Grinding disc dressing device and grinding apparatus

Abstract

The utility model relates to the technical field of semiconductor, provide a kind of lapping disc finishing device and grinding equipment.The lapping disc finishing device includes finishing unit, liquid spraying unit and linkage unit;The finishing unit includes finishing main body and finishing head, and the finishing head is set in the finishing main body along the first direction movement, and the liquid spraying unit includes liquid spraying main body and liquid spraying head, and the liquid spraying head is set in the liquid spraying main body along the second direction movement, and the first direction and the second direction are parallel to reference surface;The linkage unit is set in the finishing unit and the liquid spraying unit, to convert the reciprocating motion of the finishing head along the first direction into the reciprocating motion of the liquid spraying head along the second direction.By improving lapping disc finishing device to improve the problem that above-mentioned grinding fluid or cleaning fluid is unevenly distributed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a grinding disc dressing device and grinding equipment. Background Technology

[0002] Chemical mechanical polishing (CMP) is a technique for global surface planarization. It uses chemical oxidation and mechanical polishing to remove material from the surface of a device, resulting in a high degree of surface flatness.

[0003] Chemical mechanical polishing (CMP) is widely used in semiconductor manufacturing for the selective removal of materials. Existing CMP apparatus typically includes a polishing table, a polishing pad, and a polishing head. The polishing pad is mounted on the polishing table, and the polishing head is mounted on the polishing frame. The polishing head is used to adsorb the workpiece to be polished and moves relative to the polishing pad to achieve surface planarization of the workpiece.

[0004] The grinding process generates chemical reaction products and mechanical grinding products, which are considered contaminants. Therefore, after grinding, the grinding pad and grinding head need to be cleaned. Furthermore, the grinding pad needs to be trimmed to ensure its surface roughness meets the grinding requirements of the device.

[0005] During the dressing process of polishing pads, polishing slurry or cleaning fluid (such as DIW) is usually sprayed onto the surface of the pad to ensure that the dressing head can achieve a good polishing and cleaning effect. In existing polishing pad dressing processes, the polishing slurry or cleaning fluid is sprayed onto the top of the pad, and the spray position usually remains constant. The position change of the pad during the rotation of the polishing table and centrifugal force ensure that the polishing slurry or cleaning fluid covers the entire pad. This method easily leads to uneven distribution of the polishing slurry and cleaning fluid. Especially when the polishing slurry is unevenly distributed, it can easily result in poor surface dressing of the polishing pad. This can lead to scratches or unevenness on the surface of the device to be polished during subsequent polishing, resulting in waste of working materials and increased production costs.

[0006] Based on this, the present invention provides a grinding disc dressing device and a grinding equipment, which improves the problem of uneven distribution of the grinding fluid or cleaning fluid by improving the grinding disc dressing device. Utility Model Content

[0007] This utility model provides a grinding disc dressing device and grinding equipment, which improves the problem of uneven distribution of grinding fluid or cleaning fluid by improving the grinding disc dressing device.

[0008] This utility model provides a grinding disc dressing device, including: a dressing unit, a liquid spraying unit, and a linkage unit;

[0009] The trimming unit includes a trimming body and a trimming head, wherein the trimming head is disposed on the trimming body and moves along a first direction.

[0010] The spraying unit includes a spraying body and a spraying head. The spraying head is disposed on the spraying body and moves along a second direction. The first direction and the second direction are parallel to the reference plane.

[0011] The linkage unit is disposed in the trimming unit and the spraying unit to convert the reciprocating motion of the trimming head along the first direction into the reciprocating motion of the spraying head along the second direction.

[0012] Optionally, the trimming unit further includes a trimming drive device, which is connected to the trimming head to drive the trimming head to rotate.

[0013] The linkage unit converts the rotational motion of the trimming head into the reciprocating motion of the trimming head along the first direction, and converts the reciprocating motion of the trimming head along the first direction into the reciprocating motion of the spray head along the second direction.

[0014] Optionally, the linkage unit includes pipelines;

[0015] The trimming body includes a trimming seat and a first moving part. The trimming seat is provided with a first medium cavity. The first moving part is disposed in the first medium cavity in a sealed sliding manner along a first direction. The first moving part is connected to the trimming head.

[0016] The spray body includes a spray base and a second moving part. The spray base is provided with a second medium cavity. The second moving part is disposed in the second medium cavity in a sealed sliding manner along a second direction. The second moving part is connected to the spray head.

[0017] The first medium cavity and the second medium cavity are provided with fluid medium, and the pipeline is connected to the first medium cavity and the second medium cavity.

[0018] Optionally, the linkage unit includes a rotating component and an intermediate connecting component;

[0019] The trimming body includes a first movable component, which is configured to move along a first direction, and the first movable component is connected to the trimming head;

[0020] The trimming drive device drives the rotating component to rotate. One end of the intermediate connecting component is eccentrically connected to the rotating component, and the other end is rotatably connected to the first moving component.

[0021] Optionally, the spray head is slidably sleeved on the spray seat along the second direction.

[0022] Optionally, the spraying unit further includes a guide shaft, which is disposed on the spraying seat and extends along the second direction, and the spraying head is slidably sleeved on the guide shaft.

[0023] Optionally, the grinding disc dressing device further includes a liquid storage container, the inner cavity of which is in communication with the inner cavity of the spray head.

[0024] Optionally, the grinding disc dressing device further includes a pump body, the inlet of which is connected to the inner cavity of the liquid storage container, and the outlet of which is connected to the inner cavity of the spray head.

[0025] This utility model also provides a grinding device, including the grinding disc dressing device described above; the grinding device further includes a grinding table and a grinding pad, the grinding pad is disposed on the grinding table, and the grinding surface of the grinding pad serves as the reference surface.

[0026] Optionally, the first direction is a radial direction of the abrasive pad, and the second direction is another radial direction of the abrasive pad.

[0027] In this invention, the grinding pad trimming device involves a trimming head contacting the grinding pad and trimming it when trimming is required. Additionally, the spray head of the spray unit sprays cleaning or grinding fluid onto the grinding pad. The trimming head and the spray head reciprocate along a first direction and a second direction respectively to ensure the trimming area covers the grinding pad and that the sprayed grinding and cleaning fluids are evenly distributed on the grinding pad.

[0028] The linkage unit connects the movement of the trimming head along the first direction with the movement of the spray head along the second direction, creating a reciprocating motion. This allows for full coverage of the grinding surface of the grinding pad and ensures that the grinding fluid or cleaning fluid sprayed from the spray head is evenly distributed on the grinding pad. This improves the surface trimming effect of the grinding pad, reduces surface scratches or unevenness during the grinding process of the device, minimizes waste of working materials, and helps improve the grinding yield of the device and reduce production costs. Attached Figure Description

[0029] Figure 1 A schematic diagram of the structure of a grinding device according to an embodiment of this utility model. Figure 1 ;

[0030] Figure 2 A schematic diagram of the structure of a grinding device according to an embodiment of this utility model. Figure 2 ;

[0031] Figure 3 This is a schematic diagram of the structure of a liquid storage container according to an embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of the structure of a grinding disc dressing device according to an embodiment of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of a trimming unit according to an embodiment of the present invention. Figure 1 ;

[0034] Figure 6 This is a schematic diagram of the structure of a trimming unit according to an embodiment of the present invention. Figure 2 ;

[0035] Figure 7 This is a schematic diagram of the structure of the spraying unit according to an embodiment of the present invention. Figure 1 ;

[0036] Figure 8 This is a schematic diagram of the structure of the spraying unit according to an embodiment of the present invention. Figure 2 ;

[0037] Figure 9 This is a schematic diagram of the structure of the spraying unit according to an embodiment of the present invention. Figure 3 .

[0038] In the attached diagram:

[0039] 10-Trim unit;

[0040] 11-Main body for trimming; 111-Main body for trimming; 1111-First medium cavity; 112-First moving part; 113-First piston; 114-Mounting arm;

[0041] 12-Adjusting head; 13-Adjusting drive device; 14-First column;

[0042] 20-Spraying unit; 21-Spraying body; 211-Spraying seat; 2111-Seat body; 2112-Medium body; 212-Second moving part; 213-Second medium cavity; 214-Second piston;

[0043] 22-Spray head; 221-Spray head; 23-Second column; 24-Guide shaft; 25-Slider; 26-Mounting slot;

[0044] 30-Linkage unit; 31-Pipeline; 32-Rotating component; 33-Connecting component; 34-Moving block; 35-Linking rod;

[0045] 40-Liquid container; 41-Grinding liquid chamber; 42-Cleaning liquid chamber; 43-First suction pipe; 44-Second suction pipe; 45-First injection port; 46-Second injection port; 47-Solenoid directional valve; 48-Supply pipe;

[0046] 50 - Pump body;

[0047] 60 - Grinding table;

[0048] 70-Abrasive pad;

[0049] 80 - Grinding head; 81 - Grinding support;

[0050] 90-Base;

[0051] a - First direction; b - Second direction; c - Reference plane. Detailed Implementation

[0052] The grinding disc dressing device and grinding equipment proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0053] In this invention, "outer diameter" and "inner diameter" refer to the diameter of a circular structure, while for a non-circular structure, the inner diameter refers to the diameter of its inscribed circle and the outer diameter refers to the diameter of its circumscribed circle. "Axial direction" refers to the direction of the central axis of a cylindrical rod, while for a non-cylindrical rod, the axial direction refers to the length direction of the rod.

[0054] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Additionally, as used in this invention, “installed,” “connected,” “joined,” and “set” on one element from another should be interpreted broadly, generally indicating only a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to the specific circumstances. Furthermore, directional terms such as above, below, up, down, upward, downward, left, right, etc., are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0055] Combination Figure 1 As shown in the figure, this embodiment of the grinding equipment is used as an example, wherein the grinding equipment includes a grinding disc dressing device.

[0056] The grinding disc dressing device includes a dressing unit 10, a liquid spraying unit 20, and a linkage unit 30. In addition, the grinding disc dressing device also includes a liquid storage container 40 and a pump body 50.

[0057] The storage container 40 stores grinding or cleaning fluid. The inlet of the pump body 50 is connected to the inner cavity of the storage container 40, and the outlet of the pump body 50 is connected to the inner cavity of the spraying unit 20. The pump body 50 is used to inject the solution in the storage container 40 into the spraying unit 20, and then spray it out through the spraying unit 20.

[0058] The linkage unit 30 associates the trimming unit 10 and the spraying unit 20 so that the movement of the trimming unit 10 is related to the movement of the spraying unit 20, so that the solution sprayed by the spraying unit 20 is more evenly distributed.

[0059] The grinding equipment also includes a grinding table 60, a grinding pad 70, a grinding head 80, and a base 90.

[0060] The grinding table 60 is mounted on the base 90, and a motor can be installed on the base 90 to drive the grinding table 60 to rotate. The grinding table 60 is disc-shaped and is driven to rotate around its own central axis. The grinding pad 70 is mounted on the upper surface of the grinding table 60.

[0061] The grinding head 80 is mounted on the base 90 via the grinding bracket 81. The grinding head 80 is located directly above the grinding pad 70 and can be driven to rotate and move up and down. The grinding head 80 is used to pick up the part to be ground, and then lower it so that the part to be ground comes into contact with the grinding pad 70. The grinding head 80 drives the part to be ground to rotate, and the grinding pad 70 rotates with the grinding table 60, so that the part to be ground moves relative to the grinding pad 70, thereby achieving surface planarization of the part to be ground.

[0062] When the aforementioned grinding equipment is in operation, the grinding table 60 is driven to rotate, causing the grinding pad 70 to rotate. The grinding head 80 adsorbs and lowers the workpiece to be ground, bringing the workpiece into contact with the grinding pad 70. Furthermore, the rotation of the grinding head 80 causes the workpiece to rotate, resulting in movement of the workpiece relative to the grinding pad 70. Additionally, when the grinding pad 70 needs to be trimmed, the trimming unit 10 lowers, bringing it into contact with the grinding pad 70. The trimming unit 10 and the grinding pad 70 move relative to each other to trim the grinding pad 70. At this time, the spraying unit 20 simultaneously sprays cleaning fluid or grinding fluid onto the grinding pad 70. The trimming unit 10 and the spraying unit 20 reciprocate along the first direction a and the second direction b, respectively, to ensure that the trimming area covers the surface of the grinding pad 70 and that the sprayed grinding fluid and cleaning fluid are evenly distributed on the grinding pad 70.

[0063] In this embodiment, the grinding table 60 extends vertically in the axial direction, and the grinding head 80 extends vertically in the axial direction. The grinding table 60, grinding pad 70, grinding head 80, and base 90 are all consistent with the structure of existing grinding equipment, and will not be described in detail here.

[0064] The grinding equipment in this embodiment differs from existing grinding equipment in that the grinding disc dressing device is different. This embodiment focuses on the structure of the grinding disc dressing device.

[0065] The grinding disc dressing device includes a dressing unit 10, a liquid spraying unit 20, a linkage unit 30, a liquid storage container 40, and a pump body 50.

[0066] The trimming unit 10 includes a trimming body 11 and a trimming head 12, wherein the trimming head 12 is disposed on the trimming body 11 and moves along a first direction a.

[0067] The spraying unit 20 includes a spraying body 21 and a spraying head 22. The spraying head 22 is disposed on the spraying body 21 and moves along a second direction b. The first direction a and the second direction b are parallel to the reference plane c. The polishing surface of the polishing pad 70 ( Figure 1 and Figure 2 The upper surface of the abrasive pad 70 is used as the reference surface c, the first direction a is a radial direction of the abrasive pad 70, and the second direction b is another radial direction of the abrasive pad 70.

[0068] As the polishing pad 70 rotates with the polishing table 60, the dressing head 12 moves radially above the polishing pad 70. Preferably, the movement of the dressing head 12 extends at least from the outer periphery of the polishing pad 70 to its center position, covering the entire upper surface of the polishing pad 70. Meanwhile, the spray head 22 moves radially above the polishing pad 70, reciprocatingly spraying polishing fluid or cleaning fluid onto the upper surface of the polishing pad 70 in the radial direction. As the polishing pad 70 rotates with the polishing table 60, the solution is evenly distributed on the upper surface of the polishing pad 70.

[0069] The linkage unit 30 is disposed between the trimming unit 10 and the spraying unit 20 to convert the reciprocating motion of the trimming head 12 along the first direction a into the reciprocating motion of the spraying head 22 along the second direction b.

[0070] The linkage unit 30 is configured to link the movement of the trimming head 12 along the first direction a with the movement of the spray head 22 along the second direction b, so that the two form a reciprocating motion. On the one hand, it can form a full range of coverage on the grinding surface of the grinding pad 70, and on the other hand, it can make the grinding liquid or cleaning liquid sprayed by the spray head 22 evenly distributed on the grinding pad 70. This is beneficial to improve the surface trimming effect of the grinding pad 70, improve the phenomenon of surface scratches or unevenness during the grinding process of the device to be ground, reduce the waste of working materials, and help improve the grinding yield of the device and reduce production costs.

[0071] In this embodiment, the angle between the first direction a and the second direction b is preferably an acute angle to ensure that the trimming head 12 and the spray head 22 are close to each other. Preferably, the trimming head 12 is located on the side of the spray head 22 along the rotation direction of the polishing pad 70. That is, after the polishing pad 70 is sprayed with solution below the spray head 22 at a certain position in the circumference, it is rotated at the corresponding acute angle and then polished by the trimming head 12 at that position to ensure that the polishing pad 70 is sprayed with the corresponding polishing liquid before being polished.

[0072] In this embodiment, the grinding disc trimming device is equipped with a liquid storage container 40 and a pump body 50 for supplying liquid to the spray head 22.

[0073] Combination Figure 3 and Figure 4 As shown, the storage container 40 has a grinding fluid chamber 41 and a cleaning fluid chamber 42 internally formed. The grinding fluid chamber 41 stores grinding fluid, and the cleaning fluid chamber 42 stores cleaning fluid (e.g., deionized water). A first suction pipe 43 is disposed in the grinding fluid chamber 41, and a second suction pipe 44 is disposed in the cleaning fluid chamber 42. The storage container 40 is provided with a first injection port 45 communicating with the grinding fluid chamber 41 and a second injection port 46 communicating with the cleaning fluid chamber 42. An electromagnetic reversing valve 47 is disposed outside the storage container 40. The electromagnetic reversing valve 47 is a three-way valve with two inlets and one outlet. One inlet is connected to the first suction pipe 43, the other inlet is connected to the second suction pipe 44, and the outlet is connected to the inlet of the pump body 50 through a supply pipe 48.

[0074] When the spraying unit 20 is working, the solenoid directional valve 47 switches its passage to supply either grinding fluid or cleaning fluid, which is then delivered via the pump body 50 to the spray head 22 and sprayed onto the grinding area of ​​the grinding pad 70. Thus, the solenoid directional valve 47 enables flexible switching between grinding fluid and cleaning fluid, ensuring grinding and cleaning needs are met while reducing liquid waste and manual operation.

[0075] In this embodiment, the grinding disc dressing device is equipped with a liquid storage container 40 and a pump body 50, enabling the grinding disc dressing device to have its own liquid supply function. In other alternative embodiments, the above-mentioned grinding disc dressing device may not be equipped with a liquid storage container 40 and a pump body 50. In this case, the liquid spraying unit 20 can be directly connected to an external liquid supply device to supply liquid.

[0076] In this embodiment, the liquid storage container 40 has two independent chambers (grinding liquid chamber 41 and cleaning liquid chamber 42) for storing grinding liquid and cleaning liquid respectively. In other alternative embodiments, the liquid storage container 40 may have more independent chambers, each of which may store a corresponding solution based on the grinding requirements. The number of chambers in the liquid storage container 40 and the types of liquids stored can be adjusted based on actual grinding needs.

[0077] Furthermore, the trimming unit 10 also includes a trimming drive device 13, which is disposed on the trimming body 11 and connected to the trimming head 12 to drive the trimming head 12 to rotate. The trimming head 12 has a cylindrical structure and is driven to rotate around its own central axis. The specific material of the trimming head 12 can be selected based on actual trimming requirements.

[0078] Combination Figure 5 As shown, the trimming drive device 13 can be a motor, which is installed on the trimming body 11. The output end of the motor is coaxially connected to the trimming head 12 and is used to drive the trimming head 12 to rotate.

[0079] The linkage unit 30 converts the rotational motion of the trimming head 12 into the reciprocating motion of the trimming head 12 along the first direction a, and converts the reciprocating motion of the trimming head 12 along the first direction a into the reciprocating motion of the spray head 22 along the second direction b.

[0080] In the above structure, the rotation of the trimming head 12 serves as the power source, and the linkage unit 30 converts the power into reciprocating motion of the trimming head 12 along the first direction a and the reciprocating motion of the spray head 22 along the second direction b. Therefore, the existing power source of the trimming unit 10 can be used, and no additional power source is required.

[0081] Combination Figure 1 and Figure 6 As shown, the trimming unit 10 also includes a first column 14, which is mounted on a base 90. The trimming body 11 is mounted on the first column 14. A motor can be configured on the base 90 to drive the first column 14 to rotate, thereby causing the trimming body 11 to swing and adjust the position of the trimming head 12. Furthermore, the first column 14 can be configured as a telescopic rod (e.g., an electric telescopic rod) to achieve a lifting function.

[0082] The trimming body 11 includes a trimming seat 111 and a first moving member 112. The trimming seat 111 is provided with a first medium cavity 1111. The first moving member 112 is slidably disposed in the first medium cavity 1111 along a first direction a. The first moving member 112 is connected to the trimming head 12.

[0083] like Figure 6 As shown, in this embodiment, the trimming seat 111 is a hollow rod-shaped structure, and the length direction of the trimming seat 111 extends along the first direction a. The first medium cavity 1111 extends along the length direction of the trimming seat 111 and is connected to one end of the medium cavity (…). Figure 6 The left end of the structure is open to form an opening.

[0084] The first moving member 112 is a rod-shaped structure, the cross-sectional shape of which is adapted to the cross-section of the first medium cavity 1111, and one end of the first moving member 112 passes through the opening end of the first medium cavity 1111. Figure 6 The left end of the first moving member 112 extends into the first medium cavity 1111, and the first moving member 112 is in a sealing sliding fit with the inner wall of the first medium cavity 1111. The first medium cavity 1111 is filled with a fluid medium, so when the first moving member 112 slides in the first medium cavity 1111, the first medium cavity 1111 can be compressed or expanded.

[0085] To ensure the sealing of the first medium cavity 1111, the trimming body 11 in this embodiment further includes a first piston 113. The first piston 113 is in a sealing sliding fit with the first medium cavity 1111, and the first piston 113 is disposed at the end of the first moving member 112. Figure 6 (The right end of the middle). The first piston 113 can be made of rubber, metal or other materials, and the material of the first piston 113 can be selected based on actual usage requirements.

[0086] like Figure 6 As shown, in this embodiment, the trimming body 11 further includes a mounting arm 114, which is connected to one end of the first moving member 112 located outside the first medium cavity 1111. Figure 6 (Left end of the middle). The trimming head 12 and the trimming drive device 13 are mounted on the mounting arm 114. The mounting arm 114 is responsible for the installation, so its shape can be set according to the actual installation space requirements. The mounting arm 114 can be integrally formed with the first moving member 112. In this case, the mounting arm 114 can also be regarded as part of the first moving member 112.

[0087] In this embodiment, the trimming seat 111 has a rectangular cross-section formed by cutting along its length, and the first medium cavity 1111 also has a rectangular cross-section. The cross-sectional shape of the first moving member 112 is adapted to the cross-sectional shape of the first medium cavity 1111. This rectangular cross-section design prevents the first moving member 112 from rotating. In other alternative embodiments, the cross-sectional shapes of the trimming seat 111, the first medium cavity 1111, and the first moving member 112 can be set based on actual usage requirements, such as pentagonal, circular, or other shapes.

[0088] Combination Figure 7 and Figure 8 As shown, the liquid spraying body 21 includes a liquid spraying base 211 and a second moving part 212.

[0089] The spray base 211 is provided with a second medium cavity 213, and the second moving member 212 is disposed in the second medium cavity 213 in a sealed sliding manner along the second direction b. The second moving member 212 is connected to the spray head 22.

[0090] like Figure 8 As shown, in this embodiment, the spray nozzle 211 includes a base 2111 and a medium 2112. The base 2111 has a rod-shaped structure, and its length extends along the second direction b. The medium 2112 has a strip-shaped structure, and its length direction is consistent with the length direction of the base 2111. The medium 2112 is connected to the lower part of the base 2111.

[0091] The medium body 2112 has a hollow structure, and its inner cavity serves as the second medium cavity 213. The second medium cavity 213 extends along the length of the medium body 2112 to one end of the medium body 2112. Figure 8 (right end), the second moving part 212 passes through the opening end of the second medium cavity 213 ( Figure 8The right end of the middle) is sealed and slides to the second medium cavity 213.

[0092] In this embodiment, the base 2111 and the medium 2112 are separate structures. In other alternative embodiments, the base 2111 and the medium 2112 can be configured as an integral structure.

[0093] To ensure the sealing of the second medium cavity 213, the spray body 21 in this embodiment further includes a second piston 214. The second piston 214 is in a sealed sliding fit with the second medium cavity 213, and the second piston 214 is disposed at the end of the second moving member 212. Figure 8 (The left end of the middle). The second piston 214 can be made of rubber, metal or other materials, and the material of the second piston 214 can be selected based on actual usage requirements.

[0094] Please combine Figure 1 , Figure 7 as well as Figure 8 As shown, the spraying unit 20 also includes a second column 23, which is mounted on the base 90. The spraying body 21 is disposed on the second column 23, and a motor can be configured on the base 90 to drive the second column 23 to rotate, thereby causing the trimming body 11 to swing and thus adjust the position of the spraying head 22.

[0095] Combination Figures 4 to 8 As shown, fluid media are disposed in the first medium cavity 1111 and the second medium cavity 213.

[0096] The linkage unit 30 includes a pipeline 31, which is connected to the first medium cavity 1111 and the second medium cavity 213.

[0097] When the first moving member 112 shortens inward to compress the first medium cavity 1111, the pressure of the fluid medium in the first medium cavity 1111 increases, and the fluid medium inside the first medium cavity 1111 is injected into the second medium cavity 213 through the pipe 31. The pressure of the fluid medium in the second medium cavity 213 increases and drives the second moving member 212 to extend outward.

[0098] When the first moving part 112 extends outward, making the first medium cavity 1111 larger, the pressure of the fluid medium in the first medium cavity 1111 decreases. The fluid medium inside the second medium cavity 213 is injected into the first medium cavity 1111 through the pipe 31, and then the second moving part 212 shortens inward.

[0099] Furthermore, to ensure that the fluid medium inside the second medium cavity 213 can be injected into the first medium cavity 1111 through the pipe 31 when the first moving member 112 extends outward, an elastic member can be added to the seat 2111. This elastic member applies pressure along the spray head 22. Figure 8The force acting on the leftward movement. That is, when the first moving member 112 extends outward, the fluid medium pressure in the first medium cavity 1111 decreases, at which point the elastic member drives the spray head 22 and the second moving member 212 along the leftward movement. Figure 8 The movement to the left compresses the second medium cavity 213, allowing the fluid medium within the second medium cavity 213 to be injected into the first medium cavity 1111 through the pipe 31. When the first moving member 112 shortens inward, the pressure of the fluid medium in the first medium cavity 1111 increases, and the fluid medium in the first medium cavity 1111 is injected into the second medium cavity 213 through the pipe 31. The second moving member 212 overcomes the force of the elastic member and moves along... Figure 8 Move to the right.

[0100] Please continue to refer to this. Figure 6 As shown, the linkage unit 30 also includes a rotating component 32 and an intermediate connecting component 33.

[0101] The trimming drive device 13 drives the rotating member 32 to rotate. One end of the intermediate connecting member 33 is eccentrically connected to the rotating member 32, and the other end is rotatably connected to the first moving member 112. The rotating member 32, the intermediate connecting member 33, and the first moving member 112 constitute a crank-slider structure. During the rotation of the rotating member 32, the rotational motion is converted into linear motion of the first moving member 112 along the first direction a.

[0102] like Figure 6 As shown, in this embodiment, the rotating component 32 is a disc structure, coaxially connected to the output end of the trimming drive device 13. One end of the intermediate connecting component 33 is eccentrically rotatably connected to the rotating component 32, and the rotation axis at the connection point between the intermediate connecting component 33 and the rotating component 32 is parallel to the rotation axis of the rotating component 32. Here, eccentric rotation connection means that the rotation axis at the connection point between the intermediate connecting component 33 and the rotating component 32 does not coincide with the rotation axis of the rotating component 32.

[0103] Furthermore, such as Figure 6 As shown, in this embodiment, a movable block 34 is provided. The movable block 34 is slidably disposed on the trimming seat 111 along the first direction a. For example, the movable block 34 is disposed on the trimming seat 111 with a single degree of freedom by being disposed in an inverted "T" shaped groove or dovetail groove at the bottom of the trimming seat 111. The movable block 34 is fixedly connected to the first movable member 112 by a connecting rod 35. The position where the connecting rod 35 is connected to the first movable member 112 is located outside the first medium cavity 1111. The movable block 34 is also rotatably connected to the intermediate connecting member 33, and the rotation axis at the connection point is parallel to the rotation axis of the rotating member 32.

[0104] When the trimming drive device 13 drives the trimming head 12 to rotate, the rotating component 32 is driven to rotate synchronously, and the rotating component 32 drives the moving block 34 to slide along the first direction a through the intermediate connecting component 33. The moving block 34 drives the first moving component 112 to move along the first direction a through the connecting rod 35. Therefore, as the trimming drive device 13 drives the trimming head 12 to rotate, the first moving component 112 reciprocates and slides along the first direction a in the first medium cavity 1111, thereby causing the first moving component 112 to drive the trimming head 12 to reciprocate linearly along the first direction a, so that the trimming range of the trimming head 12 covers the entire upper surface of the polishing pad 70.

[0105] Since the first medium cavity 1111 is connected to the second medium cavity 213 through the pipe 31, during the process of the first moving member 112 reciprocating sliding motion in the first medium cavity 1111 along the first direction a, the fluid medium in the first medium cavity 1111 and the second medium cavity 213 flows to each other, so as to drive the second moving member 212 to reciprocate sliding in the second medium cavity 213 along the second direction b, thereby driving the spray head 22 to reciprocate along the second direction b.

[0106] With the above structure, the dressing drive device 13 serves as the power source, driving the dressing head 12 to rotate while also causing the dressing head 12 to reciprocate along the first direction a and the spray head 22 to reciprocate along the second direction b. This helps to expand the dressing range of the dressing head 12 and allows the spray head 22 to evenly spray the polishing fluid or cleaning fluid onto the polishing pad.

[0107] The aforementioned linkage unit 30, through the rotating component 32, the intermediate connecting component 33, and the first moving component 112, forms a crank-slider structure to achieve motion linkage between the trimming drive device 13 and the trimming head 12. In other alternative embodiments, power linkage can be achieved through gear and rack engagement. For example, the rotating component 32 can be replaced with a gear, and the intermediate connecting component 33 can be replaced with a rack. The rack meshes with the gear, and the rack is fixed to the first moving component 112. In this case, power linkage can be achieved through the forward and reverse rotation of the trimming drive device 13. In other alternative embodiments, the trimming drive device 13 and the trimming head 12 can also achieve power linkage through other known transmission structures.

[0108] The aforementioned moving unit 30 achieves power linkage between the reciprocating motion of the trimming head 12 along the first direction a and the reciprocating motion of the spray head 22 along the second direction b through the mutual flow of fluid media within the first medium cavity 1111 and the second medium cavity 213. In other alternative embodiments, the trimming head 12 and the spray head 22 can be electrically linked. For example, the trimming head 12 can be equipped with an electric telescopic rod to drive its movement along the first direction a, and the spray head 22 can be equipped with an electric telescopic rod to drive its movement along the second direction b. One of the electric telescopic rods can be equipped with an electric switch, which triggers the electric switch to control the movement of the other electric telescopic rod, thereby achieving power linkage. In other alternative embodiments, the linkage unit 30 can also use a hydraulic cylinder in conjunction with an electric switch to achieve power linkage.

[0109] In other alternative embodiments, the linkage unit 30 can also employ other known mechanical transmission structures to achieve power linkage, such as a combination of two racks and a gear. One rack acts as a first moving member 112, moving along a first direction a, while the other rack acts as a second moving member 212, moving along a second direction b. The gear is disposed on the trimming body 11. The first moving member 112 meshes with the gear, and the gear also meshes with the second moving member 212. The movement of the first moving member 112 along the first direction a is converted into rotation of the gear, which drives the second moving member 212 to move along the second direction b, thus achieving power linkage between the first and second moving members 112. The specific structure of the linkage unit 30 can be adjusted based on actual usage requirements.

[0110] In this embodiment, the fluid medium is air. In other alternative embodiments, the fluid medium may be hydraulic oil or other liquid media.

[0111] In other alternative embodiments, the linkage unit 30 may consist only of the conduit 31. In this case, the first moving member 112 can be driven along the first direction a by configuring a drive device.

[0112] In this embodiment, a movable block 34 and a connecting rod 35 are configured to assist the movement of the first movable member 112. In other alternative embodiments, the movable block 34 and the connecting rod 35 may not be configured, in which case the intermediate connecting member 33 can be directly rotatably connected to the first movable member 112.

[0113] Combination Figure 8 and Figure 9 As shown, in this embodiment, the spray head 22 is slidably sleeved on the spray seat 211 along the second direction b.

[0114] The spray head 22 has a channel in the middle for the seat 2111 to pass through. Additionally, the spray head 22 contains a liquid chamber (not shown) for storing polishing or cleaning fluid. Multiple nozzles 221 are located at the bottom of the spray head 22, each communicating with the liquid chamber. The nozzles 221 can be conventional pipes or existing atomizing nozzles, such as V-shaped, conical, or spiral atomizing nozzles. The configuration of multiple nozzles 221 ensures the solution is evenly sprayed onto the polishing area, effectively reducing polishing byproduct residue and lowering the risk of scratches during device polishing. Furthermore, adjusting the flow rate of the pump body 50 and the nozzles 221 helps to further control the distribution of polishing fluid on the polishing pad surface, improving polishing uniformity. It also allows for adjustment of rinsing parameters to suit different chemical properties, enhancing the equipment's versatility.

[0115] For further details, please refer to... Figure 8 and Figure 9 As shown, the spray unit 20 also includes a guide shaft 24, which is disposed on the spray seat 211 and extends along the second direction b. The spray head 22 is slidably sleeved on the guide shaft 24.

[0116] Specifically, a mounting groove 26 is provided above the base 2111 along the second direction b, and a guide shaft 24 is installed in the mounting groove 26, extending along the second direction b. A slider 25 protrudes from the bottom of the spray head 22, and the slider 25 is slidably fitted onto the guide shaft 24.

[0117] The guide shaft 24 is a circular shaft, and its cross-section is much smaller than that of the base 2111. This allows for precise guidance of the spray head 22 through the cooperation of the guide shaft 24 and the slider 25. Furthermore, the slider 25 connects to the spray head 22 to improve its stability. The design of the guide shaft 24 allows for a loose sliding fit between the spray head 22 and the base 2111, reducing friction and ensuring smooth sliding of the spray head 22 along the second direction b.

[0118] In other alternative embodiments, the guide shaft 24 may not be provided. In this case, a sliding fit is formed between the spray head 22 and the seat 2111 to guide the movement of the spray head 22 along the second direction b.

[0119] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0120] The above description is merely a description of a preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A grinding disc dressing device, characterized in that, include: Trimming unit, spraying unit, and linkage unit; The trimming unit includes a trimming body and a trimming head, wherein the trimming head is disposed on the trimming body and moves along a first direction; The spraying unit includes a spraying body and a spraying head. The spraying head is disposed on the spraying body and moves along a second direction. The first direction and the second direction are parallel to the reference plane. The linkage unit is disposed in the trimming unit and the spraying unit to convert the reciprocating motion of the trimming head along the first direction into the reciprocating motion of the spraying head along the second direction.

2. The grinding disc dressing device as described in claim 1, characterized in that, The trimming unit also includes a trimming drive device, which is connected to the trimming head to drive the trimming head to rotate. The linkage unit is also used to convert the rotational motion of the trimming head into the reciprocating motion of the trimming head along the first direction.

3. The grinding disc dressing device as described in claim 1 or 2, characterized in that, The linkage unit includes pipelines; The trimming body includes a trimming seat and a first moving part. The trimming seat is provided with a first medium cavity. The first moving part is disposed in the first medium cavity in a sealed sliding manner along a first direction. The first moving part is connected to the trimming head. The spray body includes a spray base and a second moving part. The spray base is provided with a second medium cavity. The second moving part is disposed in the second medium cavity in a sealed sliding manner along the second direction. The second moving part is connected to the spray head. The first medium cavity and the second medium cavity are provided with fluid medium, and the pipeline is connected to the first medium cavity and the second medium cavity.

4. The grinding disc dressing device as described in claim 2, characterized in that, The linkage unit includes a rotating component and an intermediate connecting component; The trimming body includes a first movable component, which is configured to move along a first direction, and the first movable component is connected to the trimming head; The trimming drive device drives the rotating component to rotate. One end of the intermediate connecting component is eccentrically connected to the rotating component, and the other end is rotatably connected to the first moving component.

5. The grinding disc dressing device as described in claim 3, characterized in that, The spray head is slidably fitted onto the spray seat along the second direction.

6. The grinding disc dressing device as described in claim 3, characterized in that, The spraying unit further includes a guide shaft, which is disposed on the spraying seat and extends along the second direction, and the spraying head is slidably sleeved on the guide shaft.

7. The grinding disc dressing device as described in claim 1, characterized in that, The grinding disc dressing device also includes a liquid storage container, the inner cavity of which is connected to the inner cavity of the spray head.

8. The grinding disc dressing device as described in claim 7, characterized in that, The grinding disc dressing device also includes a pump body, the inlet of which is connected to the inner cavity of the liquid storage container, and the outlet of which is connected to the inner cavity of the spray head.

9. A grinding apparatus, characterized in that, Includes the grinding disc dressing device as described in any one of claims 1 to 8; The grinding equipment also includes a grinding table and a grinding pad, the grinding pad being disposed on the grinding table, and the grinding surface of the grinding pad serving as the reference surface.

10. The grinding equipment as described in claim 9, characterized in that, The first direction is a radial direction of the abrasive pad, and the second direction is another radial direction of the abrasive pad.

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