Wafer baking oven structure with air supply channel

Abstract

A wafer baking oven structure with an air supply channel includes an oven body and a door. The oven body has a chamber with an opening in one wall. The oven body is equipped with an air supply unit, which has an air supply head located on the wall. The door is located on the oven body and opens or closes to the opening in the chamber. The door has at least one inner plate that is adjacent to the wall when the door is closed. The inner plate has an air inlet and at least one air outlet communicating with the air inlet. When the door is closed, the air inlet is connected to the air supply head, and the air outlets are connected to the opening in the chamber. This allows the air supply unit to inject protective gases into the chamber when the oven door is closed, maintaining a high level of cleanliness within the oven.

Description

Technical Field

[0001] This utility model relates to a baking device for semiconductor processes, and more particularly to a wafer baking oven structure with a gas supply channel that can provide, for example, a protective gas. Background Technology

[0002] In semiconductor manufacturing, wafers typically undergo multiple coating, exposure, development, and etching processes. After coating with photoresist or other chemical materials, a soft bake is often required to ensure uniform coating and remove moisture. After exposure and development, a post-exposure bake (PEB) or hard bake is necessary to stabilize the photoresist layer properties.

[0003] Traditional wafer baking equipment is typically integrated into the production line, with its temperature profiles and process parameters mostly fixed. When process optimization is needed, adjustments must be made directly on the production equipment, which is not only risky but can also disrupt normal production scheduling and cause capacity losses. Furthermore, poor airflow control during the heating process can lead to dust particle adhesion or solvent residue, reducing yield.

[0004] In view of this, the present invention provides a flexible and systematic experimental platform that, through the setting of various heating and cooling parameters, finds the ideal process parameters for wafers under different solvents, effectively improving yield and bringing significant competitive advantages to semiconductor manufacturing. Utility Model Content

[0005] The main objective of this invention is to provide a wafer baking oven structure with a gas supply channel. By utilizing the door closing design, the oven can be injected with protective gases when the door is closed to maintain a high level of cleanliness inside the oven.

[0006] To achieve the above objectives, this utility model provides a wafer baking oven structure with an air supply channel, including an oven body and a door. The oven body has a cavity, which forms an opening on a wall of the oven body. The oven body is provided with an air supply unit, which has an air supply head and is located on the wall. The door is located on the oven body and opens or closes the opening of the cavity. The door has at least one inner plate, which is adjacent to the wall when the door is closed. The inner plate is provided with an air inlet and at least one air outlet communicating with the air inlet. When the door is closed, the air inlet is connected to the air supply head, and each air outlet is connected to the opening of the cavity. Attached Figure Description

[0007] Figure 1 This is a three-dimensional appearance schematic diagram of the present invention.

[0008] Figure 2 This is a partial three-dimensional exploded view of the present invention.

[0009] Figure 3 This is a three-dimensional exploded view of the door body of this utility model.

[0010] Figure 4 It is based on Figure 1 Sectional view of section 4-4.

[0011] Figure 5 It is based on Figure 4 Enlarged detail of Part A.

[0012] Figure 6 It is based on Figure 1 Sectional view of section 6-6.

[0013] Figure 7 It is based on Figure 6 Enlarged detail of Part A.

[0014] In the attached figures, the following labels are used:

[0015] 1: The oven body;

[0016] 10: Chamber;

[0017] 100: Wall section;

[0018] 11: Gas supply unit;

[0019] 110: Gas supply head;

[0020] 110a: Gas supply port;

[0021] 111: Gas supply pipeline;

[0022] 2: Door body;

[0023] 2a: Airtight zone;

[0024] 20: Inner panel;

[0025] 200: Air intake port;

[0026] 201: Vent;

[0027] 201a: Nozzle;

[0028] 202: Inner window;

[0029] 21: Outer panel;

[0030] 210: Spacer column;

[0031] 211: Outer window;

[0032] 22: Door frame;

[0033] 23: Grip. Detailed Implementation

[0034] To further disclose the features and technical content of this utility model, please refer to the following detailed description and drawings of this utility model. However, the drawings are provided for reference and illustration only and are not intended to limit this utility model.

[0035] Please see Figure 1 and Figure 2 The figures shown are a three-dimensional appearance schematic diagram and a partial exploded three-dimensional schematic diagram of the present invention. The present invention provides a wafer baking oven structure with a gas supply channel to provide protective gases to maintain the cleanliness of the oven interior; the wafer baking oven structure includes an oven body 1 and a door 2 disposed on the oven body 1; wherein:

[0036] The oven body 1 may have a basic outer shell and an internal skeleton, and there is a chamber 10 inside it. The chamber 10 has an opening on a wall 100 (such as the front wall) of the oven body 1, so that the door 2 can be pivotally mounted on one side of the oven body 1 to open or close the opening of the chamber 10.

[0037] like Figure 2 As shown, the door 2 may include an inner panel 20, an outer panel 21, and a door frame 22 disposed between the inner panel 20 and the outer panel 21. When the door 2 is closed at the opening of the cavity 10 of the oven body 1 (i.e., the door 2 is stacked on the wall portion 100 of the oven body 1), the inner panel 20 is adjacent to or attached to the wall portion 100, while the outer panel 21 is exposed on the wall portion 100 of the oven body 1, as shown. Figure 1 As shown.

[0038] like Figure 3 As shown, the door body 2 is hollow inside, and at least one spacer 210 can be provided between the inner panel 20 and the outer panel 21 to make the inner panel 20 and the outer panel 21 spaced apart, so that the door frame 22 surrounds the area between the inner panel 20 and the outer panel 21 to close the interior of the door body 2; Figure 4As shown, an airtight zone 2a can be formed inside the door body 2 to prevent the gas inside from leaking out. Meanwhile, the door body 2 has an air inlet 200 and at least one air outlet 201 on its inner plate 20, and the air inlet 200 and the air outlet 201 are arranged at a certain distance from each other. For example, in the embodiment of this utility model, the air inlet 200 is located near a corner on the lower side of the inner plate 20, while the air outlets 201 can be multiple and arranged in a row, and are arranged horizontally on the upper side of the inner plate 20. Furthermore, to facilitate viewing the interior of the oven body 10 from outside the door 2, a transparent viewing window can be provided on the door 2. This viewing window can be formed by an inner window 202 and an outer window 211 facing each other, with the inner window 202 positioned between the air inlet 200 and the air outlet 201. This serves as an example of how the air inlet 200 and the air outlet 201 are disposed on the inner panel 20. Simultaneously, when the door 2 closes the cavity 10, the air outlet 201 connects to the opening of the cavity 10.

[0039] As described above, the inner window 202 of the viewing window is located on the inner panel 20, while the outer window 211 is located on the outer panel 21 and is positioned opposite to the inner window 202. Both the inner window 202 and the outer window 211 may be provided with a transparent plate-like structure for airtight sealing. The plate-like structure may be made of materials such as glass or transparent acrylic. In addition, a handle 23 may be provided on one side of the door body 2 for a person to hold, enabling the door body 2 to open or close the cavity 10 of the oven body 1.

[0040] like Figure 4 and Figure 5As shown, a gas supply unit 11 is provided on the wall portion 100 of the oven body 1. The gas supply unit 11 has a gas supply head 110 and at least one gas supply pipe 111 connected to the gas supply head 110. The gas supply head 110 is provided by protruding from the oven body 1 onto the wall portion 100 and has a gas supply port 110a. The gas supply pipe 111 is connected to the gas supply port 110a and connected to a gas supply source (not shown). The gas supply source can be located in other parts inside the oven body 1 or outside the oven body 1, and is used to supply the required gas, such as protective gas such as nitrogen, so that the gas is sprayed out from the gas supply port 110a. When the door 2 closes the chamber 10, the air inlet 200 of the door body 2 can correspond to and communicate with the air supply port 110a. Specifically, a sealing ring 112 can be provided on the air supply head 110 and surround the air supply port 110a, so that when the door body 2 is closed, its inner plate 20 is tightly pressed against the sealing ring 112, making the air inlet 200 and the air supply port 110a tightly connected, thereby allowing the gas supplied by the air supply source to be injected into the airtight area 2a inside the door body 2, i.e. Figure 5 As shown.

[0041] like Figure 6 and Figure 7 As shown, the door body 2 is hollow and has an airtight zone 2a. After the gas supply source injects the required gas into the door body 2, it can be injected into the chamber 10 through the airtight zone 2a and towards the air outlet 201. Specifically, each air outlet 201 can have at least one nozzle 201a on a surface of the inner plate 20 away from the airtight zone 2a. The nozzles 201a all face into the chamber 10, thereby accelerating the injection of gas into the chamber 10 and achieving the purpose of maintaining a high cleanliness level inside the oven. It is worth mentioning that the present invention can also further provide a channel (not shown) in the airtight zone 2a that connects the air inlet 200 to each of the air outlets 201. The channel can be composed of a pipe or other connectable closed components. In this way, the interior of the door body 2 does not need to be completely airtight, but the desired gas can still be injected through the interior of the door body 2 into the chamber 10.

[0042] Therefore, through the above-described structural composition, the wafer baking structure with gas supply channel of this utility model can be obtained.

Claims

1. A wafer baking oven structure with an air supply channel, characterized in that, include: An oven body having a cavity with an opening in one wall of the oven body, and the oven body having a gas supply unit with a gas supply head disposed on the wall; and A door is provided on the oven body and opens or closes to the cavity. The door has at least one inner plate and is adjacent to the wall when the door closes the cavity. The inner plate is provided with an air inlet and at least one air outlet communicating with the air inlet. When the door closes the chamber, the air inlet is connected to the air supply head, and the air outlet is connected to the opening of the chamber.

2. The wafer baking oven structure with gas supply channel as described in claim 1, characterized in that, The gas supply unit also has at least one gas supply line connected to the gas supply head, and the gas supply line is connected to a gas supply source.

3. The wafer baking oven structure with an air supply channel as described in claim 1 or 2, characterized in that, The gas supply head has a gas supply port that protrudes from the oven body onto the wall, and the gas supply head is provided with a sealing ring that surrounds the gas supply port.

4. The wafer baking oven structure with an air supply channel as described in claim 1, characterized in that, The door body further includes an outer panel, and the outer panel and the inner panel are spaced apart to form an airtight zone inside the door body.

5. The wafer baking oven structure with an air supply channel as described in claim 4, characterized in that, At least one spacer is provided between the inner panel and the outer panel, and the door body further has a door frame surrounding the area between the inner panel and the outer panel.

6. The wafer baking oven structure with an air supply channel as described in claim 4 or 5, characterized in that, The door body is provided with a transparent viewing window, and the viewing window is located between the air inlet and the air outlet.

7. The wafer baking oven structure with an air supply channel as described in claim 6, characterized in that, The viewport consists of an inner window and an outer window, with the inner window located on the inner panel and the outer window located on the outer panel and positioned opposite to the inner window.

8. The wafer baking oven structure with an air supply channel as described in claim 1, characterized in that, A connecting channel is provided between the air inlet and the air outlet, and the channel is located inside the door body.

9. The wafer baking oven structure with an air supply channel as described in claim 1, characterized in that, The air outlet is provided with at least one nozzle facing the chamber.

10. The wafer baking oven structure with an air supply channel as described in claim 1, characterized in that, The door is equipped with a handle.

Images