Hydraulic damping buffer mechanism of polishing machine

Abstract

The utility model discloses a kind of polishing machine hydraulic damping buffering mechanisms, with: pivot;Mounting plate, fixedly installed on pivot;Fixed plate, fixedly installed pivot, fixed plate is below mounting plate;Aligning mechanism, its upper end is installed on fixed plate;The structure of aligning mechanism is the conventional technical means in the art, is well known, not detailed introduction here;Connecting flange, the outer periphery of aligning mechanism is fixed with connecting flange;Hydraulic damping mechanism, a series of hydraulic damping mechanism are evenly provided on connecting flange;Buffer plate, installed on the second end of aligning mechanism;Hydraulic damping mechanism is connected with buffer plate;Upper disc, fixedly installed on buffer plate, prevent the upper disc being lifted in the instant of lifting and offset to one side to form pressure injury or breakage, reduce the risk of workpiece damage.

Description

Technical Field

[0001] This utility model belongs to the technical field of wafer polishing machines, and in particular relates to a hydraulic damping buffer mechanism for a polishing machine. Background Technology

[0002] In the process of processing products, double-sided grinding and polishing equipment relies on the pressure and rotation of the upper and lower plates, and the planetary rotation of the gear ring and the central tooth positioning wheel. It uses the high organic combination of the mechanical grinding action of abrasive and the chemical action of various chemical reagents to perform surface grinding and polishing. The polishing effect is related to various factors such as material hardness, abrasive particles, polishing fluid, flatness of the machine plate surface, and parallelism between the upper polishing plate and the lower plate. When the upper plate is lifted, its actual center of gravity may not coincide with the centroid. Due to the flexibility of the self-aligning mechanism, the finished workpiece may be offset to one side by the lifted upper plate, resulting in crushing or breakage. The existing machine structure has certain limitations.

[0003] In the process of realizing this utility model, the inventors discovered that the prior art has at least the following problems:

[0004] CN207696316U - Polishing Machine Table Buffer and Contouring Device discloses a polishing machine table buffer and contouring device, which cleverly utilizes the principle of spring compression and hinge linkage mechanism to buffer and protect the polishing mechanism; at the same time, it also provides support and protection for the polishing mechanism, but it cannot solve the above-mentioned technical problems. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a hydraulic damping buffer mechanism for a polishing machine, which prevents the upper plate, which is lifted at the moment of lifting, from shifting to one side and causing crushing or breakage, thereby reducing the risk of workpiece damage.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a hydraulic damping buffer mechanism for a polishing machine, which has the following features:

[0007] Shaft;

[0008] The mounting plate is fixedly mounted on the rotating shaft;

[0009] A fixing plate is fixedly installed on the rotating shaft, and the fixing plate is located below the mounting plate;

[0010] A self-aligning mechanism, the upper end of which is mounted on the fixed plate;

[0011] A connecting flange is fixedly provided on the outer periphery of the self-aligning mechanism;

[0012] A hydraulic damping mechanism is provided, wherein a series of hydraulic damping mechanisms are evenly provided on the connecting flange;

[0013] A buffer plate is installed on the second end of the self-aligning mechanism; the hydraulic damping mechanism is connected to the buffer plate.

[0014] The upper plate is fixedly installed on the buffer plate.

[0015] The hydraulic damping mechanism is a hydraulic damper; the fixed end of the hydraulic damper is installed on the connecting flange, and the movable end of the hydraulic damper is connected to the buffer plate.

[0016] The upper plate is connected to the buffer plate via a connecting column.

[0017] The mounting plate is provided with an upper protective plate, which surrounds the rotating shaft.

[0018] The upper plate is provided with a lower protective plate, which surrounds the rotating shaft.

[0019] The mounting plate has two layers of upper protective plates, one inside the other, and the lower protective plate is located between the two upper protective plates.

[0020] One of the above technical solutions has the following advantages or beneficial effects: when the upper plate self-aligning mechanism under heavy load generates self-aligning rotation, it drives the buffer plate to first impact the buffer mechanism, and disperses the impact force with hydraulic damping. According to the characteristics of hydraulic damper, the greater the displacement, the greater the damping, thereby delaying the self-aligning rotation of the upper plate connected to the self-aligning mechanism, so that when it completes the lifting and lowering, the lower plate surface is simultaneously separated from the workpiece, preventing the upper plate from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, and reducing the risk of workpiece damage. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the hydraulic damping buffer mechanism of the polishing machine provided in the embodiment of this utility model;

[0022] Figure 2 for Figure 1 A schematic diagram of the hydraulic damping buffer mechanism of a polishing machine;

[0023] Figure 3 for Figure 1 A schematic diagram of the hydraulic damping buffer mechanism of a polishing machine;

[0024] The markings in the above figures are as follows: 1. Rotating shaft, 2. Mounting plate, 3. Fixing plate, 4. Self-aligning mechanism, 41. Connecting flange, 5. Hydraulic damping mechanism, 6. Buffer plate, 7. Upper plate, 8. Upper protective plate, 9. Lower protective plate, 10. Connecting column. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Example 1

[0027] See Figures 1-3 A hydraulic damping buffer mechanism for a polishing machine comprises: a rotating shaft 1; a mounting plate 2 fixedly mounted on the rotating shaft 1; a fixing plate 3 fixedly mounted on the rotating shaft 1, the fixing plate 3 being located below the mounting plate 2; a self-aligning mechanism 4, the upper end of which is mounted on the fixing plate 3; the structure of the self-aligning mechanism 4 is a conventional technical means in the field and is common knowledge, and will not be described in detail here; a connecting flange 41, the outer periphery of the self-aligning mechanism 4 is fixedly provided with a connecting flange 41; a hydraulic damping mechanism 5, a series of hydraulic damping mechanisms 5 are evenly provided on the connecting flange 41; a buffer plate 6, mounted on the second end of the self-aligning mechanism 4; the hydraulic damping mechanisms 5 are connected to the buffer plate 6; and an upper plate 7 fixedly mounted on the buffer plate 6. When the self-aligning mechanism 4 of the upper plate 7 under heavy load generates self-aligning rotation, it drives the buffer plate 6 to first impact the buffer mechanism, and disperses the impact force with hydraulic damping. According to the characteristics of hydraulic damper, the greater the displacement, the greater the damping, thereby delaying the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4, so that when it completes the lifting and lowering, the lower plate surface is simultaneously separated from the workpiece, preventing the upper plate 7 from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage.

[0028] The hydraulic damping mechanism 5 is a hydraulic damper; the fixed end of the hydraulic damper is installed on the connecting flange 41, and the movable end of the hydraulic damper is connected to the buffer plate 6 and pre-loaded. According to the characteristics of the hydraulic damper, the greater the displacement, the greater the damping, thereby delaying the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4, so that when it completes the lifting and lowering, the lower plate surface simultaneously detaches from the workpiece, preventing the upper plate 7 from shifting to one side during the lifting and lowering moment, causing crushing or breakage, and reducing the risk of workpiece damage.

[0029] The upper plate 7 is connected to the buffer plate 6 via the connecting column 10, which serves as a connection.

[0030] When installing the hydraulic buffer, pre-pressurized damping is applied to cope with the self-aligning action of the heavy-load upper plate 7. Before processing, the hydraulic buffer can be adjusted to increase the pre-damping, thereby reducing the self-aligning speed of the heavy upper plate 7 to accommodate workpieces of different hardness and thickness. This can fully adjust the tilt error caused by the machine assembly itself and increase the product yield. When the lifting action occurs after processing, based on the characteristic that liquids are not easily compressible, the upper plate 7 is lifted at this time. Its lateral offset action will generate great hydraulic damping, reducing the self-aligning rotation speed of the upper plate 7 to a level that will not crush or damage the workpiece. After lifting, the hydraulic buffer completes its work and slowly completes the self-aligning action under the action of gravity.

[0031] With the above structure, when the self-aligning mechanism 4 of the upper plate 7 under heavy load generates self-aligning rotation, it drives the buffer plate 6 to first impact the buffer mechanism, and disperses the impact force with hydraulic damping. According to the characteristics of hydraulic damper, the greater the displacement, the greater the damping, thereby delaying the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4, so that when it completes the lifting and lowering, the lower plate surface is simultaneously separated from the workpiece, preventing the upper plate 7 from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage.

[0032] Example 1

[0033] In this embodiment, the mounting plate 2 is provided with an upper protective plate 8, which surrounds the rotating shaft 1 and serves a protective function. The buffer plate 6 is provided with a lower protective plate 9, which surrounds the rotating shaft 1 and serves a protective function. The mounting plate 2 is provided with two layers of upper protective plates 8, one inside the other, and the lower protective plate 9 is located between the two layers of upper protective plates 8, providing cross-protection.

[0034] A hydraulic damping buffer mechanism for a polishing machine comprises: a rotating shaft 1; a mounting plate 2 fixedly mounted on the rotating shaft 1; a fixing plate 3 fixedly mounted on the rotating shaft 1, the fixing plate 3 being located below the mounting plate 2; a self-aligning mechanism 4, the upper end of which is mounted on the fixing plate 3; the structure of the self-aligning mechanism 4 is a conventional technical means in the field and is common knowledge, and will not be described in detail here; a connecting flange 41, the outer periphery of the self-aligning mechanism 4 is fixedly provided with a connecting flange 41; a hydraulic damping mechanism 5, a series of hydraulic damping mechanisms 5 are evenly arranged on the connecting flange 41; a buffer plate 6, mounted on the second end of the self-aligning mechanism 4; the hydraulic damping mechanisms 5 are connected to the buffer plate 6; and an upper plate 7 fixedly mounted on the buffer plate 6. When the self-aligning mechanism 4 of the upper plate 7 under heavy load generates self-aligning rotation, it drives the buffer plate 6 to first impact the buffer mechanism, and disperses the impact force with hydraulic damping. According to the characteristics of hydraulic damper, the greater the displacement, the greater the damping, thereby delaying the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4, so that when it completes the lifting and lowering, the lower plate surface is simultaneously separated from the workpiece, preventing the upper plate 7 from shifting to one side and causing crushing or breakage at the moment of lifting and lowering, thus reducing the risk of workpiece damage.

[0035] The hydraulic damping mechanism 5 is a hydraulic damper; the fixed end of the hydraulic damper is installed on the connecting flange 41, and the movable end of the hydraulic damper is connected to the buffer plate 6. According to the characteristics of the hydraulic damper, the greater the displacement, the greater the damping, thereby delaying the self-aligning rotation of the upper plate 7 connected to the self-aligning mechanism 4, so that when it completes the lifting and lowering, the lower plate surface simultaneously detaches from the workpiece, preventing the upper plate 7 from shifting to one side during the lifting and lowering moment, causing crushing or breakage, and reducing the risk of workpiece damage.

[0036] The upper plate 7 is connected to the buffer plate 6 via the connecting column 10, which serves as a connection.

[0037] When installing the hydraulic buffer, pre-pressurized damping is applied to cope with the self-aligning action of the heavy-load upper plate 7. Before processing, the hydraulic buffer can be adjusted to increase the pre-damping, thereby reducing the self-aligning speed of the heavy upper plate 7 to accommodate workpieces of different hardness and thickness. This can fully adjust the tilt error caused by the machine assembly itself and increase the product yield. When the lifting action occurs after processing, based on the characteristic that liquids are not easily compressible, the upper plate 7 is lifted at this time. Its lateral offset action will generate great hydraulic damping, reducing the self-aligning rotation speed of the upper plate 7 to a level that will not crush or damage the workpiece. After lifting, the hydraulic buffer completes its work and slowly completes the self-aligning action under the action of gravity.

[0038] With the above structure, when the upper plate self-aligning mechanism under heavy load rotates, it causes the buffer plate to first impact the buffer mechanism. The impact force is dispersed by hydraulic damping. According to the characteristics of hydraulic damper, the greater the displacement, the greater the damping. This slows down the self-aligning rotation of the upper plate connected to the self-aligning mechanism, so that the lower plate surface is separated from the workpiece when it is lifted. This prevents the upper plate from shifting to one side and causing crushing or breakage at the moment of lifting, thus reducing the risk of workpiece damage.

[0039] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0040] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0041] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A hydraulic damping buffer mechanism for a polishing machine, characterized in that, have: Shaft; The mounting plate is fixedly mounted on the rotating shaft; A fixing plate is fixedly installed on the rotating shaft, and the fixing plate is located below the mounting plate; A self-aligning mechanism, the upper end of which is mounted on the fixed plate; A connecting flange is fixedly provided on the outer periphery of the self-aligning mechanism; A hydraulic damping mechanism is provided, wherein a series of hydraulic damping mechanisms are evenly provided on the connecting flange; A buffer plate is installed on the second end of the self-aligning mechanism; the hydraulic damping mechanism is connected to the buffer plate. The upper plate is fixedly installed on the buffer plate.

2. The hydraulic damping buffer mechanism for the polishing machine as described in claim 1, characterized in that, The hydraulic damping mechanism is a hydraulic damper; the fixed end of the hydraulic damper is installed on the connecting flange, and the movable end of the hydraulic damper is connected to the buffer plate.

3. The hydraulic damping buffer mechanism for the polishing machine as described in claim 2, characterized in that, The upper plate is connected to the buffer plate via a connecting column.

4. The hydraulic damping buffer mechanism for the polishing machine as described in claim 3, characterized in that, The mounting plate is provided with an upper protective plate, which surrounds the rotating shaft.

5. The hydraulic damping buffer mechanism for the polishing machine as described in claim 4, characterized in that, The upper plate is provided with a lower protective plate, which surrounds the rotating shaft.

6. The hydraulic damping buffer mechanism for the polishing machine as described in claim 5, characterized in that, The mounting plate has two layers of upper protective plates, one inside the other, and the lower protective plate is located between the two upper protective plates.

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