Positioning fixture for three-dimensional measurement and three-dimensional measuring device

Abstract

The utility model provides a kind of positioning fixture and three coordinate measuring devices for three coordinate measurement, positioning fixture includes pedestal, first clamping piece, second clamping piece and positioning piece;Pedestal includes base, and the first fixed boss and slider of setting in base, second clamping piece is detachably set in first fixed boss, first clamping piece is detachably set in slider, the acting surface of at least one of first clamping piece and second clamping piece is equipped with the support platform for supporting measured piece, first clamping piece is driven by slider and moves towards or away from second clamping piece to cooperate with second clamping piece and is clamped or loosened measured piece;Positioning includes fixed block and positioning baffle, positioning baffle is vertically set in one end of fixed block and extends along the side wall away from second clamping piece to be used for the side end of measured piece is resisted.This application can quickly position and fix measured piece, avoids each measurement replacement measured piece and needs to be manually adjusted measured piece to find the coordinate system.

Description

Technical Field

[0001] This utility model relates to the field of mechanical technology, and in particular to a positioning fixture and a coordinate measuring device for coordinate measuring. Background Technology

[0002] A coordinate measuring machine (CMM) is a precision measuring device that determines the dimensions, shape, and positional tolerances of a workpiece by probing a set of points on the workpiece surface and using computer calculations. Simply put, it establishes a three-dimensional coordinate system for an object, then uses probes to "touch" various points on the object's surface, calculating the coordinate values ​​of these points to accurately describe the object's geometric features.

[0003] In the field of coordinate measuring machine (CMM) technology, precise and stable fixation of the workpiece is crucial for ensuring measurement accuracy. Currently, common fixation methods typically involve applying adhesives (such as modeling clay, modeling putty, or specialized adhesives) to bond the workpiece to the measuring platform. While this method achieves fixation to some extent, it has significant limitations: First, the adhesive application process is cumbersome and time-consuming. Each time the workpiece is changed, it requires cleaning residual adhesive, reapplying adhesive, and waiting for curing, severely restricting measurement efficiency, especially failing to meet the needs of rapid, continuous measurement of batches of workpieces. Second, the stability of the adhesive itself and the uniformity of its application may introduce minute displacements or deformations, affecting the repeatability and accuracy of the measurement. Third, adhesive application makes it difficult to achieve precise positioning of the workpiece. After each installation, operators typically need to manually perform tedious coordinate system alignment, increasing labor intensity and introducing the risk of human error. These problems make it difficult for existing technology to support CMMs in achieving the goals of efficient, high-precision, and batch measurement.

[0004] In semiconductor components, the wafer carrier in the load locking chamber plays the role of supporting and cooling the wafer. Poor parallelism of the wafer carrier plane can cause wafer slippage. When using a coordinate measuring machine to measure wafer carriers in batches, it is necessary to frequently change products. Each measurement requires re-applying glue to fix the product and manually aligning the coordinate system before measurement can be performed, which seriously affects measurement efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a positioning fixture and a coordinate measuring device for coordinate measuring machine (CMM) measurement, which can quickly position and fix the workpiece under test, avoiding the need to manually readjust the workpiece and perform coordinate system alignment every time the workpiece is changed. This is beneficial to improving the stability of the workpiece under test during CMM measurement and ensuring the accuracy of CMM measurement.

[0006] To achieve the above objectives, in a first aspect, the positioning fixture for coordinate measuring machine (CMM) includes a base, a first clamping member, a second clamping member, and a positioning member. The base includes a base plate, a first fixed boss, and a slider. The first fixed boss is fixedly disposed at one end of the base plate. The second clamping member is detachably disposed on the first fixed boss. The slider is slidably disposed on the base plate and slides towards or away from the first fixed boss. The first clamping member is detachably disposed on the slider and is disposed opposite to the second clamping member. At least one of the first and second clamping members has a support platform on its working surface for supporting the workpiece to be measured. The first clamping member moves towards or away from the second clamping member under the action of the slider to cooperate with the second clamping member to clamp or release the workpiece to be measured. The positioning member includes a fixing block and a positioning stop. The fixing block is disposed on the second clamping member in a direction extending along the bottom of the support platform. The positioning stop is vertically disposed at one end of the fixing block and extends along the side wall away from the second clamping member to abut against the side end of the workpiece to be measured.

[0007] Preferably, the positioning fixture further includes a rotating handle, and the other end of the base is provided with a second fixed boss. A sliding groove is provided on the top surface of the base between the first fixed boss and the second fixed boss. The rotating handle passes through the second fixed boss and is fixedly connected to the slider.

[0008] Preferably, the first clamping member and the second clamping member are provided with at least two clamping claws on the side away from the base. The at least two clamping claws are arranged sequentially at intervals along the width direction of the first clamping member or the second clamping member. At least one working surface of each clamping claw is provided with the support platform, and the support platform extends along the width direction of the clamping claw.

[0009] Preferably, the support platform is recessed away from the working surface, and the support platform extends from the top end of the clamping claw toward the base; the distance between the side wall of the support platform and the working surface is greater than or equal to 1.5 mm and less than or equal to 35 mm; the distance between the bottom of the support platform and the top end of the clamping claw is greater than or equal to 2 mm and less than or equal to 10 mm.

[0010] Preferably, the positioning fixture further includes a pad, which is disposed on the side wall of the support platform.

[0011] Preferably, the second working surface of the second clamping member is provided with a recessed mounting groove, the mounting groove extends along the width direction of the second clamping member, the fixing block is engaged in the mounting groove, and the depth of the recess in the mounting groove is equal to the thickness of the fixing block.

[0012] Preferably, the mounting groove has a plurality of threaded through holes spaced apart along the width direction of the second clamping member, the fixing block has a waist-shaped hole along the extension direction of the fixing block, and the positioning member is fixed to the second clamping member by screws passing through the waist-shaped hole and the threaded through holes in sequence.

[0013] Preferably, the first fixing boss has a first countersunk hole, and the second clamping member has a first threaded through hole adapted to the first countersunk hole. The second clamping member is fixed to the first fixing boss by screws passing through the first countersunk hole and the first threaded through hole in sequence. The slider has a second threaded through hole, and the first clamping member has a second countersunk hole adapted to the second threaded through hole. The first clamping member is fixed to the slider by screws passing through the second countersunk hole and the second threaded through hole in sequence.

[0014] Preferably, the positioning fixture further includes a base plate and a plurality of positioning pins. The base plate is provided with a plurality of threaded holes arranged in an array. The plurality of positioning pins are arranged around the four sides of the base and inserted into the threaded holes to fix the base to the base plate.

[0015] In a second aspect, the coordinate measuring device includes a probe system and the aforementioned positioning fixture for coordinate measuring.

[0016] The advantages of the positioning fixture and coordinate measuring device for coordinate measuring machine described in this utility model are as follows: (1) This application enables the first clamping member and the second clamping member to quickly clamp and fix the test piece by moving the slider, and to release the fixation of the test piece. Compared with the prior art, which requires glue to fix the test piece before measurement, the positioning fixture of this application can quickly replace the test piece, which is beneficial to improve the measurement efficiency of the coordinate measuring device and enable the coordinate measuring device to perform batch measurement of the test pieces.

[0017] (2) This application not only clamps and fixes the edge of the first end of the test piece by the first clamping member and the second clamping member, but also holds the edge of the side end of the test piece perpendicular to the edge of the first end by the positioning block, so as to quickly position and fix the test piece, avoiding the need to manually readjust the test piece and calibrate the coordinate system every time the test piece is replaced. This is beneficial to improving the stability of the test piece during coordinate measurement and ensuring the accuracy of coordinate measurement. Moreover, the repeatability and stability are good, which effectively solves the problem of batch measurement and positioning in coordinate measurement. This enables the coordinate measuring device to quickly measure the test piece in batches and to measure all dimensions of similar test pieces in one clamping. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 1 .

[0019] Figure 2 This is a schematic diagram of the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 2 .

[0020] Figure 3 This is a schematic diagram of the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 3 .

[0021] Figure 4 This is a schematic diagram of the structure of the first clamping member in the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 1 .

[0022] Figure 5 This is a schematic diagram of the structure of the first clamping member in the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 2 .

[0023] Figure 6 This is a schematic diagram of the structure of the first clamping member in the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 3 .

[0024] Figure 7 This is a schematic diagram of the structure of the second clamping member in the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 1 .

[0025] Figure 8 This is a schematic diagram of the structure of the second clamping member in the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 2 .

[0026] Figure 9 This is a schematic diagram of the structure of the second clamping member in the positioning fixture for coordinate measuring machine according to an embodiment of the present invention. Figure 3 .

[0027] Explanation of reference numerals in the attached figures: 10. Test piece; 101. First end; 102. Side end; 1. Base; 11. Base plate; 12. First fixing boss; 121. First countersunk hole; 13. Slider; 14. Second fixing boss; 15. Slide groove; 2. First clamping member; 21. Second countersunk hole; 201. First working surface one; 211. First support platform; 3. Second clamping member; 311. Second support platform; 31. Mounting groove; 32. Threaded through hole; 33. First threaded through hole; 301. First working surface two; 302. Second working surface; 4. Positioning member; 41. Fixing block; 42. Positioning stop block; 43. Waist-shaped hole; 5. Rotating handle; 51. Rotating bearing; 6. Clamping claw; 7. Base plate; 71. Threaded hole; 8. Positioning pin; 9. Screw. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0029] To overcome the problems existing in the prior art, this utility model provides a positioning fixture and a coordinate measuring device for coordinate measuring machine (CMM) measurement. It can quickly position and fix the workpiece under test, avoiding the need to manually readjust the workpiece and perform coordinate system alignment every time the workpiece is changed. This helps to improve the stability of the workpiece under test during CMM measurement and ensures the accuracy of CMM measurement.

[0030] In some embodiments of this utility model, reference is made to Figures 1 to 9The positioning fixture includes a base 1, a first clamping member 2, a second clamping member 3, and a positioning member 4. The base 1 includes a base 11, a first fixing boss 12, and a slider 13. The first fixing boss 12 is fixedly disposed at one end of the base 11. The second clamping member 3 is detachably disposed on the first fixing boss 12. The slider 13 is slidably disposed on the base 11 and slides on the base 11 towards or away from the first fixing boss 12. The first clamping member 2 is detachably disposed on the slider 13 and is disposed opposite to the second clamping member 3. The first clamping member 2 and the second clamping member 4... At least one of the components 3 has a support platform on its working surface for supporting the test piece 10, and the first clamping component 2 moves toward or away from the second clamping component 3 under the drive of the slider 13 to cooperate with the second clamping component 3 to clamp or release the test piece 10; the positioning component 4 includes a fixing block 41 and a positioning stop 42, the fixing block 41 is disposed on the second clamping component 3 in the direction extending along the bottom of the support platform, and the positioning stop 42 is vertically disposed at one end of the fixing block 41 and extends along the side wall away from the second clamping component 3 to abut against the side end 102 of the test piece 10.

[0031] In this embodiment, the working surface of the first clamping member 2 is the working surface of the first clamping member 2 opposite to the second clamping member 3 for clamping the test piece 10, and the working surface of the second clamping member 3 is the working surface of the second clamping member 3 opposite to the first clamping member 2 for clamping the test piece 10.

[0032] In this embodiment, the direction in which the bottom of the support platform extends is the width direction of the first clamping member 2 and the second clamping member 3.

[0033] In this application, the first clamping member 2 is disposed on the slider 13 and is disposed opposite to the second clamping member 3. The first clamping member 2 moves toward or away from the second clamping member 3 under the drive of the slider 13 to cooperate with the second clamping member 3 to clamp or release the test piece 10. That is, by the slider 13 driving the first clamping member 2 to move, the first clamping member 2 and the second clamping member 3 can quickly clamp and fix the test piece 10, and release the fixation of the test piece 10. Compared with the prior art, which requires glue to fix the test piece 10 before measurement, the positioning fixture of this application can quickly replace the test piece 10, which is beneficial to improving the measurement efficiency of the coordinate measuring device and enabling the coordinate measuring device to perform batch measurement of the test pieces 10.

[0034] This application not only clamps and fixes the edge of the first end 101 of the tested part 10 with the first clamping member 2 and the second clamping member 3 (such as... Figure 3The bottom edge of the test piece 10 is shown, and the fixing block 41 is set on the second clamping member 3 along the bottom of the support platform. The positioning block 42 is vertically set at one end of the fixing block 41 and extends along the side wall away from the second clamping member 3 to abut against the side end 102 of the test piece 10. That is, the positioning block 42 is set vertically to the bottom of the support platform, so that the positioning block 42 can abut against the edge of the side end 102 of the test piece 10 that is perpendicular to the edge of the first end 101. This allows for quick positioning and fixing of the test piece 10, avoiding the need to manually readjust the test piece 10 for coordinate system alignment every time the test piece 10 is changed. This is beneficial to improving the stability of the test piece 10 during coordinate measuring machine (CMM) measurement and ensuring the accuracy of CMM measurement. Moreover, it has good repeatability and stability, effectively solving the problem of batch measurement positioning in CMM measurement. This enables the CMM measurement device to quickly measure the test piece 10 in batches and to measure all dimensions of similar test pieces 10 with a single clamping.

[0035] In some embodiments of this utility model, reference is made to Figures 1 to 2 The positioning fixture also includes a rotating handle 5. A second fixed protrusion 14 is provided at the other end of the base 11. A groove 15 is provided on the top surface of the base 11 between the first fixed protrusion 12 and the second fixed protrusion 14. The rotating handle 5 passes through the second fixed protrusion 14 and is fixedly connected to the slider 13. By rotating the rotating handle 5 clockwise or counterclockwise, the slider 13 can drive the first clamping member 2 to move towards or away from the second clamping member 3 to cooperate with the second clamping member 3 to clamp or release the workpiece 10. The structure is simple and easy to operate, enabling the first clamping member 2 to quickly cooperate with the second clamping member 3 to clamp or release the workpiece 10. Furthermore, the slider 13 drives the first clamping member 2 to move along the groove 15, ensuring smooth movement of the first clamping member 2 and preventing tilting. This improves the positioning accuracy of the workpiece 10 when clamped and fixed by the positioning fixture, thereby improving the accuracy of the coordinate measuring machine (CMM).

[0036] In some embodiments of this utility model, reference is made to Figure 1 and Figure 2 The rotating handle 5 is rotatably connected to the second fixed boss 14. Specifically, the rotating handle 5 and the second fixed boss 14 are connected via a rotating bearing 51.

[0037] In some embodiments of this utility model, reference is made to Figure 1 and Figure 2 The base 1 has a U-shaped structure, that is, the base 11, the first fixing boss 12 and the second fixing boss 14 are arranged in a U-shaped structure.

[0038] In some embodiments of this utility model, reference is made to Figure 1 and Figure 2 The base 1 is an integrally molded structure, which makes the base 1 more robust and stable, which helps to improve the positioning accuracy of the measured part 10 when it is clamped and fixed by the positioning fixture, thereby improving the accuracy of the coordinate measuring machine.

[0039] In some embodiments of this utility model, reference is made to Figures 1 to 9 The first clamping member 2 and the second clamping member 3 are provided with at least two clamping claws 6 on the side away from the base 11. The at least two clamping claws 6 are arranged sequentially at intervals along the width direction of the first clamping member 2 or the second clamping member 3. Each clamping claw 6 has at least one working surface provided with a support platform, and the support platform extends along the width direction of the clamping claw 6. The multiple clamping claws 6 are provided so that the clamping force of the first clamping member 2 and the second clamping member 3 on the test piece 10 can be dispersed when clamping the test piece 10, so as to avoid stress concentration that could damage the test piece 10 and cause measurement errors. For example, when the test piece 10 is a wafer carrier in a load locking chamber, since the wafer carrier, i.e., the test piece 10, is generally thin (4mm~5mm), if the clamping part of the first clamping member 2 and the second clamping member 3 clamping the wafer carrier is integral, it is easy to cause stress concentration and damage to the wafer carrier. Furthermore, the spacing between adjacent clamping claws 6 facilitates the clamping and measurement of the test piece 10 with protruding ends that need to be clamped.

[0040] In this embodiment, the width direction of the clamping claw 6 is the width direction of the first clamping member 2 and the second clamping member 3.

[0041] In some embodiments of this utility model, reference is made to Figures 1 to 9 Both the first clamping member 2 and the second clamping member 3 are provided with two clamping claws 6. The two clamping claws 6 are arranged in a U-shape at the top end of the first clamping member 2 and the top end of the second clamping member 3.

[0042] In some embodiments of this utility model, reference is made to Figures 4 to 9 The support platform is recessed away from the working surface, and the support platform extends from the top of the clamping claw 6 toward the base 11, which makes it easier for the first clamping member 2 and the second clamping member 3 to quickly clamp and fix the test piece 10. Moreover, the test piece 10 is clamped more stably, which helps to improve the measurement efficiency of the coordinate measuring device and enables the coordinate measuring device to perform batch measurement of the test pieces 10.

[0043] In some embodiments of this utility model, the distance between the side wall of the support platform and the working surface is greater than or equal to 1.5 mm and less than or equal to 35 mm, so that the positioning clamp can be adapted to clamp the test piece 10 with a thickness of 0-70 mm; the distance between the bottom of the support platform and the top of the clamping claw 6 is greater than or equal to 2 mm and less than or equal to 10 mm. This clamping height can ensure the stability of the test piece 10 being clamped, and can also avoid stress concentration and affecting the measurement due to too many parts of the test piece 10 being clamped.

[0044] In this embodiment, reference Figures 4 to 9 The first clamping member 2 has a first supporting platform 211 on its first working surface 201; specifically, the clamping claw 6 in the first clamping member 2 has a first supporting platform 211 on its first working surface 201, and the second clamping member 3 has a second supporting platform 311 on its first working surface 301; specifically, the clamping claw 6 in the second clamping member 3 has a second supporting platform 311 on its first working surface 301; the position of the first supporting platform 211 relative to the position of the clamping claw 6 in the first clamping member 2 and the second supporting platform 311 The position of the clamping claw 6 in the second clamping member 3 corresponds to the position of the first support platform 211. That is, the distance between the bottom of the first support platform 211 and the top of the clamping claw 6 in the first clamping member 2 is equal to the distance between the bottom of the second support platform 311 and the top of the clamping claw 6 in the second clamping member 3. This makes the clamping stability of the test piece 10 better and helps to ensure that the bottom of the test piece 10 remains parallel to the plane of the test platform when the test piece 10 is clamped by the positioning fixture, thereby helping to ensure the accuracy of the coordinate measuring machine. In some embodiments, the distance between the side wall of the first support platform 211 and the first working surface 201 of the first clamping member 2 is equal to the distance between the side wall of the second support platform 311 and the first working surface 301 of the second clamping member 3. In other embodiments, the distance between the side wall of the first support platform 211 and the first working surface 201 of the first clamping member 2 is not equal to the distance between the side wall of the second support platform 311 and the first working surface 301 of the second clamping member 3. The depth of the recess of the first support platform 211 and the second support platform 311 (i.e., the distance between the side wall of the support platform and the working surface) can be set according to actual needs to be suitable for clamping and positioning the test piece 10 of different thicknesses.

[0045] In this embodiment, the test piece 10 is placed on the first support platform 211 and the second support platform 311, and clamped and fixed by the clamping force between the clamping claw 6 of the second clamping member 3 and the clamping claw 6 of the first clamping member 2, so that the positioning fixture can be adapted to clamp and fix the test piece 10 with a thickness of 3-70mm. The second working surface 302 of the second clamping member 3, which is opposite to the first working surface 301, is not provided with a support platform, so that the second clamping member 3 can be flipped so that the second working surface 302 of the second clamping member 3 is opposite to the first working surface 201 of the first clamping member 2, so that the test piece 10 can be placed on the first support platform 211, and clamped and fixed by the clamping force between the second working surface 302 of the clamping claw 6 of the second clamping member 3 and the first working surface 201 of the clamping claw 6 of the first clamping member 2, so that the positioning fixture can be adapted to clamp the test piece 10 with a thickness of 1.5-3mm.

[0046] In some embodiments of this utility model, a third support platform is provided on the second working surface 302 of the second clamping member 3, which is opposite to the first working surface 301. The position of the third support platform on the second working surface 302 of the clamping claw 6 in the second clamping member 3 corresponds to the position of the first support platform 211 on the first working surface 201 of the clamping claw 6 in the first clamping member 2. That is, the distance between the bottom of the third support platform and the top of the clamping claw 6 in the second clamping member 3 is equal to the distance between the bottom of the first support platform 211 and the top of the clamping claw 6 in the first clamping member 2. The distance between the side wall of the first support platform 211 and the first working surface 201 of the clamping claw 6 in the first clamping member 2 is equal to or not equal to the distance between the side wall of the third support platform and the second working surface 302 of the clamping claw 6 in the second clamping member 3. This is to accommodate clamping test pieces 10 of different thicknesses. In the first clamping member 2, the second working surface of the clamping claw 6 opposite to the first working surface 201 can also be provided with a fourth support platform as needed. The structural features of the fourth support platform are the same as those of the third support platform, and will not be described again here.

[0047] In some specific embodiments of this utility model, the first working surface 201 of the clamping claw 6 in the first clamping member 2 is provided with the first support platform 211, and the first working surface 301 of the clamping claw 6 in the second clamping member 3 is provided with the second support platform 311. In other specific embodiments of this utility model, the first working surface 201 of the clamping claw 6 in the first clamping member 2 is provided with the first support platform 211, the first working surface 301 of the clamping claw 6 in the second clamping member 3 is provided with the second support platform 311, and the second working surface 302 of the clamping claw 6 in the second clamping member 3 is provided with the third support platform. That is, at least one working surface of the clamping claw 6 in the second clamping member 3 is provided with a support platform for supporting the bottom of the test piece 10.

[0048] In some embodiments of this utility model, the positioning fixture further includes a shim. The shim is disposed on the side wall of the support platform, so that when the measured part 10 is relatively thin, and the clamping gap between the first support platform 211 of the first clamping member 2 and the second support platform 311 of the second clamping member 3 is greater than the thickness of the measured part 10, the shim can be placed between the measured part 10 and the support platform to avoid gaps between the measured part 10 and the support platform, which would cause unstable clamping and affect the measurement accuracy.

[0049] In some embodiments of this utility model, reference is made to Figures 1 to 3 , Figures 7 to 9 The second working surface 302 of the second clamping member 3 is provided with a recessed mounting groove 31. The mounting groove 31 extends along the width direction of the second clamping member 3. The fixing block 41 is engaged in the mounting groove 31, and the depth of the recess in the mounting groove 31 is equal to the thickness of the fixing block 41. This ensures that the fixing block 41 is fully engaged in the mounting groove 31 and does not protrude from the second working surface 302. Therefore, when the test piece 10 is clamped and fixed by the second working surface 302 of the second clamping member 3 and the first working surface 201 of the first clamping member 2, a gap between the second working surface 302 of the second clamping member 3 and the first working surface 201 of the first clamping member 2 is avoided, which would affect the clamping and fixing of the test piece 10.

[0050] In some embodiments of this utility model, reference is made to Figures 1 to 3 , Figure 8The mounting groove 31 has a plurality of threaded through holes 32 arranged at intervals along the width direction of the second clamping member 3. The fixing block 41 has a waist-shaped hole 43 arranged along the extension direction of the fixing block 41. The positioning member 4 is fixed to the second clamping member 3 by screws passing through the waist-shaped hole 43 and the threaded through holes 32 in sequence. This allows the installation position of the positioning member 4 on the second clamping member 3 to be adjusted through the threaded through holes 32 and waist-shaped holes 43, thereby adjusting the distance between the positioning stop 42 and the side wall of the second clamping member 3. This makes it suitable for positioning the side end 102 of the test piece 10 of different lengths. Moreover, the positioning member 4 and the second clamping member 3 can be locked and fixed by multiple screws, which improves the stability of the positioning member 4 and helps to improve the testing accuracy.

[0051] In some embodiments of this utility model, reference is made to Figures 1 to 3 , Figure 7 and Figure 8 The first fixing boss 12 is provided with a first countersunk hole 121, and the second clamping member 3 is provided with a first threaded through hole 33 adapted to the first countersunk hole 121. The second clamping member 3 is fixed to the first fixing boss 12 by screws 9 passing through the first countersunk hole 121 and the first threaded through hole 33 in sequence. That is, the second clamping member 3 and the first fixing boss 12 are detachably configured, so that the second clamping member 3 can be flipped as needed so that the first working surface 301 or the second working surface 302 of the second clamping member 3 is opposite to the first working surface 201 of the first clamping member 2 to clamp and fix the test piece 10. Moreover, the second clamping member 3 can be quickly replaced as needed.

[0052] In some embodiments of this utility model, reference is made to Figures 1 to 5 The slider 13 is provided with a second threaded through hole, and the first clamping member 2 is provided with a second countersunk hole 21 adapted to the second threaded through hole. The first clamping member 2 is fixed to the slider 13 by screws passing sequentially through the second countersunk hole 21 and the second threaded through hole. That is, the first clamping member 2 and the slider 13 are detachably configured, so that the first clamping member 2 can be flipped as needed, so that the first working surface 201 or the second working surface of the first clamping member 2 is opposite to the first working surface 301 of the second clamping member 3 to clamp and fix the test piece 10. Moreover, the first clamping member 2 can be quickly replaced as needed.

[0053] In some embodiments of this utility model, reference is made to Figure 1The positioning fixture further includes a base plate 7 and several positioning pins 8. The base plate 7 has several threaded holes 71 arranged in an array. The positioning pins 8 are arranged around the four side walls of the base 1 and inserted into the threaded holes 71 to fix the base 1 to the base plate 7. The base 1 is simple and convenient to fix, and the positioning is accurate, so that the position of the base 1 on the base plate 7 can be adjusted in real time to meet the requirements of coordinate measuring machine (CMM) measurement.

[0054] In some embodiments of this utility model, the coordinate measuring device includes a probe system and a positioning fixture for coordinate measuring. The positioning fixture of this application enables the workpiece 10 to be fixedly mounted on the coordinate measuring worktable, thereby achieving rapid positioning and measurement by the coordinate measuring fixture.

[0055] In some embodiments of this utility model, the base plate 7 is fixed to the coordinate measuring machine table by screws.

[0056] In some embodiments of this invention, the coordinate measuring device further includes a mechanical body structure, a frame, a guide rail and drive system, and a scale system. The frame is typically made of granite (good stability, low coefficient of thermal expansion) or materials such as ceramic or aluminum, providing a stable platform for the entire system. The guide rail and drive system ensures smooth and precise movement of the three axes. The scale system is typically a high-precision optical scale, used to provide real-time feedback on the position information of each axis, and is crucial for ensuring accuracy. The specific structure and principle of the coordinate measuring device are conventional techniques in the field and will not be elaborated further here.

[0057] In some embodiments of this invention, the probe system includes a probe, a control system, a computer, and measurement software. The probe is a sensor that directly contacts the workpiece being measured. It is divided into trigger-type probes (such as the Renishaw PH10, which acquires data point by point) and scanning probes (which continuously acquire large amounts of point cloud data, offering faster speed and richer information). The probe is mounted on the rod and tip of the probe, typically using a ruby ​​sphere (extremely wear-resistant). The control system controls the movement and speed of the three axes and reads the probe signals. The computer and measurement software are responsible for controlling the measurement process, processing data, and generating reports. The specific structure and principle of the probe system are conventional techniques in the field and will not be elaborated further here.

[0058] In some embodiments of this utility model, the step of clamping and fixing the test piece 10 with the positioning fixture includes: According to the measurement requirements, the base 1 is placed at the corresponding position on the base plate 7 and fixed by the positioning pin 8; The second clamping member 3 is installed on the first fixing boss 12 by screws, and the first clamping member 2 is installed on the slider 13 by screws. Place the test piece 10 on the second support platform 311 of the second clamping member 3 and the first support platform 211 of the first clamping member 2. Then, rotate the rotating handle 5 to move the slider 13, causing the first clamping member 2 to move until the first clamping member 2 and the second clamping member 3 clamp and fix the test piece 10. Install the positioning member 4 on the second clamping member 3, and adjust the distance of the positioning stop 42 protruding from the second clamping member 3 through the sliding oblong hole 43 until the positioning stop 42 abuts against the side end 102 of the test piece 10. This completes the fixing and positioning of the test piece 10. The probe system and other components can then be started for coordinate measuring machine (CMM) measurement.

[0059] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A positioning fixture for coordinate measuring machine (CMM) measurement, characterized in that, The device includes a base, a first clamping member, a second clamping member, and a positioning member. The base includes a base plate, a first fixed boss, and a slider. The first fixed boss is fixedly disposed at one end of the base plate. The second clamping member is detachably disposed on the first fixed boss. The slider is slidably disposed on the base plate and slides toward or away from the first fixed boss. The first clamping member is detachably disposed on the slider and is disposed opposite to the second clamping member. At least one of the first and second clamping members has a support platform on its working surface for supporting the test piece. The first clamping member moves toward or away from the second clamping member under the action of the slider to cooperate with the second clamping member to clamp or release the test piece. The positioning member includes a fixing block and a positioning stop. The fixing block is disposed on the second clamping member along the bottom of the support platform. The positioning stop is vertically disposed at one end of the fixing block and extends along the side wall away from the second clamping member to abut against the side end of the test piece.

2. The positioning fixture for coordinate measuring machine according to claim 1, characterized in that, It also includes a rotating handle, and the other end of the base is provided with a second fixed boss. The top surface of the base between the first fixed boss and the second fixed boss is provided with a sliding groove. The rotating handle passes through the second fixed boss and is fixedly connected to the slider.

3. The positioning fixture for coordinate measuring machine according to claim 1, characterized in that, The first clamping member and the second clamping member are provided with at least two clamping claws on the side away from the base. The at least two clamping claws are arranged sequentially at intervals along the width direction of the first clamping member or the second clamping member. At least one working surface of each clamping claw is provided with the support platform, and the support platform extends along the width direction of the clamping claw.

4. The positioning fixture for coordinate measuring machine according to claim 3, characterized in that, The support platform is recessed away from the working surface, and the support platform extends from the top of the clamping claw toward the base; the distance between the side wall of the support platform and the working surface is greater than or equal to 1.5 mm and less than or equal to 35 mm; the distance between the bottom of the support platform and the top of the clamping claw is greater than or equal to 2 mm and less than or equal to 10 mm.

5. The positioning fixture for coordinate measuring machine according to claim 4, characterized in that, The positioning fixture also includes a pad, which is disposed on the side wall of the support platform.

6. The positioning fixture for coordinate measuring machine according to claim 1, characterized in that, The second working surface of the second clamping member is provided with a recessed mounting groove, which extends along the width direction of the second clamping member. The fixing block is engaged in the mounting groove, and the depth of the recess in the mounting groove is equal to the thickness of the fixing block.

7. The positioning fixture for coordinate measuring machine according to claim 6, characterized in that, The mounting groove has a plurality of threaded through holes spaced apart along the width direction of the second clamping member. The fixing block has a waist-shaped hole along the extension direction of the fixing block. The positioning member is fixed to the second clamping member by screws passing through the waist-shaped hole and the threaded through holes in sequence.

8. The positioning fixture for coordinate measuring machine according to claim 1, characterized in that, The first fixing boss is provided with a first countersunk hole, and the second clamping member is provided with a first threaded through hole that is adapted to the first countersunk hole. The second clamping member is fixed to the first fixing boss by screws passing through the first countersunk hole and the first threaded through hole in sequence. The slider is provided with a second threaded through hole, and the first clamping member is provided with a second countersunk hole adapted to the second threaded through hole. The first clamping member is fixed to the slider by screws passing through the second countersunk hole and the second threaded through hole in sequence.

9. The positioning fixture for coordinate measuring machine according to claim 1, characterized in that, It also includes a base plate and several positioning pins. The base plate has several threaded holes arranged in an array. Several positioning pins are arranged around the four sides of the base and inserted into the threaded holes to fix the base to the base plate.

10. A coordinate measuring device, characterized in that, It includes a probe system and a positioning fixture for coordinate measuring as described in any one of claims 1-9.

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