Chip soldering vacuum soldering furnace

Abstract

The utility model relates to welding furnace technical field, and disclose a kind of chip welding vacuum welding furnace, including welding furnace body, the top surface of welding furnace body is provided with integral avoid position subassembly, and the below of integral avoid position subassembly is provided with auxiliary counterweight subassembly;The utility model is provided with auxiliary counterweight subassembly and pressure display mechanism, can exert stable and accurately controlled pressure to chip in the welding process, and pressure display mechanism real-time feedback pressure value, it is convenient for operating personnel accurate control, ensure that solder evenly spreads, reduce hollow and other defects, simultaneously, groove type photoelectric switch is cooperated with electric push rod, guarantee the pressing force degree of each welding in batch production is consistent, significantly improve the reliability and yield of chip welding, by integral avoid position subassembly, after single chip enters welding furnace, pressure roller is quickly lifted, and operation space is reserved for the installation of subsequent chip and substrate, realize continuous feeding, effectively shorten production interval.

Description

Technical Field

[0001] This utility model relates to the field of welding furnace technology, and more specifically to a vacuum welding furnace for chip welding. Background Technology

[0002] In the back-end processes of semiconductor manufacturing, chip bonding is a critical process for fixing semiconductor chips onto packaging carriers or substrates. The quality of bonding directly determines the mechanical strength, thermal conductivity, and long-term operational reliability of the device, especially for high-power devices (such as IGBTs, lasers, and LEDs), aerospace electronics, and automotive electronics, where the requirements are even more stringent.

[0003] However, when placing chips, the substrate must be placed first, followed by the solder, and finally the chip, forming a "stacked state." Since the existing chips rely solely on their own weight for positioning, when this state is moved into the soldering furnace by the support mechanism, slight misalignment is highly likely to occur due to inertia. Since chips are high-precision products, even slight misalignment can lead to chip damage. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides a chip welding vacuum welding furnace to solve the problem that, in the prior art, when the chip is moved into the furnace through the internal conveying device, it is highly likely that a slight misalignment will occur due to inertia.

[0005] This utility model provides the following technical solution: a chip welding vacuum welding furnace, including a welding furnace body, an integral avoidance component is provided on the top surface of the welding furnace body, and an auxiliary counterweight component is provided below the integral avoidance component; The auxiliary counterweight assembly includes a base that is fixedly connected to the top surface of the welding furnace body by bolts. A positioning plate is provided below the base. A limit frame is provided on the bottom surface of the positioning plate. A pressure roller is rotatably connected to the bottom end of the limit frame through a bearing. Four guide rods are evenly distributed and fixedly connected to the top surface of the positioning plate. Each guide rod passes through the base and is slidably connected to the base.

[0006] As a further embodiment of this utility model, a pulley assembly is installed inside the welding furnace body via a bearing seat, and the top surface of the pulley assembly and the bottom surface of the conveying mechanism inside the welding furnace body are the same reference plane.

[0007] As a further embodiment of this utility model, the overall positioning assembly includes an electric push rod mounted on the top surface of the base via a bracket. The push rod of the electric push rod is fixedly connected to a connecting plate. Four tension rods are evenly distributed and fixedly connected to the bottom surface of the connecting plate. Limiting cylinders are fixedly connected to the positioning plate and the corresponding positions of the tension rods. The tension rods are inserted into the limiting cylinders. A pressure display mechanism is provided below the connecting plate.

[0008] As a further embodiment of this utility model, the pressure display mechanism includes a threaded cylinder fixedly connected to the bottom surface of the connecting plate, a lead screw connected internally to the threaded cylinder, a spoke-type pressure sensor mounted on the top surface of the positioning plate, and a gasket fixedly connected to the bottom end of the lead screw, with the gasket in contact with the pressure end of the spoke-type pressure sensor.

[0009] As a further embodiment of this utility model, the vertical cross-section of the tension rod is an inverted "T" shape, and a tension spring is provided inside the limiting cylinder, with both ends of the tension spring being fixedly connected to the limiting cylinder and the tension rod, respectively.

[0010] As a further embodiment of this utility model, each of the limiting frames has two positioning sliders symmetrically fixedly connected to its top surface. The positioning plate has a groove at the position of the positioning slider, and the positioning slider is inserted into the groove and slidably connected to the positioning plate through the groove. The top surface of the limiting frame is threaded with a first external thread knob, which penetrates the surface of the positioning plate and is slidably connected to the positioning plate. A rubber sheet is fixedly connected to the top of the first external thread knob, and the rubber sheet is in contact with the top surface of the positioning plate.

[0011] As a further embodiment of this utility model, the inner wall of the bracket is provided with a slotted photoelectric switch, and a baffle is fixedly connected to the side of the connecting plate corresponding to the slotted photoelectric switch.

[0012] As a further embodiment of this utility model, the bracket has a vertical sliding groove inside, and a slider is provided inside the vertical sliding groove. The slider is fixedly connected to the slotted photoelectric switch. A second external thread knob is threadedly connected to one side of the slider. A rubber sheet is fixedly connected to the surface of the second external thread knob, and the rubber sheet is in contact with the bracket.

[0013] The technical effects and advantages of this utility model are as follows: 1. This utility model, by setting an auxiliary counterweight component and a pressure display mechanism, can apply stable and precisely controllable pressure to the chip during the welding process. The pressure display mechanism provides real-time feedback of the pressure value, which is convenient for operators to make precise adjustments, ensuring uniform solder spread and reducing defects such as voids. At the same time, the slotted photoelectric switch and electric push rod work together to ensure that the pressing pressure is consistent for each welding in mass production, which significantly improves the reliability of chip welding and the yield.

[0014] 2. This utility model, through the overall avoidance component, can quickly raise the pressure roller after a single chip enters the welding furnace, reserving operating space for the subsequent installation of chips and substrates, realizing continuous feeding and effectively shortening the production interval.

[0015] 3. This utility model uses a pulley set in conjunction with a pressure roller, which rotates during the substrate transport process. This avoids chip misalignment due to inertia and does not put extra burden on chip movement. The pressure roller is made of soft materials such as silicone to prevent damage to the chip surface. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0017] Figure 2 This is a schematic diagram of the welding wheel body and base roller structure of this utility model.

[0018] Figure 3 This is a schematic diagram of the connecting frame and pressure roller structure of this utility model.

[0019] Figure 4 This is a schematic diagram of the vertical cross-sectional structure of the positioning plate of this utility model.

[0020] Figure 5 This is a schematic diagram of the vertical cross-sectional structure of the base of this utility model.

[0021] The attached figures are labeled as follows: 1. Welding furnace body; 2. Base; 3. Pulley assembly; 4. Limiting frame; 5. Pressure roller; 6. Positioning plate; 7. Spoke-type pressure sensor; 8. Lead screw; 9. Threaded cylinder; 10. Connecting plate; 11. Tension rod; 12. Limiting cylinder; 13. First external thread knob; 14. Positioning slider; 15. Electric push rod; 16. Second external thread knob; 17. Slotted photoelectric switch; 18. Baffle. Detailed Implementation

[0022] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. In addition, the forms of the various structures described in the following embodiments are merely illustrative. This utility model is not limited to the structures described in the following embodiments. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0023] Reference Figures 1-5 This utility model provides a chip welding vacuum welding furnace, including a welding furnace body 1, an overall avoidance component is provided on the top surface of the welding furnace body 1, and an auxiliary counterweight component is provided below the overall avoidance component. The auxiliary counterweight assembly includes a base 2 that is fixedly connected to the top surface of the welding furnace body 1 by bolts. A positioning plate 6 is provided below the base 2. A limit frame 4 is provided on the bottom surface of the positioning plate 6. A pressure roller 5 is rotatably connected to the bottom end of the limit frame 4 through a bearing. Four guide rods are evenly distributed and fixedly connected to the top surface of the positioning plate 6, and each guide rod passes through the base 2 and is slidably connected to the base 2.

[0024] Inside the welding furnace body 1, a pulley assembly 3 is installed via a bearing seat, and the top surface of the pulley assembly 3 and the bottom surface of the conveying mechanism inside the welding furnace body 1 are the same reference surface.

[0025] When it is necessary to solder the chip, the substrate is first placed inside the soldering furnace body 1. At this time, the pulley group 3 should be located below the substrate and in contact with the bottom surface of the substrate. Then, the solder is placed on the top surface of the substrate, and finally the chip is placed on top of the solder, so that it is in a "stacked" state. Then, the positioning plate 6 is moved down until the pressure roller 5 is in contact with the top surface of the chip. The weight of the pressure roller 5, the limiting frame 4 and the positioning plate 6 exerts force on the chip. When the substrate moves into the soldering furnace body 1, the pulley group 3 and the limiting frame 4 will be rotated due to the movement of the substrate. Because there is a "counterweight" on the top of the chip, the chip and the substrate are more stable, avoiding the limitation due to inertia at the beginning of the start. The shape of the limiting frame 4 will not burden the movement of the chip.

[0026] It should be noted that the welding furnace body 1 includes the furnace body, vacuum system, heating system, cooling system, control system and supporting mechanism, etc. Those skilled in the art can set them according to actual needs, which will not be elaborated here.

[0027] It should be noted that the pressure roller 5 is made of silicone, which is relatively soft and will not damage the chip. Those skilled in the art can set it according to actual needs, which will not be elaborated here.

[0028] It should be noted that the pulley group 3 consists of two pulleys and a belt. Those skilled in the art can set it according to actual needs, which will not be elaborated here.

[0029] In this utility model, the overall positioning component includes an electric push rod 15 mounted on the top surface of the base 2 via a bracket. The push rod of the electric push rod 15 is fixedly connected to a connecting plate 10. Four tension rods 11 are evenly distributed and fixedly connected to the bottom surface of the connecting plate 10. The positioning plate 6 and the tension rods 11 are fixedly connected to limit cylinders 12 at corresponding positions. The tension rods 11 are inserted into the limit cylinders 12. A pressure display mechanism is provided below the connecting plate 10.

[0030] The vertical cross-section of the tension rod 11 is an inverted "T" shape, and a tension spring is installed inside the limiting cylinder 12. The two ends of the tension spring are fixedly connected to the limiting cylinder 12 and the tension rod 11, respectively.

[0031] During mass production, when the first chip enters the interior of the welding furnace body 1, the electric push rod 15 is connected to an external power source and started. The push rod will apply force to the pull rod 11 through the connecting plate 10, causing the pull rod 11 to drive the positioning plate 6 to move upward through the limiting cylinder 12 until the pressure roller 5 moves up a certain distance, forming a clearance, which makes it easier to install the next chip and substrate.

[0032] It should be noted that the electric push rod 15 can be used with a magnetic switch, proximity switch or photoelectric switch to achieve precise control of the push rod's extension and retraction displacement. Those skilled in the art can set it according to actual needs, which will not be elaborated here.

[0033] In this utility model, the pressure display mechanism includes a threaded cylinder 9 fixedly connected to the bottom surface of the connecting plate 10, a lead screw 8 is threadedly connected inside the threaded cylinder 9, a spoke-type pressure sensor 7 is installed on the top surface of the positioning plate 6, a gasket is fixedly connected to the bottom end of the lead screw 8, and the gasket is in contact with the pressure end of the spoke-type pressure sensor 7.

[0034] To ensure that the solder beneath the chip is evenly spread and voids are reduced when pressing the chip, additional force is required besides gravity. The specific operation is as follows: First, the pressure roller 5 is brought into contact with the chip. Then, force is applied to the threaded cylinder 9, causing it to rotate. The lead screw 8, which is threaded to the threaded cylinder 9, applies force to the pressure end of the spoke-type pressure sensor 7 through the shim. The spoke-type pressure sensor 7 also displays the force applied to the positioning plate 6 during the process of applying force to the positioning plate 6. The operator can judge the force applied to the chip based on the value, avoiding excessive force that could damage the chip.

[0035] In this utility model, each limiting frame 4 has two positioning sliders 14 symmetrically fixedly connected to its top surface. The positioning plate 6 has a groove at the position of the positioning slider 14, and the positioning slider 14 is inserted into the groove and slidably connected to the positioning plate 6 through the groove. The top surface of the limiting frame 4 is threadedly connected to a first external thread knob 13, which penetrates the surface of the positioning plate 6 and is slidably connected to the positioning plate 6. A rubber sheet is fixedly connected to the top of the first external thread knob 13, and the rubber sheet is in contact with the top surface of the positioning plate 6.

[0036] To accommodate chips at different positions within a certain range, the first external thread knob 13 is first rotated to release the force applied to the limiting frame 4. Then, force is applied to the limiting frame 4, causing it to slide inside the groove via the positioning slider 14. This allows the limiting frame 4 to move directly above the chip. Finally, the first external thread knob 13 is used to lock the limiting frame 4, thus adjusting and locking the position of the pressure roller 5.

[0037] In this utility model, a slotted photoelectric switch 17 is provided on the inner wall of the bracket, and a baffle 18 is fixedly connected to the side of the connecting plate 10 corresponding to the slotted photoelectric switch 17. A vertical sliding groove is opened inside the bracket, and a slider is provided inside the vertical sliding groove. The slider is fixedly connected to the slotted photoelectric switch 17. A second external thread knob 16 is threadedly connected to one side of the slider. A rubber sheet is fixedly connected to the surface of the second external thread knob 16, and the rubber sheet is in contact with the bracket.

[0038] To ensure consistent pressing pressure during batch welding, after adjusting the pressing pressure, force is applied to the second external thread knob 16 to rotate it, thereby releasing the limit on the slider. Then, the slotted photoelectric switch 17 is slid to the same position as the baffle 18 after the pressure adjustment. The position of the slotted photoelectric switch 17 is then locked by the second external thread knob 16, so that each time the electric push rod 15 is activated, the connecting plate 10 moves downward until the baffle 18 is inserted into the U-shaped slot of the slotted photoelectric switch 17, at which point the push rod stops, thus ensuring consistent pressing pressure during batch welding.

[0039] It should be noted that the slotted photoelectric switch model 17 is EE-SX671. Those skilled in the art can set it according to actual needs, which will not be elaborated here.

[0040] It should be noted that in this application, the threaded cylinder 9 and the inner wall of the threaded hole are axially provided with annular grooves. A nylon 66 damping ring with a Shore hardness of 85A is embedded in the groove. Through the continuous axial clamping force generated by its elastic deformation, it forms a 15°-20° helical angle interference fit with the threaded rod surface. When the threaded pair is subjected to axial vibration load, the nylon insert can generate a maximum elastic compression of 0.3mm, increasing the coefficient of friction between the threaded contact surfaces from 0.15 to 0.68. According to ASTM D1894 standard testing, this effectively suppresses loosening displacement caused by thread springback. The use of this utility model involves the following steps: S1: When it is necessary to solder the chip, first place the substrate inside the soldering furnace body 1. At this time, the pulley group 3 should be located below the substrate and in contact with the bottom surface of the substrate. Then place the solder on the top surface of the substrate, and finally place the chip on top of the solder, so that it is in a "stacked" state. Then move the positioning plate 6 down until the pressure roller 5 is in contact with the top surface of the chip. The weight of the pressure roller 5, the limiting frame 4 and the positioning plate 6 exerts force on the chip. When the substrate moves into the soldering furnace body 1, the pulley group 3 and the limiting frame 4 will be rotated due to the movement of the substrate. Because there is a "counterweight" on the top of the chip, the chip and the substrate will be more stable, avoiding misalignment due to inertia when it is first started. The shape of the limiting frame 4 will not burden the movement of the chip. S2: During mass production, when the first chip enters the interior of the welding furnace body 1, the electric push rod 15 is connected to the external power supply and started. The push rod will apply force to the pull rod 11 through the connecting plate 10, so that the pull rod 11 drives the positioning plate 6 to move upward through the limiting cylinder 12 until the pressure roller 5 moves up to a certain distance to form a clearance, thereby making it easier to install the next chip and substrate. S3: In order to ensure that the solder under the chip is evenly spread and voids are reduced when pressing the chip, additional force is required in addition to gravity. The specific operation is as follows: First, make the pressure roller 5 fit against the chip, and then apply force to the threaded cylinder 9 to make the threaded cylinder 9 rotate. The lead screw 8, which is threaded to the threaded cylinder 9, will apply force to the pressure end of the spoke pressure sensor 7 through the shim. The spoke pressure sensor 7 will also display the value of the force applied to the positioning plate 6 during the process of applying force to the positioning plate 6. The operator can judge the force applied to the chip based on the value to avoid excessive force that could damage the chip. S4: In order to accommodate chips at different positions within a certain range, first apply force to rotate the first external thread knob 13 to release the force on the limit frame 4, and then apply force to the limit frame 4 so that the limit frame 4 slides inside the slide groove through the positioning slider 14, thereby allowing the limit frame 4 to move directly above the chip. Then lock the limit frame 4 by using the first external thread knob 13, thus realizing the adjustment and locking of the position of the pressure roller 5. S5: To ensure consistent pressing pressure during batch welding, after adjusting the pressing pressure, apply force to the second external thread knob 16 to rotate it, thereby releasing the limit on the slider. Then slide the slotted photoelectric switch 17 to the same position as the baffle 18 after the force adjustment. Then lock the position of the slotted photoelectric switch 17 by the second external thread knob 16, so that each time the electric push rod 15 is started, the connecting plate 10 moves downward until the baffle 18 is inserted into the U-shaped slot of the slotted photoelectric switch 17, and then the push rod stops, thus achieving consistent pressing pressure during batch welding.

[0041] Finally, the following points should be noted: In the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installation", "connection" and "linkage" should be interpreted broadly, and can be mechanical or electrical connection, or internal connection between two components, or direct connection. "Up", "down", "left", "right", etc. are only used to indicate relative positional relationship. When the absolute position of the described object changes, the relative positional relationship may change. The electronic components and modules used in this utility model can all be parts that are commonly used in the market and can achieve the specific functions in this case. The specific models and sizes can be selected and adjusted according to actual needs. The accompanying drawings of the embodiments disclosed in this utility model only involve the structures involved in the embodiments disclosed in this utility model. Other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of this utility model can be combined with each other.

Claims

1. A chip welding vacuum welding furnace, comprising a welding furnace body (1), characterized in that: The top surface of the welding furnace body (1) is provided with an integral avoidance component, and an auxiliary counterweight component is provided below the integral avoidance component; The auxiliary counterweight assembly includes a base (2) that is fixedly connected to the top surface of the welding furnace body (1) by bolts. A positioning plate (6) is provided below the base (2). A limit frame (4) is provided on the bottom surface of the positioning plate (6). A pressure roller (5) is rotatably connected to the bottom end of the limit frame (4) through a bearing. Four guide rods are evenly distributed and fixedly connected to the top surface of the positioning plate (6). Each guide rod passes through the base (2) and is slidably connected to the base (2).

2. The chip welding vacuum welding furnace according to claim 1, characterized in that: The welding furnace body (1) is equipped with a pulley assembly (3) inside through a bearing seat, and the top surface of the pulley assembly (3) and the bottom surface of the conveying mechanism inside the welding furnace body (1) are the same reference surface.

3. The chip welding vacuum welding furnace according to claim 1, characterized in that: The overall positioning assembly includes an electric push rod (15) mounted on the top surface of the base (2) via a bracket. The push rod of the electric push rod (15) is fixedly connected to a connecting plate (10). Four tension rods (11) are evenly distributed and fixedly connected to the bottom surface of the connecting plate (10). Limiting cylinders (12) are fixedly connected to the corresponding positions of the positioning plate (6) and the tension rods (11). The tension rods (11) are inserted into the inside of the limiting cylinders (12). A pressure display mechanism is provided below the connecting plate (10).

4. The chip welding vacuum welding furnace according to claim 3, characterized in that: The pressure display mechanism includes a threaded cylinder (9) fixedly connected to the bottom surface of the connecting plate (10), a lead screw (8) is threaded inside the threaded cylinder (9), a spoke-type pressure sensor (7) is installed on the top surface of the positioning plate (6), a gasket is fixedly connected to the bottom end of the lead screw (8), and the gasket is in contact with the pressure end of the spoke-type pressure sensor (7).

5. A chip welding vacuum welding furnace according to claim 4, characterized in that: The vertical cross section of the tension rod (11) is an inverted "T" shape, and the inside of the limiting cylinder (12) is provided with a tension spring, the two ends of which are fixedly connected to the limiting cylinder (12) and the tension rod (11) respectively.

6. The chip welding vacuum welding furnace according to claim 1, characterized in that: Each of the limiting frames (4) has two positioning sliders (14) symmetrically fixedly connected to its top surface. The positioning plate (6) has a groove at the position of the positioning slider (14), and the positioning slider (14) is inserted into the groove and slidably connected to the positioning plate (6) through the groove. The top surface of the limiting frame (4) is threaded with a first external thread knob (13). The first external thread knob (13) penetrates the surface of the positioning plate (6) and slidably connects to the positioning plate (6). The top of the first external thread knob (13) is fixedly connected with a rubber sheet, and the rubber sheet is in contact with the top surface of the positioning plate (6).

7. A chip welding vacuum welding furnace according to claim 3, characterized in that: The inner wall of the bracket is provided with a slotted photoelectric switch (17), and a baffle (18) is fixedly connected to the side of the connecting plate (10) corresponding to the slotted photoelectric switch (17).

8. A chip welding vacuum welding furnace according to claim 7, characterized in that: The bracket has a vertical groove inside, and a slider is provided inside the vertical groove. The slider is fixedly connected to the slotted photoelectric switch (17). A second external thread knob (16) is threadedly connected to one side of the slider. A rubber sheet is fixedly connected to the surface of the second external thread knob (16), and the rubber sheet is in contact with the bracket.

Images