Vacuum suction device

Abstract

The utility model relates to a vacuum adsorption technical field, concretely relates to a kind of vacuum adsorption device, comprising: sucking disc, be equipped with multiple negative pressure hole groups, multiple negative pressure hole groups are along the circumferential direction of sucking disc interval arrangement, negative pressure hole group includes side hole, first adsorption hole and expansion hole, side hole penetrates the outer circumferential surface of sucking disc, and it extends along the radial direction of sucking disc, first adsorption hole penetrates the upper surface and lower surface of sucking disc, expansion hole at least penetrates the upper surface of sucking disc, in the same negative pressure hole group, first adsorption hole and expansion hole are all communicated with side hole, expansion hole is away from the center of sucking disc relative to first adsorption hole;Base, be equipped with negative pressure cavity, negative pressure cavity is communicated with first adsorption hole;Blocking piece, movably inserted in side hole, to control the on-off between first adsorption hole and expansion hole.The vacuum adsorption device of the utility model embodiment can switch adsorption area, not only can adapt to different sizes of workpiece to be processed, strong adaptability, and can reduce the probability of entering impurity.

Description

Technical Field

[0001] This utility model relates to the field of vacuum adsorption technology, and specifically to a vacuum adsorption device. Background Technology

[0002] Abrasive pads are a type of tool used in CMP (Chemical Mechanical Polishing) equipment. The manufacturing and processing of abrasive pads requires the use of a vacuum adsorption device to adsorb and fix the abrasive pad. However, the vacuum adsorption device in related technologies has a fixed adsorption area, which cannot be adjusted according to the size of the workpiece.

[0003] When cutting abrasive pads, they need to be cut to a suitable size. Typically, a vacuum adsorption device is used to hold the pad in place, followed by cutting using a processing machine. This machine can be a CNC (Computer Numerical Control Machine Tool) with a vacuum adsorption device. Since the adsorption area of ​​the vacuum adsorption device is fixed, using a device with a small adsorption area is insufficient for processing large-sized abrasive pads. Conversely, using a device with a large adsorption area results in a larger uncovered area when processing small-sized pads, making it easy for impurities generated during the cutting process to be sucked into the vacuum adsorption device. This necessitates replacing the device with one of different adsorption areas. However, these larger and heavier devices are inconvenient to replace, causing difficulties in the abrasive pad processing. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum adsorption device to solve the problem that existing vacuum adsorption devices cannot adapt to workpieces of different sizes.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A vacuum adsorption device includes: a suction cup having multiple negative pressure hole groups arranged circumferentially around the suction cup; each negative pressure hole group includes a side hole, a first adsorption hole, and an expansion hole; the side hole penetrates the outer circumferential surface of the suction cup and extends radially along the suction cup; the first adsorption hole penetrates the upper and lower surfaces of the suction cup; and the expansion hole penetrates at least the upper surface of the suction cup. In the same negative pressure hole group, both the first adsorption hole and the expansion hole communicate with the side hole, and the expansion hole is located away from the center of the suction cup relative to the first adsorption hole; a base having a negative pressure cavity communicating with the first adsorption hole; and a sealing member movably inserted into the side hole to control the connection or disconnection between the first adsorption hole and the expansion hole.

[0006] Based on the above technical means, when adsorbing small-sized workpieces, the depth of the sealing component inserted into the side hole can be increased to disconnect the connection between the first adsorption hole and the expansion hole. The vacuum adsorption device adsorbs the workpiece through the first adsorption hole, avoiding waste of negative pressure gas, reducing energy consumption, and preventing impurities generated during processing from entering the vacuum adsorption device through the expansion hole, ensuring cleanliness and extending service life. When adsorbing large-sized workpieces, the depth of the sealing component inserted into the side hole can be decreased to connect the first adsorption hole and the expansion hole through the side hole. The vacuum adsorption device adsorbs the workpiece through both the first adsorption hole and the expansion hole, increasing the adsorption area of ​​the vacuum adsorption device to meet the processing requirements of large-sized workpieces. By adjusting the insertion depth of the sealing component in the side hole, the adsorption area of ​​the suction cup can be changed, which can not only adapt to workpieces of different sizes, but also reduce the probability of impurities entering.

[0007] Furthermore, the upper surface of the suction cup is provided with a clearance groove, which extends on the outer peripheral surface of the suction cup and extends circumferentially along the suction cup. The side hole is located between the clearance groove and the base in the axial direction of the suction cup.

[0008] Based on the above technical means, when processing the edge of the workpiece, the working space is increased, avoiding collisions and friction between the processing equipment and the suction cup, preventing damage to the suction cup, and extending the service life of the vacuum adsorption device.

[0009] Furthermore, the negative pressure hole group also includes a second adsorption hole. Within the same negative pressure hole group, the second adsorption hole and the first adsorption hole are arranged at a radial distance along the suction cup, and the second adsorption hole is closer to the center of the suction cup than the first adsorption hole.

[0010] The above-mentioned technical means can increase the adsorption area of ​​the vacuum adsorption device and improve its adsorption effect.

[0011] Furthermore, each of the negative pressure hole groups includes a plurality of expansion holes, which are arranged at radial intervals along the suction cup.

[0012] By using the aforementioned technical methods, increasing the adjustable adsorption area of ​​the suction cup is beneficial to improving its adsorption effect.

[0013] Furthermore, the base is provided with a negative pressure port, which communicates with the negative pressure cavity and extends along the axial direction of the base; the base is provided with a plurality of protrusion groups in the negative pressure cavity, the plurality of protrusion groups are arranged circumferentially at intervals along the negative pressure port, and a first radial air channel is formed between two adjacent protrusion groups, each protrusion group includes a plurality of first protrusions, the plurality of first protrusions are arranged radially at intervals along the base, and a circumferential air channel is formed between two adjacent first protrusions; the circumferential air channel communicates with the first adsorption hole, and / or, the first radial air channel communicates with the first adsorption hole.

[0014] According to the above technical means, the first protrusion defines a circumferential air channel and a first radial air channel. The circumferential air channel and the first radial air channel can guide the negative pressure gas from the negative pressure port to the outer peripheral surface of the base, avoiding the concentration of negative pressure gas in the area where the negative pressure port is located, ensuring that each adsorption hole can have sufficient negative pressure, and realizing the overall adsorption of the workpiece to be processed. Since multiple circumferential air channels are connected through the first radial air channel, and the first radial air channel extends radially along the base, that is, the first radial air channel extends in a straight line, it can reduce the loss caused by the flow of negative pressure gas in the negative pressure cavity.

[0015] Furthermore, the first protrusion is provided with a first connecting hole, and the suction cup is provided with a second connecting hole; the vacuum adsorption device also includes a connector, which is sequentially inserted through the first connecting hole and the second connecting hole from bottom to top, and the connector is fixedly connected to the first protrusion.

[0016] According to the above technical means, not only can the suction cup and the base be fixed, but the contact area between the connector and the base can also be increased, and the strength of the first connecting hole can be improved, thereby improving the installation stability between the base and the suction cup.

[0017] Furthermore, the base is provided with a plurality of second protrusions in the negative pressure cavity. The plurality of second protrusions are arranged circumferentially along the negative pressure port, and a second radial air duct is formed between two adjacent second protrusions. The second protrusions are located radially between the protrusion group and the negative pressure port of the base, and the number of second protrusions is greater than the number of the protrusion group.

[0018] According to the above technical means, the second radial air duct can guide the negative pressure gas from the negative pressure port to the first radial air duct, avoiding the negative pressure gas from concentrating in the area where the negative pressure port is located, and the negative pressure gas in the first radial air duct is more evenly distributed, which is conducive to the overall adsorption of the workpiece to be processed.

[0019] Furthermore, the base is provided with a plurality of third protrusions in the negative pressure cavity. The plurality of third protrusions are arranged circumferentially along the negative pressure port, and a third radial air duct is formed between two adjacent third protrusions. The third protrusions are located radially between the second protrusion and the negative pressure port on the base. The number of third protrusions is less than the number of protrusion groups.

[0020] According to the above technical means, the third radial air duct can guide the negative pressure gas from the negative pressure port to the second radial air duct, avoiding the negative pressure gas from concentrating in the area where the negative pressure port is located. Since the third protrusion is too close to the negative pressure port, the space available for the third protrusion is small. By reducing the number of the third protrusion, it is easier to process and manufacture the third protrusion and improve production efficiency.

[0021] Furthermore, the base is provided with a plurality of device fixing holes, which are spaced apart circumferentially along the negative pressure port, and the device fixing holes are located radially between the second protrusion and the third protrusion on the base.

[0022] Based on the above technical means, placing the equipment fixing hole close to the negative pressure port helps to ensure the fixing effect between the negative pressure port and the negative pressure generator, and reduces the probability of negative pressure gas leakage.

[0023] Furthermore, the vacuum adsorption device also includes a sealing ring disposed between the suction cup and the base, the sealing ring surrounding the negative pressure chamber.

[0024] The above-mentioned technical means can fill the gap between the suction cup and the base, prevent the negative pressure chamber from communicating with the outside world, and prevent the leakage of negative pressure gas, thus ensuring the adsorption effect of the adsorption holes on the suction cup.

[0025] Furthermore, the expansion hole is located on the side of the side hole facing away from the base.

[0026] According to the above-mentioned technical means, the depth of the expansion hole is relatively small. On the one hand, it can reduce the processing difficulty of the expansion hole, and on the other hand, the negative pressure gas can reach the upper surface of the suction cup more quickly in the expansion hole, which is conducive to improving the adsorption effect of the expansion hole on the workpiece to be processed. Attached Figure Description

[0027] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0028] Figure 1This is one of the structural schematic diagrams of the vacuum adsorption device in the embodiments of this utility model.

[0029] Figure 2 This is the second schematic diagram of the vacuum adsorption device in the embodiments of this utility model.

[0030] Figure 3 yes Figure 2 A cross-sectional view along line AA in the middle.

[0031] Figure 4 yes Figure 3 A partial schematic diagram.

[0032] Figure 5 This is an exploded view of the vacuum adsorption device in an embodiment of this utility model.

[0033] Figure 6 This is a schematic diagram of the suction cup structure in an embodiment of this utility model.

[0034] Figure 7 This is one of the structural schematic diagrams of the base in the embodiments of this utility model.

[0035] Figure 8 This is the second structural schematic diagram of the base in an embodiment of this utility model.

[0036] Explanation of reference numerals in the attached figures: 1. Vacuum adsorption device; 2. Workpiece to be processed; 100. Suction cup; 110. Negative pressure hole group; 120. Side hole; 130. First suction hole; 140. Expansion hole; 150. Second connecting hole; 160. Clearance groove; 170. Groove; 180. Second positioning hole; 190. Second suction hole; 200, Base; 201, Negative Pressure Chamber; 202, Negative Pressure Port; 210, Protrusion Assembly; 211, First Protrusion; 212, First Radial Air Duct; 213, Circumferential Air Duct; 214, First Connecting Hole; 220, Second Protrusion; 221, Second Radial Air Duct; 230, Third Protrusion; 231, Third Radial Air Duct; 240, Equipment Fixing Hole; 250, First Positioning Hole; 260, Receiving Slot; 300. Sealing ring. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0038] The embodiments of this utility model will be described below with reference to the accompanying drawings and preferred embodiments. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be understood that the preferred embodiments are only for illustrating this utility model and not for limiting the scope of protection of this utility model.

[0039] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Therefore, the drawings only show the components related to the present invention and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0040] In related technologies, vacuum adsorption devices typically have a fixed adsorption area. If the adsorption area is set too large, it cannot be fully utilized when the workpiece is small, resulting in energy waste. Furthermore, impurities generated during processing can easily enter the adsorption area not covered by the workpiece, affecting the lifespan of the vacuum adsorption device. If the adsorption area is set too small, it is smaller than the workpiece when the workpiece is large, making it impossible to effectively fix the workpiece.

[0041] To address the aforementioned technical issues, some vacuum adsorption devices are equipped with a negative pressure port, radial air ducts, and multiple annular air ducts. The annular air ducts are spaced radially along the vacuum adsorption device and are all connected to the radial air ducts. The negative pressure port is also connected to the radial air ducts. A positioning rod is installed within the radial air duct; by adjusting the depth of the positioning rod within the radial air duct, the connection between each annular air duct and the negative pressure port can be determined. While this allows for variations in the adsorption area, it is difficult to ensure uniform adsorption force across different regions, which can easily lead to deformation of the workpiece.

[0042] The following is combined with Figures 1 to 8 The following describes embodiments of the present invention.

[0043] This utility model embodiment proposes a vacuum adsorption device 1, which includes a suction cup 100, a base 200, and a sealing component (not shown in the figure).

[0044] The suction cup 100 is provided with a plurality of negative pressure hole groups 110, which are arranged at intervals along the circumference of the suction cup 100. Each negative pressure hole group 110 includes a side hole 120, a first suction hole 130, and an expansion hole 140. The side hole 120 penetrates the outer circumferential surface of the suction cup 100 and extends radially along the suction cup 100. The first suction hole 130 penetrates the upper and lower surfaces of the suction cup 100. The expansion hole 140 penetrates at least the upper surface of the suction cup 100. In the same negative pressure hole group 110, both the first suction hole 130 and the expansion hole 140 are connected to the side hole 120. The expansion hole 140 is farther away from the center of the suction cup 100 relative to the first suction hole 130.

[0045] The base 200 is provided with a negative pressure chamber 201, which communicates with the first adsorption hole 130. A sealing member is movably inserted into the side hole 120 to control the connection between the first adsorption hole 130 and the expansion hole 140. A sealing member may be provided in each side hole 120.

[0046] For example, the side hole 120 can be a threaded hole, and the sealing element can be a bolt, screw, or other threaded fastener. The sealing element and the side hole 120 are threadedly fitted. A flexible sealing structure can be provided between the sealing element and the side hole 120, such as PTFE tape; or, the sealing element can be elastic, made of rubber or silicone material, and the sealing element and the side hole 120 are interference-fitted. The upper surface of the suction cup 100 can support the workpiece 2 to be processed, which is a grinding pad.

[0047] When adsorbing small-sized workpieces 2, the depth of the sealing member inserted into the side hole 120 can be increased to disconnect the connection between the first adsorption hole 130 and the expansion hole 140. The vacuum adsorption device 1 adsorbs the workpiece 2 through the first adsorption hole 130. When adsorbing large-sized workpieces 2, the depth of the sealing member inserted into the side hole 120 can be reduced to connect the first adsorption hole 130 and the expansion hole 140 through the side hole 120. The vacuum adsorption device 1 adsorbs the workpiece 2 through both the first adsorption hole 130 and the expansion hole 140.

[0048] In this way, by adjusting the insertion depth of the sealing component in the side hole 120, the adsorption area of ​​the suction cup 100 can be changed to adapt to different sizes of workpieces 2 to be processed. When adsorbing small workpieces 2 to be processed, negative pressure gas in the expansion hole 140 can be avoided, reducing the adsorption area and thus reducing energy consumption. It also prevents impurities generated during processing from entering the vacuum adsorption device 1 through the expansion hole 140, ensuring cleanliness and extending service life. When adsorbing large workpieces 2 to be processed, negative pressure gas can also flow through the expansion hole 140 to increase the adsorption area and ensure the positioning reliability of the workpiece 2 to be processed.

[0049] For example, when processing a 30.9-inch polishing pad, the depth of the plug in the side hole 120 is increased to disconnect the first suction hole 130 and the expansion hole 140; when processing a 32.3-inch polishing pad, the insertion depth of the plug in the side hole 120 is decreased to connect the first suction hole 130 and the expansion hole 140, increasing the suction area of ​​the suction cup 100 so that the suction area can be switched between 30.9 inches and 32.3 inches.

[0050] For example, when the first adsorption hole 130 and the expansion hole 140 are connected, the adsorption force of the first adsorption hole 130 can be greater than or equal to -680 bar, and the adsorption force of the expansion hole 140 can also be greater than or equal to -680 bar, ensuring the adsorption effect. After switching the adsorption area, the first adsorption hole 130 and the expansion hole 140 maintain good airtightness, and the surface flatness and runout of the suction cup 100 are controlled within the range required for the application.

[0051] In addition, multiple negative pressure hole groups 110 are arranged at intervals along the circumference of the suction cup 100. Whether the first adsorption hole 130 and the expansion hole 140 of the multiple negative pressure hole groups 110 are connected can be adjusted synchronously. On the one hand, it can increase the adjustable area of ​​the vacuum adsorption device 1, which is beneficial to be applicable to workpieces 2 of different sizes and expand the applicable range of the vacuum adsorption device 1. On the other hand, it can ensure the adsorption uniformity of each area of ​​the suction cup 100, ensure the positioning reliability of the workpiece 2, and reduce the probability of deformation due to uneven force on the workpiece 2.

[0052] Specifically, such as Figure 3 and Figure 4 As shown, the expansion hole 140 is located on the side of the side hole 120 facing away from the base 200, that is, the expansion hole 140 extends from the upper surface of the suction cup 100 to the side hole 120.

[0053] In this way, the depth of the expansion hole 140 is relatively small, which can reduce the processing difficulty of the expansion hole 140 on the one hand, and the negative pressure gas can reach the upper surface of the suction cup 100 more quickly in the expansion hole 140, which is beneficial to improving the adsorption effect of the expansion hole 140 on the workpiece 2 to be processed.

[0054] In some embodiments, such as Figure 2-4 , Figure 6 As shown, the negative pressure hole group 110 also includes a second adsorption hole 190. Each negative pressure hole group 110 can have one or more second adsorption holes 190. Within the same negative pressure hole group 110, the second adsorption holes 190 and the first adsorption holes 130 are arranged radially apart along the suction cup 100, with the second adsorption hole 190 closer to the center of the suction cup 100 relative to the first adsorption hole 130. In this way, the adsorption area of ​​the suction cup 100 is increased, which is beneficial to improving the adsorption effect of the suction cup 100.

[0055] In some embodiments, such as Figure 2-4 , Figure 6 As shown, the negative pressure hole group 110 includes a plurality of expansion holes 140, which are arranged at radial intervals along the suction cup 100. In a negative pressure hole group 110, the plurality of expansion holes 140 can simultaneously communicate with the first adsorption hole 130, or one expansion hole 140 can communicate with the first adsorption hole 130, or several of the expansion holes 140 can simultaneously communicate with the first adsorption hole 130.

[0056] When the workpiece 2 extends beyond the first adsorption hole 130, the insertion depth of the sealing member in the side hole 120 is reduced so that at least one expansion hole 140 is connected to the first adsorption hole 130 through the side hole 120, thereby realizing that at least one expansion hole 140 is connected to the negative pressure chamber 201. The number of expansion holes 140 connected to the negative pressure chamber 201 can be controlled according to the area of ​​the workpiece 2. In this way, not only can the expanded adsorption area of ​​the suction cup 100 be increased, but the adsorption effect can also be optimized while ensuring the overall adsorption of the workpiece 2.

[0057] Furthermore, such as Figure 4 , Figure 6-8 As shown, the base 200 is provided with a negative pressure port 202, which communicates with the negative pressure cavity 201 and extends along the axial direction of the base 200. The base 200 is provided with a plurality of protrusion groups 210 in the negative pressure cavity 201. The plurality of protrusion groups 210 are arranged circumferentially at intervals along the negative pressure port 202, and a first radial air duct 212 is formed between two adjacent protrusion groups 210. Each protrusion group 210 includes a plurality of first protrusions 211, which are arranged radially at intervals along the base 200, and a circumferential air duct 213 is formed between two adjacent first protrusions 211.

[0058] The circumferential air duct 213 is connected to the first adsorption hole 130, or the first radial air duct 212 is connected to the first adsorption hole 130, or both the circumferential air duct 213 and the first radial air duct 212 are connected to the first adsorption hole 130.

[0059] For example, the negative pressure port 202 can be connected to an external negative pressure generator. When the negative pressure generator is working, it draws gas from the negative pressure chamber 201 through the negative pressure port 202 to create a negative pressure environment within the negative pressure chamber 201. Furthermore, the lower surface of the suction cup 100 is provided with a groove 170, which is aligned with the central axis of the negative pressure port 202 to improve the flow efficiency of negative pressure gas between the suction cup 100 and the base 200.

[0060] By setting the first protrusion 211, the circumferential air duct 213 and the first radial air duct 212 are defined. The circumferential air duct 213 and the first radial air duct 212 can guide the negative pressure gas from the negative pressure port 202 to the outer peripheral surface of the base 200, avoid the negative pressure gas from concentrating in the area where the negative pressure port 202 is located, and ensure that each first adsorption hole 130 can have sufficient negative pressure to achieve overall adsorption of the workpiece 2 to be processed.

[0061] Since multiple circumferential air ducts 213 are connected through the first radial air duct 212, and the first radial air duct 212 extends radially along the base 200, that is, the first radial air duct 212 extends in a straight line, which can reduce the loss caused by the flow of negative pressure gas in the negative pressure chamber 201. The multiple first adsorption holes 130 also form a straight line arrangement, which has a better adsorption and fixation effect on the workpiece 2 to be processed.

[0062] Specifically, such as Figures 4-8 As shown, the first protrusion 211 is provided with a first connecting hole 214, the suction cup 100 is provided with a second connecting hole 150, and the vacuum adsorption device 1 also includes a connector (not shown in the figure). The connector passes through the first connecting hole 214 and the second connecting hole 150 from bottom to top, and the connector is fixedly connected to the first protrusion 211.

[0063] For example, the lower surface of the base 200 can be provided with a receiving groove 260, and the connector can be a screw, nut, bolt or other threaded fastener. In this case, the second connector is constructed as a threaded hole. The connector passes through the first connecting hole 214 and is then inserted into the second connecting hole 150. The connector and the second connecting hole 150 are threadedly connected. The nut part of the connector is located in the receiving groove 260, which can fix the suction cup 100 and the base 200, and also prevent the connector from protruding from the lower surface of the base 200, thus ensuring the stability of the vacuum adsorption device 1.

[0064] Of course, it is understandable that the connector, the first connecting hole 214 and the second connecting hole 150 can also be constructed in other ways, as long as the suction cup 100 and the base 200 can be fixed. Preferably, the connector does not protrude from the upper surface of the suction cup 100 and the lower surface of the base 200 to ensure the stability of the vacuum adsorption device 1.

[0065] It should be noted that the first connecting hole 214 can be provided only on a portion of the first protrusions 211, instead of providing the first connecting hole 214 on all the first protrusions 211, thereby reducing processing and assembly steps and improving production efficiency; or, the first connecting hole 214 can be provided on all the first protrusions 211 to improve the connection reliability between the base 200 and the suction cup 100.

[0066] Alternatively, a first connecting hole 214 can be provided on the first protrusion 211, or multiple first connecting holes 214 can be provided on the first protrusion 211. The above methods can be flexibly selected according to the actual scenario.

[0067] By setting the first connecting hole 214 on the first protrusion 211, the contact area between the connector and the base 200 can be increased, and the strength of the second connecting hole 150 can be improved, thereby improving the installation stability between the base 200 and the suction cup 100.

[0068] In some embodiments, the first protrusion 211 closest to the outer peripheral surface of the base 200 is provided with a first positioning hole 250, and the suction cup 100 is provided with a second positioning hole 180. The vacuum adsorption device 1 includes a positioning member, which passes through the first positioning hole 250 and the second positioning hole 180 to achieve preliminary positioning between the suction cup 100 and the base 200, which facilitates the subsequent insertion of the connector into the first connecting hole 214 and the second connecting hole 150, thereby improving assembly efficiency.

[0069] There are multiple first positioning holes 250, multiple second positioning holes 180 and multiple positioning elements. Multiple first positioning holes 250 are arranged at intervals along the circumference of the base 200. Multiple first positioning holes 250, multiple second positioning holes 180 and multiple positioning elements are arranged one-to-one. Each positioning element passes through the corresponding first positioning hole 250 and second positioning hole 180 to improve the initial positioning effect between the suction cup 100 and the base 200.

[0070] Furthermore, such as Figure 7 As shown, the base 200 has a plurality of second protrusions 220 in the negative pressure chamber 201. The plurality of second protrusions 220 are arranged circumferentially along the negative pressure port 202. A second radial air duct 221 is formed between two adjacent second protrusions 220. Each second protrusion 220 is located between the protrusion group 210 and the negative pressure port 202 in the radial direction of the base 200. The number of second protrusions 220 is greater than the number of protrusion groups 210.

[0071] For example, the number of bump groups 210 can be 12, and the number of second bumps 220 can be 24, so that each bump group 210 corresponds to two second bumps 220. Of course, the number of bump groups 210 and the number of second bumps 220 can be adjusted according to specific requirements.

[0072] The second radial air duct 221 can guide the negative pressure gas from the negative pressure port 202 to the first radial air duct 212. The number of second radial air ducts 221 is greater than the number of first radial air ducts 212, which avoids the negative pressure gas from concentrating in the area where the negative pressure port 202 is located. Moreover, the negative pressure gas in the first radial air duct 212 is more evenly distributed, which is conducive to the overall adsorption of the workpiece 2 to be processed.

[0073] Furthermore, such as Figure 7 As shown, the base 200 has multiple third protrusions 230 in the negative pressure chamber 201. The multiple third protrusions 230 are arranged circumferentially along the negative pressure port 202. A third radial air duct 231 is formed between two adjacent third protrusions 230. The third protrusions 230 are located radially between the second protrusion 220 and the negative pressure port 202 in the base 200. The number of third protrusions 230 is less than the number of protrusion groups 210.

[0074] For example, the number of bump groups 210 can be 12, and the number of third bumps 230 can be 4, so that each third bump 230 roughly corresponds to 3 bump groups 210. Of course, the number of bump groups 210 and the number of third bumps 230 can be adjusted according to specific requirements.

[0075] The third radial air duct 231 can guide the negative pressure gas from the negative pressure port 202 to the second radial air duct 221, avoiding the concentration of negative pressure gas in the area where the negative pressure port 202 is located. The distribution of negative pressure gas in the second radial air duct 221 is more uniform. Furthermore, the third protrusion 230 is too close to the negative pressure port 202, and the space available for the third protrusion 230 is small. Reducing the number of third protrusions 230 is beneficial for the third protrusion 230 to be easily processed and manufactured, and can improve production efficiency.

[0076] Specifically, such as Figure 8 As shown, the base 200 is provided with a plurality of equipment fixing holes 240. The equipment fixing holes 240 can penetrate the upper surface and the lower surface of the base 200, or the equipment fixing holes 240 can penetrate only the lower surface of the base 200. The plurality of equipment fixing holes 240 are arranged at intervals along the circumference of the base 200. The equipment fixing holes 240 are located in the radial direction of the base 200 between the second protrusion 220 and the third protrusion 230.

[0077] The equipment fixing hole 240 can be fitted with a fixing component (not shown in the figure). The fixing component passes through the processing equipment of the workpiece 2 and is fixedly connected to the equipment fixing hole 240, so as to realize the positioning between the processing equipment and the vacuum adsorption device 1, which is conducive to improving the processing accuracy of the workpiece 2.

[0078] By placing the device fixing hole 240 between the second protrusion 220 and the third protrusion 230, that is, by placing the fixing member between the second protrusion 220 and the third protrusion 230, on the one hand, the fixing member is avoided from affecting the flow of negative pressure gas in the negative pressure chamber 201, reducing the loss of negative pressure gas, thereby ensuring the adsorption effect of the vacuum adsorption device 1 on the workpiece 2 to be processed. On the other hand, the fixing member is close to the negative pressure port 202, which is conducive to ensuring the fixing effect between the negative pressure port 202 and the negative pressure generator, and reducing the probability of negative pressure gas leakage.

[0079] In some embodiments, such as Figure 5As shown, the vacuum adsorption device 1 also includes a sealing ring 300, which is disposed between the suction cup 100 and the base 200 and surrounds the negative pressure chamber 201.

[0080] The sealing ring 300 can be made of rubber or silicone.

[0081] By setting a sealing ring 300 between the suction cup 100 and the base 200, the gap between the suction cup 100 and the base 200 can be filled, preventing the negative pressure chamber 201 from communicating with the outside world and causing negative pressure gas leakage, thus ensuring the adsorption effect of the first adsorption hole 130 on the suction cup 100.

[0082] In some embodiments, such as Figures 1-4 As shown, the upper surface of the suction cup 100 is provided with a relief groove 160, which penetrates the outer peripheral surface of the suction cup 100. That is, the relief groove 160 extends on the outer peripheral surface of the suction cup 100 and extends along the circumference of the suction cup 100.

[0083] By setting the clearance groove 160, the working space is increased when processing the edge of the workpiece 2, avoiding collision and friction between the processing equipment and the suction cup 100, preventing damage to the suction cup 100, and extending the service life of the vacuum adsorption device 1.

[0084] In addition, the side hole 120 is located between the relief groove 160 and the base 200 in the axial direction of the suction cup 100, which can prevent the side hole 120 from being damaged during the machining of the relief groove 160, thus ensuring the sealing effect of the side hole 120. Furthermore, the relief groove 160 and the expansion hole 140 are spaced apart in the radial direction of the suction cup 100.

[0085] The following describes the processing method of suction cup 100 with reference to the attached diagram: The suction cup 100 can be made of a material with good corrosion resistance and good plasticity and toughness at room temperature and low temperature. For example, the suction cup 100 can be made of 316L stainless steel sheet. 316L stainless steel is easy to form. The length of the 316L stainless steel sheet is 851mm, the width is 851mm, and the height is 26mm. The 316L stainless steel sheet is milled and cut using a horizontal milling machine to shape it into a disc with a diameter of 850.9mm and a thickness of 22mm. Drill holes on the front of the disk. First, process a through hole with a diameter of 2mm that coincides with the center of the disk. Then, process multiple through holes with a diameter of 3mm as the first adsorption hole 130 and the second adsorption hole 190, and multiple blind holes with a diameter of 3mm and a depth of 18mm as expansion holes 140. The total number of through holes and blind holes is 829. Drill and tap holes on the reverse side of the disc. First, machine multiple threaded holes with a diameter of 18mm and a depth of 18mm to match the M8 bolts as second connecting holes 150. The number of second connecting holes 150 can be 36. Then, machine four second positioning holes 180 with a diameter of 16mm and a depth of 6mm. Then, a groove 170 with a diameter of 67mm and a depth of 6mm is machined on the reverse side of the disc. The groove 170 coincides with the center of the disc and is aligned with the negative pressure port 202. Next, on the front side of the disk, a cut is made from a position 822.96 mm from the center towards the outer circumference, with a cutting depth of 7 mm. Then, a cut is made from a position 826.36 mm from the center towards the outer circumference, with a cutting depth of 5.55 mm, forming a clearance groove 160. Finally, drilling and tapping are performed on the outer circumferential surface of the disk to create blind holes with a depth of 32.4 mm and a diameter of 5 mm. The blind holes are connected to the first suction hole 130 and the expansion hole 140. The number of blind holes on the outer circumferential surface of the disk is 72. The inner circumferential surface of the blind hole near the outer circumferential surface of the disk is enlarged to a depth of 14 mm and a diameter of 6 mm. Then, the inner circumferential surface near the outer circumferential surface of the disk in the enlarged area is further enlarged to a depth of 4 mm and a diameter of 13 mm, forming a side hole 120. At this point, the suction cup 100 is completely processed.

[0086] When a threaded fastener of type M5*72*22.5 is installed into the side hole 120, a 30.9-inch suction cup 100 can be obtained, and the outer circumferential surface of the threaded fastener can be covered with PTFE tape; when a threaded fastener of type M6*72*14 is installed into the side hole 120, a 32.3-inch suction cup 100 can be obtained, and the outer circumferential surface of the threaded fastener can be covered with PTFE tape.

[0087] The above embodiments are merely preferred embodiments provided to fully illustrate the present utility model, and the protection scope of the present utility model is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present utility model are all within the protection scope of the present utility model.

[0088] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A vacuum adsorption device, characterized in that, include: A suction cup (100) is provided with a plurality of negative pressure hole groups (110). The plurality of negative pressure hole groups (110) are arranged at intervals along the circumference of the suction cup (100). The negative pressure hole group (110) includes a side hole (120), a first suction hole (130) and an expansion hole (140). The side hole (120) penetrates the outer circumferential surface of the suction cup (100) and extends radially along the suction cup (100). The first suction hole (130) penetrates the upper surface and the lower surface of the suction cup (100). The expansion hole (140) penetrates at least the upper surface of the suction cup (100). In the same negative pressure hole group (110), the first suction hole (130) and the expansion hole (140) are both connected to the side hole (120). The expansion hole (140) is away from the center of the suction cup (100) relative to the first suction hole (130). The base (200) is provided with a negative pressure chamber (201), which is connected to the first adsorption hole (130); A sealing element is movably inserted into the side hole (120) to control the opening and closing between the first adsorption hole (130) and the expansion hole (140).

2. The vacuum adsorption device according to claim 1, characterized in that, The upper surface of the suction cup (100) is provided with a relief groove (160), which extends on the outer peripheral surface of the suction cup (100) and extends along the circumferential direction of the suction cup (100). The side hole (120) is located between the relief groove (160) and the base (200).

3. The vacuum adsorption device according to claim 1, characterized in that, The negative pressure hole group (110) also includes a second adsorption hole (190). Within the same negative pressure hole group (110), the second adsorption hole (190) and the first adsorption hole (130) are arranged at a radial distance along the suction cup (100), and the second adsorption hole (190) is closer to the center of the suction cup (100) relative to the first adsorption hole (130). And / or, each of the negative pressure hole groups (110) includes a plurality of the expansion holes (140), the plurality of the expansion holes (140) being arranged radially spaced along the suction cup (100).

4. The vacuum adsorption device according to claim 1, characterized in that, The base (200) is provided with a negative pressure port (202), which is connected to the negative pressure chamber (201), and the negative pressure port (202) extends along the axial direction of the base (200); The base (200) has a plurality of protrusion groups (210) in the negative pressure chamber (201). The plurality of protrusion groups (210) are arranged circumferentially along the negative pressure port (202). A first radial air duct (212) is formed between two adjacent protrusion groups (210). Each protrusion group (210) includes a plurality of first protrusions (211). The plurality of first protrusions (211) are arranged radially along the base (200). A circumferential air duct (213) is formed between two adjacent first protrusions (211). The circumferential air duct (213) is connected to the first adsorption hole (130), and / or the first radial air duct (212) is connected to the first adsorption hole (130).

5. The vacuum adsorption device according to claim 4, characterized in that, The first protrusion (211) is provided with a first connecting hole (214), and the suction cup (100) is provided with a second connecting hole (150). The vacuum adsorption device (1) also includes a connector, which is sequentially inserted from bottom to top through the first connecting hole (214) and the second connecting hole (150), and the connector is fixedly connected to the first protrusion (211).

6. The vacuum adsorption device according to claim 4, characterized in that, The base (200) is provided with a plurality of second protrusions (220) in the negative pressure chamber (201). The plurality of second protrusions (220) are arranged circumferentially at intervals along the negative pressure port (202). A second radial air duct (221) is formed between two adjacent second protrusions (220). The second protrusions (220) are located radially between the protrusion group (210) and the negative pressure port (202) of the base (200). The number of second protrusions (220) is greater than the number of protrusion group (210).

7. The vacuum adsorption device according to claim 6, characterized in that, The base (200) has a plurality of third protrusions (230) in the negative pressure chamber (201). The plurality of third protrusions (230) are arranged circumferentially along the negative pressure port (202). A third radial air duct (231) is formed between two adjacent third protrusions (230). The third protrusions (230) are located radially between the second protrusion (220) and the negative pressure port (202) of the base (200). The number of third protrusions (230) is less than the number of protrusion groups (210).

8. The vacuum adsorption device according to claim 7, characterized in that, The base (200) is provided with a plurality of equipment fixing holes (240), which are spaced apart circumferentially along the negative pressure port (202). The equipment fixing holes (240) are located radially between the second protrusion (220) and the third protrusion (230) of the base (200).

9. The vacuum adsorption apparatus according to any one of claims 1-8, characterized in that, Also includes: A sealing ring (300) is disposed between the suction cup (100) and the base (200), and the sealing ring (300) surrounds the negative pressure chamber (201).

10. The vacuum adsorption apparatus according to any one of claims 1-8, characterized in that, The expansion hole (140) is located on the side of the side hole (120) away from the base (200).

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