A nozzle assembly for die picking and a die picking apparatus

Abstract

The application relates to a suction nozzle assembly and a wafer picking device for wafer picking, the suction nozzle assembly comprising a vacuum suction rod and a suction nozzle mounted at the lower end of the vacuum suction rod, a vacuum airflow channel is arranged in the center of the suction nozzle and communicates with the airflow of the vacuum suction rod, a groove is arranged in the lower end of the vacuum suction rod in the circumferential direction, the upper part of the suction nozzle is provided with a clamping ring protruding towards the vacuum airflow channel, the clamping ring is embedded in the groove at the lower end of the vacuum suction rod, and the lower end of the vacuum suction rod is accommodated in the suction nozzle. On one hand, the application can improve the mounting precision of the suction nozzle, and improve the risk in the process of manually mounting the suction nozzle; on the other hand, the application can improve the mounting firmness of the suction nozzle, better fix the suction nozzle, and avoid displacement of the suction nozzle.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a nozzle assembly for die picking. Background Technology

[0002] In the RW (Rewiring) wafer reassembly process, nozzles are often used to transfer bare dies. The picking and placement of bare dies is typically accomplished using rubber nozzles mounted on a holder (vacuum picker). The holder's mounting posts and the nozzle base's mounting holes are usually cylindrical or cubic structures with consistent top and bottom diameters to ensure assembly stability and alignment accuracy. Before the picking operation, operators must manually install the nozzles onto the holder. The specific process includes: selecting the specified nozzle according to the model → installing the matching holder → pushing the nozzle onto the holder base platform → cleaning the nozzle with a cleaning adhesive plate during the picking process. However, this manual operation method has many drawbacks. First, because it relies on manual nozzle installation, improper installation is prone to occur, leading to risks and potential process and quality risks. A more reliable and automated solution is urgently needed to improve the stability of the RW wafer reassembly process and product yield. Summary of the Invention

[0003] The purpose of this application is to solve the problem of easy displacement of the suction nozzle in the prior art, and to provide a suction nozzle assembly for grain picking.

[0004] To achieve the above objectives, this application adopts the following technical solution: a suction nozzle assembly for grain picking, comprising a vacuum suction rod and a suction nozzle installed at the lower end of the vacuum suction rod, wherein the center of the suction nozzle is provided with a vacuum airflow channel communicating with the airflow of the vacuum suction rod, the lower end of the vacuum suction rod is provided with a groove along the circumference, and the upper part of the suction nozzle has a retaining ring protruding toward the vacuum airflow channel, the retaining ring being embedded in the groove at the lower end of the vacuum suction rod, and the lower end of the vacuum suction rod being housed in the suction nozzle.

[0005] In one possible implementation, the vacuum suction rod includes a connecting rod body, a narrow neck located below the connecting rod body, and an expanded head connected below the narrow neck with an increased outer diameter.

[0006] In one possible implementation, a shoulder is provided between the connecting rod body and the narrow neck, the outer diameter of the shoulder being larger than the outer diameter of the expanded head, and the upper surface of the suction nozzle abutting against the shoulder.

[0007] In one possible implementation, the suction nozzle has a suction cup opening, a transition hole, and a receiving hole sequentially arranged from bottom to top, the expanded head is located in the receiving hole, and the suction cup opening, the transition hole, and the receiving hole are all connected to the vacuum airflow channel.

[0008] In one possible implementation, the inner diameter of the transition hole is smaller than the inner diameter of the suction cup opening, and the inner diameter of the transition hole and / or the suction cup opening is smaller than the inner diameter of the receiving hole.

[0009] In one possible implementation, the lower end of the suction nozzle has a lip with a maximum outer diameter of a first diameter, and the upper end of the suction nozzle has a main body with a maximum outer diameter of a second diameter, the second diameter being larger than the first diameter, and the main body and the lip are connected by a transition portion.

[0010] In one possible implementation, the size of the suction cup opening is not smaller than the size of the grain to be selected.

[0011] In one possible implementation, the groove wall is perpendicular to the axial direction of the vacuum suction rod.

[0012] In one possible implementation, the nozzle is made of flexible silicone material.

[0013] This application also provides a grain sorting device, including the aforementioned nozzle assembly.

[0014] This application creates a groove at the lower end of the vacuum suction rod, allowing the vacuum suction rod and the suction nozzle to engage. This improves the installation accuracy of the suction nozzle, reduces the risk of manual installation, and enhances the installation firmness of the suction nozzle, better securing it and preventing displacement. Attached Figure Description

[0015] Figure 1 This is a schematic diagram illustrating a case where the suction nozzle is not properly installed in prior art.

[0016] Figure 2 This is a schematic diagram illustrating a misaligned nozzle installation in prior art.

[0017] Figure 3 This is a schematic diagram illustrating the accidental displacement of the nozzle during the cleaning process in prior art.

[0018] Figure 4 This is a schematic diagram of a suction nozzle assembly provided in an embodiment of this application.

[0019] Figure 5 This is a split schematic diagram of the suction nozzle structure provided in an embodiment of this application.

[0020] The components include: 1. Vacuum suction rod; 11. Connecting rod body; 12. Expanding head; 13. Neck; 14. Shoulder.

[0021] 2. Suction nozzle; 21. Vacuum airflow channel; 211. Suction cup opening; 212. Transition hole; 213. Receiving hole; 214. Retaining ring;

[0022] 22. Lip; 23. Transition section; 24. Main body; 3. Grains; 4. Cleaning adhesive plate. Detailed Implementation

[0023] To explain in detail the technical content, structural features, achieved objectives, and effects of the utility model, the technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. In the following description, for illustrative purposes, numerous specific details are set forth to provide a detailed description of various exemplary embodiments or implementations of the utility model. However, various exemplary embodiments may also be implemented without these specific details or in one or more equivalent arrangements. Furthermore, the various exemplary embodiments may differ, but are not necessarily exclusive. For example, the specific shape, construction, and characteristics of the exemplary embodiments may be used or implemented in another exemplary embodiment without departing from the inventive concept.

[0024] In the following description, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0025] Furthermore, in this application, spatial relative terms such as “below,” “under,” “below,” “down,” “above,” “above,” “higher,” and “side” (e.g., as in a “sidewall”) are used to describe the relationship between one element and another (other) element as shown in the accompanying drawings. Spatial relative terms are intended to include different orientations of the device in use, operation, and / or manufacture other than those depicted in the drawings. For example, if the device in the drawings is flipped, an element described as “below” or “under” another element or feature would then be positioned “above” said other element or feature. Thus, the exemplary term “below” can include both above and below orientations. Furthermore, the device may be otherwise positioned (e.g., rotated 90 degrees or in other orientations), thus interpreting the spatial relative descriptive terms used herein accordingly.

[0026] In this application, unless otherwise expressly specified and limited, the term "connection" shall be interpreted broadly. For example, "connection" may be a fixed connection, a detachable connection, or an integral part; it may be a direct connection or an indirect connection through an intermediate medium.

[0027] In its previous production process, the applicant relied on manual installation of the suction nozzles, which could easily lead to the following risks:

[0028] See Figure 1 If the nozzle 2 is not completely pressed against the upper platform, the nozzle position will gradually move upward during the continuous crystal picking and placing process, causing the position of picking and placing the crystal 3 to deviate, which in turn causes process abnormalities.

[0029] See Figure 2 If the nozzle 2 is misaligned during initial installation, the contact position between the suction surface and the crystal 3 may change due to automatic correction during subsequent operations. If it comes into contact with the prohibited area of ​​the crystal 3, it will seriously affect the product quality.

[0030] See Figure 3 During the sorting process, cleaning adhesive plates (such as tape) are usually used to clean the nozzle 2 by adhesion. This method carries the risk of accidentally sticking the nozzle up or shifting it, which further affects the stability of the operation and the product yield.

[0031] After the applicant's improvements, the following was proposed: Figure 4 The suction nozzle assembly for grain picking shown includes a vacuum suction rod 1 and a suction nozzle 2 installed at the lower end of the vacuum suction rod 1. The "upper" and "lower" positional relationships described in this specification correspond to... Figure 4 The vertical positional relationship within.

[0032] The vacuum suction rod 1 is hollow inside and connected to a negative pressure air source. The vacuum suction rod 1 includes a connecting rod body 11, and a groove is formed circumferentially at its lower end. The groove wall is perpendicular to the axial direction of the vacuum suction rod 1. This groove forms a narrow neck 13 with a small outer diameter at the lower end of the vacuum suction rod, and an expanded head 12 with a larger outer diameter connected below the narrow neck 13.

[0033] The suction nozzle 2 is made of a flexible and elastically deformable material, such as silicone or rubber, which can effectively reduce the squeezing pressure when in contact with the product. The nozzle 2 is hollow inside and has a vacuum airflow channel 21 that communicates with the inner cavity of the vacuum rod. The upper part of the nozzle 2 has a retaining ring 214 protruding towards the center. The retaining ring 214 is embedded in the groove of the vacuum rod 1, and the thickness of the retaining ring 214 is equal to or slightly greater than the width of the groove. The inner diameter of the retaining ring 214 is equal to or slightly smaller than the outer diameter of the narrow neck 13, so that the retaining ring 214 can be stably and firmly fitted into the narrow neck 13 of the vacuum rod and prevent air leakage.

[0034] In one embodiment of this application, to better position and fix the suction nozzle and prevent it from being over-positioned, a shoulder 14 is provided between the connecting rod body 11 and the narrow neck 13. The outer diameter of the shoulder 14 is larger than that of the expanded head 12, and the upper surface of the suction nozzle 2 abuts against the shoulder 14. In this embodiment, the outer diameter of the shoulder 14 is equal to the outer diameter of the suction nozzle 2.

[0035] Specifically, the suction nozzle 2 has a suction cup opening 211, a transition hole 212, and a receiving hole 213 sequentially arranged from bottom to top, and the expanded head 12 is located in the receiving hole 213. The suction cup opening 211, the transition hole 212, and the receiving hole 213 form the vacuum airflow channel 21.

[0036] To better grip the die, the inner diameter of the suction cup opening 211 is greater than or equal to the size of the die or chip. The inner diameter of the transition hole 212 is smaller than the inner diameter of the suction cup opening 211 and smaller than the inner diameter of the receiving hole 213. The cross-section of the suction cup opening is similar to the cross-section of the die or chip, for example, both are circular or rectangular. When the cross-section of the suction cup opening and the die / chip is circular, the inner diameter of the suction cup opening refers to the inner diameter of the suction cup opening. When the cross-section of the suction cup opening and the die / chip is rectangular, the inner diameter of the suction cup opening refers to the maximum diameter (circumscribed circle diameter) of the suction cup opening, i.e., the length of the diagonal of the rectangle.

[0037] The lower end of the suction nozzle 2 has a lip 22 with a maximum outer diameter of a first diameter, and the upper end of the suction nozzle 2 has a main body 24 with a maximum outer diameter of a second diameter, the second diameter being larger than the first diameter, and the main body 24 and the lip 22 are connected by a transition portion 23.

[0038] In some embodiments, the cross-section of the nozzle 2 may be circular, with only the lip 22, the suction cup opening 211, and the transition hole 212 being rectangular. In the preferred embodiment of this application, the cross-section of the nozzle 2 is rectangular, consistent with the shape of the chip, and the lip 22, the suction cup opening 211, and the transition hole 212 are also rectangular. This can better ensure effective contact between the die 3 and the nozzle 2, and firmly "grip" the die.

[0039] In some embodiments, the cross-section of the vacuum suction rod 1 can be circular or rectangular. The shape of the cross-section of the vacuum suction rod can be the same as or different from the shape of the cross-section of the suction nozzle.

[0040] When the cross-section of the aforementioned vacuum suction rod or nozzle is rectangular, the outer diameter mentioned above refers to the diameter of the circumcircle of the rectangle.

[0041] Before sorting, the vacuum rod 1 is manually inserted into the nozzle 2, with the expanded head 12 of the vacuum rod 1 positioned within the nozzle 2. The nozzle is then pushed upwards until its upper surface rests against the shoulder 14 of the vacuum rod 1. At this point, the retaining ring 214 of the nozzle 2 is precisely engaged in the groove at the lower end of the vacuum rod 1, forming a tight seal with the narrow neck 13. The nozzle 2 is first pressed down on the cleaning plate 4, then lifted to clean foreign objects from the nozzle. The nozzle 2 then uses the vacuum airflow delivered through the vacuum airflow channel 21 to suck up and remove crystals 3, achieving 'use and pick up immediately'.

[0042] After the crystal 3 is placed in the area to be installed, the equipment can also activate the weak blowing function through the vacuum airflow channel to quickly separate the nozzle 2 and the crystal 3.

[0043] This application also discloses a grain sorting device having a plurality of the aforementioned nozzle assemblies. The grain sorting device further includes a plurality of detection sensors for detecting the height position of each of the aforementioned nozzles, a control circuit electrically connected to the plurality of aforementioned detection sensors, and an alarm connected to the control circuit. The aforementioned detection sensors are arrayed on the grain sorting device along the moving direction of the nozzle assemblies.

[0044] This sorting equipment can automatically measure the height of the nozzle. If the nozzle 2 is stuck to the cleaning plate 4 during the cleaning process, causing the nozzle to move downward, the height of the nozzle will change. When the height exceeds the threshold (100μm), it can be detected by the detection sensor and an alarm will be triggered to prohibit the operation and avoid abnormalities during the crystal picking process.

[0045] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope. The scope of protection of this utility model is defined by the appended claims, specification, and their equivalents.

Claims

1. A suction nozzle assembly for grain picking, comprising a vacuum suction rod and a suction nozzle mounted on the lower end of the vacuum suction rod, wherein the suction nozzle has a vacuum airflow channel at its center communicating with the airflow of the vacuum suction rod, characterized in that: The lower end of the vacuum suction rod has a groove along the circumference, and the upper part of the suction nozzle has a retaining ring protruding towards the vacuum airflow channel. The retaining ring is embedded in the groove at the lower end of the vacuum suction rod, and the lower end of the vacuum suction rod is housed in the suction nozzle.

2. The suction nozzle assembly for grain picking according to claim 1, characterized in that: The vacuum suction rod includes a connecting rod body, a narrow neck located below the connecting rod body, and an expanded head connected below the narrow neck with an increased outer diameter.

3. The suction nozzle assembly for grain picking according to claim 2, characterized in that: A shoulder is provided between the main body of the connecting rod and the thin neck. The outer diameter of the shoulder is larger than the outer diameter of the expanded head, and the upper surface of the suction nozzle rests on the shoulder.

4. The suction nozzle assembly for grain picking according to claim 2, characterized in that: The suction nozzle has a suction cup opening, a transition hole, and a receiving hole arranged sequentially from bottom to top. The expanded head is located in the receiving hole. The suction cup opening, the transition hole, and the receiving hole are all connected to the vacuum airflow channel.

5. The suction nozzle assembly for grain picking according to claim 4, characterized in that: The inner diameter of the transition hole is smaller than the inner diameter of the suction cup opening, and the inner diameter of the transition hole and / or the suction cup opening is smaller than the inner diameter of the receiving hole.

6. The suction nozzle assembly for grain picking according to claim 4, characterized in that: The inner diameter of the suction cup opening is greater than or equal to the size of the grain to be selected.

7. The suction nozzle assembly for grain picking according to claim 1, characterized in that: The lower end of the suction nozzle has a lip with a maximum outer diameter of a first diameter, and the upper end of the suction nozzle has a main body with a maximum outer diameter of a second diameter, the second diameter being larger than the first diameter, and the main body and the lip are connected by a transition portion.

8. The suction nozzle assembly for grain picking according to claim 1, characterized in that: The groove wall is perpendicular to the axis of the vacuum suction rod.

9. The suction nozzle assembly for grain picking according to any one of claims 1-8, characterized in that: The suction nozzle is made of flexible silicone material.

10. A grain sorting device, characterized in that, Includes the suction nozzle assembly as described in any one of claims 1-9.

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