A surface cleaning device suitable for DFN after glue removal

Abstract

The utility model relates to a kind of surface cleaning device suitable for DFN after glue removal, including oscillating nozzle, transmission mechanism, drive mechanism and feeding mechanism, the oscillating nozzle is connected on water pipe by hose, transmission mechanism includes eccentric block and connecting rod group, drive mechanism drives eccentric block rotation, the connecting rod group connects oscillating nozzle and eccentric block, and can drive oscillating nozzle swing, the feeding mechanism is equipped with discharging frame, and the discharging frame can be moved to the lower portion of oscillating nozzle with feeding mechanism. The utility model improves existing manual cleaning mode, and flushing is carried out automatically by feeding mechanism and oscillating nozzle, without personnel hand-held operation in cleaning process, can realize the automatic cleaning of DFN after glue removal, convenient to use, greatly save manpower cost, incoming water, effectively save water resource.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a surface cleaning device suitable for DFN after adhesive removal. Background Technology

[0002] The processing of DFN products involves the sequential steps of lamination, cutting, separation, and adhesive removal. Adhesive removal involves evenly spreading the separated DFN product in an adhesive removal solution immersion tank. A glass rod is used to gently poke the edges of the stainless steel mesh to ensure the DFN product is evenly dispersed in the solution. A special solution is then used to remove the adhesive from the surface. After adhesive removal, the DFN product is rinsed from the stainless steel mesh into a copper mesh with clean water, and then rinsed for ≤2 minutes. The stainless steel mesh is then completely dried. The DFN product in the copper mesh is rinsed twice with clean water, rinsing back and forth for approximately 5 minutes each time. The time from the completion of rinsing to the start of rinsing should be ≤2 minutes.

[0003] The current procedure involves manually holding the DFN product under running water for rinsing, which is time-consuming, labor-intensive, and wasteful of water resources. Summary of the Invention

[0004] To address the aforementioned problems, the purpose of this invention is to provide a surface cleaning device suitable for DFN after degumming, which can achieve automated cleaning of degummed DFN, is easy to use, and greatly saves labor costs and water resources.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a surface cleaning device suitable for DFN degumming, comprising a swing nozzle, a transmission mechanism, a drive mechanism, and a feeding mechanism. The swing nozzle is connected to a water pipe via a flexible hose. The transmission mechanism includes an eccentric block and a connecting rod assembly. The drive mechanism drives the eccentric block to rotate. The connecting rod assembly connects the swing nozzle and the eccentric block and can drive the swing nozzle to swing. The feeding mechanism is provided with a discharge frame, which can move with the feeding mechanism to the lower part of the swing nozzle.

[0006] In the above technical solution, the oscillating nozzle is equipped with a positioning sensor, which can sense the material feeding frame on the conveyor belt.

[0007] In the above technical solution, the oscillating nozzle is equipped with a positioning sensor, which can sense the feeding frame on the conveyor belt and control the solenoid valve and drive mechanism on the oscillating nozzle.

[0008] In the above technical solution, the driving mechanism is a drive motor, and the eccentric block is mounted on the output shaft of the drive motor.

[0009] In the above technical solution, the feeding mechanism is a conveyor belt, the conveyor belt is provided with limiting protrusions, the feeding frame is placed between the limiting protrusions, and the lower part of the conveyor belt is provided with a wastewater recycling box.

[0010] In the above technical solution, both the transmission mechanism and the drive mechanism are mounted on the base plate. The linkage group includes a swing linkage, an adjusting rod and an eccentric linkage connected in sequence. The swing linkage is connected to the swing nozzle. One end of the eccentric linkage is mounted on the eccentric block. The adjusting rod is provided with multiple adjusting holes. One end of the adjusting rod is hinged to the base plate, and the other end of the eccentric linkage is mounted on one of the adjusting holes.

[0011] In the above technical solution, the swing nozzle is connected to the water pipe through the upper buffer joint.

[0012] In summary, the advantages of this utility model over traditional methods are as follows: This utility model improves the existing manual cleaning method by automating the rinsing process through a feeding mechanism and a swing nozzle. No manual operation is required during the cleaning process, which can achieve automated cleaning of DFN after degumming. It is convenient to use, greatly saves labor costs, and effectively saves water resources by rinsing the material and discharging water. Attached Figure Description

[0013] The foregoing and other objects, features and advantages of this utility model will become apparent from the following detailed description taken in conjunction with the accompanying drawings.

[0014] Figure 1 This is a schematic diagram of the main structure of this utility model; Figure 2 This is a schematic diagram of the DFN product in this utility model; The following are the designations: 100, oscillating nozzle; 110, buffer joint; 200, transmission mechanism; 210, eccentric block; 220, connecting rod assembly; 221, oscillating connecting rod; 222, adjusting rod; 223, eccentric connecting rod; 300, drive mechanism; 400, feeding mechanism; 410, conveyor belt; 420, limiting protrusion; 500, feeding frame; 600, substrate; 700, DFN product. Detailed Implementation

[0015] The following description is based on an ideal embodiment of this utility model. With reference to the description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

[0016] The present invention will be further described with reference to the following figures: like Figure 1 As shown, a surface cleaning device suitable for DFN degumming includes a swing nozzle 100, a transmission mechanism 200, a drive mechanism 300, and a feeding mechanism 400. The swing nozzle 100 is connected to a water pipe via a hose. The transmission mechanism 200 includes an eccentric block 210 and a connecting rod assembly 220. The drive mechanism 300 drives the eccentric block 210 to rotate. The connecting rod assembly 220 connects the swing nozzle 100 and the eccentric block 210 and can drive the swing nozzle 100 to swing. The feeding mechanism 400 is provided with a discharge frame 500, which can move with the feeding mechanism 400 to the lower part of the swing nozzle 100.

[0017] The oscillating nozzle 100 is equipped with a positioning sensor, which can sense the material feeding frame 500 on the conveyor belt and control the solenoid valve and drive mechanism 300 on the oscillating nozzle 100.

[0018] The drive mechanism 300 is a drive motor, and the eccentric block 210 is mounted on the output shaft of the drive motor.

[0019] The feeding mechanism 400 is a conveyor belt 410, and the conveyor belt 410 is provided with limiting protrusions 420. The feeding frame 500 is placed between the limiting protrusions 420, and the lower part of the conveyor belt 410 is provided with a wastewater recycling box 430.

[0020] The transmission mechanism 200 and the drive mechanism 300 are both mounted on the base plate 600. The linkage group 220 includes a swing linkage 221, an adjusting rod 222 and an eccentric linkage 223 connected in sequence. The swing linkage 221 is connected to the swing nozzle 100. One end of the eccentric linkage 223 is mounted on the eccentric block 210. The adjusting rod 222 is provided with multiple adjusting holes. One end of the adjusting rod 222 is hinged to the base plate 600, and the other end of the eccentric linkage 223 is mounted on one of the adjusting holes.

[0021] The oscillating nozzle 100 is connected to the water pipe via the upper buffer connector 110.

[0022] like Figure 1 As shown, when using this utility model, the DFN product 700 after degumming is first placed in the feeding box. The feeding box moves along the conveyor belt to the lower part of the swing nozzle 100. After the position sensor on the swing nozzle 100 senses that the feeding box 500 is in position, the conveyor belt 410 stops. At the same time, the solenoid valve on the swing nozzle 100 is activated, and the swing nozzle 100 starts to spray water. The motor of the control drive mechanism 300 is started, and the motor drives the eccentric block 210 to rotate. Through the connecting rod group 220, the swing nozzle 100 is driven to swing back and forth to rinse for 5 minutes.

[0023] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A surface cleaning device suitable for DFN degumming, characterized in that: It includes a swing nozzle, a transmission mechanism, a drive mechanism, and a feeding mechanism. The swing nozzle is connected to a water pipe via a hose. The transmission mechanism includes an eccentric block and a connecting rod assembly. The drive mechanism drives the eccentric block to rotate. The connecting rod assembly connects the swing nozzle and the eccentric block and can drive the swing nozzle to swing. The feeding mechanism is equipped with a feeding frame, which can move with the feeding mechanism to the lower part of the swing nozzle.

2. The surface cleaning device for DFN after degumming according to claim 1, characterized in that: The oscillating nozzle is equipped with a positioning sensor, which can sense the material feeding frame on the feeding mechanism.

3. The surface cleaning device for DFN after degumming according to claim 1, characterized in that: The oscillating nozzle is equipped with a positioning sensor, which can sense the feeding frame on the feeding mechanism and control the solenoid valve and drive mechanism on the oscillating nozzle.

4. The surface cleaning device for DFN after degumming according to claim 1, characterized in that: The driving mechanism is a drive motor, and the eccentric block is mounted on the output shaft of the drive motor.

5. The surface cleaning device for DFN after degumming according to claim 1, characterized in that: The feeding mechanism is a conveyor belt, which is equipped with limiting protrusions. The feeding frame is placed between the limiting protrusions, and a wastewater collection tank is provided at the bottom of the conveyor belt.

6. The surface cleaning device for DFN after degumming according to claim 1, characterized in that: Both the transmission mechanism and the drive mechanism are mounted on the base plate. The linkage group includes a swing linkage, an adjusting rod and an eccentric linkage connected in sequence. The swing linkage is connected to the swing nozzle. One end of the eccentric linkage is mounted on the eccentric block. The adjusting rod is provided with multiple adjusting holes. One end of the adjusting rod is hinged to the base plate, and the other end of the eccentric linkage is mounted on one of the adjusting holes.

7. The surface cleaning device for DFN after degumming according to claim 1, characterized in that: The oscillating nozzle is connected to the water pipe via an upper buffer connector.

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