Scratch-resistant vacuum chuck for handling wafer glass sheets

Abstract

The utility model relates to wafer glass sheet carrying technical field relates to wafer glass sheet carrying is prevented to scratch vacuum chuck, including support frame, the lower surface fixed connection of support frame has the shell, the outer wall fixed connection of shell has the mounting block, the outer wall sliding connection of mounting block has the limit stop, the outer wall fixed connection of limit stop has the sucking disc body, the inside sliding connection of mounting block has T shape frame, the inside rotation connection of T shape frame has U shape frame, the outer wall rotation connection of U shape frame has convex frame no.

Description

Technical Field

[0001] This utility model relates to the field of wafer glass sheet handling technology, and in particular to a scratch-resistant vacuum chuck for handling wafer glass sheets. Background Technology

[0002] A wafer glass substrate is a high-purity glass substrate used in semiconductor manufacturing processes. It is typically used to support or carry wafers during specific processing steps, such as photolithography, bonding, or polishing. Unlike traditional silicon-based wafers, glass has advantages such as high light transmittance, strong chemical stability, and a low coefficient of thermal expansion. During the handling of wafer glass substrates, a scratch-resistant vacuum chuck is required to prevent scratches or microcracks on its surface.

[0003] The anti-scratch vacuum chuck for handling wafer glass sheets is a handling tool designed specifically for high-precision glass substrates. In the past, the chuck was usually glued to the bracket of the handling tool. This installation method makes it difficult to replace the chuck, clean the chuck, and remove residual glue, which will contaminate the tool surface and affect subsequent installation and use. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a scratch-resistant vacuum suction cup for handling wafer glass sheets, aiming to improve the problem that using glue to stick the suction cup to the bracket of the handling tool makes it inconvenient to clean or replace the suction cup, thus affecting its use.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A scratch-resistant vacuum suction cup for handling wafer glass sheets includes a support frame, a housing fixedly connected to the lower surface of the support frame, vacuum nozzles fixedly connected to the interior of both the support frame and the housing, an electronic valve installed inside each vacuum nozzle, a mounting block fixedly connected to the outer wall of the housing, a limit block slidably connected to the outer wall of the mounting block, a suction cup body fixedly connected to the outer wall of the limit block, a T-shaped frame slidably connected to the interior of the mounting block, a U-shaped frame rotatably connected to the interior of the T-shaped frame, a convex frame one rotatably connected to the outer wall of the U-shaped frame, the outer wall of the convex frame one penetrating the interior of the mounting block and slidably connected to the interior of the limit block, a spring fixedly connected to the outer wall of the convex frame one, a convex frame two fixedly connected to the outer wall of the spring, and a sealing assembly provided on the upper surface of the suction cup body.

[0007] Preferably, the sealing assembly includes a sealing gasket, the lower surface of which is fixedly connected to the upper surface of the suction cup body, and the outer wall of which is disposed on the inner wall of the outer shell.

[0008] Preferably, the lower surface of the outer shell is attached to the upper surface of the suction cup body, and the rear outer wall of the convex frame is slidably connected to the interior of the mounting block.

[0009] Preferably, a sealing ring is provided inside the suction cup body, and the outer wall of the sealing ring is attached to the inside of the outer shell.

[0010] Preferably, the suction cup body has multiple air extraction holes inside.

[0011] Preferably, the lower surface of the suction cup body is provided with multiple suction rings.

[0012] Preferably, an adsorption pad is fixedly connected to the lower surface of the suction cup body.

[0013] This utility model has the following beneficial effects:

[0014] 1. In this utility model, the cooperation between the mounting block, the limiting block, the T-shaped frame, the U-shaped frame, the first convex frame, the spring, and the second convex frame facilitates the regular cleaning or replacement of the suction cup body, ensuring that the suction cup is in the best working condition. At the same time, by quickly replacing suction cup bodies of different specifications or types, it can adapt to wafers of different specifications, improving the flexibility of handling.

[0015] 2. In this utility model, through the cooperation between the outer shell, vacuum nozzle, suction cup body, air extraction hole, adsorption ring and adsorption pad, a uniform adsorption force is generated on the entire adsorption surface of the suction cup, so as to achieve uniform adsorption of the wafer glass sheet, enhance the adsorption stability of the wafer glass sheet, ensure the safety and reliability of the handling process, and effectively prevent scratches on the surface of the glass sheet. Attached Figure Description

[0016] Figure 1 This is a perspective view of the anti-scratch vacuum chuck for handling wafer glass sheets proposed in this utility model;

[0017] Figure 2 This is a partial structural diagram of the vacuum nozzle of the anti-scratch vacuum chuck for handling wafer glass sheets proposed in this utility model.

[0018] Figure 3 This is a cross-sectional view of the internal structure of the mounting block of the anti-scratch vacuum chuck for handling wafer glass sheets proposed in this utility model.

[0019] Figure 4 This is a partial structural diagram of the adsorption ring of the anti-scratch vacuum chuck for handling wafer glass sheets proposed in this utility model.

[0020] Legend:

[0021] 1. Support frame; 2. Outer shell; 3. Vacuum nozzle; 4. Electronic valve; 5. Mounting block; 6. Limiting block; 7. Suction cup body; 8. T-shaped frame; 9. U-shaped frame; 10. Convex frame one; 11. Spring; 12. Convex frame two; 13. Sealing gasket; 14. Sealing ring; 15. Adsorption pad; 16. Air extraction hole; 17. Adsorption ring. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Reference Figures 1-3 An embodiment of this utility model provides a scratch-resistant vacuum suction cup for handling wafer glass sheets, including a support frame 1, a housing 2 fixedly connected to the lower surface of the support frame 1, vacuum nozzles 3 fixedly connected to the inside of both the support frame 1 and the housing 2, an electronic valve 4 provided inside the vacuum nozzle 3, an installation block 5 fixedly connected to the outer wall of the housing 2, a limit block 6 slidably connected to the outer wall of the installation block 5, a suction cup body 7 fixedly connected to the outer wall of the limit block 6, a T-shaped frame 8 slidably connected to the inside of the installation block 5, a U-shaped frame 9 rotatably connected to the inside of the T-shaped frame 8, a convex frame 10 rotatably connected to the outer wall of the U-shaped frame 9, the outer wall of the convex frame 10 penetrating the inside of the installation block 5 and slidably connected to the inside of the limit block 6, a spring 11 fixedly connected to the outer wall of the convex frame 10, a convex frame 2 12 fixedly connected to the outer wall of the spring 11, and a sealing assembly provided on the upper surface of the suction cup body 7;

[0024] Specifically, the handheld support frame 1 facilitates the manipulation of the wafer glass sheet through the outer shell 2 and the suction cup body 7. The vacuum nozzle 3 connects to a vacuum generator or vacuum pump to evacuate the air between the suction cup body 7 and the outer shell 2, thereby adsorbing the wafer glass sheet in contact with the suction cup body 7. The movement of the T-shaped frame 8 is restricted by the interior of the mounting block 5. Without external force driving the T-shaped frame 8, the elasticity of the spring 11 pushes the convex frame one 10 and convex frame two 12 to move to both sides of the mounting block 5, so that the outer walls of the convex frame one 10 and convex frame two 12 slide into the interior of the limiting block 6 to install the suction cup body 7. The elasticity of the support frame 1 provides support for the T-shaped frame 8, and the movement of the convex frame one 10 and convex frame two 12 is limited by the interior of the mounting block 5.

[0025] Reference Figure 2The sealing assembly includes a sealing gasket 13, the lower surface of which is fixedly connected to the upper surface of the suction cup body 7, and the outer wall of the sealing gasket 13 is disposed on the inner wall of the outer casing 2.

[0026] Specifically, by setting the outer wall of the sealing gasket 13 to be inclined and matching the inner wall of the outer shell 2, it is easy for the suction cup body 7 to fit tightly with the outer shell 2, thereby improving the seal between the outer shell 2 and the suction cup body 7.

[0027] Reference Figure 3 The lower surface of the outer shell 2 is attached to the upper surface of the suction cup body 7, and the rear outer wall of the convex bracket 10 is slidably connected to the inside of the mounting block 5.

[0028] Specifically, the contact between the outer shell 2 and the suction cup body 7 is used to initially seal the outer shell 2 and the suction cup body 7. A slider is provided on the rear outer wall of the convex frame 10 and slides inside the mounting block 5 to support the movement of the convex frame 10.

[0029] Reference Figure 2 The suction cup body 7 has a sealing ring 14 inside, and the outer wall of the sealing ring 14 is attached to the inside of the outer shell 2.

[0030] Specifically, a sealing ring 14 is provided on the edge of the suction cup body 7, and the sealing ring 14 is between the outer shell 2 and the suction cup body 7, further reducing the gap between the outer shell 2 and the suction cup body 7.

[0031] Reference Figure 4 The suction cup body 7 has multiple air extraction holes 16 inside; multiple suction rings 17 are provided on the lower surface of the suction cup body 7; and a suction pad 15 is fixedly connected to the lower surface of the suction cup body 7.

[0032] Specifically, the number of suction holes 16 and adsorption rings 17 are set to be the same, and the suction holes 16 and adsorption rings 17 are evenly distributed to facilitate the generation of a uniform vacuum on the entire adsorption surface of the suction cup, thereby achieving uniform adsorption of the wafer glass sheet. The adsorption pad 15 and adsorption rings 17 are made of silicone rubber pads. The softness and elasticity of the silicone rubber pads provide a certain buffer for the adsorption of the wafer glass sheet, while effectively preventing scratches on the surface of the glass sheet.

[0033] Working principle: When using this suction cup, the suction cup is mounted on the robotic arm or held by the worker using the support frame 1. The suction cup body 7 is brought close to the wafer glass plate by holding the support frame 1, so that the adsorption pad 15 and adsorption ring 17 are attached to the surface of the wafer glass plate. Then, the vacuum nozzle 3 is opened by the electronic valve 4 and connected to the vacuum generator. The air is then extracted from the area between the outer shell 2, the suction cup body 7 and the wafer glass plate through the vacuum nozzle 3 and the air extraction hole 16, thereby vacuum adsorbing the wafer glass plate, which makes it easy for the worker to carry the wafer glass plate by holding the support frame 1.

[0034] When the suction cup body 7 needs to be inspected, the T-shaped frame 8 is pulled and slid inside the mounting block 5, causing the U-shaped frame 9 to move upward and rotate to the right. Utilizing the consistency of the second convex frame 12 and the first convex frame 10, the second convex frame 12 and the first convex frame 10 move synchronously towards the center of the mounting block 5, compressing the spring 11. The second convex frame 12 and the first convex frame 10 slide out of the interior of the limiting block 6, no longer limiting the limiting block 6, allowing the sealing gasket 13 and the sealing ring 14 to slide out of the range of the outer shell 2, making it convenient to remove the suction cup body 7 for inspection or replacement. During use, this suction cup not only allows for quick installation and disassembly of the suction cup body 7, facilitating regular cleaning, inspection, and maintenance of the suction cup body 7, but also enhances the stability of the adsorption of the wafer glass sheet by passing through the evenly distributed air extraction holes 16 and the adsorption ring 17.

[0035] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A scratch-resistant vacuum chuck for handling wafer glass sheets, comprising a support frame (1), characterized in that: The lower surface of the support frame (1) is fixedly connected to the outer shell (2). Vacuum nozzles (3) are fixedly connected inside both the support frame (1) and the outer shell (2). An electronic valve (4) is installed inside the vacuum nozzle (3). An installation block (5) is fixedly connected to the outer wall of the outer shell (2). A limit block (6) is slidably connected to the outer wall of the installation block (5). A suction cup body (7) is fixedly connected to the outer wall of the limit block (6). A T-shaped... The frame (8) has a U-shaped frame (9) rotatably connected inside the T-shaped frame (8), and a convex frame one (10) rotatably connected to the outer wall of the U-shaped frame (9). The outer wall of the convex frame one (10) penetrates the interior of the mounting block (5) and is slidably connected to the interior of the limiting block (6). A spring (11) is fixedly connected to the outer wall of the convex frame one (10), and a convex frame two (12) is fixedly connected to the outer wall of the spring (11). A sealing component is provided on the upper surface of the suction cup body (7).

2. The anti-scratch vacuum chuck for handling wafer glass sheets according to claim 1, characterized in that: The sealing assembly includes a sealing gasket (13), the lower surface of which is fixedly connected to the upper surface of the suction cup body (7), and the outer wall of which is disposed on the inner wall of the outer shell (2).

3. The anti-scratch vacuum chuck for handling wafer glass sheets according to claim 1, characterized in that: The lower surface of the outer shell (2) is attached to the upper surface of the suction cup body (7), and the rear outer wall of the convex frame (10) is slidably connected to the interior of the mounting block (5).

4. The anti-scratch vacuum chuck for handling wafer glass sheets according to claim 1, characterized in that: The suction cup body (7) is provided with a sealing ring (14) inside, and the outer wall of the sealing ring (14) is attached to the inside of the outer shell (2).

5. The anti-scratch vacuum chuck for handling wafer glass sheets according to claim 1, characterized in that: The suction cup body (7) has multiple air extraction holes (16) inside.

6. The anti-scratch vacuum chuck for handling wafer glass sheets according to claim 1, characterized in that: The lower surface of the suction cup body (7) is provided with multiple suction rings (17).

7. The anti-scratch vacuum chuck for handling wafer glass sheets according to claim 1, characterized in that: An adsorption pad (15) is fixedly connected to the lower surface of the suction cup body (7).

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