A sandblasting protection jig for aluminum alloy parts in semiconductor processing

Abstract

The utility model discloses a kind of aluminium alloy components sandblasting protection fixtures in semiconductor process, for product (1), the protection fixture is divided into upper fixture (2) and lower fixture (3), the upper fixture (2) and lower fixture (3) are wrapped in the upper and lower sides of product (1), the product (1) and the protection fixture are annular;Annular protection fixture can protect the part needing protection of internal product (1) from all around, and does not hinder the part needing processing to process, and protection fixture does not need screw connection, the part needing protection of product (1) is wrapped from upper and lower sides, it is placed immediately use, under dead weight effect makes that protection fixture and product (1) are closely adhered, upper fixture (2) is pressed on the upper surface of product (1) under the action of gravity, product (1) is pressed on lower fixture (3) under the action of gravity, there is no sand leakage risk, can play the effect of effectively protecting product (1).

Description

Technical Field

[0001] This utility model belongs to the field of metal product processing technology. Specifically, this utility model relates to a sandblasting protection fixture for aluminum alloy components in semiconductor manufacturing processes. Background Technology

[0002] Sandblasting is a common process in metal surface treatment. It uses a high-speed airflow to bombard the metal surface with abrasive material, creating roughness or smoothness. In semiconductor physical vapor deposition, a certain thickness of sputtered substances such as metals, oxides, and organic matter are adsorbed on the surface of components. To increase the components' ability to adsorb these substances and reduce abnormal film peeling caused by weak adhesion during production, the components are roughened during the cleaning process. To avoid damage to areas where sandblasting is prohibited, such as sealed surfaces and smooth surfaces, and to prevent production accidents such as air leakage on the client's equipment, specific areas need to be shielded and protected before sandblasting.

[0003] A patent application (patent number 201921488779.0) published on May 15, 2020, discloses a sandblasting protective fixture, comprising a fixture body. The fixture body is characterized by its annular structure, with an inner protective retaining ring fixedly connected to its inner wall and an outer protective retaining ring fixedly connected to its outer wall. The outer and inner protective retaining rings are located on the same side. Several through holes are distributed circumferentially on the fixture body. This invention features a simple and reasonable structure. By using a fixture body with inner and outer protective retaining rings, the fixture can be fixed to the upper part of the component before sandblasting using hexagonal screws, solving the problem of time-consuming disassembly and assembly, improving processing efficiency, ensuring that the component does not deform during cleaning and sandblasting, and simultaneously protecting the top wall of the component that does not require sandblasting during the cleaning and sandblasting process.

[0004] Previously, the protection method for this component was to use masking tape. However, due to the high pressure of the spray gun during sandblasting, the tape was easily blown away, losing its adhesive and protective function. Utility Model Content

[0005] The present invention aims to provide a sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes that offers good protection.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes, used for products, the protective fixture is divided into an upper fixture and a lower fixture, the upper fixture and the lower fixture wrap around the upper and lower sides of the product, and both the product and the protective fixture are ring-shaped.

[0007] The end faces of the upper fixture and the lower fixture that are close to each other are in contact with each other.

[0008] The upper fixture is in close contact with the product surface, and the lower fixture is in close contact with the product surface.

[0009] The outer surface of the upper fixture has an L-shaped cross-section, and the inner wall of the upper fixture is stepped.

[0010] The edges and corners of the upper fixture are rounded.

[0011] The lower fixture has an L-shaped cross-section, and the inner wall surface of the lower fixture is provided with a groove that matches the product.

[0012] The lower fixture has rounded corners.

[0013] The technical advantages of this utility model are: no screw connection is required, it can be used immediately after placement, and the protective fixture fits tightly with the product under its own weight, eliminating the risk of sand leakage and effectively protecting the product. It can also be reused, effectively reducing production costs and enabling mass production, thus improving production efficiency. Attached Figure Description

[0014] This manual includes the following figures, which illustrate the following: Figure 1 This is a schematic diagram of the structure of a sandblasting protective fixture for aluminum alloy components in a semiconductor manufacturing process according to this utility model; Figure 2 for Figure 1 A schematic diagram of the upper fixture of a sandblasting protective fixture for aluminum alloy components in a semiconductor manufacturing process; Figure 3 for Figure 1 A schematic diagram of the lower fixture of a sandblasting protective fixture for aluminum alloy components in a semiconductor manufacturing process.

[0015] The markings in the diagram are: 1. Product; 2. Upper fixture; 3. Lower fixture; 4. Groove. Detailed Implementation

[0016] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the utility model concept and technical solution, and to facilitate its implementation.

[0017] Please see Figure 1-3A protective fixture for sandblasting aluminum alloy components in semiconductor manufacturing processes is provided for product 1. The protective fixture consists of an upper fixture 2 and a lower fixture 3, which wrap around the upper and lower sides of product 1. Both product 1 and the protective fixture are annular. The annular protective fixture can protect the parts of product 1 that need protection from all sides without hindering the processing of the parts that need to be processed. The protective fixture does not require screw connection and can be used immediately after placement. Under its own weight, the protective fixture fits tightly to product 1. The upper fixture 2 presses on the upper surface of product 1 under the action of gravity, and product 1 presses on the lower fixture 3 under the action of gravity. There is no risk of sand leakage, which can effectively protect product 1. It can also be reused, effectively reducing production costs and enabling mass production and improving production efficiency.

[0018] The end faces of the upper fixture 2 and the lower fixture 3 are close to each other and fit together, completely covering the outer side surface of the product 1, preventing sand leakage.

[0019] The upper fixture 2 and the lower fixture 3 are in close contact with the surface of product 1; reducing gaps and preventing air leakage, so that during sandblasting, the upper fixture 2 and the lower fixture 3 can be more tightly attached to the surface of product 1 by using air pressure, preventing them from falling off and causing sand leakage.

[0020] The outer surface of the upper fixture 2 has an L-shaped cross-section, and the inner wall of the upper fixture 2 is stepped. The inner wall surface of the upper fixture 2 is in close contact with the outer surface of the product 1. Since the outer surface of the upper fixture 2 is L-shaped, the surface shape is relatively flat and very beautiful. There are no depressions on the surface. When the sandblasting process is carried out, no sand will be left on the outer surface, which is conducive to improving the sandblasting quality and the service life of the equipment.

[0021] The edges and corners of the upper fixture 2 are rounded; this helps to deflect the sand during sandblasting, prevents damage to the edges and corners caused by impacts during sandblasting due to right angles, reduces the occurrence of dangerous accidents, and can improve the life of the equipment.

[0022] The lower fixture 3 has an L-shaped cross-section, and the inner wall surface of the lower fixture 3 is provided with a groove 4 that matches the product 1. The groove 4 matches the product 1, so that the lower fixture 3 can fit tightly against the outer surface of the lower half of the product 1. During the sandblasting process, the surfaces of the lower fixture 3 and the product 1 can be tightly attached to each other to prevent them from falling off and causing sand leakage.

[0023] The corners of the lower fixture 3 are rounded; this helps to deflect the sand during sandblasting, prevents damage to the corners caused by impacts during sandblasting due to right angles, reduces the occurrence of dangerous accidents, and can improve the life of the equipment.

[0024] The technical advantages of this utility model are: no screw connection is required, it can be used immediately after placement, and the protective fixture fits tightly with product 1 under its own weight, eliminating the risk of sand leakage and effectively protecting product 1. It can also be reused, effectively reducing production costs and enabling mass production, thus improving production efficiency.

[0025] The present invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution of the present invention; or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. A sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes, used for product (1), characterized in that: The protective fixture is divided into an upper fixture (2) and a lower fixture (3). The upper fixture (2) and the lower fixture (3) wrap around the upper and lower sides of the product (1). The product (1) and the protective fixture are both ring-shaped.

2. The sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes according to claim 1, characterized in that: The end faces of the upper fixture (2) and the lower fixture (3) that are close to each other are in contact with each other.

3. A sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes according to claim 1 or 2, characterized in that: The upper fixture (2) is in close contact with the surface of the product (1), and the lower fixture (3) is in close contact with the surface of the product (1).

4. The sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing according to claim 1, characterized in that: The outer surface cross-section of the upper fixture (2) is L-shaped, and the inner wall of the upper fixture (2) is stepped.

5. A sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes according to claim 4, characterized in that: The upper fixture (2) has rounded corners.

6. A sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes according to claim 1, characterized in that: The lower fixture (3) has an L-shaped cross-section, and the inner wall surface of the lower fixture (3) is provided with a groove (4) that matches the product (1).

7. A sandblasting protective fixture for aluminum alloy components in semiconductor manufacturing processes according to claim 6, characterized in that: The corners of the lower fixture (3) are rounded.

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