Ash removal rod and dust extractor for single crystal silicon furnace filter tank

Abstract

The application discloses a dust cleaning rod and dust collector of a single crystal silicon furnace filter tank. The filter tank is provided with a tank opening, the dust cleaning rod extends into the filter tank through the tank opening, a flexible brush head and a dust suction port are arranged at one end of the dust cleaning rod in the filter tank, the flexible brush head is used for stripping waste residue particles attached to the inner wall surface of the filter tank, and the dust suction port is used for sucking the stripped waste residue particles. A vibration motor is further arranged on the dust cleaning rod, and the vibration motor is used for driving the flexible brush head to vibrate relative to the filter tank. The application can solve the technical problems existing in manual cleaning of the single crystal silicon furnace filter tank.

Description

Technical Field

[0001] This application relates to the field of vacuum cleaner technology, specifically to a cleaning rod for a single-crystal silicon furnace filter canister and a vacuum cleaner. Background Technology

[0002] The high-temperature reduction reaction in a monocrystalline silicon furnace produces a large amount of flammable and explosive byproducts, including silicon dust, carbon monoxide, hydrogen, and small amounts of siloxanes. Current technology typically connects a steel filter tank in series between the furnace body and the vacuum pump. After a period of operation, the thickness of silicon powder deposited on the surface of the filter media and the walls of the filter tank can reach 3–5 mm, necessitating shutdown for cleaning.

[0003] Currently, the industry generally uses manual cleaning methods: operators use long-handled torches to extend into the tank and directly ignite high-concentration carbon monoxide in an open environment, relying on the shock wave generated by the instantaneous combustion to dislodge some of the dust; then, after the temperature inside the tank drops to room temperature, operators enter the tank, clean the filter media layer by layer, and finally collect and bag the dust.

[0004] However, this process has obvious drawbacks: a large amount of combustible gas and hot dust remain after the explosion, which can easily cause personal injury to workers in this environment; the dust particles are small and have a large specific surface area, which can easily cause secondary dust generation during manual cleaning, resulting in occupational health hazards and workshop environmental pollution.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present invention, and therefore may include information that does not constitute prior art. Utility Model Content

[0006] To address the shortcomings of existing technologies, this application discloses a cleaning rod and a vacuum cleaner for a single-crystal silicon furnace filter tank, which can solve the aforementioned technical problems associated with manually cleaning the single-crystal silicon furnace filter tank.

[0007] To achieve the above objectives, this application provides the following technical solution: The cleaning rod of the filter tank of the monocrystalline silicon furnace has an opening in the filter tank, through which the cleaning rod extends into the filter tank. A flexible brush head and a dust suction port are provided at the end of the cleaning rod located inside the filter tank. The flexible brush head is used to peel off the waste residue particles attached to the inner wall of the filter tank, and the dust suction port is used to suck up the peeled waste residue particles. A vibration motor is also provided on the cleaning rod, which is used to drive the flexible brush head to vibrate relative to the filter tank.

[0008] In a preferred embodiment, a limiting post is provided at one end of the cleaning rod located inside the filter tank, and the flexible brush head is rotatably connected to the limiting post, with the flexible brush head rotating along the inner wall of the filter tank.

[0009] A further preferred technical solution is that a bolt is provided at one end of the flexible brush head facing the limiting post. The bolt has a first position where it is separated from the limiting post and a second position where it is pressed against the limiting post. The bolt rotates relative to the limiting post in the first position and the flexible brush head is stationary relative to the limiting post in the second position.

[0010] A further preferred technical solution is that a brush head motor is provided at one end of the cleaning rod located inside the filter tank, and the output end of the brush head motor is fixedly connected to a limiting post. When the bolt is in the second position, the brush head motor drives the flexible brush head to rotate.

[0011] In a preferred embodiment, a threaded tube is connected to one end of the cleaning rod located outside the filter tank. The threaded tube is configured as a flexible tube that can extend and bend, and a vacuum cleaner is connected to the threaded tube.

[0012] In a preferred embodiment, the dust removal rod is further provided with a connector, one end of which is connected to the dust removal rod, and the other end of which is connected to a flexible brush head and a dust suction port, or an annular brush head is connected to the other end of the connector.

[0013] In addition, this application also discloses a vacuum cleaner, including a cleaning rod for a monocrystalline silicon furnace filter canister, wherein the cleaning rod for the monocrystalline silicon furnace filter canister is the cleaning rod for the monocrystalline silicon furnace filter canister described in any of the above technical solutions.

[0014] In a preferred embodiment, the vacuum cleaner has an inlet, which is connected to a threaded tube, which is located at the end of the cleaning rod outside the filter canister.

[0015] This application discloses a cleaning rod and a dust collector for a single-crystal silicon furnace filter tank, which has the following advantages: The flexible brush head and ring brush head, combined with the operating rod, allow workers to complete the cleaning operation while standing outside the filter tank of the monocrystalline silicon furnace. Moreover, the long brush head and ring brush head can be replaced and installed to clean the filter tank without leaving any dead corners, reducing the amount of labor required for manual cleaning of residual waste residue. The flexible brush head and ring brush head at the front end sweep away waste residue particles, and then suck up carbon monoxide waste gas and most of the waste residue particles, thus achieving the suction and discharge of carbon monoxide waste gas and most of the waste residue particles, reducing the labor intensity of workers. This effectively avoids the risk of personal injury to workers caused by a large amount of flammable gas and hot dust remaining after a combustion explosion, and also reduces the risk of occupational health hazards and workshop environmental pollution caused by secondary dust during manual cleaning. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0017] Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without any creative effort.

[0018] Figure 1 This is a schematic diagram of Embodiment 1 of this application; Figure 2 This is a schematic diagram of a vacuum tube connected to a flexible brush head in Embodiment 1 of this application; Figure 3 This is a schematic diagram of a suction pipe connected to a ring-shaped brush head according to Embodiment 1 of this application; Figure 4 This is a schematic diagram of Embodiment 2 of this application. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below. Obviously, the described embodiments are some embodiments of this application, but not all embodiments.

[0020] Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] Example 1 like Figures 1 to 3 As shown, the cleaning rod of the single-crystal silicon furnace filter tank described in this application has a tank opening. The cleaning rod 320 extends into the filter tank through the tank opening. A flexible brush head 370 and a dust suction port 350 are provided at one end of the cleaning rod 320 located inside the filter tank 400. A vibration motor 330 is also provided on the cleaning rod 320. After the vibration motor 330 is started, it can drive the flexible brush head 370 to vibrate relative to the filter tank 400 through vibration. The flexible brush head 370 can maintain its contact with the inner wall surface of the filter tank 400 due to its flexibility. The curvature of the flexible brush head 370 matches the curvature of the inner wall surface of the filter tank 400, and it is elastic and can bend in one direction. While vibrating, the flexible brush head 370 peels off the waste residue particles attached to the inner wall surface of the filter tank 400, and the dust suction port 350 sucks up the peeled waste residue particles.

[0022] Specifically, to facilitate the installation and adjustment of the flexible brush head 370, a limiting post 360 is provided at one end of the cleaning rod 320 located inside the filter tank 400. The flexible brush head 370 has a round hole, which rotatably engages with the limiting post 360. The flexible brush head 370 and the limiting post 360 are rotatably connected, and the flexible brush head 370 rotates along the inner wall of the filter tank 400. To fix the flexible brush head 370 after adjusting its position, a bolt 380 can be provided at one end of the flexible brush head 370 facing the limiting post 360. The bolt 380 has a first position where it is separated from the limiting post 360 and a second position where it is pressed against the limiting post 360. In the first position, the bolt 380 rotates relative to the limiting post 360, and in the second position, the flexible brush head 370 is stationary relative to the limiting post 360. A threaded tube 310 is connected to one end of the cleaning rod 320 located outside the filter canister 400. The threaded tube 310 is configured as a flexible tube that can extend and bend. The threaded tube 310 is connected to a vacuum cleaner 120.

[0023] In other embodiments, a brush head motor may be provided at one end of the cleaning rod 320 located inside the filter tank 400. The output end of the brush head motor is fixedly connected to a limiting post 360, and when the bolt 380 is in the second position, the brush head motor drives the flexible brush head 370 to rotate. Alternatively, a connecting joint 340 may also be provided on the cleaning rod 320. One end of the connecting joint 340 is connected to the cleaning rod 320, and the other end of the connecting joint 340 is connected to the flexible brush head 370 and the suction port 350. Or, an annular brush head 390 may be connected to the other end of the connecting joint 340.

[0024] During use, after adjusting the angle of the flexible brush head 370, the worker fixes it with bolts 380. Then, the flexible brush head 370 is inserted into the filter tank 400 to clean the waste residue attached to the inner wall of the filter tank 400. At this time, the vibration motor 330 is in the starting state, so that the flexible brush head 370 is in the vibrating state, which can better clean the waste residue. At the same time, the vacuum cleaner 120 is turned on, so that the suction port 350 below the long brush head 370 sucks away the cleaned waste residue. After the flexible brush head 370 has finished cleaning, it is removed and replaced with a ring brush head 390 to remove the waste residue in the corners.

[0025] Example 2 like Figure 4As shown, the vacuum cleaner described in this application includes a cleaning rod for a monocrystalline silicon furnace filter canister, which is the same cleaning rod for the monocrystalline silicon furnace filter canister described in the above embodiment. The vacuum cleaner 120 has a suction inlet 110, which is connected to a threaded tube 310. The threaded tube 310 is located at the end of the cleaning rod 320 outside the filter canister 400. The threaded tube 310 and the suction inlet 110 are detachably connected to facilitate assembly and connection of the threaded tube 310 and the suction inlet 110.

[0026] It should be noted that, in this article, relational terms are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0027] Moreover, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0028] In the absence of further restrictions, an element defined by the phrase "comprising a..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0029] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A cleaning rod for a filter canister in a monocrystalline silicon furnace, wherein the filter canister is provided with a canister opening, wherein... The cleaning rod extends into the filter tank through the tank opening. A flexible brush head and a dust suction port are provided at the end of the cleaning rod located inside the filter tank. The flexible brush head is used to peel off the waste residue particles attached to the inner wall of the filter tank, and the dust suction port is used to suck up the peeled waste residue particles. A vibration motor is also provided on the cleaning rod, which is used to drive the flexible brush head to vibrate relative to the filter tank.

2. The cleaning rod of the filter tank for a single-crystal silicon furnace according to claim 1, wherein, A limiting post is provided at one end of the cleaning rod located inside the filter tank. The flexible brush head is rotatably connected to the limiting post, and the flexible brush head rotates along the inner wall of the filter tank.

3. The cleaning rod of the filter tank for a single-crystal silicon furnace according to claim 2, wherein, A bolt is provided at one end of the flexible brush head facing the limiting post. The bolt has a first position where it is separated from the limiting post and a second position where it is tightened against the limiting post. The bolt rotates relative to the limiting post in the first position and the flexible brush head is stationary relative to the limiting post in the second position.

4. The cleaning rod of the filter tank for a single-crystal silicon furnace according to claim 3, wherein, A brush head motor is installed at one end of the cleaning rod located inside the filter tank. The output end of the brush head motor is fixedly connected to a limiting post. When the bolt is in the second position, the brush head motor drives the flexible brush head to rotate.

5. The cleaning rod of the filter tank for a single-crystal silicon furnace according to claim 1, wherein, A threaded tube is connected to one end of the cleaning rod located outside the filter canister. The threaded tube is configured as a flexible tube that can extend and bend, and a vacuum cleaner is connected to the threaded tube.

6. The cleaning rod of the filter tank for a single-crystal silicon furnace according to claim 1, wherein, The cleaning rod is also provided with a connector, one end of which is connected to the cleaning rod and the other end of which is connected to a flexible brush head and a dust suction port, or a ring brush head is connected to the other end of the connector.

7. A vacuum cleaner, including the cleaning rod of the filter canister for the monocrystalline silicon furnace, wherein, The cleaning rod of the monocrystalline silicon furnace filter canister is the cleaning rod of the monocrystalline silicon furnace filter canister as described in any one of claims 1 to 6.

8. The vacuum cleaner according to claim 7, wherein, The vacuum cleaner has an intake port connected to a threaded tube, which is located at the end of the cleaning rod outside the filter canister.

Images