

[0017] The release film is controlled by a lever to move the floating plate along a predetermined straight line. The release film can be quickly clamped or released by the release film on both sides. The workers can quickly and stably transfer the clamped and limited release film into the high-temperature mold of the new equipment to meet the needs of semiconductor packaging compression molding. Attached Figure Description

[0018] Figure 1 This is a top view of the main body component of the handheld membrane positioning device of this utility model.

[0019] Figure 2 This is a bottom view of the main body component of the handheld membrane positioning device of this utility model.

[0020] Figure 3 This is a schematic diagram of the base assembly of the handheld membrane positioning device in this utility model.

[0021] Figure 4 This is a schematic diagram showing the main body component of the handheld membrane positioning device of this utility model being placed on the base component.

[0022] Figure 5 This is a schematic diagram of the opening of the clamping claw, the main component of the handheld clamping and positioning device in this utility model.

[0023] Figure 6 This is a schematic diagram of the closing of the clamping claw, the main component of the handheld clamping and positioning device in this utility model.

[0024] In the diagram: 1. Positioning plate; 2. Base plate; 3. Clamping claw; 4. Linear bearing; 5. Hinge pin; 6. Clamping lever; 7. Lever support seat; 8. Clamping bearing; 9. Roller guide rail; 10. Guide shaft; 11. Float plate; 12. Knob plunger mounting seat; 13. Knob plunger; 14. Handle; 15. Rubber strip; 16. Spring; 17. Handle fixing block; 18. Base; 19. Support column; 20. Second top membrane column; 21. First top membrane column. Detailed Implementation

[0025] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0026] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0027] This utility model relates to the field of semiconductor advanced packaging compression molding, specifically to a handheld film clamping and positioning device suitable for semiconductor advanced packaging. It has two components: a body component of the handheld film clamping and positioning device and a base component, which is used to support and place the body component.

[0028] This invention is used in the initial research and development stage of next-generation equipment, before fully automated robotic arms are deployed. This device can replace a robotic arm to enter a high-temperature mold, clamp and fix the release film, and release and remove it after the mold is vacuum-absorbed.

[0029] See attached document Figure 1 -Appendix Figure 6 A handheld film clamping positioning device suitable for advanced semiconductor packaging comprises two components: a main body assembly and a base assembly for holding the main body assembly. The main body assembly specifically includes a positioning plate 1, a base plate 2, a clamping claw 3, a linear bearing 4, a hinge pin 5, a clamping lever 6, a lever support seat 7, a clamping bearing 8, a roller guide rail 9, a guide shaft 10, a float plate 11, a knob plunger mounting seat 12, a knob plunger 13, a handle 14, a rubber strip 15, a spring 16, and a handle fixing block 17.

[0030] The base assembly specifically includes a base 18, a support column 19, a first top membrane column 21, and a second top membrane column 20.

[0031] The base assembly is designed to be stable and not easily tipped over. The base 18 is made of 45 steel and does not have a weight-reducing groove. The four outermost corner support columns 19 are used to place the main body assembly. There are eight first top film columns 21 and twenty-eight second top film columns 20 in the middle, which can support the release film height at multiple points. Through the different positions and height differences of the columns, the support of the main body assembly is achieved and the consistency of the release film height is ensured.

[0032] The main body components are designed to be lightweight and easy to hold. The base plate 2 and the floating plate 11 are made of 5052 aluminum. Multiple weight-reducing holes are designed to make way for the first top membrane column 21 and the second top membrane column 20.

[0033] Two handle fixing blocks 17 can be installed at the lower left and lower right corners of the base plate 2 to connect the handle 14. The base plate 2 is also equipped with the mold positioning plate 1 at the left, right and front. There are two additional grooves at the bottom of the base plate 2 for positioning the rubber strip 15. At the same time, the float plate 11 is connected and positioned by the guide shaft 10, spring 16 and linear bearing 4; the linear bearing 4 and the guide shaft 10 ensure vertical guidance. When the near end of the clamping lever 6 is raised or lowered, the float plate 11 can ensure that the direction of movement is vertical up and down.

[0034] Two clamping claws 3 are fixed on the left and right sides of the float plate 11, extending through the clearance groove of the base plate 2. A roller guide rail 9 is installed in the middle of the upper surface of the float plate 11, which can restrain the two clamping bearings 8 on the clamping lever 6 from rolling. One end of the clamping lever 6 is restricted by the base plate 2, and the other end is connected to the handle 14 and then pressed against by the knob plunger 13. The knob plunger 13 is installed above the knob plunger mounting seat 12 and is fixed to the base plate 2.

[0035] With the two handles 14 on the left and right sides of the main body assembly facing upwards, place it on the base assembly. The knob plunger 13 presses against the middle handle 14, controlling the clamping claw 3 to extend and insert the cut release film. Then, the knob plunger 13 retracts, and the spring 16, which was pressed between the base plate 2 and the float plate 11, returns to its original position. The clamping lever 6 and the float plate 11 are pushed by the spring 16, and the clamping claw 3 presses the release film onto the upper surface of the adhesive strip 15, thus achieving the clamping action.

[0036] The present invention will be further described below with reference to the accompanying drawings.

[0037] Please see Figure 1 , Figure 2 , Figure 3 This embodiment provides a set of body components and a set of base components. The base plate 2 and floating plate 11 of the body components have an area comparable to that of the mold. The upper end of the base components has multiple first top film pillars 21 and second top film pillars 20. The body components have multiple clearance holes for the first top film pillars 21 and second top film pillars 20, which also serve as weight reduction holes. There are three positioning plates 1 on the lower front and lower left and right sides of the base plate 2. The positioning plates 1 are generally convex in shape, with a convex upper part and a concave lower part. There is a groove at the bottom of the convex shape, which can be precisely positioned with the mold positioning block of the packaging equipment. The protrusions of the positioning plates 1 are inserted into the corresponding grooves of the base plate 2 and then fixed with screws.

[0038] A knob plunger mounting seat 12 is screwed to the front of the base plate 2. The knob plunger mounting seat 12 is irregularly shaped, with a relief groove at the bottom to avoid the positioning plate 1 in front, and a protrusion at the top. The threaded hole on the side can be used to install the knob plunger 13. A lever support seat 7 is screwed to the rear of the base plate 2. The bottom of the lever support seat 7 is fixed to the surface of the positioning plate 1.

[0039] Two narrow, elongated clearance grooves are designed on the left and right sides of the base plate 2 to avoid the clamping claws 3. The clearance grooves are designed as vertically continuous grooves. Specifically, the long side of the L-shaped clamping claw 3 is the arm, and the short side is the claw. The two clamping claws are symmetrically arranged. The arms are fixed to the left and right sides of the floating plate, pass through the base plate and extend out. The claws correspond to the positions of the two adhesive strips and can move synchronously to clamp or prevent loosening of the release film. The elasticity of the adhesive strip 15 is used to cooperate with the clamping claws 3 to ensure that the release film does not easily slip after being flipped. The adhesive strip 15 is made of silicone rubber, which can withstand high temperatures, does not easily melt or become sticky, and has good elasticity.

[0040] There are handle fixing block 17 connection holes on the left and right sides above the base plate 2. After the two handles 14 are connected to the handle fixing block 17, they are then assembled to the base plate 2 and fixedly connected through these holes. They can be held by hand through the two handles 14.

[0041] On the reverse side of the base plate 2, six countersunk holes are designed at the left and right sides near the center and at the four corners for connecting guide shafts 10. The lower end faces of the six guide shafts 10 contact the front side of the base plate 2, and screws are connected through the countersunk holes. Two linear bearings 4 are inserted into the upper end faces of two guide shafts 10, and the linear bearings 4 are fixed to the float plate 11. At the same time, four other guide shafts 10 at the four corners of the base plate 2 are fitted with springs 16, and their upper ends are exactly in the corresponding clearance holes of the float plate 11. The above design is used to limit the movement of the float plate 11 and ensure that the float plate 11 moves along a predetermined straight line.

[0042] The bottom of the base plate 2 has grooves on the left and right sides, into which two adhesive strips 15 can be inserted. The threaded holes are fixed at both ends of the adhesive strips 15, allowing the clamping claws 3 to be cleared. The adhesive strips 15 can achieve flexible clamping and limiting of the release film, ensuring the clamping strength of the release film while avoiding rigid damage to the release film.

[0043] The float plate 11 has a screw mounting hole for the roller guide rail 9 at its center, and a set of screw mounting holes for the clamping claws 3 on each side. The clamping lever 6 has a hinge pin 5, and clamping bearings 8 are mounted on both sides. The distal end of the clamping lever 6 is connected and fixed to the lever support seat 7 via the hinge pin 5, or its horizontal movement is restricted by a rotating joint, but its deflection is not restricted. The proximal end is threadedly connected to a handle 14, the handle's shaft surface of which is pressed by a knob plunger 13. The middle of the clamping lever 6 is connected to two clamping bearings 8, which are pressed by the roller guide rail 9. The two clamping claws 3 connected to the float plate 11 are located below the rubber strip 15. Through the linkage of the float plate 11, the clamping claws 3 can be opened or closed.

[0044] The base assembly, primarily used to hold the main body assembly, consists of a base 18, support columns 19, a first top membrane column 21, and a second top membrane column 20. Due to its weight, the base 18 has two sets of screw holes on its front and rear sides for mounting screws for handling. Four support columns 19 are designed at the four corners to support the main body assembly. The first and second top membrane columns 21 are of the same height, with a larger support in the middle and smaller supports around the perimeter to ensure even distribution at the four corners.

[0045] Meanwhile, by designing clearance holes that are compatible with the first top membrane column 21 and the second top membrane column 20, the weight of the floating plate 11 and the base plate 2 can be reduced, making it easier for staff to manually transport them. For release films with a larger area, it can also ensure that when the main body component of this device is detached from the base component, the release film will not be difficult to detach or fall off due to excessive tightness caused by the contact area being too large.

[0046] Furthermore, the first top film column 21, the second top film column 20 and the clearance hole can be designed to be in a clearance fit state, or vent holes can be designed on the top of the first top film column 21 and the second top film column 20. This can facilitate the laying of release film with a large area, ensure the flatness of the release film and the floating plate 11, avoid excessive gas retention between the release film and the floating plate 11, and is suitable for the processing of release film with a large area.

[0047] For details on implementing the handheld film clamping positioning function of the above-mentioned device, please refer to [link / reference]. Figure 4 , Figure 5 , Figure 6 The usage method of this embodiment will be further explained.

[0048] First, hold the two handles 14 on the left and right sides of the main body assembly to distinguish the front and back. The back side has an adhesive strip 15, and the groove of the positioning plate 1 faces upward. Place the main body assembly with the back side facing up, and insert the first top film column 21 and the second top film column 20 into the holes, placing it on the upper surface of the four outermost support columns 19. At this time, the upper surface of the first top film column 21 and the second top film column 20 is at the same height as the upper surface of the adhesive strip 15. Confirm that the knob plunger 13 at the front and lower end is extended, blocking the shaft surface of the middle handle 14. At this time, the spring 16 between the base plate 2 and the float plate 11 is pressed, and the clamping claw 3 is in the open state. Place the left and right ends of the cut release film between the clamping claw 3 and the adhesive strip 15, pull out the knob plunger 13, the spring 16 returns to its original position, and the linear bearing 4 drives the float plate 11 to descend vertically. The clamping claw 3 descends and closes, pressing the release film and realizing the clamping action. The height of the eight first top film columns 21 and the twenty-eight second top film columns 20 of the base assembly matches the height of the release film clamped by the main body assembly. The multi-point support design effectively ensures consistent release film height and reduces contact area, facilitating easy removal.

[0049] Next, flip the main body component handle so the release film is facing down. Align the three positioning plates 1 with the high-temperature mold positioning block and press them onto the mold. Simultaneously, activate the mold vacuum adsorption function to hold the release film. At this time, the knob plunger 13 is in the retracted state. Press the middle handle 14 down, then extend the knob plunger 13 to block the middle handle 14. The clamping claw 3 completes the opening action, releasing the release film. Due to vacuum adsorption, removing the main body component of this device at this time will not affect the state of the release film being adsorbed.

[0050] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A handheld film clamping and positioning device suitable for advanced semiconductor packaging, comprising a body assembly for clamping release film, characterized in that: The main body assembly includes a relatively fixed base plate (2) and a relatively floating float plate (11), and a guide shaft (10) is provided between the base plate (2) and the float plate (11) to ensure that the float plate (11) moves along a predetermined straight line; A clamping lever (6) is also provided between the bottom plate (2) and the float plate (11), and the float plate (11) is controlled to move along a predetermined straight line by the clamping lever (6); a clamping claw (3) is fixed on the left and right sides of the float plate (11), and a clearance groove is opened on the left and right sides of the bottom plate (2) for the clamping claw (3) to pass through. The driving float (11) moves closer to or further away from the bottom plate (2) to achieve the closing or opening of the clamping claw (3); the driving clamping claw (3) moves closer to the bottom plate (2) to restrict the release film and complete the clamping action; the driving clamping claw (3) moves away from the bottom plate (2) to remove the restriction on the release film.

2. The handheld film positioning device suitable for advanced semiconductor packaging according to claim 1, characterized in that, A spring (16) is provided between the bottom plate (2) and the floating plate (11). The spring (16) resets and pushes the bottom plate (2) and the floating plate (11) away from each other, and the clamping claw (3) approaches the bottom plate (2) to complete the clamping action.

3. The handheld film positioning device suitable for advanced semiconductor packaging according to claim 1, characterized in that, The distal end of the clamping lever (6) is connected to the base plate (2) via a hinge pin (5), and the middle part of the clamping lever (6) is connected to two clamping bearings (8) that abut against the surface of the float plate (11).

4. A handheld film positioning device suitable for advanced semiconductor packaging according to claim 3, characterized in that, The base plate (2) is also provided with a knob plunger (13) at the proximal end of the clamping lever (6).

5. A handheld film positioning device suitable for advanced semiconductor packaging according to claim 1, characterized in that, It also includes a base assembly for placing the body assembly, the base assembly including a base (18), a support column (19) located on the side wall of the base (18), a first top membrane column (21) and a second top membrane column (20), the body assembly having a plurality of clearance holes adapted to the first top membrane column (21) and the second top membrane column (20).

6. A handheld film positioning device suitable for advanced semiconductor packaging according to claim 5, characterized in that, Both the bottom plate (2) and the floating plate (11) have multiple through-holes on their sidewalls.

7. A handheld film positioning device suitable for advanced semiconductor packaging according to claim 5, characterized in that, The first top membrane column (21) and the second top membrane column (20) are in a clearance fit with the clearance hole, or the top of the first top membrane column (21) and the second top membrane column (20) are provided with ventilation holes.

8. A handheld film positioning device suitable for advanced semiconductor packaging according to any one of claims 1-7, characterized in that, The bottom plate (2) has a rubber strip (15) on its side wall, and the rubber strip (15) is located on the moving path of the clamping claw (3).

9. A handheld film-clamping positioning device suitable for advanced semiconductor packaging according to any one of claims 1-7, characterized in that, A handle (14) is fixed to each of the left and right sides of the base plate (2) and the membrane lever (6).

10. A handheld film positioning device suitable for advanced semiconductor packaging according to any one of claims 1-7, characterized in that, A positioning plate (1) is provided on the bottom front and the bottom left and right sides of the base plate (2).

Images