Liquid mixing device and semiconductor apparatus

Abstract

The application discloses a liquid mixing device and a semiconductor device. The liquid mixing device comprises: a plurality of input pipelines, wherein flow control adjusting components are arranged on the input pipelines; a liquid mixing container, which is used for mixing liquid flowing into the liquid mixing container; and a main conveying pipeline, which is arranged between the input pipelines and the liquid mixing container, the input end of the main conveying pipeline is connected with the output end of each input pipeline, the main conveying pipeline has a plurality of output ends, or the main conveying pipeline has one adjustable output end, which is used for connecting the main conveying pipeline with the liquid mixing container when the liquid flow in each input pipeline reaches a preset requirement, so that the liquid in each input pipeline flows into the liquid mixing container through the main conveying pipeline, the proportion of the liquid in the liquid mixing container is beneficial to meeting the preset requirement, the concentration stability of the liquid in the liquid mixing container is improved, and the controllability of subsequent process treatment is improved, thereby improving the quality stability of wafer products.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a liquid mixing device and semiconductor equipment. Background Technology

[0002] In integrated circuit manufacturing, wafer processing involves the extensive use of various chemical mixtures. As process nodes continue to shrink, the requirements for wafer processing precision are constantly increasing. Given the close relationship between the concentration stability of various chemicals in the mixture and wafer quality, the requirements for the concentration of these chemicals in the mixture are becoming increasingly stringent.

[0003] Existing mixing equipment cannot guarantee the concentration stability of various chemicals in the mixture, which has become a bottleneck restricting further improvement of process capabilities. Therefore, improving the existing mixing equipment to achieve higher precision concentration control has become an urgent need in the industry. Utility Model Content

[0004] The problem solved by this utility model embodiment is to provide a mixing device and semiconductor equipment to improve the concentration stability of various chemicals in the mixed solution.

[0005] To address the aforementioned problems, this utility model provides a liquid mixing device, comprising: multiple input pipes, each input pipe being equipped with a flow control and adjustment component; a mixing container for mixing liquids flowing into the mixing container via each input pipe; and a main delivery pipe disposed between the input pipes and the mixing container, wherein the input end of the main delivery pipe is connected to the output end of each input pipe, and the main delivery pipe has multiple output ends, or, the main delivery pipe has a single position-adjustable output end, for ensuring that the liquid flow rate in each input pipe reaches a preset requirement, or that the liquid transported by each input pipe continuously flows in the main delivery pipe for a preset time, so that when the liquid flow rate in each input pipe reaches the preset requirement, the main delivery pipe is connected to the mixing container, so that the liquid in each input pipe flows into the mixing container via the main delivery pipe.

[0006] Optionally, when the main delivery pipeline has multiple output ends, a flow path switching component is provided on the main delivery pipeline. The main delivery pipeline has a first output end and a second output end, and the first output end is connected to the mixing container. When the liquid flow rate in any of the input pipelines does not reach the preset requirement, the flow path switching component is used to disconnect the first output end from the input end of the main delivery pipeline and to connect the second output end from the input end of the main delivery pipeline. When the liquid flow rate in each of the input pipelines reaches the preset requirement, the flow path switching component is used to connect the first output end from the input end of the main delivery pipeline.

[0007] Optionally, the main delivery pipeline includes a first delivery pipeline connected to each of the input pipelines, and a second delivery pipeline and a third delivery pipeline connected to the first delivery pipeline respectively, wherein the output end of the second delivery pipeline serves as the first output end, and the output end of the third delivery pipeline serves as the second output end; the flow path switching component includes a first switching valve and a second switching valve, wherein the first switching valve is disposed on the second delivery pipeline, and the second switching valve is disposed on the third delivery pipeline.

[0008] Optionally, when the liquid flow rate in each of the input pipelines reaches the preset requirement, the first switching valve opens and the second switching valve closes, wherein both the first switching valve and the second switching valve include pneumatically controlled switching valves.

[0009] Optionally, the main delivery pipeline includes a first delivery pipeline connected to each of the input pipelines, and a second delivery pipeline and a third delivery pipeline connected to the first delivery pipeline respectively. The output end of the second delivery pipeline serves as the first output end, and the output end of the third delivery pipeline serves as the second output end. When the liquid flow rate in each of the input pipelines reaches the preset requirement, the flow path switching component is further used to disconnect the second output end of the main delivery pipeline from the input end. The flow path switching component includes a directional control valve. The input end of the directional control valve is connected to the output end of the first delivery pipeline, one output end of the directional control valve is connected to the input end of the second delivery pipeline, and the other output end of the directional control valve is connected to the input end of the third delivery pipeline.

[0010] Optionally, the directional control valve may include a reversing valve or a selector valve.

[0011] Optionally, if the main delivery pipeline has an adjustable output end, the main delivery pipeline includes a fourth delivery pipeline connected to each of the input pipelines, and a fifth delivery pipeline connected to the fourth delivery pipeline; the mixing device further includes: a container, in which a waste liquid container and a mixing container are arranged laterally and isolated from each other; a lever, one end of which is connected to the fifth delivery pipeline, and the other end is used to adjust the position of the output end of the fifth delivery pipeline; when the liquid flow rate in any of the input pipelines does not reach the preset requirement, the lever is used to make the output end of the fifth delivery pipeline face the waste liquid container; when the liquid flow rate in each of the input pipelines reaches the preset requirement, the lever is used to make the output end of the fifth delivery pipeline face the mixing container; wherein, the fifth delivery pipeline is located in the container and above the waste liquid container and the mixing container.

[0012] Optionally, the bottom surface of the container is provided with a partition extending longitudinally to near the top of the container, and the waste liquid container and the mixed liquid container are isolated from each other by the partition.

[0013] Optionally, a full liquid level detection component is provided near the top of the mixing container; the side wall of the mixing container is higher than the detection position of the full liquid level detection component.

[0014] Optionally, the mixing device further includes: a cylinder fixed above the container; and a connector, one end of which is fixedly connected to the piston rod of the cylinder, and the other end of which is fixedly connected to the lever.

[0015] Optionally, the cylinder may include a double-acting cylinder.

[0016] Optionally, the bottom of the waste liquid container is provided with a waste liquid output pipeline, and the waste liquid output pipeline is provided with a third switch valve, which is used to open when there is liquid to be discharged in the waste liquid container, and to close when there is no liquid to be discharged in the waste liquid container.

[0017] Optionally, a waste liquid detection component is provided near the bottom of the waste liquid container, which is used to determine whether there is liquid to be discharged in the waste liquid container.

[0018] Optionally, the fifth delivery pipeline is a corrugated pipe.

[0019] Optionally, the mixing device further includes: a mixing pipeline disposed between the input pipeline and the main delivery pipeline, wherein the input end of the mixing pipeline is connected to the output end of each of the input pipelines, and the output end of the mixing pipeline is connected to the input end of the main delivery pipeline.

[0020] Optionally, the flow control and regulation component includes an automatic flow regulating valve and a flow meter disposed on the input pipeline, and a regulating valve controller respectively coupled to the flow meter and the automatic flow regulating valve.

[0021] Accordingly, this utility model embodiment also provides a semiconductor device, including: the liquid mixing device described in any embodiment of this utility model.

[0022] Optionally, the semiconductor device includes a wet etching apparatus.

[0023] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages: The mixing device provided in this embodiment includes multiple input pipelines, each equipped with a flow control and adjustment component, a mixing container, and a main delivery pipeline located between the input pipelines and the mixing container. The main delivery pipeline has multiple output ends, or a single output end with adjustable position. The output end of the main delivery pipeline is used to ensure that the liquid flow rates in each input pipeline meet preset requirements under the adjustment of the flow control and adjustment component, allowing the liquid in each input pipeline to flow into the mixing container via the main delivery pipeline. This facilitates ensuring that the proportions of various liquids in the mixing container meet preset requirements, thereby improving the concentration stability of various liquids in the mixing container. This, in turn, improves the controllability of subsequent processing and ultimately enhances the quality stability of wafer products. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a liquid mixing device; Figure 2 This is a schematic diagram of the structure of the first embodiment of the mixing device of this utility model; Figure 3 This is a schematic diagram of the structure of the second embodiment of the mixing device of this utility model; Figure 4 This is a schematic diagram of the third embodiment of the mixing device of this utility model; Figure 5 This is a schematic diagram of the structure of the fifth delivery pipeline of the third embodiment of the mixing device of this utility model, with the output end facing the mixing container. Detailed Implementation

[0025] Currently, mixing devices still need improvement. This paper analyzes the reasons why these devices require further improvement, using one example. Figure 1 This is a schematic diagram of a liquid mixing device.

[0026] refer to Figure 1The mixing device 10 includes: a plurality of input pipes 11, each input pipe 11 being provided with a flow control and adjustment component 12; and a mixing container 13, which has a plurality of input ends corresponding one-to-one with each of the input pipes 11, and each input end of the mixing container 13 is connected to the corresponding input pipe 11. The mixing container 13 is used to mix the liquids flowing into the mixing container 13 via each of the input pipes 11.

[0027] Research has revealed that after the flow control regulating component 12 is activated, the liquid flow rate in each input pipeline 11 typically experiences a process of first increasing, then decreasing, then gradually fluctuating around the preset value, and finally stabilizing at the preset value, influenced by the liquid supply pressure. Therefore, in the initial stage of activation of the flow control regulating component 12, there is often a significant difference between the liquid flow rate in each input pipeline 11 and the preset value. This is especially true for chemicals with a higher proportion in the mixture; their liquid flow rate in the initial stage of activation of the flow control regulating component 12 often differs significantly from the preset value. This results in a significant difference between the volume ratio of chemicals with a lower proportion in the mixture and the preset ratio, consequently leading to poor concentration stability of various liquids in the mixing container 13, and consequently affecting the quality stability of the wafer products.

[0028] To address the aforementioned technical problems, this utility model provides a liquid mixing device, comprising: multiple input pipes, each input pipe being equipped with a flow control and adjustment component; a mixing container for mixing liquids flowing into the mixing container via each input pipe; and a main delivery pipe disposed between the input pipes and the mixing container, wherein the input end of the main delivery pipe is connected to the output end of each input pipe, and the main delivery pipe has multiple output ends, or, the main delivery pipe has a single position-adjustable output end, for ensuring that the liquid flow rate in each input pipe reaches a preset requirement, or that the liquid transported by each input pipe continuously flows in the main delivery pipe for a preset time, so that when the liquid flow rate in each input pipe reaches the preset requirement, the main delivery pipe is connected to the mixing container, allowing the liquid in each input pipe to flow into the mixing container via the main delivery pipe.

[0029] The solution disclosed in this utility model embodiment includes multiple input pipelines, and each input pipeline is equipped with a flow control and adjustment component, a mixing container, and a main delivery pipeline disposed between the input pipelines and the mixing container. The main delivery pipeline has multiple output ends, or the main delivery pipeline has a single output end with adjustable position. The output end of the main delivery pipeline is used to ensure that the liquid flow rates in each input pipeline reach the preset requirements under the adjustment of the flow control and adjustment component, so that the liquid in each input pipeline flows into the mixing container through the main delivery pipeline. This is beneficial to ensuring that the ratio between various liquids in the mixing container meets the preset requirements, and correspondingly, it is also beneficial to improve the concentration stability of various liquids in the mixing container, thereby improving the controllability of subsequent process processing, and further improving the quality stability of wafer products.

[0030] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0031] Figure 2 This is a schematic diagram of the structure of the first embodiment of the mixing device of this utility model.

[0032] refer to Figure 2 The mixing device 100 includes: multiple input pipes 110, each input pipe 110 being equipped with a flow control and adjustment component 111; a mixing container 120 for mixing liquids flowing into the mixing container 120 via each input pipe 110; and a main delivery pipe 130 disposed between the input pipes 110 and the mixing container 120, wherein the input end of the main delivery pipe 130 is connected to the output end of each input pipe 110, and the main delivery pipe 130 has multiple output ends. 30 has a position-adjustable output terminal, used to ensure that the liquid flow rate in each input pipe 110 reaches a preset requirement, or to ensure that the liquid transported by each input pipe 110 flows continuously in the main delivery pipe 130 for a preset time, so that when the liquid flow rate in each input pipe 110 reaches the preset requirement, the main delivery pipe 130 is connected to the mixing container 120, so that the liquid in each input pipe 110 flows into the mixing container 120 through the main delivery pipe 130.

[0033] It should be noted that ensuring the liquid flow rate in each input pipe 110 meets the preset requirements can mean either the liquid flow rate in each input pipe 110 reaches a preset value, or the liquid flow rate in each input pipe 110 reaches a preset range. Specifically, it can be set according to the actual process conditions.

[0034] It should also be noted that the continuous flow time of the liquid transported by each input pipe 110 in the main delivery pipe 130 refers to the time during which liquid continuously flows out of the output end of the main delivery pipe 130 after the liquid in each input pipe 110 flows into the main delivery pipe 130.

[0035] The inlet line 110 is used to supply various chemical liquids to the main delivery line 130.

[0036] The flow control regulating component 111 is used to control the on / off state of the input pipeline 110, and to control the liquid flow rate of various chemicals in the input pipeline 110.

[0037] In some embodiments, the flow control regulating component 111 includes an automatic flow regulating valve 112 and a flow meter 113 disposed on the input pipeline 110, and a regulating valve controller 114 coupled to the flow meter 113 and the automatic flow regulating valve 112 respectively.

[0038] The automatic flow regulating valve 112 is used to receive and execute instructions from the regulating valve controller 114 to regulate its opening degree.

[0039] The flow meter 113 is used to measure the flow rate of liquid in the input pipe 110.

[0040] The regulating valve controller 114 is used to couple with the flow meter 113 and the automatic flow regulating valve 112 to form a closed control loop. The regulating valve controller 114 is configured to compare the measured value of the flow meter 113 with a preset value in the regulating valve controller 114, and control the opening of the automatic flow regulating valve 112 accordingly. For example, when the liquid flow rate in the input line 110 is less than the preset value, a command to increase the opening of the automatic flow regulating valve 112 is issued; when the liquid flow rate in the input line 110 is greater than the preset value, a command to decrease the opening of the automatic flow regulating valve 112 is issued. The regulating valve controller 114 can also directly output commands to open or close the automatic flow regulating valve 112.

[0041] The flow control and regulation component 111, which consists of the automatic flow regulating valve 112, the flow meter 113, and the regulating valve controller 114, is a commonly used means for automatically regulating flow.

[0042] In other embodiments, the flow control regulating component may consist only of an adjustable valve and a flow meter. Accordingly, the opening of the valve of the corresponding flow control regulating component is adjusted so that the liquid flow rate in each input line reaches a preset requirement.

[0043] In other embodiments, the flow control adjustment component may also consist only of a valve with an adjustable opening. Based on the preset liquid flow rate in each input line and based on experience, the opening of the valve of the corresponding flow control adjustment component is adjusted to a preset angle, and after the liquid delivered in each input line has been continuously flowing in the main delivery line for a preset time, the main delivery line is connected to the mixing container.

[0044] The preset time can be determined by process experience, that is, based on process experience, when the valve opening is at a preset angle, the liquid flow rate in each input pipeline reaches the preset requirement, and the liquid in the input pipeline continuously flows out from the output end of the main delivery pipeline.

[0045] The mixing container 120 is used to mix and store the liquids that flow into the mixing container 120 from each input line 110 via the main delivery line 130.

[0046] As an example, the material of the mixing container 120 includes PTFE (polytetrafluoroethylene). In other embodiments, the material of the mixing container may also be selected according to the storage requirements of the specific chemicals.

[0047] It should be noted that the mixing container 120 has an output end for supplying the mixed liquid.

[0048] In some embodiments, the mixing device 100 further includes: a full liquid level detection component (not shown) and an empty liquid level detection component (not shown); the full liquid level detection position 121 of the full liquid level detection component is located near the top of the mixing container 120; the empty liquid level detection position 123 of the empty liquid level detection component is located near the bottom of the mixing container 120.

[0049] It is understandable that detecting liquid at the full liquid level detection position 121 indicates that the chemical mixture in the mixing container 120 has reached its maximum capacity; not detecting liquid at the empty liquid level detection position 123 indicates that there is no mixture in the mixing container 120.

[0050] It should be noted that the mixing device 100 also includes a replenishment level detection component (not shown in the figure); the detection position of the replenishment level detection component (i.e., replenishment level detection position 122) is set between the full liquid level detection position 121 and the empty liquid level detection position 123 and is close to the full liquid level detection position 121.

[0051] If no liquid is detected at the replenishment level detection position 122, it means that the mixing container 120 needs to be replenished to ensure continuous production.

[0052] The output end of the main delivery pipeline 130 is used to ensure that the liquid flow rates in each input pipeline 110 meet the preset requirements under the regulation of the flow control and adjustment component 111. This allows the liquid in each input pipeline 110 to flow into the mixing container 120 via the main delivery pipeline 130. This helps to ensure that the ratio between various liquids in the mixing container 120 meets the preset requirements, and also helps to improve the concentration stability of various liquids in the mixing container 120. This, in turn, helps to improve the controllability of subsequent process processing, and thus helps to improve the quality stability of wafer products.

[0053] As an example, achieving a preset requirement for liquid flow rate can be achieved by the fluctuation rate of the liquid flow rate in the input line 110 within 5 seconds near a set value being less than 2%. In other embodiments, the time and fluctuation rate can be adjusted accordingly based on actual conditions.

[0054] In some embodiments, when the main delivery pipeline 130 has multiple output ends, a flow path switching component 133 is provided on the main delivery pipeline 130. The main delivery pipeline 130 has a first output end 131 and a second output end 132. The first output end 131 is connected to the mixing container 120. When the liquid flow rate in any input pipeline 110 does not reach the preset requirement, the flow path switching component 133 is used to disconnect the first output end 131 of the main delivery pipeline 130 from the input end and to connect the second output end 132 of the main delivery pipeline 130 to the input end. When the liquid flow rate in each input pipeline 110 reaches the preset requirement, the flow path switching component 133 is used to connect the first output end 131 of the main delivery pipeline 130 to the input end.

[0055] A main delivery pipeline 130 with a first output end 131 and a second output end 132 is added between the input pipeline 110 and the mixing container 120, and a flow path switching component 133 is provided on the main delivery pipeline 130. This allows the appropriate output end of the liquid in the main delivery pipeline 130 to be selected according to the flow rate of the liquid in the input pipeline 110, which helps to reduce modifications to the existing mixing device 100 and thus reduces process costs.

[0056] It should be noted that when the liquid flow rate in each input pipeline 110 reaches the preset requirement, the flow path switching component 133 is also used to disconnect the second output end 132 of the main delivery pipeline 130 from the input end, which helps to reduce unnecessary consumption of the mixed liquid and thus helps to reduce process costs.

[0057] It should also be noted that the second output terminal 132 can be connected to the waste liquid treatment module in the plant system, or it can be connected to the waste liquid container.

[0058] Specifically, the main conveying pipeline 130 includes a first conveying pipeline 135 connected to each input pipeline 110, and a second conveying pipeline 136 and a third conveying pipeline 137 connected to the first conveying pipeline 135 respectively. The output end of the second conveying pipeline 136 serves as the first output end 131, and the output end of the third conveying pipeline 137 serves as the second output end 132. The flow path switching component 133 includes a first switching valve 138 and a second switching valve 139. The first switching valve 138 is disposed on the second conveying pipeline 136, and the second switching valve 139 is disposed on the third conveying pipeline 137.

[0059] It is understandable that the input end of the first delivery pipeline 135 serves as the input end of the main delivery pipeline 130.

[0060] When the liquid flow rate in any input pipe 110 does not reach the preset requirement, the second switch valve 139 opens and the first switch valve 138 closes, to disconnect the first output terminal 131 from the input terminal of the first delivery pipe 135, and to connect the second output terminal 132 to the input terminal of the first delivery pipe 135.

[0061] When the liquid flow rate in each input pipeline 110 reaches the preset requirement, the first switching valve 138 is opened to connect the first output end 131 with the input end of the first delivery pipeline 135.

[0062] In one specific embodiment, when the liquid flow rate in each input pipe 110 reaches the preset requirement, the first switching valve 138 opens and the second switching valve 139 closes, which disconnects the second output terminal 132 from the input terminal of the first delivery pipe 135. That is, when the liquid flow rate in each input pipe 110 reaches the preset requirement, the first output terminal 131 is connected to the input terminal of the first delivery pipe 135, and the second output terminal 132 is disconnected from the input terminal of the first delivery pipe 135. This allows the liquid that meets the preset requirement to flow into the mixing container 120, thereby shortening the time it takes for the liquid in the mixing container 120 to reach the full liquid level detection position.

[0063] As an example, both the first switching valve 138 and the second switching valve 139 include pneumatically controlled switching valves.

[0064] The pneumatically controlled switching valves have a fast switching speed, which makes it easy to close the second switching valve 139 at the same time as the first switching valve 138 is opened, thereby helping to reduce the degree of flow fluctuation caused by pressure fluctuations introduced into the main delivery pipeline 130.

[0065] In some embodiments, the mixing device further includes a mixing pipeline 140 disposed between the input pipeline 110 and the main delivery pipeline 130, wherein the input end of the mixing pipeline 140 is connected to the output end of each input pipeline 110, and the output end of the mixing pipeline 140 is connected to the input end of the main delivery pipeline 130.

[0066] The mixing line 140 is used to premix the liquids in each input line 110 before they enter the mixing container 120, thereby improving the uniformity of the various liquids in the mixing container 120.

[0067] It should be noted that the mixing process includes initial mixing and replenishment. The initial mixing process includes: when no liquid is detected by the empty liquid level detection component, the automatic flow regulating valve 112 and the second switching valve 139 of each input pipeline 110 are opened, while the first switching valve 138 is closed. The liquid in each input pipeline 110 is discharged to the waste liquid treatment module in the plant system via the third conveying pipeline 137. As time increases, the liquid flow rate in each input pipeline 110 gradually reaches the preset value. When the liquid flow rate in each input pipeline 110 reaches the preset requirement, the first switching valve 138 is opened, and the second switching valve 139 is closed. The liquid in each input pipeline 110 is mixed via the second conveying pipeline 136 and flows into the mixing container 120. As time further increases, when liquid is detected at the full liquid level detection position 121, the first switching valve and the automatic flow regulating valve 112 of each input pipeline 110 are simultaneously closed.

[0068] The replenishment process includes: as the process proceeds, the chemical mixture in the mixing container 120 continuously decreases in level due to consumption. When no liquid is detected at the replenishment level detection position 122, the automatic flow regulating valve 112 and the second switching valve 139 of each input pipeline 110 open while the first switching valve 138 closes. As time increases, when the liquid flow rate in each input pipeline 110 reaches the preset requirement, the first switching valve 138 opens while the second switching valve 139 closes, and the liquid in each input pipeline 110 flows into the mixing container 120 after mixing via the second delivery pipeline 136. As time further increases, when liquid is detected at the full liquid level detection position 121, the first switching valve 138 and the automatic flow regulating valve 112 of each input pipeline 110 simultaneously close.

[0069] This invention also provides a mixing device according to a second embodiment. Figure 3 This is a schematic diagram of the structure of the second embodiment of the mixing device of this utility model.

[0070] The similarities between the second embodiment and the foregoing embodiment will not be repeated here. The difference between the second embodiment and the foregoing embodiment is that: (Refer to...) Figure 3The main delivery pipeline 230 includes a first delivery pipeline 235 connected to each input pipeline 210, and a second delivery pipeline 236 and a third delivery pipeline 237 connected to the first delivery pipeline 235 respectively. The output end of the second delivery pipeline 236 serves as the first output end 231, and the output end of the third delivery pipeline 237 serves as the second output end 232. When the liquid flow rate in each input pipeline 210 reaches the preset requirement, the flow path switching component is also used to disconnect the second output end 232 of the main delivery pipeline 230 from the input end. The flow path switching component includes... The system includes a directional control valve 233. The input end of the directional control valve 233 is connected to the output end of the first delivery pipeline 235, one output end of the directional control valve 233 is connected to the input end of the second delivery pipeline 236, and the other output end of the directional control valve 233 is connected to the input end of the third delivery pipeline 237. This allows the first delivery pipeline 235 to be connected to the first output end 231 while simultaneously disconnecting the first delivery pipeline 235 from the second output end 232. This helps to reduce the degree of flow fluctuation caused by pressure fluctuations introduced into the main delivery pipeline 230.

[0071] Specifically, the directional control valve 233 includes a directional valve or a selector valve.

[0072] Directional control valves and selector valves are common flow path switching components, which help reduce the difficulty and cost of flow path switching.

[0073] It should be noted that during the initial mixing process: when no liquid is detected at the empty liquid level detection position 223, the automatic flow regulating valve 212 of each input pipeline 210 is opened, and the directional control valve 233 connects the first delivery pipeline 235 to the second output terminal 232 and disconnects the first delivery pipeline 235 from the first output terminal 231. When the liquid flow rate in each input pipeline 210 reaches the preset requirement, the directional control valve 233 connects the first delivery pipeline 235 to the first output terminal 231 and disconnects the first delivery pipeline 235 from the second output terminal 232. When liquid is detected at the full liquid level detection position 221, the directional control valve 233 and the automatic flow regulating valve 212 of each input pipeline 210 are simultaneously closed.

[0074] It should also be noted that during the replenishment process, when no liquid is detected at the replenishment level detection position 222, the automatic flow regulating valve 212 of each input pipeline 210 opens, and the directional control valve 233 connects the first delivery pipeline 235 to the second output terminal 232 and disconnects the first delivery pipeline 235 from the first output terminal 231. When the liquid flow rate in each input pipeline 210 reaches the preset requirement, the directional control valve 233 connects the first delivery pipeline 235 to the first output terminal 231 and disconnects the first delivery pipeline 235 from the second output terminal 232. When liquid is detected at the full liquid level detection position 221, the directional control valve 233 and the automatic flow regulating valve 212 of each input pipeline 210 simultaneously close.

[0075] This invention also provides a mixing device according to a third embodiment. Figure 4 This is a structural schematic diagram of the third embodiment of the mixing device of this utility model. Figure 5 This is a schematic diagram of the structure of the output end of the fifth delivery pipeline of the third embodiment of the mixing device of this utility model facing the mixing container; The similarities between the third embodiment and the foregoing embodiments will not be repeated here. The difference between the third embodiment and the foregoing embodiments is that: (Refer to...) Figure 4 and Figure 5 When the main delivery pipeline 330 has an adjustable output end, the main delivery pipeline 330 includes a fourth delivery pipeline 335 connected to each input pipeline 310, and a fifth delivery pipeline 336 connected to the fourth delivery pipeline 335; the mixing device 300 also includes: a container 320, in which a waste liquid container 326 and a mixing container 325 are arranged laterally and isolated from each other; a lever 327, one end of which is connected to the fifth delivery pipeline 336, and the other end is used to adjust the position of the output end of the fifth delivery pipeline 336; when the liquid flow rate in any input pipeline 310 does not reach the preset requirement, the lever 327 is used to make the output end of the fifth delivery pipeline 336 face the waste liquid container 326 (e.g., Figure 4 (As shown); when the liquid flow rate in each input pipe 310 reaches the preset requirement, the lever 327 is used to turn the output end of the fifth delivery pipe 336 toward the mixing container 325 (as shown). Figure 5 (as shown); wherein, the fifth delivery pipeline 336 is located in container 320 and above waste liquid container 326 and mixed liquid container 325.

[0076] in, Figure 4 The output end of the fifth delivery pipeline faces the waste liquid container.

[0077] It is understandable that the output end of the fifth conveying pipeline 336 is the output end of the main conveying pipeline 330.

[0078] By using lever 327, when the liquid flow rate in any input pipe 310 does not reach the preset requirement, the output end of the fifth delivery pipe 336 is directed toward the waste liquid container 326. When the liquid flow rate in each input pipe 310 reaches the preset requirement, the output end of the fifth delivery pipe 336 is directed toward the mixing container 325. This helps to avoid flow fluctuations caused by pressure fluctuations introduced into the main delivery pipe 330.

[0079] In some embodiments, the bottom surface of container 320 is provided with a partition 324 extending longitudinally to near the top of the container, and waste liquid container 326 and mixed liquid container 325 are isolated from each other by the partition 324.

[0080] The partition 324 is used to divide the container 320 into two independent areas, which is beneficial to integrate the waste liquid container 326 and the mixing container 325 into the same container 320. This ensures that when the position of the output end of the fifth delivery pipe 336 changes, the liquid flowing out through the output end of the fifth delivery pipe 336 will not affect the area outside the container 320, thereby reducing the need for modifications to the existing mixing device 300.

[0081] Specifically, the partition 324 and the container 320 can be an integral structure, or the partition 324 can be sealed to the bottom and side walls of the container 320.

[0082] In some embodiments, a full liquid level detection component (not shown) is provided near the top of the container 320; the side wall height of the mixing container 325 is higher than the detection position of the full liquid level detection component (i.e., full liquid level detection position 321), which helps to reduce the probability of chemical mixture overflow in the mixing container 325.

[0083] In some embodiments, a waste liquid outlet pipe 3265 is provided at the bottom of the waste liquid container 326, and a third switch valve 3261 is provided on the waste liquid outlet pipe 3265 for opening when there is liquid to be discharged in the waste liquid container 326, and for closing when there is no liquid to be discharged in the waste liquid container 326.

[0084] When there is no liquid to be discharged from waste liquid container 326, it is advantageous to close it to prevent waste gas or waste liquid from other systems (e.g., plant systems) from flowing back into waste liquid container 326.

[0085] Specifically, a waste liquid detection component (not shown) is provided near the bottom of the waste liquid container 326. The waste liquid detection component is used to determine whether there is liquid to be discharged in the waste liquid container.

[0086] If liquid is detected at the detection position 3262 of the waste liquid detection component, it indicates that there is liquid to be discharged; if no liquid is detected at the detection position 3262 of the waste liquid detection component, it indicates that there is no liquid to be discharged.

[0087] In some embodiments, the fifth delivery line 336 is a corrugated pipe. The corrugated pipe has good flexibility, which makes it easy to change and fix the position of the output end of the fifth delivery line 336 by means of the lever 327.

[0088] In some embodiments, the mixing device 300 further includes: a cylinder 351 fixed above the container 320; a connector 352, one end of which is fixedly connected to the piston rod of the cylinder 351, and the other end of which is fixedly connected to the lever 327, so that the position of the connector 352 can be changed by the cylinder 351, thereby changing the position of the lever 327, so that the output end of the fifth delivery pipeline 336 faces the waste liquid container 326 or the mixing container 325.

[0089] Specifically, cylinders include double-acting cylinders.

[0090] The double-acting cylinder can achieve precise position control by accurately controlling the intake and exhaust volume, so that the output end of the fifth delivery pipeline 336 can be accurately aligned when delivering liquid to the waste liquid container 326 or the mixed liquid container 325, which helps to reduce the probability of liquid splashing or delivery errors.

[0091] It should be noted that during the initial mixing process: when the empty liquid level detection component does not detect liquid, the automatic flow regulating valve 312 of each input pipeline 310 is opened, and the lever 327 causes the output end of the fifth delivery pipeline 336 to face the waste liquid container 326; when the liquid flow rate in each input pipeline 310 reaches the preset requirement, the lever 327 causes the output end of the fifth delivery pipeline 336 to face the mixing container 325; when liquid is detected at the full liquid level detection position 321, the automatic flow regulating valve 312 of each input pipeline 310 is closed simultaneously.

[0092] It should also be noted that during the replenishment process: when no liquid is detected at the replenishment level detection position 322, the automatic flow regulating valve 312 of each input pipeline 310 is opened, and the output end of the fifth delivery pipeline 336 is directed towards the waste liquid container 326 via the lever 327; when the liquid flow rate in each input pipeline 310 reaches the preset requirement, the output end of the fifth delivery pipeline 336 is directed towards the mixing container 325 via the lever 327; when no liquid is detected at the replenishment level detection position 322, the automatic flow regulating valve 312 of each input pipeline 310 is opened, and the output end of the fifth delivery pipeline 336 is directed towards the mixing container 325 via the lever 327; when liquid is detected at the full liquid level detection position 321, the automatic flow regulating valve 312 of each input pipeline 310 is simultaneously closed.

[0093] Accordingly, this utility model also provides a semiconductor device.

[0094] Reference Figure 2 The semiconductor device includes the mixing apparatus of any embodiment of the present invention.

[0095] In this embodiment, the output end of the main delivery pipeline 130 is used to ensure that the liquid flow rates in each input pipeline 110 meet the preset requirements under the adjustment of the flow control and adjustment component 111. This allows the liquid in each input pipeline 110 to flow into the mixing container 120 via the main delivery pipeline 130. This helps to ensure that the ratio between various liquids in the mixing container 120 meets the preset requirements, and also helps to improve the concentration stability of various liquids in the mixing container 120. This, in turn, helps to improve the controllability of subsequent process processing, and further helps to improve the quality stability of wafer products.

[0096] For a detailed description of the mixing device, please refer to the detailed description of the foregoing embodiments, which will not be repeated in this embodiment.

[0097] Here, semiconductor equipment refers to equipment used in semiconductor manufacturing processes.

[0098] In one specific embodiment, the semiconductor device includes a wet etching apparatus.

[0099] The mixing device 100 is used to mix the solution used in wet etching.

[0100] It is understandable that semiconductor equipment is not limited to the above-mentioned equipment, but can also be other semiconductor equipment that requires mixing liquids.

[0101] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A mixing device, characterized in that, include: Multiple input lines, each input line being equipped with a flow control and adjustment component; A mixing container for mixing liquids flowing into the mixing container via each of the said inlet lines; A main delivery pipeline is disposed between the input pipeline and the mixing container. The input end of the main delivery pipeline is connected to the output end of each of the input pipelines. The main delivery pipeline has multiple output ends, or it has a single output end with an adjustable position. This is used to ensure that the liquid flow rate in each of the input pipelines reaches a preset requirement, or to ensure that the liquid transported by each of the input pipelines flows continuously in the main delivery pipeline for a preset time. When the liquid flow rate in each of the input pipelines reaches the preset requirement, the main delivery pipeline is connected to the mixing container, so that the liquid in each of the input pipelines flows into the mixing container via the main delivery pipeline.

2. The mixing apparatus as described in claim 1, characterized in that, When the main delivery pipeline has multiple output ends, a flow path switching component is provided on the main delivery pipeline. The main delivery pipeline has a first output end and a second output end, and the first output end is connected to the mixing container. When the liquid flow rate in any of the input pipelines does not reach the preset requirement, the flow path switching component is used to disconnect the first output end and the input end of the main delivery pipeline, and to connect the second output end and the input end of the main delivery pipeline. When the liquid flow rate in each of the input pipelines reaches the preset requirement, the flow path switching component is used to connect the first output end and the input end of the main delivery pipeline.

3. The mixing apparatus as described in claim 2, characterized in that, The main delivery pipeline includes a first delivery pipeline connected to each of the input pipelines, and a second delivery pipeline and a third delivery pipeline connected to the first delivery pipeline respectively. The output end of the second delivery pipeline serves as the first output end, and the output end of the third delivery pipeline serves as the second output end. The flow path switching component includes a first switching valve and a second switching valve. The first switching valve is disposed on the second conveying pipeline, and the second switching valve is disposed on the third conveying pipeline.

4. The mixing apparatus as described in claim 3, characterized in that, When the liquid flow rate in each of the input pipelines reaches the preset requirement, the first switching valve opens and the second switching valve closes. Both the first and second switching valves include pneumatically controlled switching valves.

5. The mixing apparatus as described in claim 2, characterized in that, The main delivery pipeline includes a first delivery pipeline connected to each of the input pipelines, and a second delivery pipeline and a third delivery pipeline connected to the first delivery pipeline respectively. The output end of the second delivery pipeline serves as the first output end, and the output end of the third delivery pipeline serves as the second output end. When the liquid flow rate in each of the input pipelines reaches the preset requirement, the flow path switching component is also used to disconnect the second output end of the main delivery pipeline from the input end. The flow path switching component includes a directional control valve, the input end of which is connected to the output end of the first delivery pipeline, one output end of which is connected to the input end of the second delivery pipeline, and the other output end of which is connected to the input end of the third delivery pipeline.

6. The mixing apparatus as described in claim 5, characterized in that, The directional control valve includes a reversing valve or a selector valve.

7. The mixing apparatus as described in claim 1, characterized in that, When the main delivery pipeline has a position-adjustable output end, the main delivery pipeline includes a fourth delivery pipeline connected to each of the input pipelines, and a fifth delivery pipeline connected to the fourth delivery pipeline. The mixing device further includes: a container, in which a waste liquid container and a mixing liquid container are arranged laterally and separated from each other; a lever, one end of which is connected to the fifth conveying pipeline, and the other end is used to adjust the position of the output end of the fifth conveying pipeline; When the liquid flow rate in any of the input pipelines does not reach the preset requirement, the lever is used to make the output end of the fifth delivery pipeline face the waste liquid container. When the liquid flow rate in each of the input pipelines reaches the preset requirement, the lever is used to make the output end of the fifth delivery pipeline face the mixing container. The fifth delivery pipeline is located in the container and above the waste liquid container and the mixed liquid container.

8. The mixing apparatus as described in claim 7, characterized in that, The bottom surface of the container is provided with a partition extending longitudinally to near the top of the container, and the waste liquid container and the mixed liquid container are isolated from each other by the partition.

9. The mixing apparatus as described in claim 7, characterized in that, A full liquid level detection component is provided near the top of the mixing container; the side wall of the mixing container is higher than the detection position of the full liquid level detection component.

10. The mixing apparatus as described in claim 7, characterized in that, The mixing device further includes: A cylinder is fixed above the container; A connector, one end of which is fixedly connected to the piston rod of the cylinder, and the other end of which is fixedly connected to the lever.

11. The mixing apparatus as described in claim 10, characterized in that, The cylinder includes a double-acting cylinder.

12. The mixing apparatus as described in claim 7, characterized in that, The bottom of the waste liquid container is provided with a waste liquid output pipeline, and a third switch valve is provided on the waste liquid output pipeline, which is used to open when there is liquid to be discharged in the waste liquid container, and to close when there is no liquid to be discharged in the waste liquid container.

13. The mixing apparatus as described in claim 12, characterized in that, A waste liquid detection component is installed near the bottom of the waste liquid container to determine whether there is liquid to be discharged in the waste liquid container.

14. The mixing apparatus as described in claim 7, characterized in that, The fifth delivery pipeline is a corrugated pipe.

15. The mixing apparatus according to any one of claims 1 to 14, characterized in that, The mixing device further includes a mixing pipeline disposed between the input pipeline and the main delivery pipeline, wherein the input end of the mixing pipeline is connected to the output end of each of the input pipelines, and the output end of the mixing pipeline is connected to the input end of the main delivery pipeline.

16. The mixing apparatus according to any one of claims 1 to 14, characterized in that, The flow control and regulation component includes an automatic flow regulating valve and a flow meter installed on the input pipeline, and a regulating valve controller coupled to the flow meter and the automatic flow regulating valve, respectively.

17. A semiconductor device, characterized in that, include: The mixing apparatus as described in any one of claims 1 to 16.

18. The semiconductor device as claimed in claim 17, characterized in that, The semiconductor device includes a wet etching device.

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