A double station spectrometer

Abstract

The utility model discloses a kind of double-station spectrometer, belong to spectrometer technical field, including rack, rack is installed with spectrometer carousel, spectrometer carousel is provided with even number of positioning suction nozzle for adsorbing workpiece along circumference;Two feeding suction nozzles are also installed on rack and on driving element;The outer periphery of spectrometer carousel is equipped with first test assembly and second test assembly, along the rotation direction of spectrometer carousel, the detection station of first test assembly corresponds with the stay of positioning suction nozzle with odd number of sequence, the detection station of second test assembly corresponds with the stay of positioning suction nozzle with even number of sequence;Light barrier is equipped between first test assembly and second test assembly.This double-station spectrometer, by setting two test assemblies and corresponding with the suction nozzle station of sequence stagger on carousel, so that carousel every rotation a station, two test assemblies can simultaneously test different workpieces.

Description

Technical Field

[0001] This utility model relates to the field of spectrophotometer technology, specifically to a dual-station spectrophotometer. Background Technology

[0002] In the manufacturing process of semiconductor components, spectrometers are core equipment for the rapid testing and sorting of the optoelectronic parameters of components. Currently, most widely used spectrometers adopt a single test station combined with a rotating turntable design. In this design, the turntable carries the workpiece sequentially through a unique test assembly, completing the inspection in a serial manner.

[0003] This serial working mode has an inherent efficiency bottleneck: only one workpiece can be tested per revolution of the turntable. With the manufacturing industry's ever-increasing demand for production capacity, this mode has become a major obstacle to improving production efficiency. There is a widespread and urgent need in the industry for high-efficiency spectrophotometric testing equipment, and those skilled in the art typically consider increasing the number of testing stations to improve efficiency. However, simply adding stations introduces a series of new technical challenges: for example, how to avoid mutual interference between the optical signals of two closely spaced testing stations to ensure testing accuracy; how to design a matching material handling system (such as loading, turntable, and unloading) so that the two stations can truly work collaboratively, rather than waiting for each other; and how to maintain the stability and reliability of the equipment despite the increased complexity of the entire system.

[0004] Therefore, those skilled in the art face a dilemma: continuing with mature single-station designs is inefficient; while developing dual-station solutions requires overcoming the technical challenges of test interference and system coordination. Currently, there is a lack of mature and optimized dual-station spectrometer solutions that can effectively address these issues. Summary of the Invention

[0005] The purpose of this invention is to address the problems existing in the prior art by providing a dual-station spectrometer.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is: a dual-station spectrometer, including a frame, on which a spectrometer turntable is installed, and an even number of positioning nozzles for adsorbing workpieces are arranged circumferentially on the spectrometer turntable;

[0007] The frame is also equipped with a drive unit and two feeding nozzles mounted on the drive unit;

[0008] The outer periphery of the beam splitter is provided with a first testing component and a second testing component. Along the rotation direction of the beam splitter, the detection station of the first testing component corresponds to the dwell position of the positioning nozzle when the sequence number is odd, and the detection station of the second testing component corresponds to the dwell position of the positioning nozzle when the sequence number is even.

[0009] A light-blocking plate is provided between the first test component and the second test component.

[0010] Preferably, the driving component includes a drive motor mounted on the frame, a feeding swing arm mounted on the output shaft of the drive motor, and two feeding nozzles mounted on the feeding swing arm.

[0011] Preferably, the light-blocking plate is disposed on the first test component and / or the second test component.

[0012] Preferably, the light-blocking plate is disposed on the frame.

[0013] Preferably, the bottom of the light-blocking plate has a clearance groove for the workpiece to pass through.

[0014] Preferably, the beam splitter includes a turntable motor mounted on a frame and a turntable body mounted on the output end of the turntable motor, and the positioning nozzle is mounted on the turntable body.

[0015] Preferably, both the first test component and the second test component include a test base mounted on a frame, a test stand mounted on the test base, a test motor mounted on the side of the test stand, a test cantilever mounted on the actuating end of the test motor, and a test probe mounted on the test cantilever.

[0016] Preferably, the assembly further includes a feeding component, which includes a feeding seat mounted on the frame, multiple sets of air blowing pipes mounted on the feeding seat, and multiple sets of feeding pipes mounted on the feeding seat. Each air blowing pipe is equipped with a nozzle, and each set of nozzles corresponds to each set of feeding pipes.

[0017] Preferably, the frame is provided with two feeding tracks, each feeding nozzle is provided with a corresponding feeding track, and a vibrating plate is provided at the end of the feeding track away from the feeding nozzle, and a storage device is provided at the feeding end of the vibrating plate.

[0018] Compared with the prior art, the beneficial effects of this utility model are:

[0019] 1. This dual-station spectrometer, by setting up two testing components corresponding to the staggered nozzle stations on the turntable, allows the two testing components to test different workpieces simultaneously for each station the turntable rotates. This changes the testing process from a single-station serial mode to a dual-station parallel mode, effectively improving the equipment's per-unit-time productivity.

[0020] 2. This dual-station spectrometer features a light-blocking plate located between the two test components. This plate physically isolates the light source and signal from the first test component from potential optical interference to the second test component, providing an independent and clean optical testing environment for each test station and ensuring the accuracy and reliability of the test data. Therefore, this invention improves the production efficiency of the spectrometer while also solving the problem of ensuring testing accuracy in a dual-station architecture.

[0021] 3. This dual-station spectrometer features two feeding tracks and two feeding nozzles, providing parallel material supply channels for dual-station testing and ensuring production continuity from the source. The vibratory feeder orients and sorts the randomly piled workpieces in the storage container and automatically and continuously transports them to the feeding tracks, achieving automated workpiece supply and reducing the frequency of manual replenishment. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0023] Figure 2 For the present utility model Figure 1 A magnified structural diagram of point A in the middle.

[0024] Figure 3 This is a schematic diagram of the feeding assembly of this utility model.

[0025] Figure 4 This utility model Figure 1 A magnified structural diagram at point B in the middle.

[0026] Figure 5 This is a schematic diagram of the structure of the test component and the light-blocking plate of this utility model.

[0027] Figure 6 This is a schematic diagram of the structure of the spectrophotometer turntable of this utility model.

[0028] Figure 7 This is a schematic diagram of the material feeding assembly of this utility model.

[0029] In the diagram: 1. Frame; 2. Spectrometer turntable; 21. Turntable motor; 22. Turntable body; 23. Positioning nozzle; 3. Feeding assembly; 31. Feeding track; 32. Vibratory feeder; 33. Storage container; 4. Feeding assembly; 41. Drive motor; 42. Feeding swing arm; 43. Feeding nozzle; 5. First test assembly; 51. Test base; 52. Test stand; 53. Test motor; 54. Test cantilever; 55. Test probe; 6. Second test assembly; 7. Unloading assembly; 71. Unloading seat; 72. Air blowing pipe; 73. Air blowing nozzle; 74. Unloading pipe; 8. Light blocking plate; 81. Clearance groove. Detailed Implementation

[0030] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0031] Please refer to Figures 1 to 7 The dual-station spectrometer in this solution includes a frame 1, on which a spectrometer turntable 2 is mounted, and an even number of positioning nozzles 23 for adsorbing workpieces are arranged along the circumference of the spectrometer turntable 2.

[0032] The frame 1 is also equipped with a drive unit and two feeding nozzles 43 mounted on the drive unit;

[0033] The outer periphery of the spectrometer turntable 2 is provided with a first test component 5 and a second test component 6. Along the rotation direction of the spectrometer turntable 2, the detection station of the first test component 5 corresponds to the dwell position of the positioning nozzle 23 with an odd number of sequences, and the detection station of the second test component 6 corresponds to the dwell position of the positioning nozzle 23 with an even number of sequences.

[0034] A light-blocking plate 8 is provided between the first test component 5 and the second test component 6.

[0035] In the above technical solution, by setting up two testing components and corresponding them to the staggered nozzle stations on the turntable, the two testing components can simultaneously test different workpieces for each station the turntable rotates, thereby changing the testing process from a single-station serial mode to a dual-station parallel mode, effectively improving the equipment's unit time productivity.

[0036] The light-blocking plate 8, located between the two test components, physically isolates the light source and signal of the first test component 5 from potential optical interference to the second test component 6, providing an independent and clean optical testing environment for each test station and ensuring the accuracy and reliability of the test data. Therefore, this invention improves the production efficiency of the spectrometer while also solving the problem of ensuring testing accuracy under a dual-station architecture.

[0037] Please refer to Figures 1 to 3 Preferably, the driving component includes a drive motor 41 mounted on the frame 1, a feeding swing arm 42 mounted on the output shaft of the drive motor 41, and two feeding nozzles 43 mounted on the feeding swing arm 42.

[0038] In the above technical solution, the loading swing arm 42, driven by the drive motor 41, can perform a stable and fixed-track swing motion, enabling the two loading nozzles 43 installed at both ends of the swing arm to accurately reciprocate between the end of the loading track 31 and the corresponding station of the beam splitter 2. This centralized drive method simplifies the mechanical structure and reduces the manufacturing cost and control complexity of the equipment compared to solutions such as setting up a separate linear module for each nozzle. At the same time, the swing arm motion helps to shorten the idle time for picking up and placing materials, and its movement rhythm can be well matched with the intermittent rotation of the beam splitter 2, thereby ensuring the continuity and stability of the dual-station loading process and providing a foundation for the efficient operation of the entire equipment.

[0039] In some embodiments, the light-blocking plate 8 is disposed on the frame 1 (not shown in this embodiment).

[0040] In the above technical solution, the light-blocking plate 8 is set on the frame 1, making the light-blocking plate 8 an independent rigid component. Its installation and adjustment do not depend on the test components, resulting in better stability. This can effectively avoid the positional displacement of the light-blocking plate 8 caused by the debugging or vibration of the test components, thus ensuring the long-term reliability of the light-blocking effect.

[0041] Please refer to Figure 1 and Figure 5 In other embodiments, the light-blocking plate 8 is disposed on the first test component 5 and / or the second test component 6.

[0042] In the above technical solution, by setting the light-blocking plate 8 on the test component, the light-blocking plate 8 and the test component can form an integrated functional module, which facilitates overall disassembly and positioning during equipment assembly or maintenance, and simplifies the assembly process. Since the installation position of the light-blocking plate 8 is closer to the test component, it is more convenient to install the light-blocking plate 8 on the test component. The light-blocking plate 8 can be installed on the test cantilever 54.

[0043] Please refer to Figure 4 Preferably, the bottom of the light-blocking plate 8 is provided with a clearance groove 81 for the workpiece to pass through.

[0044] In the above technical solution, while ensuring that the light-blocking plate 8 effectively blocks stray light in the horizontal direction, its bottom clearance groove provides the necessary physical space for the workpiece. When the beam splitter 2 carries the workpiece to the test station, the workpiece passes through the clearance groove 81, thereby preventing the light-blocking plate 8 from obstructing the workpiece's passage. This design resolves the conflict between light blocking and mechanical movement within a compact space, ensuring both the optical environment requirements of the testing process and the smoothness and reliability of the equipment's mechanical operation, while reducing the risk of downtime due to structural interference.

[0045] Please refer to Figure 6Preferably, the beam splitter 2 includes a turntable motor 21 mounted on the frame 1 and a turntable body 22 mounted on the output end of the turntable motor 21, and the positioning nozzle 23 is mounted on the turntable body 22.

[0046] In the above technical solution, the turntable motor 21 provides a power source for precise indexing, ensuring that each positioning nozzle 23 can accurately stop at the preset work position. The turntable body 22 provides a positioning reference for the installation of the positioning nozzle 23. The structure in which the turntable motor 21 drives the entire turntable body 22 to rotate has a short transmission chain and good rigidity, which helps to improve the positioning accuracy and repeatability of the beam splitting turntable 2, thereby providing a stable and reliable positioning reference for subsequent loading, testing and unloading processes.

[0047] Please refer to Figure 1 , Figure 4 and Figure 5 Preferably, the first test component 5 and the second test component 6 both include a test base 51 mounted on the frame 1, a test stand 52 mounted on the test base 51, a test motor 53 mounted on the side of the test stand 52, a test cantilever 54 mounted on the execution end of the test motor 53, and a test probe 55 mounted on the test cantilever 54.

[0048] In the above technical solution, the stable connection between the test base 51 and the frame 1 provides a solid mounting foundation for the entire test assembly. The test stand 52 provides a vertical mounting surface, and the test motor 53 drives the test cantilever 54, enabling the test probe 55 to perform multi-degree-of-freedom precision fine-tuning to accurately align with the workpiece under test. This structure modularizes the driving, support, and execution functions, allowing each test component to be calibrated and debugged independently without interference. It not only ensures that the test probe 55 has extremely high positioning stability and repeatability during operation, thus ensuring the accuracy of test data, but also facilitates equipment assembly and subsequent maintenance, improving the maintainability of the equipment.

[0049] Please refer to Figure 7 Preferably, it also includes a feeding assembly 7, which includes a feeding seat 71 mounted on the frame 1, multiple sets of air blowing pipes 72 mounted on the feeding seat 71, and multiple sets of feeding pipes 74 mounted on the feeding seat 71. The air blowing pipes 72 are equipped with nozzles 73, and each set of nozzles 73 is corresponding to each set of feeding pipes 74.

[0050] In the above technical solution, the nozzle 73 blows the workpiece off the positioning suction nozzle 23 of the turntable using a jet of air. This is a non-contact unloading method, characterized by rapid operation, no mechanical wear, and a long service life. The unloading pipe 74 corresponds one-to-one with the nozzle 73, guiding workpieces of different grades to different collection containers, achieving efficient and automatic sorting of workpieces based on test results. This replaces traditional manual handling and avoids the risks of material mixing or electrostatic damage that may result from human operation.

[0051] It should be noted that each set of nozzles 73 and feed tubes 74 consists of two units, and along the rotation direction of the spectrometer turntable 2, the nozzles 73 and feed tubes 74 with odd-numbered sequences work in conjunction with the workpieces tested by the first test component 5, while the nozzles 73 and feed tubes 74 with even-numbered sequences work in conjunction with the workpieces tested by the second test component 6. When the workpieces located in odd-numbered positions and the workpieces located in even-numbered positions are of the same grade, the two workpieces can be fed simultaneously. Furthermore, when a test component is damaged, since the workpieces detected by the first test component 5 and the second test component 6 are collected separately, the damaged test component is automatically separated from the workpieces detected by the undamaged test component. When retesting, only the workpieces detected by the damaged test component need to be retested.

[0052] Please refer to Figure 1 and Figure 2 Preferably, the frame 1 is provided with two feeding tracks 31, and each feeding nozzle 43 is provided in a one-to-one correspondence with the feeding track 31. The end of the feeding track 31 away from the feeding nozzle 43 is provided with a vibrating plate 32, and the feeding end of the vibrating plate 32 is provided with a storage device 33.

[0053] In the above technical solution, the two feeding tracks 31 and the two feeding nozzles 43 work together to provide parallel material supply channels for dual-station testing, ensuring the continuity of production from the source. The vibratory feeder 32 can orient and sort the randomly piled workpieces in the storage container 33 and automatically and continuously transport them to the feeding tracks 31, realizing automated workpiece supply and reducing the frequency of manual replenishment. The storage container 33 serves as a centralized storage unit, providing sufficient material buffer for the vibratory feeder 32. This feeding component 3, together with the dual feeding nozzles 43 and the dual testing stations, forms a complete and efficient material flow system, ensuring that the dual-station spectrometer can operate stably for a long time without interruption, and fully utilize its capacity advantages.

[0054] Work style:

[0055] When the dual-station spectrometer starts working, firstly, the feeding assembly 3 starts, and the two vibrating discs 32 orient and sort the disordered workpieces in the storage tank 33 and continuously transport them to the corresponding feeding tracks 31. Then, the feeding assembly 4 starts operating, and its drive motor 41 drives the feeding swing arm 42 to move, causing the two feeding nozzles 43 installed at both ends of the swing arm to work synchronously; one feeding nozzle 43 picks up a workpiece from the end of one feeding track 31, while the other feeding nozzle 43 simultaneously picks up another workpiece from the end of the other feeding track 31. Next, the swing arm rotates, simultaneously transferring and placing the two workpieces onto two adjacent positioning nozzles 23 on the spectrometer turntable 2, with odd and even serial numbers respectively.

[0056] Driven by the turntable motor 21, the beam splitter 2 rotates by the angle corresponding to the two positioning nozzles 23 each time, causing all the positioning nozzles 23 to carry the workpiece sequentially through each station. When the positioning nozzle 23 carrying the workpiece rotates to the detection station of the first test component 5, the nozzles with odd-numbered sequences stop, and the first test component 5 performs parameter detection on the workpiece through the test probe 55 on its test cantilever 54. At the same time, at the detection station of the second test component 6, the nozzles with even-numbered sequences are carrying another workpiece and undergoing synchronous detection by the second test component 6. During this process, the light-blocking plate 8 set between the first and second test components 6 can effectively block stray light interference between the two, ensuring the accuracy of their respective test data, and the clearance groove 81 at its bottom ensures that the workpiece or test probe 55 can pass smoothly, avoiding mechanical interference.

[0057] After the test is completed, the spectrophotometer turntable 2 continues to rotate, transporting the tested workpiece to the unloading end. The unloading assembly 7 operates according to the test results, with the corresponding nozzle 73 ejecting airflow to blow the workpiece off the positioning suction nozzle 23 and into the corresponding unloading pipe 74, completing the automatic sorting. Simultaneously, the loading station continues synchronous loading. This cycle repeats, achieving continuous and automated operation with dual-path feeding, synchronous testing, interference isolation, and automatic sorting, thereby significantly improving the equipment's production efficiency and testing reliability.

[0058] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A dual-station spectrometer, comprising a frame (1), characterized in that, A beam splitter (2) is mounted on the frame (1), and an even number of positioning nozzles (23) for adsorbing workpieces are arranged on the beam splitter (2) along the circumference. The frame (1) is also equipped with a drive unit and two feeding nozzles (43) mounted on the drive unit. The outer periphery of the beam splitter (2) is provided with a first test component (5) and a second test component (6). Along the rotation direction of the beam splitter (2), the detection station of the first test component (5) corresponds to the dwell position of the positioning nozzle (23) with an odd number of sequences, and the detection station of the second test component (6) corresponds to the dwell position of the positioning nozzle (23) with an even number of sequences. A light-blocking plate (8) is provided between the first test component (5) and the second test component (6).

2. The dual-station spectrometer according to claim 1, characterized in that: The drive unit includes a drive motor (41) mounted on the frame (1), a loading swing arm (42) mounted on the output shaft of the drive motor (41), and two loading nozzles (43) mounted on the loading swing arm (42).

3. The dual-station spectrometer according to claim 1, characterized in that: The light-blocking plate (8) is disposed on the first test component (5) and / or the second test component (6).

4. The dual-station spectrometer according to claim 1, characterized in that: The light-blocking plate (8) is mounted on the frame (1).

5. The dual-station spectrometer according to claim 1, characterized in that: The bottom of the light-blocking plate (8) is provided with a clearance groove (81) for the workpiece to pass through.

6. The dual-station spectrometer according to claim 1, characterized in that: The beam splitter (2) includes a turntable motor (21) mounted on a frame (1) and a turntable body (22) mounted on the output end of the turntable motor (21). The positioning nozzle (23) is mounted on the turntable body (22).

7. The dual-station spectrometer according to claim 1, characterized in that: The first test component (5) and the second test component (6) both include a test base (51) mounted on the frame (1), a test stand (52) mounted on the test base (51), a test motor (53) mounted on the side of the test stand (52), a test cantilever (54) mounted on the execution end of the test motor (53), and a test probe (55) mounted on the test cantilever (54).

8. The dual-station spectrometer according to claim 1, characterized in that: It also includes a feeding assembly (7), which includes a feeding seat (71) mounted on the frame (1), multiple sets of air blowing pipes (72) mounted on the feeding seat (71), and multiple sets of feeding pipes (74) mounted on the feeding seat (71). The air blowing pipes (72) are equipped with nozzles (73), and each set of nozzles (73) is corresponding to each set of feeding pipes (74).

9. The dual-station spectrometer according to claim 1, characterized in that: The frame (1) is provided with two feeding tracks (31), and each feeding nozzle (43) is provided in correspondence with the feeding track (31). The end of the feeding track (31) away from the feeding nozzle (43) is provided with a vibrating plate (32), and the feeding end of the vibrating plate (32) is provided with a storage device (33).

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