An extraction device for large particles on cleanroom garment surfaces

Abstract

The utility model relates to industrial cleanliness monitoring and particle processing technical field, especially a kind of extraction device for large particle on clean clothes surface. At present, in the production of electronic manufacturing, chip and semiconductor industry, the attention of large particle on clean clothes surface is insufficient, there is no extraction device specially used for large particle on clean clothes surface.The extraction device provided by the utility model, by adopting subsection type first air pipe containing detachable filter membrane clamp, processing box with air inlet filter, combined with motor-driven paddle agitating clean clothes, vacuum pump negative pressure converging large particle device synergistic effect, application this corresponding extraction method, the directional extraction and accurate quantization of the large particle with particle size >10µm on clean clothes surface are realized, the problem that traditional broad-spectrum detection data distortion, unable to guide batch quality control is solved, and the technical blank that traditional technology lacks large particle extraction scheme for the particle size >10µm on clean clothes surface is filled.

Description

Technical Field

[0001] This utility model relates to the field of industrial cleanliness monitoring and particle treatment technology, and in particular to a device for extracting large particles from the surface of cleanroom garments. Background Technology

[0002] In industries such as electronics manufacturing, chips, and semiconductors, cleanrooms are the core environment for ensuring production precision and product quality. Cleanroom garments, as a key barrier to prevent particulate contamination from personnel, have surface particle control that is directly related to production safety. According to the ISO 14644-1 standard, the industry generally focuses on the detection and control of suspended particles in the range of 0.1µm to 5µm. However, in practice, it has been found that another type of particle has an impact on actual production and product quality: large particles with a diameter >10µm. These large particles (including environmental dust and fibers released from aging cleanroom garments) have a large mass and relatively strong adhesion, making them easy to remain on the surface of cleanroom garments and in fabric folds and gaps. This can not only cause serious product defects such as substrate pits and chip cracks, but also reduce production yield.

[0003] However, current industry testing and protection for cleanroom garments have significant shortcomings: on the one hand, cleanroom garments gradually age over time, leading to decreased fabric structural stability and the continuous release of large particles such as fibers; on the other hand, most related tests focus on suspended particles as specified in ISO 14644-1, lacking specific testing and evaluation for particles larger than 10µm. This has resulted in the long-term neglect of the risks associated with large particles adhering to and releasing from the surface of cleanroom garments during aging. Existing cleanroom garment cleaning or particle extraction devices are mostly designed for broad-spectrum dust removal, failing to optimize the directional extraction structure for the physical characteristics of particles larger than 10µm (large mass, strong adhesion, and easy residue). This results in low efficiency in removing large particles from the fabric surface, making precise and efficient extraction difficult. Consequently, it becomes impossible to confirm the impact of large particles on the cleanroom garment surface on production efficiency and product yield. In summary, traditional technologies lack a dedicated device capable of directional and efficient extraction of particles larger than 10µm from the surface of cleanroom garments, urgently requiring targeted solutions to these problems. Utility Model Content

[0004] Based on this, it is necessary to address the above-mentioned shortcomings by providing an extraction device for large particles on the surface of cleanroom garments, comprising: a support, a motor, a stirring paddle, a processing box, a first air pipe, and a vacuum pump. The motor and the processing box are fixed on the support. The stirring paddle includes: a rotating shaft and blades fixed to one end of the rotating shaft. The blades are disposed inside the processing box. The top or side wall of the processing box has a shaft extension hole and an air inlet. The rotating shaft extends out from the shaft extension hole and is drivenly connected to the power shaft of the motor. A filter is provided on the air inlet. A first through hole is provided at the bottom of the processing box. One end of the first air pipe is connected to the first through hole, and the other end is connected to the vacuum pump. A filter membrane for collecting large particles is provided inside the first air pipe.

[0005] Preferably, the first air tube includes a second air tube and a third air tube. One end of the second air tube is connected to the first through hole and the other end is connected to the third air tube. One end of the third air tube is connected to the second air tube and the other end is connected to the vacuum pump. The connection end of the second air tube and the third air tube is detachably provided with a filter membrane clip, and the filter membrane is disposed in the filter membrane clip.

[0006] Preferably, the processing box is cylindrical.

[0007] Preferably, the bottom of the processing box is funnel-shaped, and the first through hole is located at the lowest point of the bottom of the processing box.

[0008] Preferably, a metal mesh for placing cleanroom garments is provided below the paddle.

[0009] Preferably, a shaft seal is fitted onto the rotating shaft, and the shaft seal is fixed to the shaft extension hole.

[0010] Preferably, the blade edge is a smooth arc shape, the blade is made of PA66+GF, and the processing box is made of 304 stainless steel.

[0011] Preferably, the side wall of the processing box is provided with a sealing door with a sealing ring.

[0012] Preferably, the vacuum pump is a rotary vane vacuum pump.

[0013] The aforementioned extraction device for large particles on the surface of cleanroom garments utilizes a segmented first air tube with a detachable filter membrane clip, a processing box with an air inlet filter, and a device that uses a motor-driven paddle to agitate the cleanroom garment and a vacuum pump to collect particles under negative pressure. By employing a corresponding large particle extraction method, it achieves the directional extraction and precise quantification of large particles with a diameter >10µm on the surface of cleanroom garments. This solves the problems of data distortion and inability to guide batch quality control in traditional broad-spectrum detection methods, and fills the technological gap of traditional technologies lacking a solution for extracting large particles with a diameter >10µm on the surface of cleanroom garments. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a device for extracting large particles from the surface of cleanroom garments in one embodiment of the present invention.

[0015] Explanation of reference numerals in the attached drawings: 100-bracket, 200-motor, 300-stirring paddle, 310-shaft, 311-shaft seal, 320-paddle blade, 400-processing box, 400a-shaft extension hole, 400b-air inlet, 400c-first through hole, 410-filter, 420-metal mesh, 430-sealing door, 500-first air pipe, 510-filter membrane clamp, 511-filter membrane, 520-second air pipe, 530-third air pipe, 600-vacuum pump. Detailed Implementation

[0016] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0017] This utility model discloses a device for extracting large particles from the surface of cleanroom garments, such as... Figure 1As shown, it includes: a support 100, a motor 200, a stirring paddle 300, a processing tank 400, a first air pipe 500, and a vacuum pump 600. The support 100 is used to support the components of the extraction device. The motor 200 and the processing tank 400 are fixed on the support. In one embodiment, the motor 200 is located directly above the processing tank 400. In other embodiments, the motor 200 can be located on the side or diagonally above the processing tank 400 or in other positions. The motor 200 only needs to provide power. The agitator 300 consists of a rotating shaft 310 and blades 320. The blades 320 are integrally formed and fixed to one end of the rotating shaft 310. The blades 320 are completely placed in the internal cavity of the processing tank 400. The rotating shaft 310 extends outward from the shaft extension hole 400a opened in the top or side wall of the processing tank 400. The end of the rotating shaft 310 extending out of the shaft extension hole 400a is connected to the power shaft of the motor 200. The transmission connection method is: coupling drive, belt drive, chain drive, gear drive, worm gear drive, universal joint drive, etc., selected according to the relative position of the motor 200 and the agitator 300. The motor 200 drives the agitator 300 to rotate inside the processing tank 400. The top or side wall of the processing chamber 400 is also provided with an air inlet 400b, and a filter 410 is installed at the air inlet 400b. The filter 410 can filter the outside air entering the processing chamber 400 to prevent particles in the external environment from entering the processing chamber 400 and interfering with the extraction results of large particles on the surface of the clean garment. In one embodiment, the shaft extension hole 400a and the air inlet 400b are provided in the top wall of the processing chamber 400. In other embodiments, the shaft extension hole 400a and the air inlet 400b are provided in the side wall of the processing chamber 400. The bottom of the processing chamber 400 is provided with a first through hole 400c. The first through hole 400c is sealed and connected to one end of the first air pipe 500. The other end of the first air pipe 500 is connected to the vacuum pump 600. At the same time, a filter membrane 511 for collecting large particles is provided inside the first air pipe 500. To facilitate the replacement of the filter membrane 511 and the collection of large particles, the first air pipe 500 is divided into two parts: the second air pipe 520 and the third air pipe 530. One end of the second air pipe 520 is sealed and connected to the first through hole 400c at the bottom of the processing box 400, and the other end is connected to one end of the third air pipe 530. The other end of the third air pipe 530 is sealed and connected to the air inlet of the vacuum pump 600. At the connection between the second air pipe 520 and the third air pipe 530, a filter membrane clip 510 is detachably installed. The filter membrane 511 used to collect large particles is embedded inside the filter membrane clip 510. The connection between the filter membrane clip 510 and the second air pipe 520 and the third air pipe 530 adopts a snap-fit ​​sealing structure, which not only ensures the sealing of the gas passage, but also enables quick disassembly and assembly.

[0018] The operating procedure of the device for extracting large particles from the surface of cleanroom garments provided by this utility model is as follows: Before carrying out the extraction of large particles from cleanroom garments, a blank test is performed on the system. At this time, no cleanroom garments are placed in the processing box 400. The appropriate filter membrane 511 is installed into the filter membrane clamp 510 and the air pipe is connected. The motor 200 is started to drive the stirring paddle 300 to run idle. At the same time, the vacuum pump 600 is turned on. The outside air enters the processing box 400 after being filtered by the filter 410 through the air inlet 400b. The background particles in the processing box 400 enter the second air pipe 520 through the first through hole 400c at the bottom of the processing box 400 with the airflow. The particles are then intercepted by the filter membrane 511 in the filter membrane clamp 510, thereby obtaining the background particle data of the device. After completing the blank test, replace the filter membrane 511. Place the cleanroom garment to be tested in a fluffy state inside the processing chamber 400. Restart the motor 200. The motor 200 drives the rotating shaft 310, which in turn drives the paddle 320 to rotate inside the processing chamber 400. During the rotation, the paddle 320 gently agitates the cleanroom garment, causing large particles with a diameter >10µm adhering to the surface and hidden inside the garment to be fully dislodged and dispersed into the air inside the processing chamber 400. At the same time, the vacuum pump 600 continues to run, creating a stable negative pressure inside the processing chamber 400, carrying away large particles... The airflow carrying particles enters the second air pipe 520 through the first through hole 400c at the bottom of the processing chamber 400. When the airflow passes through the filter membrane 511 inside the filter membrane clamp 510, large particles with a diameter >10µm are completely intercepted by the filter membrane 511. The filtered clean airflow is then discharged by the vacuum pump 600 through the third air pipe 530. After the preset extraction time is reached (in one embodiment, the extraction time is 1 minute), the motor 200 and the vacuum pump 600 are turned off, and the filter membrane clamp 510 is removed to take out the filter membrane 511 that has intercepted large particles for subsequent large particle counting analysis. It should be noted that the pore size of the filter membrane 511 is 8-10µm.

[0019] This invention provides a device for extracting large particles from the surface of cleanroom garments. Addressing the shortcomings of existing cleanroom garment particle collection devices with their broad-spectrum design, it overcomes the limitations of previous methods that indiscriminately collect particles of all sizes and cannot accurately extract particles larger than 10µm. Through the directional stirring of the agitator 300 within the processing chamber 400, the cleanroom garment remains fluffy and relaxed, allowing large particles in folds and crevices to detach completely. Combined with the negative pressure airflow created by the vacuum pump 600 within the processing chamber 400, large particles are rapidly moved towards the bottom first through-hole 400c and into the first air pipe 500, preventing them from settling and being lost within the processing chamber 400. Finally, the particles are trapped by the filter membrane 511 within the first air pipe 500, significantly improving the collection efficiency of large particles. In addition to improving efficiency, the filter 410 at the air inlet 400b of the processing box 400 can effectively intercept stray particles from the external environment, avoiding interference from external particles at the source. The detachable design of the filter membrane clip 510 allows for convenient blank testing to calibrate the background particles, ensuring that the extracted large particle data is the actual amount released from the cleanroom garment. This solves the problems of data distortion and inaccurate quantification in existing equipment. The modular adaptation structure of the filter membrane clip 510 and the filter membrane 511 allows for quick replacement of consumables. The extracted filter membrane 511 can be directly transferred to equipment such as microscopes for particle counting, which perfectly meets the needs of industries such as semiconductors and electronics manufacturing for accurate detection of large particles in cleanroom garments, filling the technological gap in large particle directional extraction equipment.

[0020] In one embodiment, such as Figure 1 As shown, the processing box 400 is cylindrical. The cylindrical processing box 400 has the characteristics of no sharp edges, smooth inner wall surface, and uniform radial force. On the one hand, when the stirring paddle 300 drives the cleanroom garment to rotate inside the box, the cylindrical inner wall can guide the cleanroom garment to form a stable and regular rolling trajectory, avoiding the cleanroom garment from being folded or squeezed due to being stuck at the sharp edges. At the same time, it can make the blades 320 of the stirring paddle 300 act evenly on all parts of the cleanroom garment. On the other hand, the cylindrical box structure can make the negative pressure airflow generated by the vacuum pump 600 form a uniform circulation inside the processing box 400, causing the large particles that fall off to flow smoothly along the inner wall of the box to the first through hole 400c at the bottom, reducing the generation of dead airflow. The cylindrical chamber not only significantly reduces friction and abrasion between the cleanroom garments and the chamber walls during agitation, preventing the release of large fibrous particles due to wear and tear that could interfere with test results, but also protects the integrity of the cleanroom garment fabric and extends its service life. Secondly, the uniform tumbling of the cleanroom garments within the cylindrical chamber allows for more thorough removal of large particles (>10µm in diameter) from their surface and folds. Combined with the uniformly circulating negative pressure airflow, this effectively reduces localized settling of large particles within the processing chamber 400, improving the release and collection efficiency of large particles. Furthermore, the smooth cylindrical inner wall has no dead corners, making it less likely for particle impurities to remain, facilitating subsequent cleaning and maintenance, reducing the baseline particle count of the system, and further ensuring the accuracy of large particle extraction data.

[0021] In one embodiment, such as Figure 1 As shown, the bottom of the processing chamber 400 is configured as a funnel shape, with the first through-hole 400c located at the lowest point. The conical structure of the funnel-shaped bottom possesses natural converging and guiding characteristics. Large particles with a diameter >10µm will automatically slide along the inclined conical surface of the funnel-shaped bottom towards the first through-hole 400c at the lowest point under the negative pressure airflow generated by the empty pump and the action of gravity. The funnel-shaped bottom can significantly improve the collection efficiency of large particles. The converging structure of the funnel-shaped bottom completely eliminates the problem of particle settling dead zones that are prone to occur in flat-bottomed chambers. Whether it is suspended large particles that have fallen off due to stirring or particles that have settled due to gravity, they can be efficiently guided to the first through-hole, avoiding the problem of large particles remaining at the bottom of the processing chamber 400 and not being able to be collected. Especially for large particles with a diameter >10µm and a relatively large mass, its gravity guiding effect is more significant, which can further ensure the integrity of the extraction of large particles. Furthermore, it effectively reduces interference from background particles in the system. The funnel-shaped bottom has no residual dead corners, and the conical structure facilitates the removal of attached particulate impurities during device cleaning and maintenance. This reduces background interference from residual particles at the bottom of the processing chamber 400 on subsequent blank tests and sample extraction, improving the accuracy of the detection data. Thirdly, it simplifies the device cleaning process. The smooth conical surface of the funnel shape has no dust accumulation dead corners, making it easier to clean by airflow purging or simple wiping compared to a flat-bottomed chamber. This reduces the difficulty and frequency of equipment maintenance and extends the stable operation cycle of the device. Fourthly, it enhances airflow utilization efficiency. The converging airflow field allows the negative pressure effect of the vacuum pump 600 to be more concentrated, achieving a better particle guiding effect without increasing the pumping power. While ensuring collection efficiency, it also takes into account the energy economy of the equipment, making it more suitable for the low-energy consumption and high-precision detection scenarios in cleanrooms.

[0022] In one embodiment, such as Figure 1 As shown, a metal mesh 420 for placing cleanroom garments is provided below the paddle 320. The metal mesh 420 is detachably installed on the inner wall of the treatment box 400. The metal mesh 420 can stably support the cleanroom garments in the area directly below the paddle 320, so that the paddle 320 only gently turns and agitates the cleanroom garments during rotation, without directly rubbing against the cleanroom garments. At the same time, the metal mesh 420 can form spatial layers, physically separating the cleanroom garments from the funnel area at the bottom of the treatment box 400, so as to prevent the cleanroom garments from blocking the first through hole 400c, ensuring the smooth flow of negative pressure airflow and the stability of the device operation.

[0023] In one embodiment, such as Figure 1As shown, a shaft seal 311 is fitted onto the rotating shaft 310 and fixed to the shaft extension hole 400a. The shaft seal 311 seals the gap between the rotating shaft 310 and the shaft extension hole 400a, completely blocking the intrusion path of external particles. The tight seal of the shaft seal 311 prevents unfiltered air and particles from entering the processing chamber 400 through the gap in the shaft extension hole 400a, eliminating interference from the gap between the rotating shaft 310 and the shaft extension hole 400a on background particles and ensuring the accuracy of data on large particles released from cleanroom garments. The shaft seal 311 also ensures the stability of the negative pressure airflow field inside the processing chamber 400. It prevents leakage of the negative pressure airflow from the shaft extension hole 400a, ensuring that the negative pressure generated by the vacuum pump 600 acts evenly inside the processing chamber 400, allowing large particles with a diameter >10µm to fall off. The particles can smoothly converge into the first through hole 400c at the bottom of the funnel shape, without causing a decrease in particle collection efficiency due to airflow leakage. The shaft seal 311 can also reduce the risk of particles generated by the device itself. The protective function of the shaft seal 311 reduces the direct friction between the rotating shaft 310 and the shaft extension hole 400a, preventing debris particles generated by mechanical wear from mixing into the detection system, further reducing the background particle count of the system, and extending the service life of key components of the device. The shaft seal can reduce the radial shaking when the rotating shaft 310 rotates, reduce the wear and tear between the shaft extension hole 400a and the rotating shaft 310, and prevent trace amounts of water vapor or impurities that may exist in the processing box 400 from corroding the rotating shaft, thereby improving the overall operational stability and durability of the device.

[0024] In one embodiment, such as Figure 1 As shown, the blade 320 has a smooth, rounded edge, avoiding snagging and scratching with cleanroom garments through the absence of sharp corners. The smooth surface also reduces dead zones for particle adhesion and airflow eddies, ensuring stable airflow within the treatment chamber 400. The blade 320 is made of PA66+GF, a material known for its high strength, high abrasion resistance, low particle release, and excellent dimensional stability. This ensures the blade 320 remains undeformed during long-term rotation, maintains uniform agitation force, significantly reduces friction-generated debris, and is adaptable to the humidity of cleanroom environments, preventing moisture-induced aging. The treatment chamber 400 is made of 304 stainless steel, utilizing its high-gloss surface to reduce particle adhesion. Its excellent corrosion resistance meets the cleaning and maintenance needs of cleanrooms, while preventing external particle contamination such as rust and oxide layer peeling.

[0025] In one embodiment, such as Figure 1 As shown, the side wall of the processing box 400 is provided with a sealing door 430 with a sealing ring, which facilitates the handling of clean garments.

[0026] In one embodiment, such as Figure 1As shown, vacuum pump 600 is a rotary vane vacuum pump. Compared to other vacuum pumps, the rotary vane vacuum pump can provide a stable negative pressure, creating a uniform and continuous negative pressure airflow field within the processing chamber 400. This ensures that large particles >10µm that have been stirred and detached smoothly and directionally converge towards the first through-hole 400c at the bottom of the funnel, avoiding the sedimentation and loss or disordered diffusion of large particles caused by airflow turbulence due to negative pressure fluctuations. Furthermore, by controlling the pumping speed, it matches the retention efficiency of the filter membrane 511, preventing large particles from penetrating the filter membrane 511 due to excessively fast pumping, and also preventing the particle collection efficiency from decreasing due to excessively slow pumping. This fundamentally guarantees the integrity of large particle extraction and the accuracy of the data.

[0027] The device for extracting large particles from the surface of cleanroom garments provided by this utility model includes the following specific steps in its use: Step S1: Preliminary preparation. Place the extraction device in a clean room with a cleanliness level of not less than ISO 5, complete the electrical connection between the motor and power supply of the extraction device, and check the sealing and operating status of each component of the device. Step S2, Blank Test: Place a brand new, clean filter membrane into the filter membrane holder, install the filter membrane holder between the second and third air tubes, start the vacuum pump of the extraction device to evacuate the air, and after the air evacuation reaches the preset time, turn off the equipment and remove the filter membrane, seal it and store it as a blank group filter membrane. Step S3: Extract large particles from the surface of the cleanroom garment. Replace with a brand new, clean filter membrane of the same specification and place it into the filter membrane holder. Place the cleanroom garment to be tested into the processing box of the extraction device in a fluffy state. Start the motor and drive the paddle to rotate at a preset speed. Simultaneously start the vacuum pump to extract air. After the preset extraction time is reached, turn off the equipment, remove the filter membrane, seal and store it, and mark it as the sample group filter membrane. Step S4, Particle Counting Detection: Place the blank group filter membrane and the sample group filter membrane under the particle detection device respectively, identify and count the total number of particles with a diameter >10μm on the two filter membranes, record the number of large particles on the blank group filter membrane as Nblank, and record the number of large particles on the sample group filter membrane as Ntest; Step S5, Calculation of actual particle quantity: The formula N sample = N test - N blank is used to calculate the actual number of particles >10μm generated by the cleanroom garment to be tested.

[0028] Step S6: Repeat steps S4 and S5 for cleanroom garments with the same service life or from the same batch to obtain the number of large particles on the surface of cleanroom garments with the same service life: N i 1 sample, N i 2 samples, N i 3 sample, ..., N insample, calculates the average number of large particles on the surface of cleanroom garments with the same service life: N i avg sample = (N i 1sample+N i 2 sample + N i 3 sample + ... + N i n sample) / n; or the number of large particles on the surface of the same batch of cleanroom garments is: N j 1 sample, N j 2 samples, N j 3 sample, ..., N j For n samples, calculate the average number of large particles on the surface of cleanroom garments from the same batch: N j avg sample = (N j 1 sample + N j 2 sample + N j 3 sample + ... + N j n sample) / n; Step S7: Use the obtained data for data analysis.

[0029] In existing technologies, particle detection methods for cleanroom garments are mostly broad-spectrum, full-size particle counting, or only achieve general dust removal. There is no specific extraction process for particles larger than 10μm, making it impossible to accurately quantify the release of large particles. This has resulted in a long-standing lack of effective assessment methods for large particle contamination in cleanroom garments within the industry. The method for extracting large particles from the surface of cleanroom garments provided by this invention, based on the extraction device, constructs a complete large particle extraction chain: "cleanroom environment deployment - system baseline calibration - targeted particle extraction - accurate counting and quantification - preliminary batch data processing." This provides enterprises with accurate data on large particle contamination in single samples and, through mean analysis of batch data, provides quantitative evidence for cleanroom garment replacement cycle determination and batch procurement quality acceptance. It successfully fills the technological gap in the existing field of extraction and detection solutions for large particles >10μm on the surface of cleanroom garments.

[0030] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0031] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A device for extracting large particles from the surface of cleanroom garments, characterized in that, include: The system comprises a support frame (100), a motor (200), a stirring paddle (300), a processing tank (400), a first air pipe (500), and a vacuum pump (600). The motor (200) and the processing tank (400) are fixed on the support frame (100). The stirring paddle (300) includes a rotating shaft (310) and a blade (320) fixed to one end of the rotating shaft (310). The blade (320) is disposed inside the processing tank (400). A shaft extension hole (400a) is provided on the top wall or side wall of the processing tank (400). The air inlet (400b) is provided with a filter (410) on the air inlet (400b), and a first through hole (400c) is opened at the bottom of the processing box (400). One end of the first air pipe (500) is connected to the first through hole (400c) and the other end is connected to the vacuum pump (600). A filter membrane (511) for collecting large particles is provided in the first air pipe (500).

2. The extraction device for large particles on the surface of cleanroom garments according to claim 1, characterized in that, The first air tube (500) includes a second air tube (520) and a third air tube (530). One end of the second air tube (520) is connected to the first through hole (400c) and the other end is connected to the third air tube (530). One end of the third air tube (530) is connected to the second air tube (520) and the other end is connected to the vacuum pump (600). The connection end of the second air tube (520) and the third air tube (530) is detachably provided with a filter membrane clip (510), and the filter membrane (511) is disposed in the filter membrane clip (510).

3. The extraction device for large particles on the surface of cleanroom garments according to claim 2, characterized in that, The processing box (400) is cylindrical.

4. The extraction device for large particles on the surface of cleanroom garments according to claim 3, characterized in that, The bottom of the processing box (400) is funnel-shaped, and the first through hole (400c) is located at the lowest point of the bottom of the processing box (400).

5. The extraction device for large particles on the surface of cleanroom garments according to claim 4, characterized in that, A metal mesh (420) for placing cleanroom garments is provided below the blade (320).

6. The extraction device for large particles on the surface of cleanroom garments according to claim 2, characterized in that, A shaft seal (311) is fitted onto the rotating shaft (310), and the shaft seal (311) is fixed on the shaft extension hole (400a).

7. The extraction device for large particles on the surface of cleanroom garments according to claim 2, characterized in that, The blade (320) has a smooth arc-shaped edge and is made of PA66+GF. The processing box (400) is made of 304 stainless steel.

8. The extraction device for large particles on the surface of cleanroom garments according to claim 2, characterized in that, The processing box (400) has a sealing door (430) with a sealing ring on its side wall.

9. The extraction device for large particles on the surface of cleanroom garments according to claim 2, characterized in that, The vacuum pump is a rotary vane vacuum pump.

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