Low-corrosion quartz tube cleaning apparatus
Patent Information
- Application Number
- CN202522538820.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-28
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-11-28
AI Technical Summary
[0004]本实用新型的目的是为了解决现有技术中存在清洗设备多为单管清洗设计，难以满足规模化生产中的批量处理需求，不便于同时对多个石英管进行清洗，且对于不同直径的石英管适配性差，进而造成清洗效率降低的问题，而提出的一种低腐蚀石英管清洗设备
1、本实用新型中，通过平移电机电动驱动双向丝杆进行转动，进而有利于带动连接杆在滑槽的内部相向移动，进而有利于带动夹持板相向移动，夹持板上开设有多个夹持槽，便于放置石英管促使夹持板对石英管进行夹持，有利于保证了石英管的稳定性，便于对多个石英管同步进行清洗，从而有利于实现批量清洗，提高了清洗效率，通过连接杆便于在滑槽的内部相向移动，有利于调节两个夹持板之间的距离，从而便于对不同直径的石英管进行夹持，无需为不同直径石英管更换专用夹具，提高了夹持板的适用性和灵活性。
Smart Images
Figure CN224913142U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of quartz tube processing technology, and in particular to a low-corrosion quartz tube cleaning device. Background Technology
[0002] Quartz tubes possess excellent properties such as high temperature resistance, corrosion resistance, and good light transmittance, and are widely used in semiconductors, photovoltaics, optical instruments, and other fields. During the production and use of quartz tubes, their surfaces are easily contaminated with oil, dust, metallic impurities, and other pollutants. These contaminants can affect the performance of the quartz tube and the quality of subsequent processing; therefore, cleaning treatment is necessary.
[0003] Existing cleaning equipment is mostly designed for single-tube cleaning, which makes it difficult to meet the batch processing needs of large-scale production. It is not convenient to clean multiple quartz tubes at the same time, and its adaptability to quartz tubes of different diameters is poor, which leads to a reduction in cleaning efficiency. Utility Model Content
[0004] The purpose of this invention is to address the problems in existing technologies where cleaning equipment is mostly designed for single-tube cleaning, making it difficult to meet the batch processing needs of large-scale production, inconvenient to clean multiple quartz tubes simultaneously, and poor adaptability to quartz tubes of different diameters, thus resulting in reduced cleaning efficiency. Therefore, this invention proposes a low-corrosion quartz tube cleaning device.
[0005] To achieve the above objectives, the present invention adopts the following technical solution: a low-corrosion quartz tube cleaning device, comprising a cleaning tank and a storage tank, wherein sliding grooves are installed on both sides of the interior of the cleaning tank, and a bidirectional lead screw is installed inside the sliding grooves, one end of the bidirectional lead screw is connected to a translation motor, and a connecting rod is threaded to the outer side of the bidirectional lead screw, the connecting rod being movably installed inside the sliding grooves, a clamping plate being connected to the bottom of the connecting rod, and multiple clamping slots being provided on the clamping plate, and a drain pipe being connected to the bottom of the cleaning tank.
[0006] Preferably, a pad is fixedly installed inside the cleaning tank, and ultrasonic generators are symmetrically installed inside the cleaning tank, with the ultrasonic generators located at the bottom of the pad.
[0007] Preferably, the cleaning tank is symmetrically equipped with brackets inside, and rotating shafts are symmetrically installed on the brackets. One end of each rotating shaft is connected to a spray frame, and one end of each rotating shaft is connected to a rotating motor.
[0008] Preferably, a telescopic hose is connected to the top of the spray frame, and a pump is connected to one end of the telescopic hose.
[0009] Preferably, a feed pipe is connected to the side of the storage tank, and a stirring motor is installed on the top of the storage tank.
[0010] Preferably, the bottom of the stirring motor is connected to a drive shaft, and multiple stirring rollers are distributed on the outer side of the drive shaft.
[0011] Compared with the prior art, the advantages and positive effects of this utility model are as follows: 1. In this utility model, a translation motor electrically drives a bidirectional lead screw to rotate, which in turn facilitates the movement of the connecting rod towards each other within the slide groove. This, in turn, facilitates the movement of the clamping plates towards each other. The clamping plates have multiple clamping slots, which facilitate the placement of quartz tubes and ensure the clamping plates hold the quartz tubes, thus ensuring the stability of the quartz tubes. This allows for simultaneous cleaning of multiple quartz tubes, enabling batch cleaning and improving cleaning efficiency. The connecting rod's ability to move towards each other within the slide groove allows for adjustment of the distance between the two clamping plates, facilitating the clamping of quartz tubes of different diameters without the need to replace them with special clamps, thereby improving the applicability and flexibility of the clamping plates.
[0012] 2. In this utility model, the cleaning fluid inside the storage tank is drawn by a pump and transported to the inside of the spray frame through a telescopic hose. It is then sprayed out through the nozzles on the spray frame, which is beneficial for cleaning the quartz tube. In addition, the ultrasonic generator works to generate high-frequency vibration signals. The vibration causes countless tiny bubbles to form inside the cleaning fluid. The bubbles are rapidly generated, expanded and burst instantly under high-frequency pressure changes, which is beneficial for ultrasonic cleaning of the quartz tube, thereby improving the cleaning efficiency. Attached Figure Description
[0013] Figure 1 This utility model provides a three-dimensional structural diagram of a low-corrosion quartz tube cleaning device; Figure 2 This utility model presents another structural schematic diagram of a low-corrosion quartz tube cleaning device. Figure 3 This utility model provides a schematic diagram of the clamping mechanism structure for a low-corrosion quartz tube cleaning device. Figure 4 This utility model provides a partial cross-sectional structural diagram of a low-corrosion quartz tube cleaning device; Figure 5 This utility model provides a schematic diagram of the adjustment component structure for a low-corrosion quartz tube cleaning device. Figure 6 This invention provides a partial cross-sectional structural diagram of a low-corrosion quartz tube cleaning device.
[0014] Legend: 1. Cleaning tank; 2. Storage tank; 3. Feed pipe; 4. Pump; 5. Telescopic hose; 6. Spray frame; 7. Rotary motor; 8. Rotating shaft; 9. Support; 10. Slide groove; 11. Two-way lead screw; 12. Translation motor; 13. Connecting rod; 14. Clamping plate; 15. Ultrasonic generator; 16. Pad; 17. Drain pipe; 18. Agitator motor; 19. Drive shaft; 20. Agitator roller. Detailed Implementation
[0015] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.
[0016] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.
[0017] Example 1: As Figures 1-6 As shown, this utility model provides a technical solution: a low-corrosion quartz tube cleaning device, including a cleaning tank 1 and a storage tank 2. The cleaning tank 1 has sliding grooves 10 installed on both sides inside. A bidirectional lead screw 11 is installed inside the sliding groove 10. One end of the bidirectional lead screw 11 is connected to a translation motor 12. A connecting rod 13 is threaded to the outside of the bidirectional lead screw 11. The connecting rod 13 is movably installed inside the sliding groove 10. A clamping plate 14 is connected to the bottom of the connecting rod 13. The clamping plate 14 has multiple clamping grooves. A drain pipe 17 is connected to the bottom of the cleaning tank 1.
[0018] In this embodiment, the bidirectional lead screw 11 is electrically driven by the translation motor 12 to rotate, which in turn facilitates the movement of the connecting rod 13 towards each other inside the slide groove 10, and in turn facilitates the movement of the clamping plates 14 towards each other. The clamping plates 14 have multiple clamping slots, which facilitates the placement of quartz tubes and causes the clamping plates 14 to clamp the quartz tubes, which helps to ensure the stability of the quartz tubes and facilitates the simultaneous cleaning of multiple quartz tubes, thereby enabling batch cleaning and improving cleaning efficiency. The connecting rod 13 can move towards each other inside the slide groove 10, which helps to adjust the distance between the two clamping plates 14, thus facilitating the clamping of quartz tubes of different diameters without the need to change to special clamps for quartz tubes of different diameters, improving the applicability and flexibility of the clamping plates 14. By opening the valve on the drain pipe 17, the sewage is discharged.
[0019] Example 2: Figures 1-6As shown, a pad 16 is fixedly installed inside the cleaning tank 1. Ultrasonic generators 15 are symmetrically installed inside the cleaning tank 1, and the ultrasonic generators 15 are located at the bottom of the pad 16. A bracket 9 is symmetrically installed inside the cleaning tank 1, and a rotating shaft 8 is symmetrically installed on the bracket 9. One end of the rotating shaft 8 is connected to a spray frame 6, and one end of one of the rotating shafts 8 is connected to a rotating motor 7. A telescopic hose 5 is connected to the top of the spray frame 6, and a pump 4 is connected to one end of the telescopic hose 5. A feed pipe 3 is connected to the side of the storage tank 2. A stirring motor 18 is installed on the top of the storage tank 2, and a drive shaft 19 is connected to the bottom of the stirring motor 18. Multiple stirring rollers 20 are distributed on the outer side of the drive shaft 19.
[0020] In this embodiment, ammonium bifluoride and pure water are added to the storage tank 2 in a certain proportion. The drive shaft 19 is rotated by the stirring motor 18, which in turn rotates the stirring roller 20, facilitating the mixing of ammonium bifluoride and pure water. The cleaning solution inside the storage tank 2 is drawn by the pump 4 and delivered to the spray frame 6 through the telescopic hose 5. It is then sprayed out through the nozzles on the spray frame 6, which is beneficial for cleaning the quartz tube. The cleaning solution can generate fluoride ions and weaken the acidity of hydrofluoric acid. While cleaning the quartz tube, it can reduce the etching on the tube surface and improve the product surface qualification rate. In addition, the ultrasonic generator 15 generates high-frequency vibration signals. The vibration causes countless tiny bubbles to form inside the cleaning solution. The bubbles are rapidly generated, expanded and burst instantly under high-frequency pressure changes, which is beneficial for ultrasonic cleaning of the quartz tube, thereby improving the cleaning efficiency. The rotation motor 7 drives one of the rotating shafts 8 to rotate, which, together with the other rotating shaft 8, facilitates the angle adjustment of the spray frame 6, thereby making it easy to adjust the rinsing angle of the spray frame 6.
[0021] The working principle of this embodiment is as follows: In use, the bidirectional lead screw 11 is first driven by the translation motor 12 to rotate, which in turn drives the connecting rod 13 to move towards each other inside the slide groove 10, and in turn drives the clamping plate 14 to move towards each other. The clamping plate 14 has multiple clamping slots to facilitate the placement of quartz tubes and to clamp the quartz tubes, so that multiple quartz tubes can be cleaned simultaneously. Ammonium bifluoride and pure water are put into the storage tank 2 in a certain proportion. The transmission shaft 19 is driven by the stirring motor 18 to rotate, which in turn drives the stirring roller 20 to rotate, so as to mix and stir the ammonium bifluoride and pure water. The cleaning liquid inside the storage tank 2 is drawn by the pump 4 and transported to the inside of the spray frame 6 through the telescopic hose 5, and sprayed out through the nozzles on the spray frame 6, which is beneficial to cleaning the quartz tubes. In addition, the ultrasonic generator 15 works to generate high-frequency vibration signals. The vibration causes countless tiny bubbles to form inside the cleaning liquid. The bubbles are rapidly generated, expanded and burst instantly under high-frequency pressure changes, which is beneficial to ultrasonic cleaning of the quartz tubes, thereby improving the cleaning efficiency. The rotating motor 7 electrically drives one of the rotating shafts 8 to rotate, which, together with the other rotating shaft 8, helps to adjust the angle of the spray frame 6, thus making it easier to adjust the rinsing angle of the spray frame 6. Finally, the valve on the sewage pipe 17 is opened to facilitate the discharge of sewage.
[0022] The rotary motor 7, bidirectional lead screw 11, translation motor 12, ultrasonic generator 15, and stirring motor 18 in this utility model are common knowledge in the field. Their working principles are well-known technologies. The appropriate model is selected according to actual use. Therefore, the rotary motor 7, bidirectional lead screw 11, translation motor 12, ultrasonic generator 15, and stirring motor 18 will not be explained in detail.
[0023] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.
Claims
1. A low-corrosion quartz tube cleaning device, comprising a cleaning tank (1) and a storage tank (2), characterized in that: The cleaning tank (1) has sliding grooves (10) installed on both sides inside. A double-acting screw (11) is installed inside the sliding groove (10). One end of the double-acting screw (11) is connected to a translation motor (12). A connecting rod (13) is threaded to the outside of the double-acting screw (11). The connecting rod (13) is movably installed inside the sliding groove (10). A clamping plate (14) is connected to the bottom of the connecting rod (13). Multiple clamping slots are provided on the clamping plate (14). A drain pipe (17) is connected to the bottom of the cleaning tank (1).
2. The low-corrosion quartz tube cleaning equipment according to claim 1, characterized in that: A pad (16) is fixedly installed inside the cleaning tank (1), and an ultrasonic generator (15) is symmetrically installed inside the cleaning tank (1). The ultrasonic generator (15) is located at the bottom of the pad (16).
3. The low-corrosion quartz tube cleaning equipment according to claim 1, characterized in that: The cleaning tank (1) is symmetrically equipped with a bracket (9), and a rotating shaft (8) is symmetrically installed on the bracket (9). One end of the rotating shaft (8) is connected to a spray frame (6), and one end of the rotating shaft (8) is connected to a rotating motor (7).
4. The low-corrosion quartz tube cleaning equipment according to claim 3, characterized in that: The top of the spray frame (6) is connected to a telescopic hose (5), and one end of the telescopic hose (5) is connected to a pump (4).
5. The low-corrosion quartz tube cleaning equipment according to claim 1, characterized in that: The storage tank (2) is connected to a feed pipe (3) on its side, and a stirring motor (18) is installed on the top of the storage tank (2).
6. The low-corrosion quartz tube cleaning equipment according to claim 5, characterized in that: The bottom of the stirring motor (18) is connected to a drive shaft (19), and multiple stirring rollers (20) are distributed on the outer side of the drive shaft (19).