A sapphire nano-patterned substrate surface cleaning device

Abstract

The utility model relates to sapphire technical field, concretely is a kind of sapphire nanometer patterning substrate surface cleaning device, comprising: support leg and workbench, the support leg upper end is equipped with workbench, the workbench is equipped with hole board, and is equipped with placing tray on workbench, the workbench is equipped with cleaning mechanism, the cleaning mechanism is equipped with storage box inside, the storage box is equipped with filter block inside, and circulation pump is equipped with on storage box side, the circulation pump output is equipped with connecting pipe, the connecting pipe one end is equipped with delivery pipe, the delivery pipe one side is equipped with support plate, the support plate is equipped with support, the support is equipped with the spray head body, and positioning mechanism is equipped on workbench, the positioning mechanism is equipped with L type board inside, the L type board is equipped with telescopic column, positioning mechanism can be positioned to sapphire work, through cleaning tray can be cleaned to sapphire, through cleaning mechanism can be recycled to cleaning fluid.

Description

Technical Field

[0001] This utility model relates to the field of sapphire technology, specifically to a surface cleaning device for sapphire nanopatterned substrates. Background Technology

[0002] Sapphire patterned substrates (PSS) are semiconductor materials that optimize the epitaxial growth quality of gallium nitride (GaN) and the light extraction efficiency of LEDs by creating nanoscale microstructure patterns on the surface of sapphire substrates. The core of PSS lies in using dry etching technology to form specific patterns, reduce epitaxial defects and improve device performance.

[0003] In response, Chinese patent application number CN220195868U discloses a sapphire wafer surface cleaning device, including an immersion tank with four support columns fixed to its outer surface and a discharge pipe on one side of its bottom. The immersion tank contains a storage assembly, and a top plate is located on its top. A cylinder drives the central column and the storage assembly to move up and down, thereby achieving a process of cleaning and rinsing the sapphire inside the storage assembly. By rotating a screw, the screw pushes a connecting plate and a pressing plate inside each placement frame to move, pressing and fixing the sapphire inside, maintaining its stability during cleaning and rinsing. Compared to existing technologies, by placing the sapphire inside the first, second, and third placement frames and clamping it with the pressing plates, a larger number of sapphires can be accommodated for cleaning simultaneously, while maintaining a stable fixation effect. The device is easy to adjust and effectively improves the efficiency of sapphire cleaning.

[0004] However, existing sapphire nanopatterned substrate surface cleaning devices increase operating costs because the sapphire nanopatterned substrates require cleaning, and the existing devices cannot filter and recycle the cleaning solution.

[0005] Therefore, in order to solve the above problems, a surface cleaning device for sapphire nanopatterned substrates is proposed. Utility Model Content

[0006] The purpose of this invention is to provide a surface cleaning device for sapphire nanopatterned substrates, in order to solve the problem mentioned in the background art of existing sapphire nanopatterned substrate surface cleaning devices, which increase operating costs because sapphire nanopatterned substrates require cleaning but existing devices cannot filter and recycle the cleaning solution.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a sapphire nanopatterned substrate surface cleaning device, comprising: a support leg and a worktable, the upper end of the support leg being provided with the worktable, the worktable being provided with a perforated plate and a placement tray, the worktable being provided with a cleaning mechanism, the cleaning mechanism being provided with a storage box, the storage box being provided with a filter block, and a circulation pump being provided on one side of the storage box, the output end of the circulation pump being provided with a connecting pipe, one end of the connecting pipe being provided with a delivery pipe, one side of the delivery pipe being provided with a support plate, the support plate being provided with a bracket, the bracket being provided with a nozzle body, and a positioning mechanism being provided on the worktable, the positioning mechanism being provided with an L-shaped plate, the L-shaped plate being provided with a telescopic column, the positioning mechanism being used to position the sapphire, the cleaning tray being used to clean the sapphire, and the cleaning liquid being used to circulate and reuse the cleaning mechanism.

[0008] Preferably, a cross arm is fixedly installed at the telescopic end of the telescopic column, and a servo motor is fixedly installed on the cross arm. The telescopic column can drive the cleaning disc to adjust its height as needed.

[0009] Preferably, a transmission rod is fixedly installed at the output end of the servo motor via a coupling, and a cleaning disc is fixedly installed at one end of the transmission rod. The servo motor can drive the transmission rod to rotate, and the transmission rod drives the cleaning disc to work.

[0010] Preferably, the worktable is provided with hydraulic rods on both sides, the hydraulic rods are fixedly installed on the support plate, and the output end of the hydraulic rod is fixedly installed with a positioning ring. The hydraulic rod can drive the positioning ring to perform positioning work on the sapphire.

[0011] Preferably, the storage box is fixedly installed at the bottom of the workbench, the filter block is fixedly installed inside the storage box, the circulation pump is fixedly installed on the workbench by bolts, and the circulation pump is fixedly connected to the filter block by a suction pipe. The storage box is used to store the cleaning liquid, which is then filtered by the filter block.

[0012] Preferably, one end of the connecting pipe is detachably mounted on the circulating pump, one end of the delivery pipe is fixedly connected to the connecting pipe, and the support plate is fixedly mounted on the workbench. The cleaning fluid is delivered to the connecting pipe through the connecting pipe. When the storage tank needs to be cleaned, it can be disassembled through the perforated plate on the workbench to clean the inside of the storage tank.

[0013] Preferably, the bottom end of the bracket is fixedly mounted on the support plate by bolts, the nozzle body is fixedly mounted on the bracket, and the other end of the delivery pipe is fixedly connected to the nozzle body. The support plate can be used to support and fix the bracket.

[0014] Compared with the prior art, the beneficial effects of this utility model are: 1. By setting up a positioning mechanism, the sapphire nanopatterned substrate can be positioned. Compared with the existing structure, this utility model uses a hydraulic rod, positioning clamp, telescopic column, horizontal arm, servo motor, transmission rod, cleaning disc and other structures to clamp the sapphire nanopatterned substrate. The servo motor drives the transmission rod to drive the cleaning disc to clean the surface of the sapphire nanopatterned substrate, thereby improving the working efficiency of the device.

[0015] 2. By incorporating a cleaning mechanism, the cleaning solution can be recycled as needed. Compared to existing structures, this utility model uses a storage tank, filter block, circulation pump, connecting pipe, delivery pipe, support, and nozzle body. The filter block filters the liquid in the storage tank, and the liquid is then delivered by the circulation pump. This structure is simple and effective, thereby reducing the cost of using the device. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0017] Figure 1 This is a front view schematic diagram of the structure of this utility model; Figure 2 This is a front view schematic diagram of the main structure of the present utility model; Figure 3 This is a front sectional view of the structure of the workbench of this utility model; Figure 4 This is a front sectional view of the positioning mechanism of this utility model; Figure 5 This is a schematic cross-sectional view of the cleaning mechanism of this utility model.

[0018] In the diagram: 1. Support leg; 2. Workbench; 21. Perforated plate; 22. Placement tray; 3. Positioning mechanism; 31. L-shaped plate; 32. Telescopic column; 33. Cross arm; 34. Servo motor; 35. Transmission rod; 36. Cleaning tray; 37. Hydraulic rod; 38. Positioning ring; 4. Cleaning mechanism; 41. Storage box; 42. Filter block; 43. Circulation pump; 44. Connecting pipe; 45. Delivery pipe; 46. Support plate; 47. Bracket; 48. Nozzle body. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model; the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In addition, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0021] Please see Figures 1-5 One embodiment provided by this utility model: The servo motor 34, hydraulic rod 37, and circulating pump 43 used in this application are products that can be purchased directly from the market. Their principles and connection methods are existing technologies well known to those skilled in the art, so they will not be described in detail here.

[0022] A surface cleaning device for sapphire nanopatterned substrates includes: a support leg 1 and a worktable 2. The worktable 2 is located on the upper end of the support leg 1. The worktable 2 has a perforated plate 21 and a placement tray 22. The worktable 2 has a cleaning mechanism 4. The cleaning mechanism 4 has a storage box 41 inside. The storage box 41 has a filter block 42 inside. A circulation pump 43 is located on one side of the storage box 41. The output end of the circulation pump 43 has a connecting pipe 44. One end of the connecting pipe 44 has a delivery pipe 45. A support plate 46 is located on one side of the delivery pipe 45. A bracket 47 is located on the support plate 46. A nozzle body 48 is located on the bracket 47. A positioning mechanism 3 is located on the worktable 2. The positioning mechanism 3 has an L-shaped plate 31 inside. A telescopic column 32 is located on the L-shaped plate 31. By setting this component, the sapphire nanopatterned substrate can be clamped and positioned by the positioning mechanism 3. The cleaning solution can be recycled as needed by the cleaning mechanism 4.

[0023] As a further improvement of this utility model, a cross arm 33 is fixedly installed at the telescopic end of the telescopic column 32, and a servo motor 34 is fixedly installed on the cross arm 33. By setting this component, the cross arm 33 can be supported by the telescopic column 32, and the servo motor 34 can be supported and fixed by the cross arm 33.

[0024] As a further improvement of this utility model, a transmission rod 35 is fixedly installed at the output end of the servo motor 34 via a coupling. A cleaning disc 36 is fixedly installed at one end of the transmission rod 35. By setting this component, the servo motor 34 can drive the cleaning disc 36 to work through the transmission rod 35.

[0025] As a further improvement of this utility model, hydraulic rods 37 are provided on both sides of the workbench 2. The hydraulic rods 37 are fixedly installed on the support plate 46, and a positioning ring 38 is fixedly installed at the output end of the hydraulic rods 37. By setting this component, the positioning ring 38 can be moved by the hydraulic rods 37.

[0026] As a further improvement of this utility model, the storage box 41 is fixedly installed at the bottom of the workbench 2, the filter block 42 is fixedly installed inside the storage box 41, and the circulation pump 43 is fixedly installed on the workbench 2 by bolts. The circulation pump 43 is fixedly connected to the filter block 42 through a suction tube. By setting this component, the cleaning liquid can be filtered through the filter block 42 inside the storage box 41.

[0027] As a further improvement of this utility model, one end of the connecting pipe 44 is detachably installed on the circulating pump 43, one end of the conveying pipe 45 is fixedly connected to the connecting pipe 44, and the support plate 46 is fixedly installed on the workbench 2. By setting this component, the cleaning liquid can be conveyed to the conveying pipe 45 through the connecting pipe 44.

[0028] As a further improvement of this utility model, the bottom end of the bracket 47 is fixedly mounted on the support plate 46 by bolts, the nozzle body 48 is fixedly mounted on the bracket 47, and the other end of the delivery pipe 45 is fixedly connected to the nozzle body 48. By setting this component, the nozzle body 48 can be supported and limited by the bracket 47.

[0029] Working principle: When the sapphire nano-patterned substrate surface cleaning device is needed, simply support the device with the support leg 1, power the device with the existing power supply, place the sapphire nano-patterned substrate to be processed on the placement plate 22, and use the hydraulic rod 37 to drive the positioning ring 38 to clamp and position the sapphire nano-patterned substrate. Then, add the cleaning fluid into the storage tank 41, start the circulation pump 43 to transport the cleaning fluid through the filter block 42 and the connecting pipe 44 to the delivery pipe 45, and then spray the cleaning fluid onto the surface of the sapphire nano-patterned substrate through the nozzle body 48 via the delivery pipe 45. As needed, the telescopic column 32 drives the horizontal arm 33 and the servo motor 34 to move, so that the cleaning disc 36 is in contact with the surface of the sapphire nano-patterned substrate. The servo motor 34 then drives the cleaning disc 36 to clean the surface of the sapphire nano-patterned substrate through the transmission rod 35, thus completing the work.

[0030] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any way. Those skilled in the art can readily implement this utility model based on the accompanying drawings and the above description. However, any modifications, alterations, or equivalent variations made by those skilled in the art without departing from the scope of the utility model's technical solution, utilizing the disclosed technical content, are considered equivalent embodiments of this utility model. Furthermore, any equivalent changes, alterations, or variations made to the above embodiments based on the essential technology of this utility model are still within the protection scope of this utility model's technical solution.

Claims

1. A surface cleaning device for sapphire nanopatterned substrates, comprising: Support leg (1) and worktable (2), the upper end of the support leg (1) is provided with worktable (2), the worktable (2) is provided with perforated plate (21), and a placement plate (22) is provided on the worktable (2). The feature is that: a cleaning mechanism (4) is provided on the workbench (2), a storage box (41) is provided inside the cleaning mechanism (4), a filter block (42) is provided inside the storage box (41), and a circulation pump (43) is provided on one side of the storage box (41). A connecting pipe (44) is provided at the output end of the circulation pump (43), a conveying pipe (45) is provided at one end of the connecting pipe (44), a support plate (46) is provided on one side of the conveying pipe (45), a bracket (47) is provided on the support plate (46), a nozzle body (48) is provided on the bracket (47), and a positioning mechanism (3) is provided on the workbench (2). An L-shaped plate (31) is provided inside the positioning mechanism (3), and a telescopic column (32) is provided on the L-shaped plate (31).

2. The sapphire nanopatterned substrate surface cleaning device according to claim 1, characterized in that: The telescopic column (32) has a cross arm (33) fixedly installed at its telescopic end, and a servo motor (34) is fixedly installed on the cross arm (33).

3. The sapphire nanopatterned substrate surface cleaning device according to claim 2, characterized in that: The output end of the servo motor (34) is fixedly mounted with a transmission rod (35) via a coupling, and a cleaning disc (36) is fixedly mounted on one end of the transmission rod (35).

4. The sapphire nanopatterned substrate surface cleaning device according to claim 3, characterized in that: The workbench (2) is provided with hydraulic rods (37) on both sides. The hydraulic rods (37) are fixedly installed on the support plate (46), and the output end of the hydraulic rods (37) is fixedly installed with a positioning ring (38).

5. The sapphire nanopatterned substrate surface cleaning device according to claim 1, characterized in that: The storage box (41) is fixedly installed at the bottom of the workbench (2), the filter block (42) is fixedly installed inside the storage box (41), the circulation pump (43) is fixedly installed on the workbench (2) by bolts, and the circulation pump (43) is fixedly connected to the filter block (42) by a suction pipe.

6. The sapphire nanopatterned substrate surface cleaning device according to claim 1, characterized in that: One end of the connecting pipe (44) is detachably installed on the circulating pump (43), one end of the conveying pipe (45) is fixedly connected to the connecting pipe (44), and the support plate (46) is fixedly installed on the workbench (2).

7. The sapphire nanopatterned substrate surface cleaning device according to claim 1, characterized in that: The bottom end of the bracket (47) is fixedly installed on the support plate (46) by bolts, the nozzle body (48) is fixedly installed on the bracket (47), and the other end of the delivery pipe (45) is fixedly connected to the nozzle body (48).

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